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Electric-pulse-induced resistance switching in manganite films grown by metalorganic chemical vapor deposition with in situ spectroscopic diagnostics

Research Project

Project/Area Number 19360144
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Electronic materials/Electric materials
Research InstitutionKyoto University

Principal Investigator

NAKAMURA Toshihiro  Kyoto University, 大学院・工学研究科, 講師 (90293886)

Project Period (FY) 2007 – 2009
Project Status Completed (Fiscal Year 2009)
Budget Amount *help
¥18,460,000 (Direct Cost: ¥14,200,000、Indirect Cost: ¥4,260,000)
Fiscal Year 2009: ¥4,680,000 (Direct Cost: ¥3,600,000、Indirect Cost: ¥1,080,000)
Fiscal Year 2008: ¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000)
Fiscal Year 2007: ¥9,230,000 (Direct Cost: ¥7,100,000、Indirect Cost: ¥2,130,000)
Keywords不揮発性メモリー / ReRAM / ペロブスカイト型酸化物 / マンガン酸化物 / MOCVD / その場プロセス診断 / 抵抗スイッチング / 交流インピーダンス法 / 電極材料 / 電子・電気材料 / 先端機能デバイス
Research Abstract

Recently, a large resistance change by the application of an electric pulse was observed at room temperature in metal oxides such as Pr_<1-x>Ca_xMnO_3 (PCMO). This effect provides a possibility of a next-generation nonvolatile memory, called resistance random access memory (ReRAM). In this work, the composition control based on the in situ spectroscopic monitoring was developed to improve the reproducibility of the resistance switching in the deposited PCMO films. The frequency response of complex impedance of the PCMO-based devices was measured to study the resistance switching mechanism. The electric-pulse-induced change of the impedance spectra suggested that the resistance switching in the PCMO-based devices was due to the resistance change in both the grain bulk and the interface between the film and the electrode.

Report

(4 results)
  • 2009 Annual Research Report   Final Research Report ( PDF )
  • 2008 Annual Research Report
  • 2007 Annual Research Report
  • Research Products

    (32 results)

All 2009 2008 2007 Other

All Journal Article (10 results) (of which Peer Reviewed: 10 results) Presentation (20 results) Remarks (2 results)

  • [Journal Article] Resistive switching in metal oxide films deposited by metalorganic chemical vapor deposition2009

    • Author(s)
      T. Nakamura, K. Onogi, K. Homma,, K. Tachibana
    • Journal Title

      ECS Transactions Vol.25

      Pages: 865-869

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Ferromagnetism of manganese-doped indium tin oxide films deposited on polyethylene naphthalate substrates2009

    • Author(s)
      T. Nakamura, S. Isozaki, K. Tanabe,, K. Tachibana
    • Journal Title

      Journal of Applied Physics Vol.105

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Resistive switching in metal oxide films deposited by metalorganic chemical vapor deposition2009

    • Author(s)
      T.Nakamura, K.Onogi, K.Homma, K.Tachibana
    • Journal Title

      ECS Transactions 25

      Pages: 865-869

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Ferromagnetism of manganese-doped indium tin oxide films deposited on polyethylene naphthalate substrates2009

    • Author(s)
      T.Nakamura, S.Isozaki, K.Tanabe, K.Tachibana
    • Journal Title

      Journal of Applied Physics 105

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Ferromagnetism of manganese-doped indium tin oxide films deposited on polvethylene nanhthalate substrates2009

    • Author(s)
      T. Nakamura, S. Isozaki, K. Tanabe, K. Tachibana
    • Journal Title

      Journal of Applied Physics 105

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Metalorganic chemical vapor deposit ion of metal oxide films exhibiting electric-pulse-induced resistance switching2007

    • Author(s)
      T. Nakamura, K. Homma, T. Yakushiji, R. Tai, A. Nishio,, K. Tachibana
    • Journal Title

      Surface & Coatings Technology Vol.201

      Pages: 9275-9278

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Electric-Pulse-Induced Resistance Switching in Magnetoresistive Manganite Films Grown by Metalorganic Chemical Vapor Deposition2007

    • Author(s)
      T. Nakamura, K. Homma, R. Tai, A. Nishio,, K. Tachibana
    • Journal Title

      IEEE Transactions on Magnetics Vol.43

      Pages: 3070-3072

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Ferromagnetism in sputtered manganese-doped indium tin oxide films with high conductivity and transparency2007

    • Author(s)
      T. Nakamura, K. Tanabe, K. Tsureishi,, K. Tachibana
    • Journal Title

      Journal of Applied Physics Vol.101

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Electric-Pulse-Induced Resistance Switching in Magnetoresistive Manganite Films Grown by Metalorganic Chemical Vapor Deposition2007

    • Author(s)
      T. Nakamura, K. Homma, R. Tai, A. Nishio, and K. Tachibana
    • Journal Title

