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Preparation of multiferroic thin film by low temperature vapor deposition

Research Project

Project/Area Number 19360292
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Inorganic materials/Physical properties
Research InstitutionTohoku University

Principal Investigator

MASUMOTO Hiroshi  Tohoku University, 学際科学国際高等研究センター, 教授 (50209459)

Co-Investigator(Kenkyū-buntansha) GOTO Takashi  東北大学, 金属材料研究所, 教授 (60125549)
OHNUMA Sigehiro  (財)電気磁気材料研究所, 電磁気材料グループ, 主任研究員 (50142633)
SAIDA Jyunji  東北大学, 学際科学国際高等研究センター, 准教授 (20359540)
KIMURA Teiichi  東北大学, 金属材料研究所, 助教 (10333882)
TU Rong  東北大学, 金属材料研究所, 助教 (80396506)
HOTTA Mikinori  東北大学, 金属材料研究所, 助教 (30431604)
Project Period (FY) 2007 – 2009
Project Status Completed (Fiscal Year 2009)
Budget Amount *help
¥20,150,000 (Direct Cost: ¥15,500,000、Indirect Cost: ¥4,650,000)
Fiscal Year 2009: ¥3,380,000 (Direct Cost: ¥2,600,000、Indirect Cost: ¥780,000)
Fiscal Year 2008: ¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000)
Fiscal Year 2007: ¥12,740,000 (Direct Cost: ¥9,800,000、Indirect Cost: ¥2,940,000)
Keywords酸化イットリウム鉄 / コバルト-酸化ニオブ / ルテニウム酸化物 / 誘電率 / 磁性 / 電気電導率 / 薄膜 / セラミックス / CVD / Y-Fe-O / 誘電体 / 磁性体 / 電極薄膜 / チタン酸バリウム / 強誘電体 / キュリー点
Research Abstract

Development of the multi-functional materials which have two or more functions has been required for a high integration, high functionality and energy saving of the next-generation device. In this research, it succeeded in preparation of the multi-functional materials thin films which have both magnetic and dielectric properties such as Y-Fe-O and Co-Nb_2O_5 thin film by chemical vapor deposition and RF sputtering methods. Furthermore, new Ir and Ru system oxide thin film of electrode for dielectric materials were produced.

Report

(4 results)
  • 2009 Annual Research Report   Final Research Report ( PDF )
  • 2008 Annual Research Report
  • 2007 Annual Research Report
  • Research Products

    (41 results)

All 2010 2009 2008 2007

All Journal Article (27 results) (of which Peer Reviewed: 27 results) Presentation (14 results)

  • [Journal Article] Phase transition-crystal structure relations in ferroelectric Bi_<2.5>Na_<1.5>Nb_3O_<12> compound by molecular dynamics simulation2009

    • Author(s)
      A. Yokoi, H. Masumoto, J. Sugishita
    • Journal Title

      Mater.Chem.Phys. 116巻

      Pages: 16-20

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Epitaxial growth of BaRuO_3 thin films on MgO substrates by laser ablation2009

    • Author(s)
      Ito, A; Masumoto, H; Goto, T; Sato, S
    • Journal Title

      JOURNAL OF THE CERAMIC SOCIETY OF JAPAN 117

      Pages: 426-430

    • NAID

      10025966902

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Effect of lattice matching on microstructure and electrical conductivity of epitaxial ARuO(3)(A=Sr,Ca and Ba)thin films prepared on(001)LaAlO_3 substrates by laser ablation2009

    • Author(s)
      Ito, A; Masumoto, H; Goto, T
    • Journal Title

      THIN SOLID FILMS 517

      Pages: 5616-5620

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Structural and optical properties of BaTi_2O_5 thin films prepared by pulsed laser deposition at different substrate temperatures2009

    • Author(s)
      Wang, CB; Tu, R; Goto, T; Shen, Q; Zhang, LM
    • Journal Title

