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UHV in-situ and Cs-corrected HR(S)TEM Studies of structures and growth process of Ge nanodots formed on faintly oxidized Si surfaces

Research Project

Project/Area Number 19560023
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Thin film/Surface and interfacial physical properties
Research InstitutionNagoya University

Principal Investigator

TANAKA Nobuo (2008)  Nagoya University, エコトピア科学研究所, 教授 (40126876)

趙 星彪 (2007)  Nagoya University, エコトピア科学研究所, 研究員 (90318783)

Co-Investigator(Kenkyū-buntansha) 田中 信夫  名古屋大学, エコトピア科学研究所, 教授 (40126876)
Project Period (FY) 2007 – 2008
Project Status Completed (Fiscal Year 2008)
Budget Amount *help
¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000)
Fiscal Year 2008: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2007: ¥3,640,000 (Direct Cost: ¥2,800,000、Indirect Cost: ¥840,000)
Keywords電子顕微鏡 / HR-profile TEM / HAADF-STEM / Geナノドット / 極薄Si酸化膜 / 臨界核サイズ / 構造安定モデル
Research Abstract

本研究では、実空間かつ原子レベルでその場観察できるUHV in-situ HR-profile TEM(UHV in-situ high-resolution transmission electron microscopy in the profile-imaging geometry)と、試料の原子コラムレベル毎の組成分析や原子コラム位置を直視観察できるHAADF-STEM(high angle annular dark field-scanning resolution transmission electron microscopy)を用いて、Si基板に形成した極薄Si酸化膜上でのGeナノドットの形成過程と、GeナノドットとSi界面近傍における微細構造、および原子拡散現象などを詳細に評価した。その結果、本系におけるGeナノドット成長様式およびGeナノドット直下にGe-rich layerの存在する新しい構造モデルを提案することができた

Report

(3 results)
  • 2008 Annual Research Report   Final Research Report ( PDF )
  • 2007 Annual Research Report
  • Research Products

    (21 results)

All 2009 2008 2007 Other

All Journal Article (7 results) (of which Peer Reviewed: 7 results) Presentation (13 results) Remarks (1 results)

  • [Journal Article] In-situ monitoring of nucleation and evolution of Ge nanodots on faintly oxidized Si(111) surfaces2008

    • Author(s)
      Sung-Pyo Cho, Shinji Kawano and Nobuo Tanaka
    • Journal Title

      App. Sur. Sci 254

      Pages: 7868-7868

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] Spherical aberration corrected STEM studies of Ge nanodots grown on Si(001) surfaces with an ultrathin SiO2 coverage2008

    • Author(s)
      N. Tanaka, S.-P. Cho, A. A. Shklyaev J. Yamasaki, E. Okunishi and M. Ichikawa
    • Journal Title

      App. Sur. Sci 254

      Pages: 7569-7569

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] Spherical aberration corrected STEM studies of Ge nanodots grown on Si(001) surfaces with an ultrathin SiO_2 coverage2008

    • Author(s)
      N. Tanaka, S. -P. Cho, A. A. ShklyaevJ. Yamasaki, E. Okunishi M. Ichikawa
    • Journal Title

      Applied Surface Science 255

      Pages: 7569-7572

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] In-situ monitoring of nucleation and evolution of Ge nanodots on faintly oxidized Si(111)surfaces2008

    • Author(s)
      Sung-Pyo Cho, Shinji Kawano, Nobuo Tanaka
    • Journal Title

      Applied Surface Science 255

      Pages: 7868-7871

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] in-situ monitoring of nucleation and evolution of Ge nanodots on faintly oxidized Si (111) surfaces2008

    • Author(s)
      Sung-Pyo Cho, Shinji Kawano and Nobuo Tanaka
    • Journal Title

      Applied Surface Science 印刷中

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] UHV in-situ とCs corrected HRTEMによる極薄Si酸化膜上でのGeナノドットの核形成・成長、および微細構造の評価2007

    • Author(s)
      趙星彪, 川野晋司, 齋藤晃, 山崎順, 田中信夫
    • Journal Title

      日本結晶成長学会誌 Vol.34, No.3

      Pages: 10-10

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] UHV in-situとCs corrected HRMEMによる極薄Si酸化膜上でのGeナノドットの核形成・成長、および微細構造の評価2007

    • Author(s)
      趙星彪, 川野晋司, 齋藤晃, 山崎順, 田中信夫
    • Journal Title

      日本結晶成長学会誌 34

      Pages: 10-10

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Presentation] UHV in-situ TEMによる極薄Si酸化膜付Si基板上に成長するGeナノドットの歪み評価2009

    • Author(s)
      藤林裕明, 趙星彪, 田中信夫
    • Organizer
      日本物理学会
    • Place of Presentation
      東京、立教大
    • Year and Date
      2009-03-28
    • Related Report
      2008 Annual Research Report
  • [Presentation] UHV in-situ TEMによる極薄Si酸化膜付Si基板上に成長するGeナノドットの歪み評価2009

    • Author(s)
      趙星彪, 藤林裕明, 田中信夫
    • Organizer
      日本物理学会第64回年次大会
    • Place of Presentation
      東京 (立教大)
    • Year and Date
      2009-03-27
    • Related Report
      2008 Final Research Report
  • [Presentation] 極薄酸化膜付きSi上に成長するGe量子ドットに含まれる歪分布の定量的評価2008

