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Preparation of nanoparticle magnetic recording media by gas flow sputtering

Research Project

Project/Area Number 19560333
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Electron device/Electronic equipment
Research InstitutionUtsunomiya University

Principal Investigator

ISHII Kiyoshi  Utsunomiya University, 大学院・工学研究科, 教授 (30134258)

Co-Investigator(Kenkyū-buntansha) SAKUMA Hioshi  宇都宮大学, 大学院・工学研究科, 助教 (40375522)
SAITOU Yoshifumi  宇都宮大学, 大学院・工学研究科, 助教 (70251080)
Project Period (FY) 2007 – 2008
Project Status Completed (Fiscal Year 2008)
Budget Amount *help
¥4,680,000 (Direct Cost: ¥3,600,000、Indirect Cost: ¥1,080,000)
Fiscal Year 2008: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Fiscal Year 2007: ¥2,990,000 (Direct Cost: ¥2,300,000、Indirect Cost: ¥690,000)
Keywords磁気記録媒体 / 垂直磁気記録媒体 / スパッタ膜 / ガスフロースパッタ法 / 鉄白金 / ガスフロースパヅタ法 / 低温規則化 / Co-Pt / Fe-Pt
Research Abstract

本研究では、宇都宮大学独自のガスフロースパッタ法を用いることにより、次世代の超高密度ハードディスク磁気記録媒体の実現を目指して、ナノ磁性粒子(次世代では太さが10nm、次次世代では5nm程度の縦長粒子または球形粒子)を敷き詰めた構造のナノ粒子薄膜の開発を目指した。その結果、幅約10 nmの柱状の粒子からなるCo-Ptナノ粒子構造薄膜作製に成功した。さらに、より大きな結晶磁気異方性を有するL10構造FePtについて同様な粒子構造を実現することを目指した。通常のスパッタ法では基板を加熱しないとL10構造の薄膜は得られないが、ガスロースパッタ法では基板加熱のない状態においても、規則度は低いがL10構造に規則化した薄膜が成長することを見出し、ナノ粒子構造の形成の可能性を明らかにした。

Report

(3 results)
  • 2008 Annual Research Report   Final Research Report ( PDF )
  • 2007 Annual Research Report
  • Research Products

    (34 results)

All 2009 2008 2007

All Journal Article (15 results) (of which Peer Reviewed: 15 results) Presentation (18 results) Book (1 results)

  • [Journal Article] Low-temperature Ordering in FePt Films Deposited by Gas Flow Sputtering2009

    • Author(s)
      H. Sakuma, H. Kawano, K. Ishii, T. Taniyama
    • Journal Title

      Journal of the Magnetics Society of Japan vol. 33

      Pages: 167-170

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] Fabrication of Fe nanoparticles with sizes ranging from 30 to 170nm by gas flow sputtering2009

    • Author(s)
      H. Aoshima, H. Suzuki, H. Sakuma, K. Ishii
    • Journal Title

      Journal of Applied Physics vol. 105

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] Gas Flow Sputtering : Versatile Process for The Growth of Nanopillars, Nanoparticles, and Epitaxial Thin Films2009

    • Author(s)
      H. Sakuma, K. Ishii
    • Journal Title

      Journal of Magnetism and Magnetic Materials vol. 321

      Pages: 872-875

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] Magnetic Properties of Co-Pt Nanopillars as Function of Lattice Parameter and Morphology of Pt Underlayer2009

    • Author(s)
      H. Sakuma, K. Nishiguchi, S. Mifuji, K. Ishii
    • Journal Title

      Transactions of the Materials Research Society of Japan vol. 34

      Pages: 133-136

    • NAID

      130005003940

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] Estimation of optimum ion energy for the reduction of resistivity in bias sputtering of ITO thin films2008

    • Author(s)
      K. Ishii, Y. Saitou, K. Furutani, H. Sakuma, Y. Ikeda
    • Journal Title

      IEICE TRANSACTIONS on Electronics vol. E91-C

      Pages: 1653-1657

    • NAID

      10026819869

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] TEM Analysis of Hcp-Co Films Deposited by Gas Flow Sputtering2008

    • Author(s)
      H. Sakuma, H. Tai, K. Ishii
    • Journal Title

      IEEJ Transactions on Electrical and Electronic Engineering vol. 3

      Pages: 375-378

    • NAID

      10025773050

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] Epitaxial Growth of Fe_3O_4 on GaAs by Gas Flow Sputtering2008

    • Author(s)
      H. Sakuma, S. Hiyama, T. Kashiwakura, K. Ishii
    • Journal Title

      Transactions of the Materials Research Society of Japan vol. 33

      Pages: 1305-1308

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] Preparation of Fe-N Nanoparticles by Gas Flow Sputtering2008

