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Study on fabrication techniques of high performance thin films for future ultrasonic and/or photonic devices

Research Project

Project/Area Number 19560322
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Electronic materials/Electric materials
Research InstitutionKanagawa Institute of Technology

Principal Investigator

UNO Takehiko  Kanagawa Institute of Technology, 工学部, 教授 (50257408)

Co-Investigator(Kenkyū-buntansha) NOGE Satoru  沼津工業高等専門学校, 電気電子工学科, 准教授 (10221483)
Project Period (FY) 2007 – 2009
Project Status Completed (Fiscal Year 2009)
Budget Amount *help
¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000)
Fiscal Year 2009: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000)
Fiscal Year 2008: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
Fiscal Year 2007: ¥2,730,000 (Direct Cost: ¥2,100,000、Indirect Cost: ¥630,000)
Keywords機能性薄膜 / ルミネセンス / 誘導放出 / シリカガラス / 光増幅 / 圧電性 / 結晶薄膜 / ニオブ酸リチウム / 高温センサ / 圧電性薄膜 / 薄膜結晶 / 電子線発光 / 温度センサ / ニオブ酸リチウ / 結晶成長 / 圧電定数 / 分極 / シリカ
Research Abstract

(1) Luminescence characteristics from silica glass thin films containing periodic doped impurities have been investigated. Capability of the films for optical amplification in short wavelength band around 400nm was clarified. Piezoelectricity similar to quartz crystal was observed in the films with periodic structure, however it almost disappeared after one year. (2) Growth technique of single crystal films of oxides on silica substrate was proposed. Signs of epitaxial growth of oxides on silica were observed. However, reproducibility was not so high. A temperature sensing technique during the crystallization process was developed to improve it.

Report

(4 results)
  • 2009 Annual Research Report   Final Research Report ( PDF )
  • 2008 Annual Research Report
  • 2007 Annual Research Report
  • Research Products

    (48 results)

All 2010 2009 2008 2007

All Journal Article (6 results) (of which Peer Reviewed: 6 results) Presentation (40 results) Book (2 results)

  • [Journal Article] Observation of Stimulated Emission in Short Wavelength Band from Silica-based Superstructure Films2009

    • Author(s)
      Takehiko Uno, Satoru Noge, Kei Kasahara
    • Journal Title

      I EICE Teansactions on Electronics Vol.E92-C

      Pages: 1454-1459

    • NAID

      10026823856

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Obversation of Stimulated Emission in Short Wavelength Band from Silica-based Superstructure Films2009

    • Author(s)
      Takehiko Uno, Satoru Noge, Kei Kasahara
    • Journal Title

      IEICE Teansactions on Electronics(電子情報通信学会英文論文誌) E92-C

      Pages: 1454-1459

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] New Fabrication Technique of LiNbO_3 Thin Film on a Silica Substrate2008

    • Author(s)
      Takehiko Uno, Satoru Noge
    • Journal Title

      Ferroelectrics Vol.367

      Pages: 73-81

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] New Fabrication Technique of LiNbO_3 Thin Film on a Silica Substrate2008

    • Author(s)
      Takehiko Uno, Satoru Noge
    • Journal Title

      Ferroelectrics 367

      Pages: 73-81

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 分極処理した4価金属ドープシリカ薄膜における圧電性と可視発光2007

    • Author(s)
      宇野武彦、野毛悟、藤塚俊
    • Journal Title

      電気学会論文誌C 127巻

      Pages: 1147-1154

    • NAID

      10019522136

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] 分極処理した4価金属ドープシリカ薄膜における圧電性と可視発光2007

    • Author(s)
      宇野武彦、野毛悟、藤塚俊
    • Journal Title

      電気学会論文誌C 127

      Pages: 1147-1154

    • NAID

      10019522136

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Presentation] シリカ薄膜における短波長発光と誘導放出の観測2010

