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Development of LED in wavelength region required improvement of efficiency using ZnTe based materials

Research Project

Project/Area Number 19560318
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Electronic materials/Electric materials
Research InstitutionSaga University

Principal Investigator

NISHIO Mitsuhiro  Saga University, 理工学部, 教授 (60109220)

Co-Investigator(Kenkyū-buntansha) OGAWA Hiroshi  佐賀大学, 名誉教授 (10039290)
KAKU Kishin  佐賀大学, 理工学部, 教授 (60243995)
TANAKA Tooru  佐賀大学, シンクロトロン応用研究センター, 助教 (20325591)
Project Period (FY) 2007 – 2008
Project Status Completed (Fiscal Year 2008)
Budget Amount *help
¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000)
Fiscal Year 2008: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
Fiscal Year 2007: ¥2,730,000 (Direct Cost: ¥2,100,000、Indirect Cost: ¥630,000)
KeywordsZnTe系材料 / LED / 高効率欠損領域 / 高効率欠損波長領域
Research Abstract

ZnTeをベースとした材料系(Zn_(1-x)Mg_xTe)を用いて高効率欠損波長領域におけるLEDの性能向上を実現した。エピタキシャル成長用基板の品質向上やエピタキシャル成長膜の平坦化、高品質化が実現できた。特にド-ピング量、アニ-ル処理条件の最適化により、高キャリア密度や発光効率向上が達成できた。更に、A1濃度制御技術の開発や光取り出し構造の最適化などが果され、ダブルヘテロ構造を用いたLEDの作製により、基本特性が掌握できた。

Report

(3 results)
  • 2008 Annual Research Report   Final Research Report ( PDF )
  • 2007 Annual Research Report
  • Research Products

    (56 results)

All 2009 2008 2007 Other

All Journal Article (18 results) (of which Peer Reviewed: 18 results) Presentation (28 results) Book (5 results) Remarks (3 results) Patent(Industrial Property Rights) (2 results)

  • [Journal Article] ZnTe based light emittin g diodes fabricated by solid-state diffusion of Al through an Al oxide layer2009

    • Author(s)
      Tooru Tanaka, Mitsuhiro Nishio, Qixin Guo, and Hiroshi Ogawa
    • Journal Title

      Japanese Journ al of Applied Physics 48

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] Fabri cation of a ZnTe light emitting diode by Al t hermal diffusion into a p-ZnTe epitaxial layer on a p-ZnMgTe substrate2009

    • Author(s)
      Tooru Tanaka, Katsuhiko Saito, Mitsuhiro Nishio, Qixin Guo, and Hiroshi Ogawa
    • Journal Title

      Journal of Materia ls Science : Materials in Electronics 20

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] Post-annealing effect upon electrical a nd optical properties of MOVPE grown P-dop ed ZnTe homoepitaxial layers2009

    • Author(s)
      Katsuhiko Saito, Kouji Yamaguchi, Tooru T anaka, Mitsuhiro Nishio, Qixin Guo, Hiroshi Ogawa
    • Journal Title

      Journal of Mat erials Science : Materials in Electronics 20

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] Fabrication of ZnTe Lig ht Emitting Diode by Al Thermal Diffusion t hrough Surface Oxidation Layer2009

    • Author(s)
      Tooru Tanaka, Mitsuhiro Nishio, Qixin Guo, and Hiroshi Ogawa
    • Journal Title

      Japanese Jou rnal of Applied Physics 47

      Pages: 8408-8410

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] ZnTe based light emitting diodes fabricated by solid-state diffusion of Al through an Al oxide layer2009

    • Author(s)
      Tooru Tanaka, Mitsuhiro Nishio, Qixin Guo, Hiroshi Ogawa
    • Journal Title

      Japanese Journal of Applied Physics 48

    • NAID

      40016464754

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Fabrication of a ZnTe light emitting diode by Al thermal diffusion into a p-ZnTe epitaxial layer on a p-ZnMgTe substrate2009

