Fabrication of Nanowire heater and its temperatur esensing for bio-thermal mechanism

• Project/Area Number: 19510126
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Nanomaterials/Nanobioscience
• Research Institution: The University of Tokyo
• Principal Investigator: KIM Beomjoon The University of Tokyo, 生産技術研究所, 准教授 (60334356)
• Co-Investigator(Kenkyū-buntansha): TAKAMA Nobuyuki 東京大学, 生産技術研究所, 技術専門員 (00396912)
• Project Period (FY): 2007 – 2008
• Project Status: Completed (Fiscal Year 2008)
• Budget Amount: ¥4,680,000 (Direct Cost: ¥3,600,000、Indirect Cost: ¥1,080,000); Fiscal Year 2008: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000); Fiscal Year 2007: ¥3,380,000 (Direct Cost: ¥2,600,000、Indirect Cost: ¥780,000)
• Keywords: 1分子ナノ計測 / 分子温度計測 / ナノ加工技術

Research Abstract

本研究の目的は、単分子の熱力学的反応計測用センサーおよび温度可変ソースとして"シリコンおよび金属ナノワイヤーのヒーター"を製作、評価する研究である。
実際ナノワイヤーの温度測定を行うため、金属ナノワイヤーを製作し、その上に量子ドットを固定させ、温度変化によって変わる量子ドットからの蛍光スペクトルのマッピングにより温度分布の領域を検出した。量子ドットの代わりに蛍光性色素であるローダミンBを用いてナノワイヤーの温度分布の計測を行う実験に取り組んでより安定で金属ナノワイヤーの温度分布マッピング(25度より90度レベルにて5度程度の分解能)に成功した。一方、量子ドットによるナノヒーターの温度分布計測だけではなく、既存のSThMによる、ナノヒーターの温度計測を行い、ナノ領域にて温度計測及び熱伝導特性を評価した。さらに安価でかつハイスループットの単結晶シリコンのナノワイヤーを製作し、作製したナノワイヤーをヒートソースとして利用するため、その温度制御ができることを確認した。特に、気中環境下の計測だけではなく、液中でのナノワイヤー温度計測を行った。