    • Author(s)
      笠原慧、宇野武彦、野毛悟
    • Organizer
      第57回応用物理学関係連合講演会
    • Place of Presentation
      平塚
    • Year and Date
      2010-03-18
    • Related Report
      2009 Final Research Report
  • [Presentation] シリカ薄膜における短波長発光と誘導放出の観測2010

    • Author(s)
      笠原慧、宇野武彦、野毛悟
    • Organizer
      第57回応用物理学関係連合講演会
    • Place of Presentation
      東海大学
    • Year and Date
      2010-03-18
    • Related Report
      2009 Annual Research Report
  • [Presentation] 高温相水晶における無電極ワイヤレス温度センサの検討2010

    • Author(s)
      田代博之、宇野武彦
    • Organizer
      圧電材料・デバイスシンポジウム
    • Place of Presentation
      仙台
    • Year and Date
      2010-02-02
    • Related Report
      2009 Final Research Report
  • [Presentation] 高温相水晶における無電極ワイヤレス温度センサの検討2010

    • Author(s)
      田代博之、宇野武彦
    • Organizer
      圧電材料・デバイスシンポジウム
    • Place of Presentation
      東北大学
    • Year and Date
      2010-02-02
    • Related Report
      2009 Annual Research Report
  • [Presentation] SAW Prpaagation Characteristics of Buried Type Optical-waveguides on LiNbO_3 Substrates2009

    • Author(s)
      Kei Kasahara, Takehiko Uno, Satoru Noge
    • Organizer
      The 30th Symposium on Ultrasonic Electronics
    • Place of Presentation
      京都
    • Year and Date
      2009-11-19
    • Related Report
      2009 Final Research Report
  • [Presentation] High Temperature Sensor Using b-Phase Quartz2009

    • Author(s)
      Hiroyuki Tashiro、Takehiko Uno、Satoru Noge
    • Organizer
      The 30th Symposium on Ultrasonic Electronics
    • Place of Presentation
      京都
    • Year and Date
      2009-11-19
    • Related Report
      2009 Final Research Report
  • [Presentation] High Temperature Sensor Using β-phase Quartz2009

    • Author(s)
      Hiroyuki Tashiro, Takehiko Uno, Satoru Noge
    • Organizer
      The 30th Symposium on Ultrasonic Electronics
    • Place of Presentation
      同志社大学
    • Year and Date
      2009-11-19
    • Related Report
      2009 Annual Research Report
  • [Presentation] SAW Prpaagation Characteristics of Buried Type Optical-waveguides on LiNbO_3 Substrates2009

    • Author(s)
      Kei Kasahara, Ttakehiko Uno, Satoru Noge
    • Organizer
      The 30th Symposium on Ultrasonic Electronics
    • Place of Presentation
      同志社大学
    • Year and Date
      2009-11-19
    • Related Report
      2009 Annual Research Report
  • [Presentation] 超構造薄膜光導波路の形成と特性2009

    • Author(s)
      笠原慧、宇野武彦、野毛悟
    • Organizer
      電子部品・材料研究会(電子情報通信学会)
    • Place of Presentation
      弘前
    • Year and Date
      2009-08-10
    • Related Report
      2009 Final Research Report
  • [Presentation] 超構造薄膜光導波路の形成と特性2009

    • Author(s)
      笠原慧、宇野武彦、野毛悟
    • Organizer
      電子部品・材料研究会(電子情報通信学会)
    • Place of Presentation
      弘前大学
    • Year and Date
      2009-08-10
    • Related Report
      2009 Annual Research Report
  • [Presentation] β相水晶の圧電特性と高温センサへの応用について2009

    • Author(s)
      田代博之、宇野武彦、野毛悟
    • Organizer
      電子部品・材料研究会(電子情報通信学会)
    • Place of Presentation
      弘前大学
    • Year and Date
      2009-08-10
    • Related Report
      2009 Annual Research Report
  • [Presentation] β相水晶の圧電特性と高温センサへの応用について2009