    • Author(s)
      Tooru Tanaka, Katsuhiko Saito, Mitsuhiro Nishio, Qixin Guo, Hiroshi Ogawa
    • Journal Title

      Journal of Materials Science : Materials in Electronics 20

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Post-annealing effect upon electrical and optical properties of MOVPE grown P-doped ZnTe homoepitaxial layers2009

    • Author(s)
      Katsuhiko Saito, Kouji Yamaguchi, Tooru Tanaka, Mitsuhiro Nishio, Qixin Guo, Hiroshi Ogawa
    • Journal Title

      Journal of Materials Science : Materials in Electronics 20

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Fabrication of ZnTe Light Emitting Diode by Al Thermal Diffusion through Surface Oxidation Layer2009

    • Author(s)
      Tooru Tanaka, Mitsuhiro Nishio, Qixin Guo, Hiroshi Ogawa
    • Journal Title

      Japanese Journal of Applied Physics 47

      Pages: 8408-8410

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Fabri cation of a ZnTe light emitting diode by Al t hermal diffusion into a p-ZnTe epitaxial layer on a p-ZnMgTe substrate2008

    • Author(s)
      Tooru Tanaka, Katsuhiko Saito, Mitsuhiro Nishio, Qixin Guo, and Hiroshi Ogawa
    • Journal Title

      Journal of Materia ls Science : Materials in Electronics 20

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] Post-annealing effect upon electrical a nd optical properties of MOVPE grown P-dop ed ZnTe homoepitaxial layers2008

    • Author(s)
      Katsuhiko Saito, Kouji Yamaguchi, Tooru T anaka, Mitsuhiro Nishio, Qixin Guo, Hiroshi Ogawa
    • Journal Title

      Journal of Mat erials Science : Materials in Electronics 20

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] Improvement of MOVPE grown ZnTe : P layer s by annealing treatment2008

    • Author(s)
      K. Saito, K. Fujimoto, K. Yamaguchi, T. T anaka, M. Nishio, Q. X. Guo, and H. Ogawa
    • Journal Title

      Journal of Physics 100

      Pages: 42019-1

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] Growth of undo ped ZnMgTe layers by metalorganic vapour p hase epitaxy2008

    • Author(s)
      K. Saito, D. Kouno, T. Tanaka, M. Nishio, Q. X. Guo, and H. Ogawa
    • Journal Title

      Journal oPhysics 100

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] Epitaxial growth of ZnMgTe with a wide composition range on ZnTe substrate by molecular beam epitaxy2008

    • Author(s)
      Tooru Tanaka, Katsuhiko Saito, Mitsuhiro Nishio, Qixin Guo, Hiroshi Ogawa
    • Journal Title

      Journal of Physics 100

      Pages: 42018-1

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] Fabrication of a ZnTe light emitting diode by Al thermal diffusion into a p-ZnTeepitaxial layer on a p-ZnMgTe substrate2008

    • Author(s)
      Tooru Tanaka, Katsuhiko Saito, Mitsuhiro Niahio, Qixin Guo, and Hiroshi Ogawa
    • Journal Title

      Journal of Materials Science:Materials in Electronics (in press)

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Post-annealing effect upon electrical and optical properties of MOVPE grown P-doped ZnTe homoepitaxial layers2008

    • Author(s)
      Katsuhiko Saito, Kouji Yamaguchi, Tooru Tanaka, Mitsuhiro Nishio, Qixin Guo, Hiroshi Ogawa
    • Journal Title

      Journal of Materials Science: Materials in Electronics (in press)

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Improvement of MOVPE grown ZnTe:P layers by annealing treatment2008

    • Author(s)
      K.Saito, K.Fujimoto, K.Yamaguchi, T.Tanaka, M, Nishio, Q.X.Guo, and H.Ogawa
    • Journal Title

      Journal of Physics (in press)

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Growth of undoped ZnMgTe layers by metalorganic vapour phase epitaxy2008