      MATERIALS CHEMISTRY AND PHYSICS 113

      Pages: 130-134

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Phase transition-crystal structure relations in ferroelectric Bi_<2.5>Na_<1.5>Nb_3O_<12> compound by molecular dynamics simulation2009

    • Author(s)
      Yokoi, A; Masumoto, H; Sugishita, J
    • Journal Title

      MATERIALS CHEMISTRY AND PHYSICS 116

      Pages: 16-20

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Preparation of polycrystalline BaTi_2O_5 by pressureless sintering2009

    • Author(s)
      Li, GJ; Tu, R; Goto, T
    • Journal Title

      MATERIALS RESEARCH BULLETIN 44

      Pages: 468-471

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Characterization of alkaline earth metals ruthenate thin films2009

    • Author(s)
      Ito, A; Masumoto, H; Goto, T; Sato, S
    • Journal Title

      JOURNAL OF THE EUROPEAN CERAMIC SOCIETY 30

      Pages: 435-440

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Dielectric property of polycrystalline ZrO_2 substituted BaTi_2O_5 prepared by arc-melting2008

    • Author(s)
      X. Y. Yue, R. Tu and T. Goto
    • Journal Title

      Mater. Trans. 49

      Pages: 120-124

    • NAID

      10020088756

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Microstructure and electrical conductivity of CaRuO_3 thin films prepared by laser ablation2008

    • Author(s)
      A. Ito, H. Masumoto and T. Goto
    • Journal Title

      Mater. Trans. 49

      Pages: 158-165

    • NAID

      10020088888

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Effect of Ba substitution on the microstructure and electrical conductivity of Ba_xCa_<1-x>RuO_3 thin films prepared by laser ablation2008

    • Author(s)
      A. Ito, H. Masumoto and T. Goto
    • Journal Title

      Mater. Trans. 49

      Pages: 1822-1825

    • NAID

      10024271064

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Effect of Ba substitution on the microstructure and electrical conductivity of Ba_xSr_<1-x>RuO_3 thin films prepared by laser ablation2008

    • Author(s)
      A. Ito, H. Masumoto and T. Goto
    • Journal Title

      J. Ceram. Soc. Jpn. 116

      Pages: 441-444

    • NAID

      110006623967

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Dielectric properties of (010) oriented polycrystalline Ta_2O_5 substituted BaTi_2O_5 prepared by arc melting2008

    • Author(s)
      X. Y. Yue, R. Tu and T. Goto
    • Journal Title

      J. Ceram. Soc. Jpn. 116

      Pages: 436-440

    • NAID

      110006623966

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Preparation of b-axis oriented BaTi_20_5 thin films by pulsed laser deposition2008

    • Author(s)
      C. B. Wang, R. Tu, T. Goto, Q. Shen and L.M. Zhang
    • Journal Title

      J. Inorg. Mater. 23

      Pages: 553-556

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Preparation of BaRuO_3 and BalrO_3 films by laser ablation2007

    • Author(s)
      H. Masumoto, A. Ito, Y. Kaneko, T. Goto
    • Journal Title

      Key Eng.mater 336-338巻

      Pages: 730-734

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Characterization of alkaline earth metals ruthenate thin films2007

    • Author(s)
      A. Ito, H. Masumoto, T. Goto, S. Sato
    • Journal Title

      Key Eng.mater 336-338巻

      Pages: 730-734

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Microstructure and electrical conductivity of epitaxial BaRuO_3 thin films prepared on(001), (110)and(111)SrTiO_3 substrates by laser ablation2007

    • Author(s)
      A. Ito, H. Masumoto and T. Goto
    • Journal Title

      Mater. Trans. 48

      Pages: 1919-1923

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Microstructures and electrical properties of Ru-C nano-composite films by PECVD2007

    • Author(s)
      M. Sakata, T. Kimura and T. Goto
    • Journal Title

      Mater. Trans. 48

      Pages: 58-63

    • NAID

      10018666077

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Preparation of Ru-C nano-composite film by MOCVU and electrode properties for oxygen gas sensor2007

