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Deposition of hetero-structure layered low-k amorphous fluorinated carbon films under sequence control of gas feed and plasma power

Research Project

Project/Area Number 19540517
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Plasma science
Research InstitutionHokkaido University

Principal Investigator

SUGAWARA Hirotake  Hokkaido University, 大学院・情報科学研究科, 准教授 (90241356)

Co-Investigator(Kenkyū-buntansha) SUDA Yoshiyuki  北海道大学, 大学院・情報科学研究科, 助教 (70301942)
Project Period (FY) 2007 – 2009
Project Status Completed (Fiscal Year 2009)
Budget Amount *help
¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000)
Fiscal Year 2009: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2008: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2007: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
Keywordsプラズマ / 化学気相堆積法 / フッ化炭素 / 低誘電率 / 絶縁膜 / 波状化 / 低誘電率材料 / プラズマCVD / 誘電体 / 薄膜堆積 / 耐熱性 / 電子・電気材料 / 積層
Research Abstract

Amorphous fluorocarbon (a-C:F) films, which are applicable to insulation of electrical power equipment and integrated circuits, were deposited by plasma-enhanced chemical vapor deposition using a C_8F_<18> feedstock. When the a-C:F films were composed at a low plasma power, the thermal tolerance of the films was weak for less bondings between molecular chains in the a-C:F films (loose films). The dielectric constant of these a-C:F films had a tendency to be lower than that of conventional a-C:F films with dense bondings between molecular chains (firm films). This feature is desirable for reduction of the dielectric energy loss in power equipment and the delay of the signal transmission in the integrated circuits. In addition, we found a waving phenomenon of the firm film due to the heat given during the deposition of the firm film on a loose film. The voids made under the wavy film are also expected to contribute to the reduction of the dielectric constant of the a-C:F films.

Report

(4 results)
  • 2009 Annual Research Report   Final Research Report ( PDF )
  • 2008 Annual Research Report
  • 2007 Annual Research Report
  • Research Products

    (40 results)

All 2010 2009 2008 2007

All Journal Article (7 results) (of which Peer Reviewed: 4 results) Presentation (33 results)

  • [Journal Article] C_8F_<18>プラズマCVDによる非晶質フッ化炭素低誘電率絶縁膜の波状構造積層堆積 (平成21年電気学会基礎材料・共通部門大会特集)2010

    • Author(s)
      水野巧一朗, 菅原広剛, 村山明宏
    • Journal Title

      電気学会論文誌 Vol. 130-A, No. 4

      Pages: 319-324

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] C_8F_<18>プラズマCVDによる非晶質フッ化炭素低誘電率絶縁膜の波状構造積層堆積2010

    • Author(s)
      水野巧一朗、菅原広剛、村山明宏
    • Journal Title

      電気学会論文誌A 130-A

      Pages: 319-324

    • NAID

      10026225577

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] formation or winding surface of amorphous fluorocarbon films composed by perfluorooctane plama-enhanced chemical vapor deposition2008

    • Author(s)
      K. Mizuno
    • Journal Title

      Proc. XIX Europhysic Conf. on Atom-Molecular Phenomena in Ionized Gases (Jul. 15-19, 2008, Granada, Spain, CD-ROM ISBN2-914771-04-5) 32-A

    • Related Report
      2008 Annual Research Report
  • [Journal Article] Deposition of layered amorphous fluorocarbon films by C_8F_<18> PECVD2008

    • Author(s)
      T. Yamauchi
    • Journal Title

      Bulletin American Physical Society 53

      Pages: 27-27

    • Related Report
      2008 Annual Research Report
  • [Journal Article] Thermal effect on multi-layered amorphous fluorocarbon films composed by plasma-enhanced chemical vapor deposition using perfluorooctane2008

    • Author(s)
      K. Mizuno
    • Journal Title

      Proc. 14th Asian Conf. on Electrical Discharge (Nov. 23-25, 2008, Bumi Sangkuriang, Bandung, Indonesia, ISBN 978-979-16338-1-9) 1