    • Author(s)
      K.Saito, D.Kouno, T.Tanaka, M.Nishio, Q.X.Guo, and H.Ogawa
    • Journal Title

      Journal oPhysics (in press)

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Epitaxial growth of ZnMgTe with a wide composition range on ZnTe substrate by molecular beam epitaxy2008

    • Author(s)
      Tooru Tanaka, Katsuhiko Saito, Mitsuhiro Nishio, Qixin Guo, Hiroshi Ogawa
    • Journal Title

      Journal of Physics (in press)

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Presentation] Al熱拡散法によるZnTe緑色LEDの作製と評価2009

    • Author(s)
      田中徹, 伊藤博昭, 吉本拓史, 郭其新, 西尾光弘, 小川博司
    • Organizer
      2009年春季第56回応用物理学関係連合講演会
    • Place of Presentation
      筑波大学
    • Year and Date
      2009-03-30
    • Related Report
      2008 Annual Research Report 2008 Final Research Report
  • [Presentation] ブリッジマン法で作製した高品質PドープZnMgTe結晶のフォトルミネッセンス特性2008

    • Author(s)
      島尾聡, 田中昌彦, 斉藤勝彦, 田中徹,郭其新, 中畑秀利, 西尾光弘
    • Organizer
      平成20年度応用物理学会九州支部学術講演会
    • Place of Presentation
      宮崎大学
    • Year and Date
      2008-11-30
    • Related Report
      2008 Annual Research Report 2008 Final Research Report
  • [Presentation] MOVPE法によるGaAs基板上ZnTeエピタキシャル膜の作製と評価2008

    • Author(s)
      末安祐介, 中尾勇貴, 角口芳樹, 田中徹,西尾光弘, 郭其新
    • Organizer
      平成20年度応用物理学会九州支部学術講演会
    • Place of Presentation
      宮崎大学
    • Year and Date
      2008-11-30
    • Related Report
      2008 Annual Research Report 2008 Final Research Report
  • [Presentation] MOVPE法によるサファイア基板上のZnTeエピタキシャル成長膜の構造特性2008

    • Author(s)
      中尾勇貴, 末安祐介, 角口芳樹, 灘真輝,田中徹, 西尾光弘, 郭其新
    • Organizer
      平成20年度応用物理学会九州支部学術講演会
    • Place of Presentation
      宮崎大学
    • Year and Date
      2008-11-30
    • Related Report
      2008 Annual Research Report 2008 Final Research Report
  • [Presentation] サファイア基板上ZnTeエピタキシャル成長膜のアニール効果2008

    • Author(s)
      角口芳樹, 末安祐介, 中尾勇貴, 田中徹,西尾光弘, 郭其新
    • Place of Presentation
      宮崎大学
    • Year and Date
      2008-11-30
    • Related Report
      2008 Final Research Report
  • [Presentation] PドープZn1-xMgxTeエピタキシャル膜の電気的光学的性質に及ぼすアニーリング効果2008

    • Author(s)
      井上祐輔, 野中直樹, 斉藤勝彦, 田中徹,郭其新, 西尾光弘
    • Place of Presentation
      宮崎大学
    • Year and Date
      2008-11-30
    • Related Report
      2008 Final Research Report
  • [Presentation] サファイア基板上ZnTeエピタキシャル成長膜のアニール効果2008

    • Author(s)
      角口芳樹, 末安祐介, 中尾勇貴, 田中徹, 西尾光弘, 郭其新
    • Organizer
      平成20年度応用物理学会九州支部学術講演会
    • Place of Presentation
      宮崎大学
    • Year and Date
      2008-11-30
    • Related Report
      2008 Annual Research Report
  • [Presentation] PドープZnl-xMgxTeエピタキシャル膜の電気的光学的性質に及ぼすアニーリング効果2008

