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Study of Frequency-Change-Type High-Sensitivity Two-Axis Acceleration Sensor

Research Project

Project/Area Number 19560047
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Applied physics, general
Research InstitutionIshinomaki Senshu University

Principal Investigator

SUGAWARA Sumio  Ishinomaki Senshu University, 理工学部, 教授 (00007197)

Co-Investigator(Kenkyū-buntansha) KUDO Subaru  石巻専修大学, 理工学部, 教授 (20214968)
Project Period (FY) 2007 – 2009
Project Status Completed (Fiscal Year 2009)
Budget Amount *help
¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000)
Fiscal Year 2009: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
Fiscal Year 2008: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2007: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Keywords加速度センサ / 力センサ / 横振動子 / 軸力 / 有限要素法 / 周波数変化 / 2軸センサ / 折り曲げ支持棒 / 有限要素法解析 / 共振周波数 / カセンサ / 共振周波数変化
Research Abstract

The construction of a frequency-change-type two-axis acceleration sensor is proposed and is designed using the finite-element method. The analyzed relationship between the applied acceleration and the resonance frequency change becomes linear in this construction. Moreover, methods for realizing high sensitivity are proposed. Selecting the axis to apply the acceleration and using bent support bars are both effective methods to increase sensor sensitivity. The sensor characteristics are measured in the gravitational field. As a result, the analyzed characteristics of the sensor agreed with the experimental ones.

Report

(4 results)
  • 2009 Annual Research Report   Final Research Report ( PDF )
  • 2008 Annual Research Report
  • 2007 Annual Research Report
  • Research Products

    (21 results)

All 2009 2008 2007

All Journal Article (14 results) (of which Peer Reviewed: 8 results) Presentation (7 results)

  • [Journal Article] Finite Analysis of Sensitivity of Frequency-Change Force Sensor2009

    • Author(s)
      Sumio Sugawara, Masaki Yamakawa, Subaru Kudo
    • Journal Title

      Jpn. J. Appl. Phys. Vol.48

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] 周波数変化型単結晶シリコン加速度センサの傾斜角センサへの応用2009

    • Author(s)
      菅原澄夫
    • Journal Title

      月刊「化学工業」 Vol.60,No.9

      Pages: 45-49

    • Related Report
      2009 Final Research Report
  • [Journal Article] Finite Element Analysis of Sensitivity of Frequency-Change-Type Force Sensor2009

    • Author(s)
      Sumio Sugawara
    • Journal Title

      Jpn.J.Appl.Phys. Vol.48, No.7

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 周波数変化型単結晶シリコン加速度センサの傾斜角センサへの応用2009

    • Author(s)
      菅原澄夫
    • Journal Title

      月刊「化学工業」 Vol.60, No.9

      Pages: 45-49

    • Related Report
      2009 Annual Research Report
  • [Journal Article] 周波数変化型単結晶シリコン2軸加速度センサの高感度化に関する研究2008

    • Author(s)
      菅原澄夫
    • Journal Title

      超音波TECHNO Vol.20,No.3

      Pages: 64-66

    • Related Report
      2009 Final Research Report
  • [Journal Article] 周波数変化型単結晶シリコン加速度センサの傾斜角センサへの応用2008

    • Author(s)
      菅原澄夫
    • Journal Title

      超音波TECHNO Vol.20,No.4

      Pages: 74-76

    • Related Report
      2009 Final Research Report
  • [Journal Article] Application of Frequency-Change-Type Single-Crystal Silicon Acceleration Sensors to Inclination Angle Sensor2008

    • Author(s)
      Sumio Sugawara, Tokiharu Watanabe, Jiro Terada
    • Journal Title

      Jpn. J. Appl. Phys. Vol.47,No.5

      Pages: 4048-4051

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Theoretical Studies of Realizing High Sensitivity for Frequency-Chage-Type Single-Crystal Silicon Two-Axis Acceleration Sensor2008

    • Author(s)
      Sumio Sugawara, Jumpei Koike
    • Journal Title

      Jpn. J. Appl. Phys. Vol.47,No.8

      Pages: 6578-6582

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Application of Frequency-Change-Type Single-Crystal Silicon Acceleration Sensors to Inclination Angle Sensor2008