    • Author(s)
      田代博之、宇野武彦、野毛悟
    • Organizer
      日本学術振興会弾性波デバイス第150委員会研究会
    • Place of Presentation
      東京
    • Year and Date
      2009-07-31
    • Related Report
      2009 Final Research Report
  • [Presentation] β相水晶の圧電特性と高温センサへの応用について2009

    • Author(s)
      田代博之、宇野武彦、野毛悟
    • Organizer
      日本学術振興会弾性波デバイス第150委員会 研究会
    • Place of Presentation
      弘済会館(東京)
    • Year and Date
      2009-07-31
    • Related Report
      2009 Annual Research Report
  • [Presentation] 高温相水晶の特性と応用2009

    • Author(s)
      田代博之、宇野武彦、野毛悟
    • Organizer
      EMシンポジウム(電気学会)
    • Place of Presentation
      東京理科大 森戸記念館
    • Year and Date
      2009-05-15
    • Related Report
      2009 Annual Research Report
  • [Presentation] LN基板上への超構造薄膜の形成と光学特性2009

    • Author(s)
      笠原慧、宇野武彦、野毛悟
    • Organizer
      EMシンポジウム(電気学会)
    • Place of Presentation
      東京理科大 森戸記念館
    • Year and Date
      2009-05-15
    • Related Report
      2009 Annual Research Report
  • [Presentation] 4価元素をドープした石英薄膜の可視光スペクトル2009

    • Author(s)
      野毛悟, 宇野武彦, 安井寛治
    • Organizer
      応用物理学関係連合講演会
    • Place of Presentation
      筑波大学
    • Year and Date
      2009-03-31
    • Related Report
      2008 Annual Research Report
  • [Presentation] β水晶による高温用温度センサの検討2009

    • Author(s)
      田代博之、宇野武彦、野毛悟
    • Organizer
      電子情報通信学会総合大会
    • Place of Presentation
      松山
    • Year and Date
      2009-03-20
    • Related Report
      2009 Final Research Report
  • [Presentation] β水晶による高温用温度センサの検討2009

    • Author(s)
      田代博之, 宇野武彦, 野毛悟
    • Organizer
      電子情報通信学会総合大会
    • Place of Presentation
      愛媛大学
    • Year and Date
      2009-03-20
    • Related Report
      2008 Annual Research Report
  • [Presentation] シリカ超構造薄膜における電子線発光2009

    • Author(s)
      笠原慧、宇野武彦、野毛悟
    • Organizer
      電子情報通信学会総合大会
    • Place of Presentation
      松山
    • Year and Date
      2009-03-18
    • Related Report
      2009 Final Research Report
  • [Presentation] シリカ超構造薄膜における電子線発光2009

    • Author(s)
      笠原慧, 宇野武彦, 野毛悟
    • Organizer
      電子情報通信学会総合大会
    • Place of Presentation
      愛媛大学
    • Year and Date
      2009-03-18
    • Related Report
      2008 Annual Research Report
  • [Presentation] 4価元素をドープした石英ガラス薄膜の可視光スペクトル2009

    • Author(s)
      野毛悟, 宇野武彦
    • Organizer
      電子情報通信学会総合大会
    • Place of Presentation
      愛媛大学
    • Year and Date
      2009-03-18
    • Related Report
      2008 Annual Research Report
  • [Presentation] 高温相水晶によるワイヤレス温度センサの基礎検討2009

    • Author(s)
      田代博之, 宇野武彦, 野毛悟
    • Organizer
      圧電材料・デバイスシンポジウム
    • Place of Presentation
      東北大学
    • Year and Date
      2009-02-03
    • Related Report
      2008 Annual Research Report
  • [Presentation] Fabrication of Magneto-optic Thin Films on LiTaO3 and/or LiNbO3 substrates by Contact epitaxy2008