    • Author(s)
      井上祐輔, 野中直樹, 斉藤勝彦, 田中徹, 郭其新, 西尾光弘
    • Organizer
      平成20年度応用物理学会九州支部学術講演会
    • Place of Presentation
      宮崎大学
    • Year and Date
      2008-11-30
    • Related Report
      2008 Annual Research Report
  • [Presentation] Al酸化膜を用いたAl熱拡散法によるZnTe-LEDの作製2008

    • Author(s)
      伊藤博昭・田中徹・郭其新・西尾光弘
    • Organizer
      平成20年第61回電気関係学会九州支部連合大会
    • Place of Presentation
      大分大学
    • Year and Date
      2008-09-24
    • Related Report
      2008 Annual Research Report 2008 Final Research Report
  • [Presentation] 有機金属気相成長法によるZn1-xMgxTeへのドーピング2008

    • Author(s)
      野中直樹・井上祐輔・斉藤勝彦・田中徹・郭其新・西尾光弘
    • Organizer
      平成20年第61回電気関係学会九州支部連合大会
    • Place of Presentation
      大分大学
    • Year and Date
      2008-09-24
    • Related Report
      2008 Final Research Report
  • [Presentation] 有機金属気相成長法によるZnl-xMgxTeへのドーピング2008

    • Author(s)
      野中直樹, 井上祐輔, 斉藤勝彦, 田中 徹, 郭 其新, 西尾光弘
    • Organizer
      平成20年第61回電気関係学会九州支部連合大会
    • Place of Presentation
      大分大学
    • Year and Date
      2008-09-24
    • Related Report
      2008 Annual Research Report
  • [Presentation] Influence of precursor transport rate upon the optical and electrical properties of P-ZnTe homoepilayer grown by MOVPE system2008

    • Author(s)
      Xiuxun Han,Yuuki Kuramitsu, Tooru Tanaka, Qixin Guo, Mitsushiro Nishio
    • Organizer
      The 4th Vacuum and Surface Sciences Conference of Asia and Australia (VASSCAA-4)
    • Place of Presentation
      Matsue
    • Related Report
      2008 Annual Research Report 2008 Final Research Report
  • [Presentation] 常圧MOVPE法により作製された燐ドープZnTe膜の品質と基板温度の関係2008

    • Author(s)
      倉滿悠紀, 山口浩司, 韓修訓, 斉藤勝彦, 田中徹, 郭其新, 西尾光弘, 小川博司
    • Organizer
      2008年春季第55回応用物理学関係連合講演会
    • Place of Presentation
      千葉
    • Related Report
      2008 Final Research Report
  • [Presentation] Al酸化膜を介したAl熱拡散により作製したZnTe LEDの評価2008

    • Author(s)
      田中徹, 吉本拓史, 郭其新, 西尾光弘, 小川博司
    • Organizer
      2008年春季第55回応用物理学関係連合講演会
    • Place of Presentation
      千葉
    • Related Report
      2008 Final Research Report
  • [Presentation] MBE法によるZn1-xMgxTe混晶成長と量子井戸構造の作製2008

    • Author(s)
      吉本拓史, 伊藤博昭, 田中徹, 郭其新, 西尾光弘, 小川博司
    • Organizer
      2008年春季第55回応用物理学関係連合講演会
    • Place of Presentation
      千葉
    • Related Report
      2008 Final Research Report
  • [Presentation] 有機金属気相成長法により作製された燐ドープZnTeエピ層の表面モフォロジの改善2007

    • Author(s)
      倉満悠紀, 山口浩司, 斉藤勝彦, 田中徹,西尾光弘, 郭其新, 小川博司
    • Organizer
      平成19年度応用物理学会九州支部学術講演会
    • Place of Presentation
      福岡
    • Related Report
      2008 Final Research Report
  • [Presentation] 分子線エピタキシー法によるZnTe基板上へのZn1-xMgxTeエピタキシャル成長2007

