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Intellectual advancement on loose abrasive polishing for super mass production of crystal substrate

Research Project

Project/Area Number 19560107
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Production engineering/Processing studies
Research InstitutionSaitama University

Principal Investigator

HORIO Kenichiro  Saitama University, 大学院・理工学研究科, 教授 (60201761)

Project Period (FY) 2007 – 2008
Project Status Completed (Fiscal Year 2008)
Budget Amount *help
¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000)
Fiscal Year 2008: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2007: ¥3,120,000 (Direct Cost: ¥2,400,000、Indirect Cost: ¥720,000)
Keywords精密研磨 / 両面研磨 / 精密部品加工 / ベベル形状 / 修正輪型研磨 / オスカー式研磨
Research Abstract

超量産仕上げ加工を実現するための遊離砥粒研磨技術について検討した. 両面研磨加工技術については新規開発したスケルトン型加工装置により加工状況の把握, およびそれに基づく加工メカニズムの考察が可能となった. 表面形状加工技術については, オスカー型と修正輪型それぞれについて現象観察に基づく考察, および試料保持方法などの各種技術開発により数100倍の高能率化が図れる接触型研磨技術が適用可能であることを示した.

Report

(3 results)
  • 2008 Annual Research Report   Final Research Report ( PDF )
  • 2007 Annual Research Report
  • Research Products

    (4 results)

All 2008

All Journal Article (2 results) (of which Peer Reviewed: 2 results) Presentation (2 results)

  • [Journal Article] New Approaches of Bevel Shape Generation for Quartz Crystal2008

    • Author(s)
      Kenichiro Horio, Junichi Kaneko, Tsugio Yamazaki
    • Journal Title

      Proceedings of American Society for Precision Engineering

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] New Approaches of Bevel Shape Generation for Quartz Crystal2008

    • Author(s)
      Kenichiro Horio
    • Journal Title

      Proceedings of American Society for Precision Engineering (CD-ROM)

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Presentation] 可視化研磨機による加工面観察(第2報)-溝付き定盤の場合-2008

    • Author(s)
      山崎次男, 堀尾健一郎, 松原巧季, 金子順一
    • Organizer
      精密工学会2008年度秋季学術講演会
    • Year and Date
      2008-09-18
    • Related Report
      2008 Final Research Report
  • [Presentation] 可視化研磨機による加工面観察(第2報)-溝付き定盤の場合-2008

    • Author(s)
      堀尾健一郎
    • Organizer
      精密工学会2008年度秋季学術講演会
    • Place of Presentation
      東北大学(仙台市)
    • Year and Date
      2008-09-18
    • Related Report
      2008 Annual Research Report

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Published: 2007-04-01   Modified: 2016-04-21  

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