Development of a high-resolution laser-THz-emission-microscope

• Project/Area Number: 19360161
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Electron device/Electronic equipment
• Research Institution: Osaka University
• Principal Investigator: TONOUCHI Masayoshi Osaka University, レーザーエネルギー学研究センター, 教授 (40207593)
• Co-Investigator(Kenkyū-buntansha): MURAKAMI Hironaru 大阪大学, レーザーエネルギー学研究センター, 准教授 (30219901) ; KAWAYAMA Iwao 大阪大学, レーザーエネルギー学研究センター, 助教 (10332264)
• Project Period (FY): 2007 – 2008
• Project Status: Completed (Fiscal Year 2008)
• Budget Amount: ¥18,850,000 (Direct Cost: ¥14,500,000、Indirect Cost: ¥4,350,000); Fiscal Year 2008: ¥7,020,000 (Direct Cost: ¥5,400,000、Indirect Cost: ¥1,620,000); Fiscal Year 2007: ¥11,830,000 (Direct Cost: ¥9,100,000、Indirect Cost: ¥2,730,000)
• Keywords: テラヘルツ / フェムト秒レーザー / 顕微鏡 / ガルバノメーター / 近接場 / 半導体 / 高温超伝導体 / 強相関電子材料

Research Abstract

システム開発においては、固浸レンズやガルバノスキャナーを用いた新規なレーザーテラルツエミッション顕微鏡を構築し、空間分解能1μm以下でかつスキャン時間が数秒であといった高分解能かつ高速性能を持つことを確認した。また、このシステムを用が、半導体集積回路の欠陥検査等に有効であることを示した。一方、強誘電体からのテラヘルツ放射を、結晶構造および配向制御した薄膜を用いて系統的に観測し、そのメカニズムを明らかにした。