      IEEE Transactions on Magnetics 43

      Pages: 3070-3072

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Metalorganic chemical vapor deposit ion of metal oxide films exhibiting electric-pulse-induced resistance switching2007

    • Author(s)
      T. Nakamura, K. Homma, T. Yakushiji, R. Tai, A. Nishio, and K. Tachibana
    • Journal Title

      Surface & Coatings Technology 201

      Pages: 9275-9278

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Presentation] Resistive switching in metal oxide films deposited by metalorganic chemical vapor deposition2009

    • Author(s)
      T. Nakamura, K. Onogi, K. Homma, K. Tachibana
    • Organizer
      The 17th International Symposium on Chemical Vapor Deposition (CVD-XVII) and the 17th European Conference on Chemical Vapor Deposition (EUROCVD-17)
    • Place of Presentation
      Vienna, Austria
    • Year and Date
      2009-10-07
    • Related Report
      2009 Annual Research Report 2009 Final Research Report
  • [Presentation] 交流インピーダンス法による(Pr, Ca)MnO3薄膜の電気特性解析(III)2009

    • Author(s)
      大野木圭太, 中村敏浩
    • Organizer
      2009年(平成21年)秋季第70回応用物理学会学術講演会
    • Place of Presentation
      富山大学
    • Year and Date
      2009-09-08
    • Related Report
      2009 Final Research Report
  • [Presentation] Sputter deposition of ferromagnetic transparent conducting film2009

    • Author(s)
      T. Nakamura, Y. Ueda, S. Isozaki, K. Tanabe, , K. Tachibana
    • Organizer
      International Conference on Magnetism 2009 (ICM2009)
    • Place of Presentation
      Karlsruhe, Germany
    • Year and Date
      2009-07-30
    • Related Report
      2009 Annual Research Report 2009 Final Research Report
  • [Presentation] 交流インピーダンス法による(Pr, Ca)MnO3薄膜の電気特性解析(II)2009

    • Author(s)
      大野木圭太, 横山拓也, 本間紘平, 中村敏浩, 橘邦英
    • Organizer
      2009年(平成21年)春季第56回応用物理学関係連合講演会
    • Place of Presentation
      筑波大学
    • Year and Date
      2009-04-02
    • Related Report
      2009 Final Research Report
  • [Presentation] MnドープITO薄膜における磁気・電気・光学特性のSn組成依存性2009

    • Author(s)
      上田芳彦, 磯崎真一, 中村敏浩, 橘邦英
    • Organizer
      2009年(平成21年)春季第56回応用物理学関係連合講演会
    • Place of Presentation
      筑波大学
    • Year and Date
      2009-04-02
    • Related Report
      2009 Final Research Report
  • [Presentation] Ferromagnetism of manganese-doped indium tin oxide films deposited on polyethylene naphthalate substrates2008

    • Author(s)
      T. Nakamura, S. Isozaki, K. Tanabe, , K. Tachibana
    • Organizer
      The 53rd Conference on Magnetism and Magnetic Materials (MMM2008)
    • Place of Presentation
      Austin, USA
    • Year and Date
      2008-11-13
    • Related Report
      2009 Final Research Report
  • [Presentation] Frequency response analysis of magnetoresistive manganite films deposited by metalorganic chemical vapor deposition2008

    • Author(s)
      T. Nakamura, T. Yokoyama, K. Homma, , K. Tachibana
    • Organizer
      The 53rd Conference on Magnetism and Magnetic Materials (MMM2008)
    • Place of Presentation
      Austin, USA
    • Year and Date
      2008-11-12
    • Related Report
      2009 Final Research Report
  • [Presentation] Frequency response analysis of magnetoresistive manganite films depositedbv metaloreanic chemical vapor deposition2008

    • Author(s)
      T. Nakamura, T. Yokoyama, K. Homma, K. Tachibana
    • Organizer
      The 53rd Conference on Magnetism and Magnetic Materials(MMM2008)
    • Place of Presentation
      Austin, USA
    • Year and Date
      2008-11-12
    • Related Report
      2008 Annual Research Report
  • [Presentation] Magnetic properties of manganese-doped indium tin oxide films deposited on polyethylene naphthalate substrates2008

    • Author(s)
      T. Nakamura, S. Isozaki, K. Tanabe, , K. Tachibana
    • Organizer
      Joint European Magnetic Symposia 2008 (JEMS08)
    • Place of Presentation
      Dublin, Ireland
    • Year and Date
      2008-09-16
    • Related Report
      2009 Final Research Report
  • [Presentation] Magnetic properties of manganese-doped indium tin oxide films deposited on polvethvlene nanhthalate substrates2008

    • Author(s)
      T. Nakamura, S. Isozaki, K. Tanabe, K. Tachibana
    • Organizer
      Joint European Magnetic Symposia 2008(JEMS08)
    • Place of Presentation
      Dublin, Ireland
    • Year and Date
      2008-09-16
    • Related Report
      2008 Annual Research Report
  • [Presentation] 交流インピーダンス法による(Pr, Ca)MnO3薄膜の電気特性解析2008

