Grain-boundary conduction control and electrical characterization of n-type nanodiamond thin films for ultralow loss devices

• Project/Area Number: 19560678
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Inorganic materials/Physical properties
• Research Institution: Kyushu University
• Principal Investigator: TEII Kungen Kyushu University, 大学院・総合理工学研究院, 准教授 (10335995)
• Co-Investigator(Kenkyū-buntansha): OKADA Katsuyuki 物質・材料研究機構, ナノセラミックスセンター, 主幹研究員 (10354432)
• Project Period (FY): 2007 – 2008
• Project Status: Completed (Fiscal Year 2008)
• Budget Amount: ¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000); Fiscal Year 2008: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000); Fiscal Year 2007: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
• Keywords: カーボン材料 / プラズマ / 半導体 / ラジカル / ナノ粒子 / ダイヤモンド / 電子デバイス / ドーピング / 粒界 / CVD / 薄膜

Research Abstract

ダイヤモンドは超低損失デバイスを実現し、省エネルギー・低環境負荷に貢献できる夢の半導体材料であるが、n型のドーピングが困難である。本研究では、窒素ドープナノダイヤモンド薄膜のもつ特異な粒界伝導特性の制御によって、高いn型伝導性を実証した。またその成果をもとに、ヘテロ構造デバイスの試作と評価を行い、ダイヤモンド超低損失デバイスの実現に必要な技術基盤を確立した。

