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Chemical short-range order in radiation-induced amorphous SiC

Research Project

Project/Area Number 19560664
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Physical properties of metals
Research InstitutionOsaka University

Principal Investigator

ISHIMARU Manabu  Osaka University, 産業科学研究所, 准教授 (00264086)

Co-Investigator(Kenkyū-buntansha) HIRATA Akihiko  大阪大学, 産業科学研究所, 助教 (90350488)
NAITO Muneyuki  大阪大学, 産業科学研究所, 助教 (10397721)
Project Period (FY) 2007 – 2008
Project Status Completed (Fiscal Year 2008)
Budget Amount *help
¥4,680,000 (Direct Cost: ¥3,600,000、Indirect Cost: ¥1,080,000)
Fiscal Year 2008: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
Fiscal Year 2007: ¥2,730,000 (Direct Cost: ¥2,100,000、Indirect Cost: ¥630,000)
Keywords解析・評価 / アモルファス / 透過電子顕微鏡 / 炭化ケイ素 / 非晶質 / 動径分布解析 / 構造緩和 / スエリング
Research Abstract

照射誘起非晶質炭化ケイ素(SiC)の構造および構造緩和過程を先端的電子顕微鏡技術により調べた。非晶質SiCは第1隣接においてSi-C異種原子対に加え、結晶には存在しないC-C、Si-Si同種原子対を有することが明らかとなった。熱処理に伴い異種原子対は増加するのに対し同種原子対は減少し、構造緩和により化学的短範囲規則性が変化することが確認された。Si-Si原子対はC-C原子対よりも構造緩和により早く消失し、この同種原子対間の消滅速度の違いにより非晶質SiCの体積は大きく変化することが示唆された

Report

(3 results)
  • 2008 Annual Research Report   Final Research Report ( PDF )
  • 2007 Annual Research Report
  • Research Products

    (30 results)

All 2009 2008 2007

All Journal Article (10 results) (of which Peer Reviewed: 3 results) Presentation (20 results)

  • [Journal Article] Direct observations of thermally induced structural changes in amorphous silicon carbide2008

    • Author(s)
      M. Ishimaru, A. Hirata, M. Naito, I.-T. Bae, Y. Zhang, and W. J. Weber
    • Journal Title

      J.Appl. Phys 104

    • Related Report
      2008 Final Research Report
  • [Journal Article] Structural relaxation in amorphous SiC studied by in situ transmission electron microscopy2008

    • Author(s)
      M. Ishimaru, A. Hirata, M. Naito, I.-T. Bae, Y. Zhang, and W. J. Weber
    • Journal Title

      Proc. 9^<th> Asia-Pacific Microscopy Conf

      Pages: 708-709

    • Related Report
      2008 Final Research Report
  • [Journal Article] Electron irradiation-induced phase transformation in α-FeSi2008

    • Author(s)
      M. Naito, M. Ishimaru, J. A. Valdez, and K. E. Sickafus
    • Journal Title

      J. Appl. Phys 104

    • Related Report
      2008 Final Research Report
  • [Journal Article] Ionization-induced effects in amorphous apatite at elevated temperatures2008

    • Author(s)
      I.-T. Bae, Y. Zhang, W. J. Weber, M. Ishimaru, Y. Hirotsu, and M. Higuchi,
    • Journal Title

      J. Mater. Res 23

      Pages: 962-967

    • Related Report
      2008 Final Research Report
  • [Journal Article] emperature dependence of electron-beam induced effects in amorphous apatite2008

    • Author(s)
      I.-T. Bae, Y. Zhang, W. J. Weber, M. Ishimaru, Y. Hirotsu, and M. Higuchi,
    • Journal Title

      Nucl. Instrum. Meth 266

      Pages: 3037-3042

    • Related Report
      2008 Final Research Report
  • [Journal Article] Direct observations of thermally induced structural changes in amorphous silicon carbide2008

    • Author(s)
      M. Ishimaru, et al.
    • Journal Title

      Journal of Applied Physics 104

      Pages: 33503-33503

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Structural relaxation in amorphous SiC studied by in situ transmission electron microscopy2008