      Pages: 29-32

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Observation of surface and cross section amorphous fluorocarbon films composed by perfluoro-octane plasma-enhanced chemical vapor deposition2007

    • Author(s)
      T. Yamauchi
    • Journal Title

      Proceedings of 28th International Conference on Phenomena in Ionized Gases(CD-ROM, ISBN978-80-87026-01-4) 1

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Deposition of amorphous fluorocarbon films by C_8F_<18>/Ar plasma-enhanced chemical vapor deposition and theri chemical properties2007

    • Author(s)
      H. Koike
    • Journal Title

      Proceedings of 18th International Symposium on Plasma Chemistry(CD-ROM ISBN978-4-9903773-4-2) 1

    • Related Report
      2007 Annual Research Report
  • [Presentation] C_8F_<18>プラズマCVDにより堆積されたa-C : F膜の熱耐性評価及び投入電力の最適条件2010

    • Author(s)
      水野巧一朗, 菅原広剛 (発表者) 村山明宏
    • Organizer
      平成22年電気学会全国大会No. 1-195 (vol. 1, p. 221)
    • Place of Presentation
      明治大学駿河台キャンパス
    • Year and Date
      2010-03-17
    • Related Report
      2009 Final Research Report
  • [Presentation] C_8F_<18>プラズマCVDにより堆積されたa-C:F膜の熱耐性評価及び投入電力の最適条件2010

    • Author(s)
      水野巧一朗、菅原広剛、村山明宏
    • Organizer
      平成22年電気学会全国大会
    • Place of Presentation
      明治大学駿河台キャンパス
    • Year and Date
      2010-03-17
    • Related Report
      2009 Annual Research Report
  • [Presentation] C_8F_<18>プラズマCVDにより堆積されたa-C : F膜の特性評価-低電力堆積膜と高電力堆積膜の比較-2009

    • Author(s)
      水野巧一朗 (発表者), 菅原広剛, 村山明宏
    • Organizer
      平成21年度電気・情報関係学会北海道支部連合大会No. 36
    • Place of Presentation
      北見工業大学
    • Year and Date
      2009-10-18
    • Related Report
      2009 Final Research Report
  • [Presentation] C_8F_<18>プラズマCVDにより堆積されたa-C:F膜の特性評価-低電力堆積膜と高電力堆積膜の比較-2009

    • Author(s)
      水野巧一朗、菅原広剛、村山明宏
    • Organizer
      平成21年度電気・情報関係学会北海道支部連合大会
    • Place of Presentation
      北見工業大学
    • Year and Date
      2009-10-18
    • Related Report
      2009 Annual Research Report
  • [Presentation] C_8F_<18>プラズマCVDによる非晶質フッ化炭素低誘電率絶縁膜の波状構造積層堆積2009

    • Author(s)
      水野巧一朗 (発表者), 菅原広剛, 村山明宏
    • Organizer
      平成21年電気学会基礎・材料・共通部門大会No. O-12-II
    • Place of Presentation
      静岡大学浜松キャンパス
    • Year and Date
      2009-09-10
    • Related Report
      2009 Final Research Report
  • [Presentation] C_8F_<18>プラズマCVDによる非晶質フッ化炭素低誘電率絶縁膜の波状構造積層堆積2009

    • Author(s)
      水野巧一朗、菅原広剛、村山明宏
    • Organizer
      平成21年電気学会基礎・材料・共通部門大会
    • Place of Presentation
      静岡大学浜松キャンパス
    • Year and Date
      2009-09-10
    • Related Report
      2009 Annual Research Report
  • [Presentation] Plasma power dependence of properties of amorphous fluorocarbon films composed by PECVD using perfluorooctane,2009

    • Author(s)
      K.Mizuno, H.Sugawara, Y.Sakai, A.Murayama
    • Organizer
      29th Int.Conf.Phenomena in Ionized Gases
    • Place of Presentation
      カンクンコンベンションセンター,カンクン,メキシコ
    • Year and Date
      2009-07-13
    • Related Report
      2009 Annual Research Report
  • [Presentation] C_8F_<18>プラズマCVDによるa-C : F膜の波状構造積層堆積2009