Research Products

• [Journal Article] Simple fabrication of Si nanowire and its biological application (2009)
  • Author(s): Y.T. Cheng, Y.H. Cho, N. Takama, P.Low, C. Bergaud and B.J. Kim
  • Journal Title: Journal of Physics,conference series Vol.152
  • Peer Reviewed
• [Journal Article] Simple fabrication of Si nanowire and its biological application (2009)
  • Author(s): Y.T. Cheng, Y.H. Cho, N. Takama, P. Low, C. Bergaud, and B.J. Kim
  • Journal Title: Journal of Physics, conference series Vol.152
  • Peer Reviewed
• [Journal Article] High spatial resolution surface temperature mapping using fluorescent thermometry (2008)
  • Author(s): Peter Low, Beomjoon Kim, Nobuyuki Takama and Christian Bergaud
  • Journal Title: Small 4,No.7 Pages: 908-914
  • Peer Reviewed
• [Journal Article] AC thermal imaging of nanoheaters using a scanning florescent probe (2008)
  • Author(s): B. Samson, L. Aigouy, P. Low, C. Bergaud, B.J. Kim, M. Mortier
  • Journal Title: Applied Physics Letters 92
  • Peer Reviewed
• [Journal Article] Assembly of CdSe/ZnS Nanocrystals on Microwires and Nanowires for Temperature Sensing (2008)
  • Author(s): Peter Low, Bruno Le Pioufle, Beomjoon Kim, Christian Bergaud
  • Journal Title: Sensors and Actuators B Vol.130/1 Pages: 175-180
  • Peer Reviewed
• [Journal Article] High spatial resolution surface temperature mapping using fluorescent thermometry (2008)
  • Author(s): Peter Law, Beomjoon Kim, Nobuyuki Takama, and Christian Bergaud
  • Journal Title: Small Vol 4, No.7 Pages: 908-914
  • Peer Reviewed
• [Journal Article] AC thermal imaging of nanoheaters using a scanning florescent probe (2008)
  • Author(s): B. Samson, L Aigouy, P. Low, C. Bergaud, B.J. Kim, M. Mortier
  • Journal Title: Applied Physics Letters 92 Pages: 23101-103
  • Peer Reviewed
• [Journal Article] Assembly of CdSe/ZnS Nanocrystals on Microwires and Nanowires for Temperature Sensing (2008)
  • Author(s): Peter Low, Bruno Le Pioufle, Beomjoon Kim, Christian Bergaud
  • Journal Title: Sensors and Actuators B Vol 130/1 Pages: 175-180
  • Peer Reviewed
• [Journal Article] High spatial resolution surface temperature mapping using fluorescent thermometry (2008)
  • Author(s): Peter Low, Beomjoon Kim, Nobuyuki Takama, Christian Bergaud
  • Journal Title: Small Vol4, No.7 Pages: 908-914
  • Peer Reviewed
• [Journal Article] AC thermal imaging of nanoheaters using a scanning florescent probe (2008)
  • Author(s): B. Samson, L. Aigouy, P. Low, C. Bergaud, B. J. Kim, M. Mortier
  • Journal Title: Applied Physics Letters 92 Pages: 23101-103
  • Peer Reviewed
• [Journal Article] Thermal imaging of nickel wires with a fluorescent nanoprobe (2007)
  • Author(s): B. Samson, L. Aigouy, G. Tessier, P.Low, B.J. Kim, C. Bergaud and M. Mortier
  • Journal Title: Journal of Physics : Conference Series 92 Pages: 12089-12089
  • Peer Reviewed
• [Journal Article] Measurement of the temperature distribution of resistively heated nanowires using CdSe/ZnS nanocrystals (2007)
  • Author(s): Peter Lbw, Nobuyuki Takama, Beomjoon Kim and Christian Bergaud
  • Journal Title: SEISAN-KENKYU Vol.59,No.6 Pages: 510-513
  • NAID: 110006936092
• [Journal Article] Thermal imaging of nickel wires with a fluorescent nanoprobe (2007)
  • Author(s): B. Samson, L. Aigouy, G. Tessier, P. Low, B. J. Kim, C. Bergaud, M. Mortier
  • Journal Title: Journal of Physics : Conference Series 92 Pages: 12089-92
  • Peer Reviewed
• [Presentation] Surface-temperature control of silicon nanowires in dry and liquid conditions (2009)
  • Author(s): S. Akiyama, Y.T. Cheng, J. Fattaccioli, N. Takama, P. Low, C. Bergaud and B.J.Kim
  • Organizer: 22^<nd>. IEEE International Conference on Micro Electro Mechanical Systems(MEMS 2009)Proc.of the IEEE Int.Conf.on MEMS 2009
  • Place of Presentation: Sorrento,Italy
• [Presentation] Surface-temperature control of silicon nanowires in dry and liquid conditions (2009)
  • Author(s): S. Akiyama, Y. T. Cheng, J. Fattaccioli, N. Takama, P. Low, C. Bergaud and B. J. Kim
  • Organizer: 22.nd IEEE International Conference on Micro Electro Mechanical Systems MEMS 2009
  • Place of Presentation: Sorrento, Italy
• [Presentation] Surface-temperature mapping on suspended silicon nanowire using fluorescent thermometry under dry and liquid conditions (2008)
  • Author(s): Y.T. Cheng, J. Fattaccioli, S. Akiyama,N. Takama, Y. Akagi, S.J. Cho, P. Low, C. Bergaud and B.J. Kim
  • Organizer: 34^<th>. International conference on Micro and Nano engineering 2008(MNE2008)
  • Place of Presentation: Athens,Greece,Abstract book(oral presentation)
• [Presentation] Simple fabrication of Si nanowire and its biological application as nanoscale heat source (2008)
  • Author(s): Y.T. Cheng, Y.H. Cho, N. Takama and B.J. Kim
  • Organizer: MRS International Materials Research Conference