    • Author(s)
      T. Kimiura and T. Goto
    • Journal Title

      Mater. Sci. Forum 534-536

      Pages: 1485-1488

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Effect of oxygen partial pressure on structure and dielectric property of BaTi_2O_5 films prepared by laser ablation2007

    • Author(s)
      C. Wang. R. Tu and T. Goto
    • Journal Title

      Mater. Trans. 48

      Pages: 625-628

    • NAID

      10018735392

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Dielectric properties of poly-and single-crystalline BA_<1-x>Sr_xTi_2O2007

    • Author(s)
      X. Y. Yue, R. Tu and T. Goto
    • Journal Title

      Mater. Trans. 48

      Pages: 984-989

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Preparation of BaRuO_3 and BalrO_3 films by laser ablation2007

    • Author(s)
      H. Masumoto, A. Ito, Y. Kaneko and T. Goto
    • Journal Title

      Key Eng. mater. 336-338

      Pages: 730-734

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] A. C. Impedance analysis on b-axis oriented BA_<1-x>Sr_xTi_2O_5 prpared by an arc-melting method2007

    • Author(s)
      X. Y. Yue, R. Tu and T. Goto
    • Journal Title

      J. Ceram. Soc. Jpn. 115

      Pages: 648-653

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Morphology of epitaxiallly grown BaRuO3 and CaRuO_3 thin films by laser ablation2007

    • Author(s)
      A. Ito, H. Masumoto and T. Goto
    • Journal Title

      Key Eng. Mater. 352

      Pages: 315-318

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Epitaxial growth of b-axis oriented BaTi_2O_5 films by laser ablation2007

    • Author(s)
      C. Wang, R. Tu and T. Goto
    • Journal Title

      Key Eng. Mater 352

      Pages: 311-314

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] A. C. impidance spectroscopy of b-axis oriented SrO substituted BaTi_2O_5 prepared by arc-melting2007

    • Author(s)
      X. Y. Yue, R. Tu and T. Goto
    • Journal Title

      Key Eng. Mater 352

      Pages: 277-280

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Ru-C nanocomposite films prepared by PECVD as an electrode for oxygen sensor2007

    • Author(s)
      M. Sakata, T. Kimura and T. Goto
    • Journal Title

      Key Eng. Mater 352

      Pages: 319-322

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Microstructure and electrical conoductivity of BaRuO_3 thin films prepared by laser ablation2007

    • Author(s)
      A. Ito, H. Masumoto and T. Goto
    • Journal Title

      Mater. Trans. 48

      Pages: 2953-2959

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Presentation] MOCVD法によるY-Fe-O系薄膜の合成2010

    • Author(s)
      田中高太郎, 増本博
    • Organizer
      日本金属学会2010年春期 (第146) 大会
    • Place of Presentation
      筑波大学
    • Year and Date
      2010-03-30
    • Related Report
      2009 Final Research Report
  • [Presentation] MOCVD法によるY-Fe-O系薄膜の合成2010

    • Author(s)
      田中高太郎, 増本博
    • Organizer
      日本金属学会2010年春期(第146)大会
    • Place of Presentation
      筑波大学
    • Year and Date
      2010-03-30
    • Related Report
      2009 Annual Research Report
  • [Presentation] Preparation of(020)-orientated BaTi_2O_5 films by laser CVD2010

    • Author(s)
      Dongyun Guo・Rong Tu・Akihiko Ito・Takashi Goto
    • Organizer
      日本セラミックス協会 2010年年会
    • Place of Presentation
      東京農工大学
    • Year and Date
      2010-03-23
    • Related Report
      2009 Annual Research Report
  • [Presentation] MOCVD法によるY-Fe-O系薄膜の合成2009

    • Author(s)
      田中高太郎, 増本博
    • Organizer
      平成21年度日本セラミックス協会東北北海道支部研究発表会
    • Place of Presentation
      東京農工大学
    • Year and Date
      2009-10-29
    • Related Report
      2009 Final Research Report
  • [Presentation] MOCVD法によるY-Fe-O系薄膜の合成2009