    • Author(s)
      吉本拓史, 田中徹, 西尾光弘, 郭其新, 小川博司
    • Organizer
      平成19年度応用物理学会九州支部学術講演会
    • Place of Presentation
      福岡
    • Related Report
      2008 Final Research Report
  • [Presentation] PドープZnTeエピ膜のフォトルミネッセンス及び電気的特性に及ぼすアニール効果2007

    • Author(s)
      倉満悠紀, 斉藤勝彦, 田中徹, 郭其新,西尾光弘, 小川博司
    • Organizer
      平成19年度応用物理学会九州支部学術講演会
    • Place of Presentation
      福岡
    • Related Report
      2008 Final Research Report
  • [Presentation] MOVPE法によるアンドープZnMgTeエピ膜のPL特性2007

    • Author(s)
      河野大輔, 斉藤勝彦, 田中徹, 郭其新, 西尾光弘, 小川博司
    • Organizer
      平成19年度応用物理学会九州支部学術講演会
    • Place of Presentation
      福岡
    • Related Report
      2008 Final Research Report
  • [Presentation] 垂直ブリッジマン法による大型ZnMgTeバルク成長の試み2007

    • Author(s)
      島尾聡, 田口幸樹, 斉藤勝彦, 田中徹, 郭其新, 中畑秀利, 西尾光弘, 小川博司
    • Organizer
      平成19年度応用物理学会九州支部学術講演会
    • Place of Presentation
      福岡
    • Related Report
      2008 Final Research Report
  • [Presentation] MOVPE法によるサファイア基板上のZnTeエピタキシャル成長膜の構造特性2007

    • Author(s)
      中尾勇貴, 末安祐介, 白石徹, 久米祐介, 郭其新, 田中徹, 西尾光弘, 小川博司
    • Organizer
      平成19年度応用物理学会九州支部学術講演会
    • Place of Presentation
      福岡
    • Related Report
      2008 Final Research Report
  • [Presentation] MOVPE法によるGaAs基板上ZnTeエピタキシャル膜の作製と評価2007

    • Author(s)
      末安祐介, 中尾勇貴, 白石徹, 久米祐介, 田中徹, 郭其新, 西尾光弘, 小川博司
    • Organizer
      平成19年度応用物理学会九州支部学術講演会
    • Place of Presentation
      福岡
    • Related Report
      2008 Final Research Report
  • [Presentation] Surface morphology of ZnTe : P(100) homoepitaxially grown by horizontal MOVPE technique2007

    • Author(s)
      K. Yamaguchi, Y. Kuramitsu, K. Saito, T. Tanaka, M. Nishio, Q. Guo, and H. Ogawa
    • Organizer
      The 6th International Conference on Thin Film Physics and Application
    • Place of Presentation
      Shanghai
    • Related Report
      2008 Final Research Report
  • [Presentation] Post-annealing effect upon electrical and optical properties of MOVPE grown P-doped ZnTe homoepitaxial layers2007

    • Author(s)
      Katsuhiko Saito, Kouji Yamaguchi, Tooru Tanaka, Mitsuhiro Nishio, Qixin Guo and Hiroshi Ogawa
    • Organizer
      International Conference on Optical, Optoelectronic and Photonic Materials and Applications (ICOOPMA)
    • Place of Presentation
      London
    • Related Report
      2008 Final Research Report
  • [Presentation] Fabrication of ZnTe light emitting diode on p-ZnMgTe substrate by Al thermal diffusion, International Conference on Optical(P077)2007

    • Author(s)
      Tooru Tanaka, Katsuhiko Saito, Mitsuhiro Nishio, Qixin Guo, and Hiroshi Ogawa
    • Organizer
      Optoelectronic and Photonic Materials and Applications (ICOOPMA)
    • Place of Presentation
      London
    • Related Report
      2008 Final Research Report
  • [Presentation] Growth of undoped ZnMgTe layers by metalorganic vapour phase epitaxy(EMPP2-123)2007