    • Author(s)
      藤林裕明, 趙星彪, 田中信夫
    • Organizer
      日本顕微鏡学会第64回学術講演会
    • Place of Presentation
      京都(国立京都国際会館)
    • Year and Date
      2008-05-22
    • Related Report
      2008 Final Research Report
  • [Presentation] 極薄Si酸化膜付Si上に成長するGeナノドツトに含まれる歪み分布の定量的な評価2008

    • Author(s)
      藤林裕明, 趙星彪, 田中信夫
    • Organizer
      日本顕微鏡学会
    • Place of Presentation
      京都、国立京都国際会館
    • Year and Date
      2008-05-22
    • Related Report
      2008 Annual Research Report
  • [Presentation] Cs-corrected STEM Studies of Ge Nanodots Grown on Slightly Oxidized Si(111) Surfaces2008

    • Author(s)
      N Tanaka, S-P Cho, A A Shklyaev, J Yamasaki, E Okunishi and M Ichikawa
    • Organizer
      Microscopy & Microanalysis 2008
    • Place of Presentation
      New Mexico, USA
    • Related Report
      2008 Final Research Report
  • [Presentation] Studies of Ge Quantum Dots on Slightly Oxidized Si(111) Surfaces by Cs-corrected TEM/STEM2008

    • Author(s)
      N. Tanaka, S. -P. Cho, A. A. Shklyaev, J. Yamasaki, E. Okunishi, and M. Ichikawa
    • Organizer
      The 1st International Symposium on Advanced Microscopy and Theoretical Calculations (AMTC 1)
    • Place of Presentation
      Nagoya, Japan
    • Related Report
      2008 Final Research Report
  • [Presentation] Cs-corrected STEM Studies of Ge Nanodots Grown on Slightly Oxidized Si(001) Surfaces2008

    • Author(s)
      N Tanaka, S-P Cho, A A Shklyaev, J Yamasaki, E Okunishi, M Ichikawa
    • Organizer
      Microscopy Society of America
    • Place of Presentation
      New Mexico, USA
    • Related Report
      2008 Annual Research Report
  • [Presentation] Studies of Ge Quantum Dots on Slightly Oxidized Si(111) Surfaces by Cs-corrected TEM/STEM2008

    • Author(s)
      N Tanaka, S-P Cho, A A Shklyaev, J Yamasaki, E Okunishi, M Ichikawa
    • Organizer
      The 1st International Symposium on Advanced Microscopy and Theoretical Calculations (AMTC 1)
    • Place of Presentation
      Nagoya, japan
    • Related Report
      2008 Annual Research Report
  • [Presentation] 極薄Si酸化膜を用いたSi(001)表面上のGeナノドットの微細構造および組成の評価2007

    • Author(s)
      趙星彪, Alexander A Shklyaev, 山崎順, 奥西栄治, 市川昌和, 田中信夫
    • Organizer
      日本物理学会第62回年次大会
    • Place of Presentation
      札幌 (北海道大)
    • Year and Date
      2007-09-23
    • Related Report
      2008 Final Research Report
  • [Presentation] 極薄Si酸化膜上でのGeナノドットの核形成・成長、および微細構造の評価2007

    • Author(s)
      趙星彪, 川野晋司, 田中信夫
    • Organizer
      日本顕微鏡学会第63回学術講演会
    • Place of Presentation
      新潟(新潟コンベンションセンター)
    • Year and Date
      2007-05-20
    • Related Report
      2008 Final Research Report
  • [Presentation] 極薄Si酸化膜上でのGeナノドットの核形成・成長、および微細構造の評価2007

    • Author(s)
      趙星彪, 川野晋司, 田中信夫
    • Organizer
      日本顕微鏡学会第63回学術講演会
    • Place of Presentation
      新潟コンベンションセンター
    • Year and Date
      2007-05-20
    • Related Report
      2007 Annual Research Report
  • [Presentation] In-situ monitoring of nucleation and evolution of Ge nanodots on faintly oxidized Si(111) surfaces November11-152007

    • Author(s)
      Sung-Pyo Cho, Shinji Kawano and Nobuo Tanaka
    • Organizer
      2007, ACSIN-9(9th International Conference on Atomically Controlled Surfaces, Interfaces and Nanostructures)
    • Place of Presentation
      Tokyo, Japan
    • Related Report
      2008 Final Research Report
  • [Presentation] Spherical aberration corrected STEM studies of Ge nanodots grown on Si(001) surfaces with an ultrathin SiO_2 coverage2007

    • Author(s)
      N. Tanaka, S.-P. Cho, A. A. Shklyaev J. Yamasaki, E. Okunishi and M. Ichikawa
    • Organizer
      ACSIN-9(9th International Conference on Atomically Controlled Surfaces, Interfaces and Nanostructures)
    • Place of Presentation
      Tokyo, Japan
    • Related Report
      2008 Final Research Report
  • [Remarks]

    • URL

      http://sirius.esi.nagoya-u.ac.jp/~tanakalab/

    • Related Report
      2008 Final Research Report

URL: 

Published: 2007-04-01   Modified: 2016-04-21  

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