    • Author(s)
      田中高太郎, 増本博
    • Organizer
      平成21年度日本セラミックス協会東北北海道支部研究発表会
    • Place of Presentation
      北海道大学
    • Year and Date
      2009-10-29
    • Related Report
      2009 Annual Research Report
  • [Presentation] ナノグラニュラーCo-Ti-O膜のトンネル型磁気抵抗効果2009

    • Author(s)
      大沼繁弘, 岩佐忠義, 小林伸聖, 増本健
    • Organizer
      日本金属学会2009年秋期(第145)大会
    • Place of Presentation
      京都大学
    • Year and Date
      2009-09-16
    • Related Report
      2009 Annual Research Report
  • [Presentation] ナノ複相Co-Nb-O膜の作製とその複合機能性2009

    • Author(s)
      大沼繁弘・岩佐忠義
    • Organizer
      日本金属学会2009年春期(第144回)大会
    • Place of Presentation
      東京工業大学
    • Year and Date
      2009-03-30
    • Related Report
      2008 Annual Research Report
  • [Presentation] Effect of composition on crystal phase and electrical property of Sr-Ir-O system prepared by SPS2009

    • Author(s)
      阿部世嗣・大沼繁弘
    • Organizer
      日本金属学会2009年春期(第144回)大会
    • Place of Presentation
      東京工業大学
    • Year and Date
      2009-03-29
    • Related Report
      2008 Annual Research Report
  • [Presentation] プラズマCVD法により合成したLa-Ru-O系膜の結晶相2008

    • Author(s)
      木村賢宜・木村禎一・後藤孝
    • Organizer
      日本セラミックス協会第21回秋季シンポジウム
    • Place of Presentation
      北九州国際会議場
    • Year and Date
      2008-09-19
    • Related Report
      2008 Annual Research Report
  • [Presentation] Effect of composition on crystal phase and electrical property of Sr-Ir-O system prepared by SPS2008

    • Author(s)
      Nittaya Keawprak-Rong Tu-Takashi Goto
    • Organizer
      日本セラミックス協会第21回秋季シンポジウム
    • Place of Presentation
      北九州国際会議場
    • Year and Date
      2008-09-19
    • Related Report
      2008 Annual Research Report
  • [Presentation] b軸配向BaTi_2O_5多結晶体の誘電的性質に及ぼすアルカリ土類金属元素置換の影響2008

    • Author(s)
      岳新艶、塗溶、後藤孝
    • Organizer
      2008年春期(第142回)大会
    • Place of Presentation
      武蔵工業大学
    • Year and Date
      2008-03-27
    • Related Report
      2007 Annual Research Report
  • [Presentation] Preparation and photocatalytic properties of titania films by ECR plasma MOCVD2007

    • Author(s)
      Hiroshi Masumoto and Takashi Goto
    • Organizer
      Materials Processing, Properties and Performance
    • Place of Presentation
      Cheng Du, China
    • Year and Date
      2007-09-14
    • Related Report
      2007 Annual Research Report
  • [Presentation] Dielectric properties of poly-and single-crystalline(Ba_1-xCa_x)Ti_2O_5 prepared by arc-melting and FZ methods2007

    • Author(s)
      Guojun Li・Rong Tu・Takashi Goto
    • Organizer
      日本セラミックス協会第20回秋季シンポジウム
    • Place of Presentation
      名古屋工業大学
    • Year and Date
      2007-09-13
    • Related Report
      2007 Annual Research Report
  • [Presentation] Effect of additives on the structural stability of BaTi_2O_5 sintered body2007

    • Author(s)
      Guojun Li・Rong Tu・Takashi Goto
    • Organizer
      日本セラミックス協会第20回秋季シンポジウム
    • Place of Presentation
      名古屋工業大学
    • Year and Date
      2007-09-12
    • Related Report
      2007 Annual Research Report

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Published: 2007-04-01   Modified: 2016-04-21  

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