    • Author(s)
      Katsuhiko Saito, Daisuke Kouno, Tooru Tanaka, Mitsuhiro Nishio, Qixin Guo, Hiroshi Ogawa
    • Organizer
      17th International Vacuum Congress
    • Place of Presentation
      Stockholm
    • Related Report
      2008 Final Research Report
  • [Presentation] Improvement of MOVPE grown ZnTe : P layers by annealing treatment(EMPP2-99)2007

    • Author(s)
      Katsuhiko Saito, Kenji Fujimoto, Kouji Yamaguchi, Tooru Tanaka, Mitsuhiro Nishio, Qixin Guo, Hiroshi Ogawa
    • Organizer
      17th International Vacuum Congress
    • Place of Presentation
      Stockholm
    • Related Report
      2008 Final Research Report
  • [Presentation] Epitaxial growth of ZnMgTe with a wide composition range on ZnTe substrate by molecular beam epitaxy(EMPP2-97)2007

    • Author(s)
      Tooru Tanaka, Katsuhiko Saito, Mitsuhiro Nishio, Qixin Guo, and Hiroshi Ogawa
    • Organizer
      17th International Vacuum Congress
    • Place of Presentation
      Stockholm
    • Related Report
      2008 Final Research Report
  • [Book] 月刊機能材料2009

    • Author(s)
      田中徹, 郭其新, 西尾光弘, 小川博司(分担執筆)
    • Total Pages
      87
    • Publisher
      シーエムシー出版
    • Related Report
      2008 Final Research Report
  • [Book] 第2編第7章第3節ZnTe基板・応用デバイス, 2009化合物半導体技術大全2009

    • Author(s)
      田中徹, 西尾光弘, 郭其新, 小川博司(分担執筆)
    • Total Pages
      324
    • Publisher
      株式会社電子ジャーナル
    • Related Report
      2008 Final Research Report
  • [Book] Recent Progress in ZnTe-based green LED, Handbook of Light Emitting and Schottky Diode Research2009

    • Author(s)
      Tooru Tanaka, Mitsuhiro Nishio, Hiroshi Ogawa
    • Publisher
      Nova Science Publishers, Inc. New York
    • Related Report
      2008 Final Research Report
  • [Book] 月刊機能材料2009

    • Author(s)
      田中徹, 他(分担執筆)
    • Total Pages
      87
    • Publisher
      シーエムシー出版
    • Related Report
      2008 Annual Research Report
  • [Book] 2009化合物半導体技術大全2009

    • Author(s)
      田中徹, 他(分担執筆)
    • Total Pages
      324
    • Publisher
      株式会社電子ジャーナル
    • Related Report
      2008 Annual Research Report
  • [Remarks] 研究内容又は研究成果に関するwebページ

    • URL

      http://www.sc.ec.saga-u.ac.jp/

    • Related Report
      2008 Final Research Report
  • [Remarks]

    • URL

      http://www.sc.ec.saga-u.ac.jp/

    • Related Report
      2008 Annual Research Report
  • [Remarks]

    • URL

      http://www.sc.ec.saga-u.ac.jp/

    • Related Report
      2007 Annual Research Report
  • [Patent(Industrial Property Rights)] 半導体装置及びその製造方法2007

    • Inventor(s)
      田中徹, 小川博司, 西尾光弘, 齋藤勝彦
    • Industrial Property Rights Holder
      佐賀大学
    • Industrial Property Number
      2007-256110
    • Filing Date
      2007-09-28
    • Related Report
      2008 Final Research Report
  • [Patent(Industrial Property Rights)] 半導体装置及びその製造方法2007

    • Inventor(s)
      田中 徹, 小川 博司, 西尾 光弘, 齋藤 勝彦
    • Industrial Property Rights Holder
      佐賀大学
    • Industrial Property Number
      2007-256110
    • Filing Date
      2007-09-28
    • Related Report
      2007 Annual Research Report

URL: 

Published: 2007-04-01   Modified: 2016-04-21  

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