    • Author(s)
      水野巧一朗 (発表者), 山内達也, 菅原広型, 村山明宏
    • Organizer
      平成21年電気学会全国大会No. 1-195 (vol. 1, p. 240)
    • Place of Presentation
      北海道大学
    • Year and Date
      2009-03-17
    • Related Report
      2009 Final Research Report
  • [Presentation] C_8F_<18>プラズマCVDによるa-C : F膜の波状構造積層堆積2009

    • Author(s)
      水野巧一朗
    • Organizer
      平成21年電気学会全国大会(No.1-195)
    • Place of Presentation
      北海道大学
    • Year and Date
      2009-03-17
    • Related Report
      2008 Annual Research Report
  • [Presentation] Plasma power dependence of properties of amorphous fluorocarbon films composed by PECAD using perfluorooctane, Proc2009

    • Author(s)
      K. Mizuno, H. Sugawara (発表者), Y. Sakai, A. Murayama
    • Organizer
      29th Int. Conf. Phenomena in Ionized Gases No. PA3-9 (4 pages)
    • Place of Presentation
      Cancun, Mexico
    • Related Report
      2009 Final Research Report
  • [Presentation] C_8F_<18>プラズマCVDによるa-C : F膜の異種構造積層堆積と波状膜形成2008

    • Author(s)
      水野巧一朗, (発表者), 山内達也, 菅原広剛
    • Organizer
      平成20年度電気・情報関係学会北海道支部連合大会No. 85
    • Place of Presentation
      東海大学札幌キャンパス
    • Year and Date
      2008-10-26
    • Related Report
      2009 Final Research Report
  • [Presentation] 封じ切りC_8F_<18>/ArプラズマCVDによるa-C : F膜の作成2008

    • Author(s)
      山内達也, (発表者), 菅原広剛, 水野巧一朗, 酒井洋輔
    • Organizer
      平成20年度電気・情報関係学会北海道支部連合大会No. 84
    • Place of Presentation
      東海大学札幌キャンパス
    • Year and Date
      2008-10-26
    • Related Report
      2009 Final Research Report
  • [Presentation] 封じ切りC_8F_<18>/ArプラズマCVDによるa-C : F膜の作成2008

    • Author(s)
      山内達也
    • Organizer
      平成20年度電気・情報関係学会北海道支部連合大会(No.84)
    • Place of Presentation
      東海大学札幌キャンパス
    • Year and Date
      2008-10-26
    • Related Report
      2008 Annual Research Report
  • [Presentation] C_8F_<18>プラズマCVDによるa-C : F膜の異種構造積層堆積と波状膜形成2008

    • Author(s)
      水野巧一朗
    • Organizer
      平成20年度電気・情報関係学会北海道支部連合大会(No.85)
    • Place of Presentation
      東海大学札幌キャンパス
    • Year and Date
      2008-10-26
    • Related Report
      2008 Annual Research Report
  • [Presentation] C_8F_<18>プラズマCVDによるa-C : F膜の作成と堆積機構の検討2008

    • Author(s)
      山内達也, (発表者), 菅原広剛, 水野巧一朗, 酒井洋輔
    • Organizer
      平成20年電気学会基礎・材料・共通部門大会講演論文集No. V2
    • Place of Presentation
      千葉工業大学
    • Year and Date
      2008-08-22
    • Related Report
      2009 Final Research Report
  • [Presentation] C_8F_<18>プラズマCVDによるa-C : F膜の作成と堆積機構の検討2008

    • Author(s)
      山内達也
    • Organizer
      平成20年電気学会基礎・材料・共通部門大会(No.V-2)
    • Place of Presentation
      千葉工業大学津田沼キャンパス
    • Year and Date
      2008-08-22
    • Related Report
      2008 Annual Research Report
  • [Presentation] C_8F_<18>プラズマCVDによるa-C : F膜の異種構造積層堆積2008