    • Author(s)
      Hiroyuki Tashiro, Satoru Noge, Takehiko Uno
    • Organizer
      The 29th Symposium on Ultrasonic Electronic
    • Place of Presentation
      仙台
    • Year and Date
      2008-11-11
    • Related Report
      2009 Final Research Report
  • [Presentation] Fabrication of Magneto-optic Thin Films on LiTaO_3 and/or LiNbO_3 Substrates by Contact Epitaxy2008

    • Author(s)
      Hiroyuki Tashiro, Satoru Noge, Takehiko Uno
    • Organizer
      The 29^<th> Symposium on Ultrasonic Electronics
    • Place of Presentation
      仙台シルバーセンター
    • Year and Date
      2008-11-11
    • Related Report
      2008 Annual Research Report
  • [Presentation] Shear Mode Type Solidly Mounted Piezoelectric Resonator Using a LiTaO_3 Transducer2008

    • Author(s)
      Takehiko Uno, Kei Kasahara, Hiroyuki Tashiro
    • Organizer
      The 29^<th> Symposium on Ultrasonic Electronics
    • Place of Presentation
      仙台シルバーセンター
    • Year and Date
      2008-11-11
    • Related Report
      2008 Annual Research Report
  • [Presentation] LiNbO_3基板に形成したシリカ超構造薄膜の光学特性2008

    • Author(s)
      笠原慧、宇野武彦
    • Organizer
      電子情報通信学会エレクトロニクスソサイエティサマーミーティング
    • Place of Presentation
      東京
    • Year and Date
      2008-06-27
    • Related Report
      2009 Final Research Report
  • [Presentation] LiNbO3基板に形成したシリカ超構造薄膜の高額特性2008

    • Author(s)
      笠原 慧, 宇野武彦
    • Organizer
      電子情報通信学会ェレクトロニクスソサイエティサマーミーティング
    • Place of Presentation
      機械振興会館(東京)
    • Year and Date
      2008-06-27
    • Related Report
      2008 Annual Research Report
  • [Presentation] 酸化物薄膜のシリカ基板上への形成について-包囲制御の可能性-(招待講演)2008

    • Author(s)
      宇野武彦
    • Organizer
      第37回EMシンポジウム(電気学会)
    • Place of Presentation
      東京理科大森戸記念館
    • Year and Date
      2008-05-16
    • Related Report
      2008 Annual Research Report
  • [Presentation] 複数の4価元素をドープしたSiO_2薄膜の可視発光(No.28a-ZN-8)2008

    • Author(s)
      野毛悟、宇野武彦
    • Organizer
      第55回応用物理学関係連合講演会
    • Place of Presentation
      日本大学理工学部
    • Year and Date
      2008-03-28
    • Related Report
      2007 Annual Research Report
  • [Presentation] LN薄膜基板上シリカ超構造薄膜の基礎検討(No.E-5)2008

    • Author(s)
      宇野武彦、野毛悟、笠原慧
    • Organizer
      圧電材料・デバイスシンポジウム
    • Place of Presentation
      東北大学(仙台)
    • Year and Date
      2008-01-25
    • Related Report
      2007 Annual Research Report
  • [Presentation] LN薄膜における方位制御の検討2008

    • Author(s)
      宇野武彦、野毛悟
    • Organizer
      圧電材料・デバイスシンポジウム(No.A-1)
    • Place of Presentation
      仙台
    • Year and Date
      2008-01-24
    • Related Report
      2009 Final Research Report
  • [Presentation] LN薄膜における方位制御の検討(No.A-1招待講演)2008

    • Author(s)
      宇野武彦、野毛悟
    • Organizer
      圧電材料・デバイスシンポジウム08
    • Place of Presentation
      東北大学(仙台)
    • Year and Date
      2008-01-24
    • Related Report
      2007 Annual Research Report
  • [Presentation] Silica Based Superstructure Films on Piezoelectric Substrates for Light Amplification Use2007