Research Products

• [Journal Article] Understanding the nature of ultrafast polarization dynamics of ferroelectric memory in the multiferroic BiFeO_3 thinfilms (2009)
  • Author(s): D.S.Rana, I.Kawayama, , K.R.Mavan. , K.Takahashi H.Murakami, M.Tonouchi
  • Journal Title: Advanced Materials Vol.21 Pages: 1-5
  • Peer Reviewed
• [Journal Article] Transmission-type laser THz emission microscope using a solid immersion lens (2008)
  • Author(s): S.Kim, H.Murakami, M.Tonouchi
  • Journal Title: IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS Vol.14 Pages: 498-504
  • Peer Reviewed
• [Journal Article] Structural depedence of Terhertz radiation from multiferroic BiFeO_3thin films (2008)
  • Author(s): D.S.Rana, K.Takahashi, K.R.Mavan., I.Kawayama, H.Murakami,M.Tonouchi
  • Journal Title: Physical Review B Vol.77 Pages: 24105-24105
  • Peer Reviewed
• [Journal Article] Effects of cation disorder on terahertz emission from half-doped manganite thin films (2008)
  • Author(s): K.R.Mavani., D.S.Rana, K.Takahashi, I.Kawayama, H.Murakami,M.Tonouchi
  • Journal Title: Europhyscis Letters Vol.81 Pages: 17009-17016
  • Peer Reviewed
• [Journal Article] Transmission-type laser THz emission microscope using a solid immersion lens (2008)
  • Author(s): S. Kim, H. Murakami, M. Tonouchi
  • Journal Title: IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS 14 Pages: 498-504
  • Peer Reviewed
• [Journal Article] Effects of disorder and scaling of optical conductivity in NdO. 5CaO. 5-xBaxMnO3 (x=O and 0.02) thin films as observed by terahertz time-domain spectroscopy (2008)
  • Author(s): K. R. Mavani, M. Nagai, D. S. Rana, H. Yada, I. Kawayama, M. Tonouchi, K. Tanaka
  • Journal Title: APPLIED PHYSICS LETTERS 93 Pages: 132903-132903
  • Peer Reviewed
• [Journal Article] Structural depedence of Terhertz radiation from multiferroic BiFeO_3 thin films (2008)
  • Author(s): D. S. Rana, K. Takahashi, K. R. Mavan., I. Kawayama, H. Murakami, M. Tonouchi
  • Journal Title: Physical Review B 77 Pages: 24105-24105
  • Peer Reviewed
• [Journal Article] Effects of cation disorder on terahertz emission from half-doped manganite thin films (2008)
  • Author(s): K. R. Mavani., D. S. Rana, K. Takahashi, I. Kawayama, H. Murakami, M. Tonouchi
  • Journal Title: Europhyscis Letters 81 Pages: 17009-17016
  • Peer Reviewed
• [Journal Article] Transmission-type Laser THz Emission Microscope using a Solid Immersion Lens (2008)
  • Author(s): S. Kim, H. Murakami, M. Tonouchi
  • Journal Title: IEEE journal of selected topic in Quantum Electr onics 14(In press)
  • Peer Reviewed
• [Journal Article] Laser Terahertz Emission Microscopy (2008)
  • Author(s): H. Murakami and M. Tonouchi
  • Journal Title: Compte-Rendus (Physique) (未定)(In press)
  • Peer Reviewed
• [Journal Article] Visualization of photoassisted polarization switching and its consequences in BiFeO_3 thin films probed by terahertzradiation (2007)
  • Author(s): D.S.Rana, K.Takahashi, K.R.Mavani, I.Kawayama, H.Murakami, M.Tonouchi
  • Journal Title: Applied Physics Letters Vol.91 Pages: 31909-31911
  • Peer Reviewed
• [Journal Article] Laser Terahertz Emission Microscope (2007)
  • Author(s): H.Murakami, N.Uchida, R.Inoue, S.Kim, T.Kiwa, and M.Tonouchi
  • Journal Title: Proc. of IEEE Vol.95 Pages: 1646-1657
  • Peer Reviewed
• [Journal Article] Visualization of photoassisted polarization switching and its consequences in BiFeO_3 thin films probed by terahertz radiation (2007)
  • Author(s): D. S. Rana, K. Takahashi, K. R. Mavani, I. Kawayama, H. Murakami, M. Tonouchi
  • Journal Title: Applied Physics Letters 91 Pages: 31909-31911
  • Peer Reviewed
• [Journal Article] Laser Terahertz Emission Microscope (2007)
  • Author(s): H. Murakami, N. Uchida, R. Inoue, S. Kim, T. Kiwa, and M. Tonouchi
  • Journal Title: Proc. of IEEE 95 Pages: 1646-1657
  • Peer Reviewed
• [Presentation] Novel laser scanning THz emission microscope (2008)
  • Author(s): S.Kim, M.Yamashita, T.Matsumoto, H.Murakami, C.Otani,○ M.Tonouchi
  • Organizer: EOS Annual Meeting 2008
  • Place of Presentation: パリ・フランス
  • Year and Date: 2008-09-29
• [Presentation] Probing ultrafast ferroelectric polarization dynamics in multiferroic BiFeO3 by terahertz emission spectroscopy (2008)
  • Author(s): D.S.Rana, I.Kawayama, M.R.Mavani, K. Takahashi, H.Murakami, M.Tonouchi
  • Organizer: 2008年日本物理学会秋季大会
  • Place of Presentation: 岩手大学
  • Year and Date: 2008-09-20
• [Presentation] ガルバノメーターを用いたレーザー走査型テラヘルツ放射顕微鏡の開発 (2008)
  • Author(s): 金子大輔、金鮮美、山下将嗣、松本徹、村上博成、大谷知行、斗内政吉
  • Organizer: 2008年秋季第69回応用物理学会学術講演会