    • Author(s)
      水野巧一朗, (発表者), 小池広恵, 山内達也, 菅原広剛, 須田善行, 酒井洋輔
    • Organizer
      平成20年電気学会全国大会No. 1-208 (vol. 1, p. 253)
    • Place of Presentation
      福岡工業大学
    • Year and Date
      2008-03-21
    • Related Report
      2009 Final Research Report
  • [Presentation] C_8F_<18>プラズマCVDによるa-C:F膜の異種構造積層堆積2008

    • Author(s)
      水野巧一朗
    • Organizer
      平成20年電気学会全国大会 No.1-208(vol. 1, p.253)
    • Place of Presentation
      福岡工業大学
    • Year and Date
      2008-03-21
    • Related Report
      2007 Annual Research Report
  • [Presentation] 封じきりC_8F_<18>プラズマCVDによる二層非晶質フッ化炭素膜の間欠堆積2008

    • Author(s)
      山内達也, 菅原広剛, (発表者), 酒井洋輔, 須田善行, 小池広恵
    • Organizer
      平成20年電気学会全国大会No. 2-093 (vol. 2, p. 111)
    • Place of Presentation
      福岡工業大学
    • Year and Date
      2008-03-19
    • Related Report
      2009 Final Research Report
  • [Presentation] 封じきりC_8F_<18>プラズマCVDによる二層非晶質フッ化炭素膜の間欠堆積2008

    • Author(s)
      山内達也
    • Organizer
      平成20年電気学会全国大会 No.2-093(vol. 2, p.111)
    • Place of Presentation
      福岡工業大学
    • Year and Date
      2008-03-19
    • Related Report
      2007 Annual Research Report
  • [Presentation] Thermal effect on muwlti-layered amorphous fluorocarbon films composed by plasma-enhanced chemical vapor deposition using perfluorooctane, Proc2008

    • Author(s)
      K. Mizuno, H. Sugawara (発表者), T. Yamauchi, Y. Sakai
    • Organizer
      14th Asian Conf. on Electrical Discharge, No. A-3, pp. 29-32
    • Place of Presentation
      Sangkuriang, Bandung, West Jawa, Indonesia
    • Related Report
      2009 Final Research Report
  • [Presentation] Deposition of layered armorphous fluorocarbon films by C8F18 PECVD2008

    • Author(s)
      T. Yamauchi, (発表者), K. Mizuno, H. Sugawara
    • Organizer
      61th Ann. Gaseous Electronics Conf. (Am. Phys. Soc.)
    • Place of Presentation
      Dallas, Texas, USA Bulletin Am. Phys. Soc.
    • Related Report
      2009 Final Research Report
  • [Presentation] Formation of Winding surface of amorphous fluorocarbon films composed by perfluorooctane plama-enhanced chemical vapor deposition, Proc2008

    • Author(s)
      K. Mizuno, H. Sugawara, (発表者), T. Yamauchi, H. Koike, Y. Suda, Y. Saka
    • Organizer
      XIX Europhysi Conference on Atom-Molecular Phenomena, in Ionized Gases (ISBN2-914771-04-5, Vol. 32-A), No. 1-61 (2 pages)
    • Place of Presentation
      Granada, Spain(CD-ROM)
    • Related Report
      2009 Final Research Report
  • [Presentation] C_8F_<18>プラズマCVDによる二層非晶質フッ化炭素膜の作成2007

    • Author(s)
      山内達也, (発表者), 菅原広剛, 酒井洋輔, 須田善行, 小池広恵
    • Organizer
      平成19年度電気・情報関係学会北海道支部連合大会No. 104
    • Place of Presentation
      北海道工業大学
    • Year and Date
      2007-10-28
    • Related Report
      2009 Final Research Report
  • [Presentation] C_8F_<18>プラズマCVDによる二層非晶質フッ化炭素膜の作成2007

