Study on Novel Fabrication Method for Organic Thin Films using Supercritcal Fluid

• Project/Area Number: 19560320
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Electronic materials/Electric materials
• Research Institution: Kogakuin University
• Principal Investigator: SAKAMOTO Tetsuo Kogakuin University, 工学部, 准教授 (20313067)
• Project Period (FY): 2007 – 2008
• Project Status: Completed (Fiscal Year 2008)
• Budget Amount: ¥4,160,000 (Direct Cost: ¥3,200,000、Indirect Cost: ¥960,000); Fiscal Year 2008: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000); Fiscal Year 2007: ¥2,600,000 (Direct Cost: ¥2,000,000、Indirect Cost: ¥600,000)
• Keywords: 電気 / 電子材料 / 結晶成長 / 電気・電子材料 / 超臨界流体 / 有機薄膜 / 発光素子 / 電子・電気材料

Research Abstract

有機薄膜を作製する新しい方法として、超臨界流体を用いた析出法と急減圧法を検討した。析出法では微結晶ならびに薄膜状の析出物が得られた。一方、急減圧法では微結晶しか得られなかったが、マスクを用いたパターニングが可能であることを示した。従来の方法と比べ、膜質は劣るものの、一貫したドライプロセスで有機薄膜が作製できる点が特徴である

Research Products

• [Presentation] Fabrication of Organic Thin Films and Particles using Supercritical Fluids (2008)
  • Author(s): Tetsuo SAKAMAOTO, Itaru YAMAGUCHI and Kenji OISHI
  • Organizer: 4th Vacuum and Surface Sciences Conference of Asia and Australia
  • Place of Presentation: 松江市
  • Year and Date: 2008-10-30
• [Presentation] Organic Thin-Film Fabrication by means of Electrospray Deposition (2008)
  • Author(s): Itaru YAMAGUCHI, Yuuki WATANABE and Tetsuo SAKAMOTO
  • Organizer: 4th Vacuum and Surface Sciences Conference of Asia and Australia
  • Place of Presentation: 松江市
  • Year and Date: 2008-10-30
• [Presentation] Fabrication of Organic Thin Films and Particles using Supercritical Fluids (2008)
  • Author(s): Tetsuo Sakamoto
  • Organizer: 4th Vacuum and Surface Sciences Conference of Asia and Australia (VASSCAA-4)
  • Place of Presentation: 松江市
  • Year and Date: 2008-10-29
• [Presentation] Organic Thin-Film Fabrication by means of Electrospray Deposition (2008)
  • Author(s): Itaru Yamaguchi
  • Organizer: 4th Vacuum and Surface Sciences Conference of Asia and Australia (VASSCAA-4)
  • Place of Presentation: 松江市
  • Year and Date: 2008-10-29
• [Remarks]
  • URL: http://www.ns.kogakuin.ac.jp/~wwc1045/