    • Author(s)
      Sumio Sugawara
    • Journal Title

      Jpn. J. Appl. Phys. Vol. 47, No. 5

      Pages: 4048-4051

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 周波数変化型単結晶シリコン2軸加速度センサの高感度化に関する研究2008

    • Author(s)
      菅原澄夫
    • Journal Title

      超音波TECHNO Vol. 20, No. 3

      Pages: 64-66

    • Related Report
      2008 Annual Research Report
  • [Journal Article] 周波数変化型単結晶シリコン加速度センサの傾斜角センサへの応用2008

    • Author(s)
      菅原澄夫
    • Journal Title

      超音波TECHNO Vol. 20, No. 4

      Pages: 74-76

    • Related Report
      2008 Annual Research Report
  • [Journal Article] Theoretical Studies of Realizing High Sensitivity for Frequency-Change-Type Single-Crystal Silicon Two-Axis Acceleration Sensor2008

    • Author(s)
      Sumio Sugawara
    • Journal Title

      Jpn. J. Appl. Phys. Vol. 47, No. 8

      Pages: 6578-6582

    • NAID

      40016211057

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Construction of Frequency-Change-Type Single-Crystal Silicon Two-Axis Acceleration Sensor2007

    • Author(s)
      Sumio Sugawara, Hiroyuki SUZUKI, Takashi Saito
    • Journal Title

      Jpn. J. Appl. Phys. Vol.46,No.7B

      Pages: 4652-4655

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Construction of Frequency-Change-Type Single-Crystal Silicon Two-AxisAcceleration Sensor2007

    • Author(s)
      Sumio Sugawara
    • Journal Title

      Jpn.J.Appl.Phys. Vol.46,No.7B

      Pages: 4652-4655

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Presentation] Experimental Study of Sensitivity of Frequency-Change-Type Two-Axis Acceleration Sensor2009

    • Author(s)
      Sumio Sugawara
    • Organizer
      Symp.on Ultrason. Electron.
    • Place of Presentation
      Kyoto
    • Year and Date
      2009-11-20
    • Related Report
      2009 Annual Research Report
  • [Presentation] Experimental Study of Sensitivity of Frequency-Change-Type Two-Axis Acceleration Sensor2009

    • Author(s)
      Sumio Sugawara, Yu Kajiwara
    • Organizer
      Symp. on Ultrason. Electron.
    • Place of Presentation
      Kyoto
    • Related Report
      2009 Final Research Report
  • [Presentation] A Study on Sensitivity of Frequency-Change-Type Force Sensor2008

    • Author(s)
      Sumio Sugawara, Masaki Yamakawa
    • Organizer
      Proc. of Symp. on Ultrason. Electron.
    • Related Report
      2009 Final Research Report
  • [Presentation] Application of Frequency-Change-Type Single-Crystal Silicon Acceleration Sensors to Inclination Angle Sensor2007

    • Author(s)
      Sumio Sugawara, Tokiharu Watanabe
    • Organizer
      Symp. on Ultrason. Electron.
    • Place of Presentation
      Tsukuba
    • Related Report
      2009 Final Research Report
  • [Presentation] Realization of High Sensitivity of Frequency-Chang-Type Single-Crystal Silicon Two-Axis Acceleration Sensor2007

    • Author(s)
      Sumio Sugawara, Jumpei Koike
    • Organizer
      Symp. on Ultrason. Electron
    • Place of Presentation
      Tsukuba
    • Related Report
      2009 Final Research Report
  • [Presentation] Application of Frequency-Change-Type Single-Crystal SiliconAcceleration Sensors to Inclination Angle Sensor2007

    • Author(s)
      Sumio Sugawara
    • Organizer
      Symp.on Ultrason.Electron
    • Place of Presentation
      つくば国際会議場
    • Related Report
      2007 Annual Research Report
  • [Presentation] Realization of High SeHsitivity of Frequency-Chang-Type Single-Crystal Silicon Two-Axis Acceleration Sensor2007

    • Author(s)
      Sumio Sugawara
    • Organizer
      Symp.on Ultrason.Electron
    • Place of Presentation
      つくば国際会議場
    • Related Report
      2007 Annual Research Report

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Published: 2007-04-01   Modified: 2016-04-21  

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