    • Author(s)
      山内達也
    • Organizer
      平成19年度電気・情報関係学会北海道支部連合大会No.104
    • Place of Presentation
      北海道工業大学
    • Year and Date
      2007-10-28
    • Related Report
      2007 Annual Research Report
  • [Presentation] C_8F_<18>プラズマCVDにおける発光スペクトルとa-C : F膜の化学結合状態の関連2007

    • Author(s)
      小池広恵, (発表者), 菅原広剛, 酒井洋輔, 須田善行, 山内達也
    • Organizer
      平成19年度電気・情報関係学会北海道支部連合大会No. 92
    • Place of Presentation
      北海道工業大学
    • Year and Date
      2007-10-27
    • Related Report
      2009 Final Research Report
  • [Presentation] C_8F_<18>プラズマCVDにおける発光スペクトルとa-C:F膜の化学結合状態の関連2007

    • Author(s)
      小池広恵
    • Organizer
      平成19年度電気・情報関係学会北海道支部連合大会No.92
    • Place of Presentation
      北海道工業大学
    • Year and Date
      2007-10-27
    • Related Report
      2007 Annual Research Report
  • [Presentation] C_8F_<18>プラズマCVDによるa-C : F膜生成とその特性の評価2007

    • Author(s)
      小池広恵, (発表者), 菅原広剛, 酒井洋輔, 須田善行, 山内達也
    • Organizer
      平成19年電気学会プラズマ放電合同研究会、PST-07-54/ED-07-134
    • Place of Presentation
      北海道大学
    • Year and Date
      2007-09-14
    • Related Report
      2009 Final Research Report
  • [Presentation] C_8F_<18>プラズマCVDによるa-C:F膜生成とその特性の評価2007

    • Author(s)
      小池広恵
    • Organizer
      平成19年電気学会プラズマ放電合同研究会PST-07-54/ED-07-134
    • Place of Presentation
      北海道大学
    • Year and Date
      2007-09-14
    • Related Report
      2007 Annual Research Report
  • [Presentation] C_8F_<18>プラズマCVDによるa-C : F膜の積層2007

    • Author(s)
      山内達也, (発表者), 菅原広剛, 酒井洋輔, 須田善行, 小池広恵
    • Organizer
      放電学会若手セミナーP-24
    • Place of Presentation
      登別グランドホテル
    • Year and Date
      2007-09-13
    • Related Report
      2009 Final Research Report
  • [Presentation] Composition of two-layered amorphous fluorocarbon films by perfluorooctane plasma enhanced chemical vapor deposition2007

    • Author(s)
      T. Yamauchi, H. Koike, H. Sugawara, (発表者), Y. Suda, Y. Sakai
    • Organizer
      2007 Japan-Korea Joint Symposium on Electrical Discharge and High Voltage Engineering 16P-26 (pp. 335-338)
    • Place of Presentation
      Shibaura Institute of Technology, Tokyo, Japan
    • Related Report
      2009 Final Research Report
  • [Presentation] Deposition of amorphous fluorocarbon films by C_8F_<18>/Ar plasma-enhanced chemical vapor deposition and their chemical properties, Proc2007

    • Author(s)
      H. Koike, (発表者), T. Yamauchi, Y. Sakai, Y. Suda, H. Sugwara
    • Organizer
      18th Int. Symp. on Plasma Chem. p. 460 (ISBN978-4-9903773-4-2), No. 27P-67 (4 pages)
    • Place of Presentation
      Kyoto University, Japan(CD-ROM)
    • Related Report
      2009 Final Research Report
  • [Presentation] Observation of surface and cross section of amorphous fluorocarbon films composed by perfluoro-octane plasma-enhanced chemical vapor deposition, Proc2007

    • Author(s)
      T. Yamauchi, H. Koike, H, Sugawara, (発表者), Y. Suda, Y. Sakai
    • Organizer
      28th Int. Conf. Phenomena in Ionized Gases (ISBN978-80-87026-01-4), No. 2P13-34 (4 pages)
    • Place of Presentation
      Prague, Czech Republic(CD-ROM)
    • Related Report
      2009 Final Research Report

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Published: 2007-04-01   Modified: 2016-04-21  

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