Research Products

• [Journal Article] Origin of reverse leakage current in n-type nanocrystalline diamond/p-type silicon heterojunction diodes (2009)
  • Author(s): T. Ikeda and K. Teii
  • Journal Title: Applied Physics Letters Vol.94, 072104 Pages: 1-3
  • Peer Reviewed
• [Journal Article] Origin of low threshold field emission from nitrogen-incorporated nanocrystalline diamond films (2009)
  • Author(s): T. Ikeda and K. Teii
  • Journal Title: Applied Physics Letters Vol. 94, 143102 Pages: 1-3
  • Peer Reviewed
• [Journal Article] Origin of Reverse Leakage Current in n-Type Nanocrystalline Diamond/p-Type Silicon Heterojunction Diodes (2009)
  • Author(s): T.Ikeda, K.Teii
  • Journal Title: Appl.Phys.Lett. Volume: 94 Pages: 72104-72104
  • Peer Reviewed
• [Journal Article] Origin of Low Threshold Field Emission from Nitrogen-Incorporated Na nocrystalline Diamond Films (2009)
  • Author(s): T.Ikeda, K.Teii
  • Journal Title: Appl.Phys.Lett. Volume: 94 Pages: 143102-143102
  • Peer Reviewed
• [Journal Article] Effect of the sp2 carbon phase on n-type conduction in nanodiamond films (2008)
  • Author(s): T. Ikeda, K. Teii, C. Casiraghi, J. Robertson, A.C. Ferrari
  • Journal Title: Journal of Applied Physics Vol.104, 073720 Pages: 1-7
  • Peer Reviewed
• [Journal Article] ナノダイヤモンド膜の形成機構と電気伝導特性 (2008)
  • Author(s): 池田知弘, 堤井君元
  • Journal Title: 電気学会プラズマ研究会資料 PST-08-66 Pages: 47-51
  • NAID: 10025667180
• [Journal Article] Effect of the Sp^2 Carbon Phase on n-Type Conduction in Nanodiamond Films (2008)
  • Author(s): T.Ikeda, K.Teii, C.Casiraghi, J.Robertson, A.C.Ferrari
  • Journal Title: J.Appl.Phys. Volume: 104 Pages: 73720-73720
  • Peer Reviewed
• [Journal Article] Conductive and resistive nanocrystalline diamond films studied by Raman spectroscopy (2007)
  • Author(s): K. Teii and T. Ikeda
  • Journal Title: Diamond and Related Materials Vol.16 Pages: 753-756
  • Peer Reviewed
• [Journal Article] Phase control and electrical properties of undoped and nitrogen-doped nanodiamond films deposited from Ar-rich microwave plasmas (2007)
  • Author(s): T. Ikeda, K. Takeguchi, K. Teii
  • Journal Title: Proceedings of 18th International Symposium on Plasma Chemistry 27P-16(CD-ROM) Pages: 1-4
• [Journal Article] Conductive and resistive nanocrystalline diamond films studied by Raman spectroscopy (2007)
  • Author(s): K.Teii, T.Ikeda
  • Journal Title: Diamond and Related Materials 16 Pages: 753-756
  • Peer Reviewed
• [Journal Article] Phase control and electrical properties of undoped and nitrogen-doped nanodiamond films deposited from Ar-rich microwave plasmas (2007)
  • Author(s): T.Ikeda, K.Takeguchi, K.Teii
  • Journal Title: Proceedings of 18th International Symposium on Plasma Chemistry 27P-16 Pages: 1-4
• [Presentation] n型ナノダイヤモンド膜の形成と電気特性評価 (2009)
  • Author(s): 池田知弘, 堤井君元
  • Organizer: 第26回プラズマプロセシング研究会
  • Place of Presentation: 愛知
  • Year and Date: 2009-02-02
• [Presentation] ナノダイヤモンド膜の形成機構と電気伝導特性 (2008)
  • Author(s): 池田知弘, 堤井君元
  • Organizer: 電気学会プラズマ研究会
  • Place of Presentation: 宮城
  • Year and Date: 2008-10-31
• [Presentation] ナノダイヤモンド膜の形成機構と電気伝導特性 (2008)
  • Author(s): 池田知弘、堤井君元
  • Organizer: 電気学会プラズマ研究会
  • Place of Presentation: 仙台
  • Year and Date: 2008-10-31
• [Presentation] Optimization of electron transport properties for fabrication of pn diodes using n-type nanodiamond films (2008)
  • Author(s): T. Ikeda and K. Teii
  • Organizer: 19th European Conference on Diamond, Diamond-Like Materials, Carbon Nanotubes, and Nitrides
  • Place of Presentation: Sitges, Spain
  • Year and Date: 2008-09-08
• [Presentation] Optimization of Electron Transport Properties for Fabrication of pn Diodes Using n-Type Nanodiamond Films (2008)
  • Author(s): T.Ikeda, K.Teii
  • Organizer: 19th European Conference on Diamond, Diamond-Like Materials, Carbon Nanotubes, Nitrides
  • Place of Presentation: シッチェス、スペイン
  • Year and Date: 2008-09-08
• [Presentation] ナノダイヤモンド/シリコンヘテロ接合ダイオードの電気特性評価 (2008)
  • Author(s): 池田知弘, 堤井君元
  • Organizer: 第69回応用物理学会学術講演会
  • Place of Presentation: 愛知
  • Year and Date: 2008-09-02
• [Presentation] ナノダイヤモンド/シリコンヘテロ接合ダイオードの電気特性評価 (2008)
  • Author(s): 池田知弘、堤井君元
  • Organizer: 第69回応用物理学会学術講演会
  • Place of Presentation: 名古屋
  • Year and Date: 2008-09-02
• [Presentation] ナノダイヤモンド薄膜の成長機構とn型伝導特性 (2008)
  • Author(s): 池田知弘, 堤井君元
  • Organizer: 第25回プラズマプロセシング研究会
  • Place of Presentation: 山口
  • Year and Date: 2008-01-25
• [Presentation] Effect of sp^2 carbon phase on electrical properties of nitrogen-doped nanodiamond films (2007)
  • Author(s): T. Ikeda and K. Teii
  • Organizer: 6th Asian-European International Conference on Plasma Surface Engineering
  • Place of Presentation: 長崎
  • Year and Date: 2007-09-28
• [Presentation] Transition from semiconducting to quasimetallic behaviour in nitrogen-doped nanodiamond films (2007)
  • Author(s): T. Ikeda and K. Teii
  • Organizer: 18th European Conference on Diamond, Diamond-Like Materials, Carbon Nanotubes, and Nitrides
  • Place of Presentation: Berlin, Germany
  • Year and Date: 2007-09-10
• [Presentation] Transition from semiconducting to quasimetallic behaviour in nitrogen-doped nanodiamond films (2007)
  • Author(s): 池田知弘、堤井君元
  • Organizer: 18th European Conference on Diamond, Diamond-Like Materials, Carbon Nanotubes, and Nitrides
  • Place of Presentation: ベルリン
  • Year and Date: 2007-09-10
• [Presentation] Phase control and electrical properties of undoped and nitrogen-doped nanodiamond films deposited from Ar-rich microwave plasmas (2007)
  • Author(s): T. Ikeda, K. Takeguchi, K. Teii
  • Organizer: 18th International Symposium on Plasma Chemistry
  • Place of Presentation: 京都
  • Year and Date: 2007-08-27
• [Patent(Industrial Property Rights)] プラズマCVD法を用いたナノダイヤモンド/アモルファスカーボン複合膜の形成方法 (2007)
  • Inventor(s): 堤井君元, 池田知弘
  • Industrial Property Rights Holder: 九州大学
  • Industrial Property Number: 2007-239742
  • Filing Date: 2007-09-14
• [Patent(Industrial Property Rights)] プラズマCVD法を用いたナノダイヤモンド/アモルファスカーボン複合膜の形成方法 (2007)
  • Inventor(s): 堤井君元、池田知弘
  • Industrial Property Rights Holder: 九州大学
  • Industrial Property Number: 2007-239742
  • Filing Date: 2007-09-14