    • Author(s)
      H. Aoshima, H. Sakuma, K. Ishii
    • Journal Title

      Japanese Journal of Applied Physics vol. 47

      Pages: 780-783

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] Preparation and characterization of Fe-N nanoparticles by gas flow sputtering2008

    • Author(s)
      Hikaru Aoshima 他
    • Journal Title

      Japanese Journal of Applied Physics 47

      Pages: 780-783

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Epitaxial growth of Fe304 on GaAs by gas flow sputtering2008

    • Author(s)
      Hiroshi Sakuma 他
    • Journal Title

      Transactions of the Materials Research Society of Japan 33

      Pages: 1305-1307

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] TEM Analysis of Hcp-Co Films Deposited by Gas Flow Sputtering2008

    • Author(s)
      Hiroshi Sakuma 他
    • Journal Title

      IEEJ Transactions on Electrical and Electronic Engineering 3

      Pages: 375-378

    • NAID

      10025773050

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Estimation of optimum ion energy for the reduction of resistivity in bias sputterin of ITO thin films2008

    • Author(s)
      Kiyoshi Ishii 他
    • Journal Title

      IEICE Transactions on Electronics E91-C

      Pages: 1653-1657

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Preparation of Fe-N nanoparticles by gas flow sputtering2008

    • Author(s)
      H. Aoshima, 他
    • Journal Title

      Japanese Journal of Applied Physics 47

      Pages: 780-783

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Growth of Magnetite Epitaxial Thin Films by Gas Flow Sputtering and Characterization by FMR2007

    • Author(s)
      H. Sakuma, S. Sato, R. Gomimoto, S. Hiyama, K. Ishii
    • Journal Title

      IEEJ Transactions on Electrical and Electronic Engineering vol. 4

      Pages: 1931-4973

    • NAID

      10025772241

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] Growth of Magnetite Epitaxial Thin Films by Gas Flow Sputtering and Characterization by FMR2007

    • Author(s)
      H. Sakuma, 他
    • Journal Title

      IEEJ Transactions on Electrical and Electronic Engineering 2

      Pages: 431-435

    • NAID

      10025772241

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Presentation] Modification of Lattice Parameter and Morphology of Pt Under-Layer and Effects on Magnetic Properties of Co-Pt Nanopillars2008

    • Author(s)
      H. Sakuma, K. Ishii
    • Organizer
      The IUMRS International Conference in Asia
    • Place of Presentation
      名古屋国際会議場
    • Year and Date
      2008-12-12
    • Related Report
      2008 Final Research Report
  • [Presentation] Fabrication of Fe Nanoparticles by Gas Flow Sputtering Process2008

    • Author(s)
      H. Suzuki, K. Ishii
    • Organizer
      The IUMRS International Conference in Asia
    • Place of Presentation
      名古屋国際会議場
    • Year and Date
      2008-12-12
    • Related Report
      2008 Final Research Report
  • [Presentation] Fabrication and Ferromagnetic Resonance Analysis of Fe Nanoparticle Chains2008

    • Author(s)
      Y. Satou, K. Ishii
    • Organizer
      The IUMRS International Conference in Asia 2008
    • Place of Presentation
      名古屋国際会議場
    • Year and Date
      2008-12-12
    • Related Report
      2008 Final Research Report
  • [Presentation] Fabrication and Ferromagnetic Resonance Analysis of Fe Nanoparticle Chains2008

    • Author(s)
      Yoko Satou 他
    • Organizer
      The IUMRS International Conference in Asia 2008
    • Place of Presentation
      名古屋国際会議場
    • Year and Date
      2008-12-12
    • Related Report
      2008 Annual Research Report
  • [Presentation] Fabrication of Fe Nanoparticles by Gas Flow Sputtering Process2008

    • Author(s)
      Hironobu Suzuki 他
    • Organizer
      The IUMRS International Conference in Asia 2008
    • Place of Presentation
      名古屋国際会議場
    • Year and Date
      2008-12-12
    • Related Report
      2008 Annual Research Report
  • [Presentation] Modification of Lattice Parameter and Morphology of Pt Und er-Layer and Effects on Magnetic Properties of Co-Pt Nanopillars2008

    • Author(s)
      Hiroshi Sakuma 他
    • Organizer
      The IUMRS International Conference in Asia 2008
    • Place of Presentation
      名古屋国際会議場
    • Year and Date
      2008-12-12
    • Related Report
      2008 Annual Research Report
  • [Presentation] Fabrication of Fe nanoparticles with sizes ranging from 30nm to 170nm by gas flow sputtering2008