    • Author(s)
      M. Ishimaru, et al.
    • Journal Title

      Proceedings of 9th Asia-Pacific Microscopy Conference

      Pages: 708-709

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Effect of ionization rates on dynamic recovery processes during electron-beam irradiation of 6H-SiC2007

    • Author(s)
      I.-T. Bae, W. J. Weber, M. Ishimaru, and Y. Hirotsu
    • Journal Title

      Appl. Phys 90

    • Related Report
      2008 Final Research Report
  • [Journal Article] Post-annealing recrystallization and damage recovery process in Fe ion implanted Si2007

    • Author(s)
      M. Naito, A. Hirata, M. Ishimaru, and Y. Hirotsu
    • Journal Title

      Nucl. Instrum. Meth B257

      Pages: 340-343

    • Related Report
      2008 Final Research Report
  • [Journal Article] Effect of ionization rates on dynamic recovery processes during electron-beam irradiati on of 6H-SiC2007

    • Author(s)
      I. -T. Bae, W. J. Weber, M. Ishimaru, Y.Hirotsu
    • Journal Title

      Applied Physics Letters 90

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Presentation] Thermally induced structural changes of amorphous SiC2009

    • Author(s)
      M. Ishimaru
    • Organizer
      16^<th> Int'l Conf. Microscopy of Semiconductig Materials
    • Place of Presentation
      Oxford, UK
    • Related Report
      2008 Final Research Report
  • [Presentation] Structural relaxation in amorphous SiC studied by in situ transmission electron microscopy2008

    • Author(s)
      M. Ishimaru, A. Hirata, M. Naito, I.-T. Bae, Y. Zhang, W. J. Weber
    • Organizer
      9^<th> Asia-Pacific Microscopy Conf
    • Place of Presentation
      Jeju, Korea
    • Related Report
      2008 Final Research Report
  • [Presentation] Structural characterization of metastable iron silicides formed in the Fe ion implanted Si2008

    • Author(s)
      M. Naito and M. Ishimaru
    • Organizer
      9^<th> Asia-Pacific Microscopy Conf
    • Place of Presentation
      Jeju, Korea
    • Related Report
      2008 Final Research Report
  • [Presentation] Local structure analysis of metastable iron silicides formed in the Fe ion implanted Si2008

    • Author(s)
      M. Naito and M. Ishimaru
    • Organizer
      7th Polish-Japan Joint Seminar on Micro and Nano Analysis
    • Place of Presentation
      Warsaw, Poland
    • Related Report
      2008 Final Research Report
  • [Presentation] Formation of metastable iron silicides in the Fe implanted Si2008

    • Author(s)
      M. Naito and M. Ishimaru
    • Organizer
      16^<th> Int'l Conf. Ion Beam Modification of Materials
    • Place of Presentation
      Dresden, Germany
    • Related Report
      2008 Final Research Report
  • [Presentation] Structural changes of amorphous SiC during post-implantation thermal annealing (invited)2008

    • Author(s)
      M. Ishimaru, A. Hirata, M. Naito, I.-T. Bae, Y. Zhang, and W. J. Weber
    • Organizer
      16^<th> Int'l Conf. Ion Beam Modification of Materials
    • Place of Presentation
      Dresden, Germany
    • Related Report
      2008 Final Research Report
  • [Presentation] 「透過電子顕微鏡「その場」観察による非晶質SiCにおける構造緩和過程の解析」2008

    • Author(s)
      石丸学、平田秋彦、内藤宗幸、弘津禎彦
    • Organizer
      日本顕微鏡学会第64回学術講演会
    • Place of Presentation
      京都
    • Related Report
      2008 Final Research Report
  • [Presentation] 照射誘起構造変化の透過電子顕微鏡法による解析(受賞講演)」2008

    • Author(s)
      石丸学
    • Organizer
      日本金属学会平成20年度春期大会
    • Place of Presentation
      世田谷
    • Related Report
      2008 Final Research Report
  • [Presentation] 非晶質SiCにおける構造緩和過程の透過電子顕微鏡「その場」観察2008

