Precise measurement of thin film elastic constant using picosecond resonant ultrasound spectroscopy
Project/Area Number |
19360051
|
Research Category |
Grant-in-Aid for Scientific Research (B)
|
Allocation Type | Single-year Grants |
Section | 一般 |
Research Field |
Materials/Mechanics of materials
|
Research Institution | Osaka University |
Principal Investigator |
HIRAO Masahiko Osaka University, 大学院・基礎工学研究科, 教授 (80112027)
|
Co-Investigator(Kenkyū-buntansha) |
OGI Hirotsugu 大阪大学, 大学院・基礎工学研究科, 准教授 (90252626)
NAKAMURA Nobutomo 大阪大学, 大学院・基礎工学研究科, 助教 (50452404)
TARUMI Ryuichi 大阪大学, 大学院・工学研究科, 准教授 (30362643)
|
Project Period (FY) |
2007 – 2009
|
Project Status |
Completed (Fiscal Year 2009)
|
Budget Amount *help |
¥19,760,000 (Direct Cost: ¥15,200,000、Indirect Cost: ¥4,560,000)
Fiscal Year 2009: ¥2,990,000 (Direct Cost: ¥2,300,000、Indirect Cost: ¥690,000)
Fiscal Year 2008: ¥6,760,000 (Direct Cost: ¥5,200,000、Indirect Cost: ¥1,560,000)
Fiscal Year 2007: ¥10,010,000 (Direct Cost: ¥7,700,000、Indirect Cost: ¥2,310,000)
|
Keywords | 弾性定数 / ナノ薄膜 / フォノン共鳴 / 極短パルス光計測 / 薄膜 / フェムト秒レーザー / 貴金属 / 低温計測 / ダイヤモンド薄膜 / 非破壊検査 |
Research Abstract |
Accurate evaluation of elastic properties of nanoscale thin films is an important issue in nanoscience and nanotechnology. We have developed the picosecond ultrasound spectroscopy method for the measurement of the elastic constant of nanoscale thin films and present its application to nondestructive evaluation method for reliability of nanomaterials.
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Report
(4 results)
Research Products
(33 results)