    • Author(s)
      H. Aoshima, K. Ishii
    • Organizer
      53rd Annual Conference on Magnetism and Magnetic Materials
    • Place of Presentation
      オースチン、米国
    • Year and Date
      2008-11-13
    • Related Report
      2008 Final Research Report
  • [Presentation] Fabrication of Fe nanoparticles with sizes ranging from 30 nm to 170 nm by gas flow sputtering2008

    • Author(s)
      Hikaru Aoshima 他
    • Organizer
      53rd Annual Conference on Magnetism and Magnetic Materials
    • Place of Presentation
      オースチン、米国
    • Year and Date
      2008-11-13
    • Related Report
      2008 Annual Research Report
  • [Presentation] Fabrication of ferromagnetic Co-doped TiO2 films by gas flow sputtering2008

    • Author(s)
      Hiroshi Sakuma 他
    • Organizer
      "Frontiers in Functional Optics, " Japan Tai wan Bilateral Science & Technology Symposium
    • Place of Presentation
      宇都宮大学
    • Year and Date
      2008-11-11
    • Related Report
      2008 Annual Research Report
  • [Presentation] ガスフロースパッタ法によるFePt薄膜の作製2008

    • Author(s)
      河野仁志, 石井清
    • Organizer
      第32回日本磁気学会学術講演会
    • Place of Presentation
      東北学院大学
    • Year and Date
      2008-09-12
    • Related Report
      2008 Annual Research Report 2008 Final Research Report
  • [Presentation] Gas flow sputtering : a versatile process for the growth of nanoparticles, nanopillars, and epitaxial thin films2008

    • Author(s)
      H. Sakuma, K. Ishii
    • Organizer
      Moscow International Symposium on Magnetism
    • Place of Presentation
      Moscow State University
    • Year and Date
      2008-06-23
    • Related Report
      2008 Final Research Report
  • [Presentation] Gas flow sputtering: a versatile process for the growth of nanoparticles, nanopillars, and epitaxial thin films2008

    • Author(s)
      Hiroshi Sakuma 他
    • Organizer
      Moscow International Symposium on Magnetism
    • Place of Presentation
      Moscow State University
    • Year and Date
      2008-06-23
    • Related Report
      2008 Annual Research Report
  • [Presentation] TEM analysis of hcp-Co films deposited by gas flow sputtering2008

    • Author(s)
      H. Sakuma, K. Ishii
    • Organizer
      Moscow International Symposium on Magnetism
    • Place of Presentation
      琉球大学
    • Year and Date
      2008-02-11
    • Related Report
      2008 Final Research Report
  • [Presentation] TEM analysis of hcp-Co films deposited by gas flow sputtering2008

    • Author(s)
      Hiroshi Sakuma 他
    • Organizer
      International Workshop on Nano-structured Materials & Magnetics
    • Place of Presentation
      琉球大学
    • Year and Date
      2008-02-11
    • Related Report
      2008 Annual Research Report
  • [Presentation] TEM Analysis of hcp-Co Films Deposited by Gas Flow Sputtering2008

    • Author(s)
      H. Sakuma, 他
    • Organizer
      International Workshop on Nano-structured Materials & Magnetics
    • Place of Presentation
      琉球大学
    • Year and Date
      2008-02-11
    • Related Report
      2007 Annual Research Report
  • [Presentation] ガスフロースパッタプロセスにおけるFeナノ粒子の成長と堆積2007

    • Author(s)
      小林貴志, 他
    • Organizer
      第18回日本MRS学術シンポジウム
    • Place of Presentation
      日本大学駿河大キャンパス
    • Year and Date
      2007-12-08
    • Related Report
      2007 Annual Research Report
  • [Presentation] Effect of nanostructure of Pt under-layer on magnetic properties of Co-Pt nanopillars2007

    • Author(s)
      H. Sakuma, 他
    • Organizer
      The 2007 International Symposium on Organic and Inorganic Electronic Materials and Related Nanotechnologies
    • Place of Presentation
      メルパルク長野
    • Year and Date
      2007-06-22
    • Related Report
      2007 Annual Research Report
  • [Presentation] Preparation of Fe-N nanoparticles by gas flow sputtering2007

    • Author(s)
      H. Aoshima, 他
    • Organizer
      The 2007 International Symposium on Organic and Inorganic Electronic Materials and Related Nanotechnologies
    • Place of Presentation
      メルパルク長野
    • Year and Date
      2007-06-22
    • Related Report
      2007 Annual Research Report
  • [Book] スパッタ実務Q&A集 (金原粲, 小島啓安, 菊池直人, 中野武雄, 岡田修監修)2009

    • Author(s)
      石井清, 佐久間洋志
    • Publisher
      技術情報協会
    • Related Report
      2008 Final Research Report

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Published: 2007-04-01   Modified: 2016-04-21  

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