    • Author(s)
      横山拓也, 中村敏浩, 橘邦英
    • Organizer
      2008年(平成20年)秋季第69回応用物理学会学術講演会
    • Place of Presentation
      中部大学
    • Year and Date
      2008-09-04
    • Related Report
      2009 Final Research Report
  • [Presentation] MnドープITO薄膜のフレキシブルポリマー基板上への作製(II)2008

    • Author(s)
      磯崎真一, 田邊浩平, 中村敏浩, 橘邦英
    • Organizer
      2008年(平成20年)秋季第69回応用物理学会学術講演会
    • Place of Presentation
      中部大学
    • Year and Date
      2008-09-04
    • Related Report
      2009 Final Research Report
  • [Presentation] Ferromagnetism of manganese-doped indium tin oxide films deposited on flexible polymer substrates2008

    • Author(s)
      T. Nakamura, K. Tanabe, S. Isozaki, , K. Tachibana
    • Organizer
      IEEE International Magnetics Conference (Intermag2008)
    • Place of Presentation
      Madrid, Spain
    • Year and Date
      2008-05-07
    • Related Report
      2009 Final Research Report
  • [Presentation] Impedance spectroscopy of magnetoresistive manganite films exhibiting electric-pulse-induced resistance switching2008

    • Author(s)
      T. Nakamura, K. Homma, T. Yakushiji, , K. Tachibana
    • Organizer
      IEEE International Magnetics Conference (Intermag2008)
    • Place of Presentation
      Madrid, Spain
    • Year and Date
      2008-05-06
    • Related Report
      2009 Final Research Report 2008 Annual Research Report
  • [Presentation] MnドープITO薄膜のフレキシブルポリマー基板上への作製2008

    • Author(s)
      磯崎真一, 田邊浩平, 中村敏浩, 橘邦英
    • Organizer
      2008年(平成20年)春季第55回応用物理学関係連合講演会
    • Place of Presentation
      日本大学
    • Year and Date
      2008-03-27
    • Related Report
      2009 Final Research Report
  • [Presentation] Impedance spectroscopy on magnetoresistive manganite films deposited by metalorganic chemical vapor deposition2007

    • Author(s)
      T. Nakamura, K. Homma, T. Yakushiji, , K. Tachibana
    • Organizer
      52nd Conference on Magnetism and Magnetic Materials (MMM2007)
    • Place of Presentation
      Tampa, USA
    • Year and Date
      2007-11-07
    • Related Report
      2009 Final Research Report 2007 Annual Research Report
  • [Presentation] Metalorganic chemical vapor deposition of metal oxide films exhibiting electric-pulse-induced resistance switching2007

    • Author(s)
      T. Nakamura, K. Homma, T. Yakushiji, , K. Tachibana
    • Organizer
      16th European Conference on Chemical Vapor Deposition (EUROCVD-16)
    • Place of Presentation
      Den Haag (Scheveningen), The Netherlands
    • Year and Date
      2007-09-20
    • Related Report
      2009 Final Research Report 2007 Annual Research Report
  • [Presentation] MOCVDにより作製した(Pr, Ca)MnO3薄膜の電気特性評価2007

    • Author(s)
      本間紘平、中村敏浩、橘邦英
    • Organizer
      2007年(平成19年)秋季第68回応用物理学会学術講演会
    • Place of Presentation
      立命館大学
    • Year and Date
      2007-09-05
    • Related Report
      2009 Final Research Report
  • [Presentation] RFマグネトロンスパッタリングによるMnドープITOの作製2007

    • Author(s)
      田邊浩平, 中村敏浩, 橘邦英
    • Organizer
      2007年(平成19年)秋季第68回応用物理学会学術講演会
    • Place of Presentation
      立命館大学
    • Year and Date
      2007-09-04
    • Related Report
      2009 Final Research Report
  • [Presentation] Sputter deposition of transparent conducting films exhibiting high-temperature ferromagnetism2007

    • Author(s)
      K. Tanabe, T. Nakamura, , K. Tachibana
    • Organizer
      The 18th International Symposium on Plasma Chemistry
    • Place of Presentation
      Kyoto, Japan
    • Year and Date
      2007-08-27
    • Related Report
      2009 Final Research Report
  • [Remarks] シーズ提供中村敏浩,多元系酸化物薄膜の作製と抵抗スイッチング特性, (財)京都高度技術研究所第9期技術経営人材養成講座, 2009年10月~2010年2月

    • Related Report
      2009 Final Research Report
  • [Remarks] 依頼展示中村敏浩,橘邦英, PCMO薄膜の作製と抵抗スイッチング特性, VACUUM2008第30回真空展, 2008年9月10日~12日,東京ビッグサイト

    • Related Report
      2009 Final Research Report

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Published: 2007-04-01   Modified: 2016-04-21  

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