  • Place of Presentation: Chongqing,China,Abstract book(oral presentation)
• [Presentation] Scanning thermal microscopy with a fluorescent nanoprobe (2008)
  • Author(s): Benjamin Samson, Elika Saidi, Lionel Aigouy, Peter Low, Beomjoon Kim, Christian Bergaud, Michel Mortier
  • Organizer: 2008 APS(American Physical Society)March Meeting
  • Place of Presentation: New Orieans,Louisiana,USA(V36.00011)(oral presentation)
• [Presentation] Novel Fabrication of Sinanoeire and its biosensor application(Siナノワイヤーの製作及びバイオセンサーへの応用) (2008)
  • Author(s): Y.T. Cheng, Y.H. Cho, K. Nakagawa, N.Takama, H. Kawakatu, S.J. Cho, Y. Akagi, B.J. Kim
  • Organizer: 2008年春期第55回応房物理学関係連合講演会、講演予稿集
  • Place of Presentation: 日本大学理工学部船橋キャンパス(No.3)
• [Presentation] Surface-temperature mapping on suspended silicon nanowire using fluorescent thermometry under dry and liquid conditions (2008)
  • Author(s): Y.T. Cheng, J. Fattaccioli, S. Akiyama, N. Takama, Y. Akagi, S.J. Cho, P. Low, C. Bergaud. and B.J. Kim
  • Organizer: 34th. International conference on Micro and Nano engineering 2008 (MNE2008)
  • Place of Presentation: Athens, Greece
• [Presentation] Simple fabrication of Si nanowire and its biological application as nanoscale heat source (2008)
  • Author(s): Y.T. Cheng, Y.H. Cho, N. Takama, and B.J. Kim
  • Organizer: MRS International Materials Research Conference
  • Place of Presentation: Chongqing, China
• [Presentation] Surface-temperature mapping on suspended silicon nanowire using fluorescent thermometry under dry and liquid conditions (2008)
  • Author(s): Y. T. Cheng, J. Fattaccioli, S. Akiyama, N. Takama, Y. Akagi, S. J. Cho, P. Low, C. Bergaud, B. J. Kim
  • Organizer: 34^<th>. International conference on Micro and Nano engineering 2008 (MNE2008)
  • Place of Presentation: Athens, Greece
• [Presentation] Scanning thermal microscopy with a fluorescent nanoprobe (2008)
  • Author(s): Benjamin Samson, Elika Saidi, Lionel Aigouy, Peter Low, Beomjoon Kim, Christian Bergaud, Michel Mortier
  • Organizer: 2008 APS (American Physical Society) March Meeting
  • Place of Presentation: New Orieans, Louisiana, USA
• [Presentation] Novel Fabrication of Si nanowire and its biosensor application (2008)
  • Author(s): Y. T. Cheng, Y. H. Cho, K. Nakagawa, N. Takama, H. Kawakatu, S. J. Cho, Y. Akagi, B. J. Kim
  • Organizer: 2008年春期第55回応用物理学関係連合講演会
  • Place of Presentation: 日本大学理工学部船橋キャンパス
• [Presentation] High spatial resolution thermometry using fluorescent nanoprobes in dry and liquid media (2007)
  • Author(s): Peter Low, Nobuyuki Takama, Beomjoon Kim and Christian Bergaud
  • Organizer: 7th France-Japan Workshop on Nanosciences and Nanomaterials
  • Place of Presentation: Strasbourg,France
• [Presentation] Thermal imaging of nickel wires with a fluorescent nanoprobe (2007)
  • Author(s): B. Samson, L. Aigouy, G. Tessier, P.Low, B. Kim, C. Bergaud, M. Mortier
  • Organizer: 12th International Conference on Phonon Scattering in Condensed Matter(Phonons 2007)
  • Place of Presentation: Paris
• [Presentation] Using dried Rhodamine B fluorescence for temperature characterization of sub-micron scale devices (2007)
  • Author(s): Peter LOw, Nobuyuki Takama, Beomjoon Kim and Christian Bergaud
  • Organizer: The 14th. International Conference on Solid-State Sensors, Actuators and Microsystems(Transducers'07-Lyon)
  • Place of Presentation: Lyon,France
• [Presentation] High spatial resolution thermometry using fluorescent nanoprobes in dry and liquid media (2007)
  • Author(s): Peter Low, Nobuyuki Takama, Beomjoon Kim, Christian Bergaud
  • Organizer: 7th France-Japan Workshop on Nanosciences and Nanomaterials
  • Place of Presentation: Bischoffsheim, Strasbourg, France
• [Presentation] Thermal imaging of nickel wires with a fluorescent nanoprobe (2007)
  • Author(s): B. Samson, L. Aigouy, G. Tessier, P. Low, B. Kim. C. Bergaud, M. Mortier
  • Organizer: 12th International Conference on Phonon Scattering in Condensed Matter (Phonons 2007)
  • Place of Presentation: Paris, France
• [Presentation] Using dried Rhodamine B fluorescence for temperature characterization of sub-micron scale devices (2007)
  • Author(s): Peter Low, Nobuyuki Takama, Beomjoon Kim, Christian Bergaud
  • Organizer: The 14th. International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '07-Lyon)
  • Place of Presentation: Lyon, France
• [Presentation] Measurement of the temperature distribution on resistively heated nanowires using CdSe/ZnS nanocrystals (2006)
  • Author(s): Peter Low, Nobuyuki Takama, Beomjoon Kim, Christian Bergaud
  • Organizer: 2006 MRS (Materials Research Society) Fall meeting
  • Place of Presentation: Boston, USA
• [Remarks]
  • URL: http://www.Kimlab.Iis.U-tokyo.ac.jp/
• [Remarks]
  • URL: http://www.kimlabiis.u-tokyo.acjp/publication/publication.html
• [Remarks]
  • URL: http://www.kimlab.iis.u-tokyo.ac.jp/publication/publication.html