    • Author(s)
      Takahiko Uno, Satoru Noge, Kei Kasahara
    • Organizer
      第28回超音波エレクトロニクスシンポジウム(No.2-04P-24)
    • Place of Presentation
      つくば
    • Year and Date
      2007-11-15
    • Related Report
      2009 Final Research Report
  • [Presentation] Control of LiNbO_3 Thin Film Orientation by Crystal Contact Epitaxy2007

    • Author(s)
      Takahiko Uno, Satoru Noge, Takehiko Adachi
    • Organizer
      第28回超音波エレクトロニクスシンポジウム(No.2-01P-06)
    • Place of Presentation
      つくば
    • Year and Date
      2007-11-15
    • Related Report
      2009 Final Research Report
  • [Presentation] Control of LiNbO_3 Thin Film Orientation by Crystal Contact Epitaxy(No.2-01P-06)2007

    • Author(s)
      Takahiko Uno, Satoru Noge and Takehiko Adachi
    • Organizer
      超音波エレクトロニクスの基礎と応用に関するシンポジウム
    • Place of Presentation
      つくば国際会議場
    • Year and Date
      2007-11-15
    • Related Report
      2007 Annual Research Report
  • [Presentation] Silica Based Superstructure Films on Piezoelectric Substrates for Light Amplification Use(No.2-04P-24)2007

    • Author(s)
      Takahiko Uno, Satoru Noge and Kei Kasahara
    • Organizer
      第28回超音波エレクトロニクスの基礎と応用に関するシンポジウム
    • Place of Presentation
      つくば国際会議場
    • Year and Date
      2007-11-15
    • Related Report
      2007 Annual Research Report
  • [Presentation] New Fabrication Technique of LiNbO3 Thin Film on Silica Substrate(No.P153)2007

    • Author(s)
      Takahiko Uno, Satoru Noge
    • Organizer
      11th European Meeting on Ferroelectricity
    • Place of Presentation
      Bled(スロベニア)
    • Year and Date
      2007-09-04
    • Related Report
      2007 Annual Research Report
  • [Presentation] シリカ系超構造薄膜による可視発光と光増幅2007

    • Author(s)
      宇野武彦、野毛悟
    • Organizer
      電子情報通信学会エレクトロニクスソサイエティサマーミーティング
    • Place of Presentation
      機械振興会館(東京)
    • Year and Date
      2007-06-29
    • Related Report
      2007 Annual Research Report
  • [Presentation] Fabrication Technique of Single Crystal Thin Films on Silica Substrate2007

    • Author(s)
      Takahiko Uno, Satoru Noge
    • Organizer
      2007 International Symposium on Organic and Inorganic Electronic Materials and Related Nanotechnologies(No.IB-17I)
    • Place of Presentation
      長野
    • Year and Date
      2007-06-20
    • Related Report
      2009 Final Research Report
  • [Presentation] Fabrication Technique of Single Crystal Thin Films on Silica Substrate(No.IB-071,Invited)2007

    • Author(s)
      Takahiko Uno, Satoru Noge
    • Organizer
      2007 International Symposium on Organic and Inorganic Electronic Materials and Related Nanotec hnologies(EM-NANO 2007)
    • Place of Presentation
      信州大学(長野)
    • Year and Date
      2007-06-20
    • Related Report
      2007 Annual Research Report
  • [Book] 圧電材料の高性能化と先端応用技術2008

    • Author(s)
      監修・中村僖良、(著者 宇野武彦, 他分担執筆)
    • Total Pages
      508
    • Publisher
      サイエンス&テクノロジー株式会社
    • Related Report
      2009 Final Research Report
  • [Book] 圧電材料の高性能化と先端応用技術(179-187を担当)2008

    • Author(s)
      監修・中村僖良、(著者 宇野武彦, 他)
    • Total Pages
      508
    • Publisher
      サイエンス&テクノロジー株式会社
    • Related Report
      2007 Annual Research Report

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Published: 2007-04-01   Modified: 2016-04-21  

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