  • Place of Presentation: 中部大学
  • Year and Date: 2008-09-04
• [Presentation] レーザー走査型テラヘルツイメージングシステムの開発 (2008)
  • Author(s): 水野将吏、金鮮美、川山巌、村上博成、斗内政吉
  • Organizer: 2008年秋季第69回応用物理学会学術講演会
  • Place of Presentation: 中部大学
  • Year and Date: 2008-09-04
• [Presentation] ガルバノメーターを用いたレーザー走査型テラヘルツ放射顕微鏡の開発 (2008)
  • Author(s): 金子大輔, 金鮮美, 山下将嗣, 松本徹, 村上博成, 大谷知行, 斗内政占
  • Organizer: 2008年秋季 第69回応用物理学会学術講演会
  • Place of Presentation: 中部大学
  • Year and Date: 2008-09-04
• [Presentation] レーザー走杏型テラヘルツイメージングシステムの開発 (2008)
  • Author(s): 水野将吏, 金鮮美, 川山巌, 村上博成, 斗内政吉
  • Organizer: 2008年秋季 第69回応用物理学会学術講演会
  • Place of Presentation: 中部大学
  • Year and Date: 2008-09-04
• [Presentation] Laser Terahertz Emission Microscopy Toward High-Resolution Imaging (2008)
  • Author(s): S.Kim, H.Murakami, M.Tonouchi
  • Organizer: Conference on Lasers and Electro-Optics
  • Place of Presentation: サンノゼ・米国
  • Year and Date: 2008-05-08
• [Presentation] Terahertz emission from BiFeO_3 by mean of direct optical modulation of ferroelectric spontaneous polarization (2008)
  • Author(s): M.Tonouchi, D.S.Rana, K.Takahashi, K.R.Mavani, I.Kawayama, H.Murakami
  • Organizer: International Workshop on Optical Terahertz Science and Technology 2009
  • Place of Presentation: サンタバーバラ・米国
  • Year and Date: 2008-03-08
• [Presentation] LSI imaging using Transmission-mode Laser THz emission (2007)
  • Author(s): S.Kim, H.Murakami, M.Tonouchi
  • Organizer: LSI Testing Symposium (LSITS) 2007
  • Place of Presentation: Osaka
  • Year and Date: 2007-11-09
• [Presentation] LSI imaging using Transmission-mode Laser THz emission (2007)
  • Author(s): S. Kim, H. Murakami, M. Tonouchi
  • Organizer: LSI Testing Symposium (LSITS) 2007
  • Place of Presentation: 大阪
  • Year and Date: 2007-11-09
• [Presentation] Recent progress in laser terahertz emission microscopy toward high-resolution imaging (2007)
  • Author(s): S.Kim, H.Koga, H.Murakami, M.Tonouchi
  • Organizer: The Joint 32nd International Conference on Infrared and Millimetre Waves and 15th International Conference on Terahertz Electronics (IRMMW-THz 2007)
  • Place of Presentation: Cardiff, UK
  • Year and Date: 2007-09-07
• [Presentation] Recent progress in laser terahertz emission microscopy toward high-reso lution imaging (2007)
  • Author(s): S. Kim, H. Koga, H. Murakami, M. Tonouchi
  • Organizer: The Joint 32nd International Conference on Infrared and Millimetre Waves and 15th International Conference on Terahertz Electronics (IRMMW-THz 2007)
  • Place of Presentation: Cardiff, UK
  • Year and Date: 2007-09-07
• [Presentation] Temperature Dependent THz Radiation from Charge-ordered Nd_<0.50>Ca_<0.48>Ba_<0.02> MnO_3 Manganite Thin Film (2007)
  • Author(s): K.R.Mavani, D.S.Rana, K.Takahashi, I.Kawayama, H.Murakami and M.Tonouchi
  • Organizer: 2007 MRS Spring Meeting
  • Place of Presentation: San Francisco, USA
  • Year and Date: 2007-04-10
• [Presentation] Structural Dependence of THz-radiation from BiFeO_3 Thin Films (2007)
  • Author(s): D.S.Rana, K.Takahashi, K.R.Mavani, I.Kawayama, H.Murakami and M.Tonouchi
  • Organizer: 2007 MRS Spring Meeting
  • Place of Presentation: Francisco, USA
  • Year and Date: 2007-04-10
• [Presentation] Temperature Dependent THz Radiation from Charge-ordered Nd_<0.50>Ca_<0.48>Ba_<0.02>MnO_3 Manganite Thin Film (2007)
  • Author(s): K. R. Mavani, D. S. Rana, K. Takahashi, I. Kawayama, H. Murakami and M. Tonouchi
  • Organizer: 2007MRS Spring Meeting
  • Place of Presentation: San Francisco, USA
  • Year and Date: 2007-04-10
• [Presentation] Structural Dependence of THz-radiation from BiFeO_3 Thin Films (2007)
  • Author(s): D. S. Rana, K. Takahashi, K. R. Mavani, I. Kawayama, H. Murakami and M. Tonouchi
  • Organizer: 2007 MRS Sprig Meeting
  • Place of Presentation: San Francisco, USA
  • Year and Date: 2007-04-10
• [Book] テラヘルツ技術総覧(Handbook of Terahertz Technology) (2007)
  • Author(s): 斗内政吉、村上博成、金鮮美、貴田憲明、高橋宏平、鈴木正人、井上亮太郎
  • Total Pages: 16
  • Publisher: ネヌ・ジー・シー
• [Book] テラヘルツ技術総覧(Handbook of Terahertz Technology)
  • Author(s): 斗内政吉、村上博成、金鮮美、貴田憲明、高橋宏平、鈴木正人、井上亮太郎
  • Total Pages: 16
  • Publisher: ネヌ・ジー・シー, 207
• [Patent(Industrial Property Rights)] 半導体検査装置および検査方法 (2008)
  • Inventor(s): 村上博成、斗内政吉、金鮮美、山下将嗣、大谷知行、松本徹、青木芳充
  • Industrial Property Rights Holder: 浜松ホトニクス
  • Filing Date: 2008-09-01
• [Patent(Industrial Property Rights)] 半導体検査装置および検査方法 (2008)
  • Inventor(s): 村上博成, 斗内政吉, 金鮮美, 山下将嗣, 大谷知行, 松本徹, 青木芳充
  • Industrial Property Rights Holder: 浜松ホトニクス
  • Industrial Property Number: 2008-223612
  • Filing Date: 2008-09-01