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Nano-profilometry by spectroscopic Mueller matrix polarimeter

Research Project

Project/Area Number 19360062
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Production engineering/Processing studies
Research InstitutionTokyo University of Agriculture and Technology

Principal Investigator

OTANI Yukitoshi  Tokyo University of Agriculture and Technology, 大学院・共生科学技術研究院, 准教授 (10233165)

Co-Investigator(Kenkyū-buntansha) 梅田 倫弘  東京農工大学, 大学院・共生科学技術研究員, 教授 (60111803)
水谷 康弘  東京農工大学, 大学院・工学府, 教務職員 (40374152)
Co-Investigator(Renkei-kenkyūsha) UMEDA Norihiro  東京農工大学, 大学院・共生科学技術研究院, 教授 (60111803)
MIZUTANI Yasuhiro  徳島大学, 大学院・ソシオテクノサイエンス研究部, 講師 (40374152)
Project Period (FY) 2007 – 2009
Project Status Completed (Fiscal Year 2009)
Budget Amount *help
¥19,630,000 (Direct Cost: ¥15,100,000、Indirect Cost: ¥4,530,000)
Fiscal Year 2009: ¥4,290,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥990,000)
Fiscal Year 2008: ¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2007: ¥10,920,000 (Direct Cost: ¥8,400,000、Indirect Cost: ¥2,520,000)
Keywords超精密計測 / ナノ形状 / 偏光解析 / ミュラー行例 / 偏光計 / ミュラー行列
Research Abstract

A spectroscopic Mueller matrix polarimeter which is based on a scatterometry technique is proposed to evaluate the surface profiles of nanostructures. In general, it is difficult to image surface profile structures that are smaller than the wavelength. The surface profiles of nanostructures can be measured by detecting polarization properties based on Mueller matrices. A nanostructure profile is determined from the Mueller matrix which expresses all the polarization properties of the sample by experimental measurements and calculated values using rigorous coupled-wave analysis (RCWA).

Report

(4 results)
  • 2009 Annual Research Report   Final Research Report ( PDF )
  • 2008 Annual Research Report
  • 2007 Annual Research Report
  • Research Products

    (17 results)

All 2009 2008 Other

All Journal Article (2 results) (of which Peer Reviewed: 2 results) Presentation (13 results) Remarks (2 results)

  • [Journal Article] Surface profile detection with nanostructures using a Mueller matrix polarimeter2008

    • Author(s)
      Y. Otani, T. Kuwagaito, Y. Mizutani
    • Journal Title

      Proc. SPIE Vol.7063

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Surface profile detection with nanostructures using a Mueller matrix polarimeter2008

    • Author(s)
      Yukitoshi Otani, TomohitoKuwagaito, Yasuhiro Mizutani
    • Journal Title

      Proc. SPIE 7063

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Presentation] (Invited paper)Mueller matrix polarimeter for nano-structure measurement2009

    • Author(s)
      Y. Otani
    • Organizer
      CLEO/PR 2009
    • Place of Presentation
      中国・上海
    • Year and Date
      2009-09-01
    • Related Report
      2009 Annual Research Report 2009 Final Research Report
  • [Presentation] 分光偏光変調による分光偏光・複屈折イメージング2009

    • Author(s)
      大谷幸利
    • Organizer
      光・複屈折イメージング, 第56回応用物理学関連連合関係講演会シンポジウム偏光計測の基礎と応用最前線
    • Place of Presentation
      筑波大学
    • Year and Date
      2009-03-30
    • Related Report
      2009 Final Research Report
  • [Presentation] 偏光計測の基礎と応用最前線2009

    • Author(s)
      大谷幸利
    • Organizer
      第56回応用物理学関連連合関係講演会
    • Place of Presentation
      筑波大学
    • Year and Date
      2009-03-30
    • Related Report
      2008 Annual Research Report
  • [Presentation] Two-dimensional measurement of birefringence dispersion, 2008 SEM Fall Conference Celebrating2008

    • Author(s)
      Y. Otani, T. Wakayama
    • Organizer
      the 60th Birthday of Holography
    • Place of Presentation
      Springfield, MA, USA
    • Year and Date
      2008-10-28
    • Related Report
      2009 Final Research Report
  • [Presentation] Two-dimensional Measurement of Birefringence Dispersion2008

    • Author(s)
      Yukitoshi Otani, ToshitakaWakayama
    • Organizer
      2008 SEM Fall Conference Celebratingthe 60th Birthday of Holography
    • Place of Presentation
      Springfield, MA, USA
    • Year and Date
      2008-10-28
    • Related Report
      2008 Annual Research Report
  • [Presentation] Spectroscopic Mueller matrix polarimeter by two liquid crystal polarization modulator2008

    • Author(s)
      Y M. Chujo, Y. Otani, N. Umeda
    • Organizer
      米国光学会Frontiers in Optics
    • Place of Presentation
      Rochester, USA
    • Year and Date
      2008-10-19
    • Related Report
      2009 Final Research Report
  • [Presentation] Spectroscopic Mueller Matrix Polarimeter by Two Liquid CrystalPolarization Modulator2008

    • Author(s)
      Makoto Chujo, YukitoshiOtani, Norihiro Umeda
    • Organizer
      米国光学会 Frontiers in Optics
    • Place of Presentation
      Rochester、USA
    • Year and Date
      2008-10-19
    • Related Report
      2008 Annual Research Report
  • [Presentation] ミュラー行列による微細周期構造の光学特性の評価2008

    • Author(s)
      大谷幸利
    • Organizer
      応用物理学会春季大会
    • Place of Presentation
      日本大学理工学部・千葉
    • Year and Date
      2008-03-29
    • Related Report
      2009 Final Research Report
  • [Presentation] ライン型分光ミュラー行列偏光計の開発2008

    • Author(s)
      大谷幸利
    • Organizer
      応用物理学会春季大会
    • Place of Presentation
      日本大学理工学部・千葉
    • Year and Date
      2008-03-29
    • Related Report
      2009 Final Research Report
  • [Presentation] ミュラー行列による微細周期構造の光学特性の評価2008

    • Author(s)
      大谷 幸利
    • Organizer
      応用物理学会 春季大会
    • Place of Presentation
      日本大学理工学部・千葉
    • Year and Date
      2008-03-29
    • Related Report
      2007 Annual Research Report
  • [Presentation] ライン型分光ミュラー行列偏光計の開発2008

    • Author(s)
      大谷 幸利
    • Organizer
      応用物理学会 春季大会
    • Place of Presentation
      日本大学理工学部・千葉
    • Year and Date
      2008-03-29
    • Related Report
      2007 Annual Research Report
  • [Presentation] ナノ構造評価のためのミュラー行列偏光計2008

    • Author(s)
      大谷幸利
    • Organizer
      精密工学会春季大会
    • Place of Presentation
      明治大学・神奈川
    • Year and Date
      2008-03-18
    • Related Report
      2009 Final Research Report
  • [Presentation] ナノ構造評価のためのミュラー行列偏光計2008

    • Author(s)
      大谷 幸利
    • Organizer
      精密工学会 春季大会
    • Place of Presentation
      明治大学・神奈川
    • Year and Date
      2008-03-18
    • Related Report
      2007 Annual Research Report
  • [Remarks]

    • URL

      http://www.opt.utsunomiya-u.ac.jp/~otani/

    • Related Report
      2009 Final Research Report
  • [Remarks]

    • URL

      http://www.tuat.ac.jp/~otani

    • Related Report
      2008 Annual Research Report

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Published: 2007-04-01   Modified: 2016-04-21  

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