    • Author(s)
      石丸学、平田秋彦、弘津禎彦
    • Organizer
      日本金属学会平成20年度春期大会
    • Place of Presentation
      世田谷
    • Related Report
      2008 Final Research Report
  • [Presentation] Structural changes of amorphous SiC during post-implantation thermal annealing (invited)2008

    • Author(s)
      M. Ishimaru, et al.
    • Organizer
      16th Int'l Conf. on Ion Beam Modification of Materials
    • Place of Presentation
      Dresden, Germany
    • Related Report
      2008 Annual Research Report
  • [Presentation] Structural relaxation in amorphous SiC studied by in situ transmission electron microscopy2008

    • Author(s)
      M. Ishimaru, et al.
    • Organizer
      9th Asia-Pacific Microscopy Conference
    • Place of Presentation
      Jeju, Korea
    • Related Report
      2008 Annual Research Report
  • [Presentation] 透過電子顕微鏡 「その場」 観察による非晶質SiCにおける構造緩和過程の解析2008

    • Author(s)
      石丸 学, 平田秋彦, 内藤宗幸, 弘津禎彦
    • Organizer
      日本顕微鏡学会第64回学術講演会
    • Place of Presentation
      京都
    • Related Report
      2008 Annual Research Report
  • [Presentation] 照射誘起構造変化の透過電子顕微鏡法による解析(受賞講演)2008

    • Author(s)
      石丸 学
    • Organizer
      日本金属学会平成20年度春期大会
    • Place of Presentation
      世田谷、東京
    • Related Report
      2007 Annual Research Report
  • [Presentation] 非晶質SiCにおける構造緩和過程の透過電子顕微鏡「その場」観察2008

    • Author(s)
      石丸 学、平田秋彦、弘津禎彦
    • Organizer
      日本金属学会平成20年度春期大会
    • Place of Presentation
      世田谷、東京
    • Related Report
      2007 Annual Research Report
  • [Presentation] Si 単結晶基板上への鉄シリサイド形成過程の透過電子顕微鏡観察(招待)2007

    • Author(s)
      石丸学、元鍾漢, 内藤宗幸, 弘津禎彦
    • Organizer
      日本顕微鏡学会第51回シンポジウムー顕微鏡学の今とこれから~ー
    • Place of Presentation
      徳島
    • Related Report
      2008 Final Research Report
  • [Presentation] Structural characterization of ion-beam-induced amorphous silicon carbide by advanced electron microscopy (invited)2007

    • Author(s)
      M. Ishimaru
    • Organizer
      15th Int'l Conf. Surface Modification of Materials by Ion Beams
    • Place of Presentation
      Mumbai, India
    • Related Report
      2008 Final Research Report
  • [Presentation] Fe イオン注Si に形成されたFe-Si 準安定相の局所構造解析2007

    • Author(s)
      内藤宗幸、石丸学、弘津禎彦
    • Organizer
      第68回応用物理学会学術講演会
    • Place of Presentation
      札幌
    • Related Report
      2008 Final Research Report
  • [Presentation] Temperature dependence of electron-beam-induced effects in amorphous apatite2007

    • Author(s)
      I.-T. Bae. Y. Zhang, W. J. Weber, M. Ishimaru, Y. Hirotsu, and M. Higuchi
    • Organizer
      14th Int'l Conf. Radiation Effects in Insulators
    • Place of Presentation
      Caen, France
    • Related Report
      2008 Final Research Report
  • [Presentation] Feイオン注入Siに形成された非晶質Fe-Siの再結晶化過程2007

    • Author(s)
      内藤宗幸、平田秋彦、石丸学、弘津禎彦
    • Organizer
      日本電子顕微鏡学会第63回学術講演会
    • Place of Presentation
      新潟
    • Related Report
      2008 Final Research Report
  • [Presentation] Structural characterization of ion-beam-induced amorphous silicon carbide by advanced electron microscopy(invited)2007

    • Author(s)
      M. Ishimaru
    • Organizer
      15th Int'l Conf. Surface Modification of Materials by Ion Beams
    • Place of Presentation
      Mumbai, India
    • Related Report
      2007 Annual Research Report

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Published: 2007-04-01   Modified: 2016-04-21  

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