Design of Magnetostrictive Susceptibility on Magnetostrictive Thin Film

• Project/Area Number: 19560709
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Structural/Functional materials
• Research Institution: Tokai University
• Principal Investigator: MATSUMURA Yoshihito Tokai University, 工学部, 教授 (60239085)
• Project Period (FY): 2007 – 2009
• Project Status: Completed (Fiscal Year 2009)
• Budget Amount: ¥4,160,000 (Direct Cost: ¥3,200,000、Indirect Cost: ¥960,000); Fiscal Year 2009: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000); Fiscal Year 2008: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000); Fiscal Year 2007: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
• Keywords: 磁歪感受率 / 磁歪材料薄膜 / 鉄 / IIIA族元素 / 過飽和固溶体 / イオン / 運動量 / 内部応力 / 磁歪材料 / 薄膜 / 鉄-IIIA族元素 / 過剰エネルギー / 超磁歪材料 / プラズマ特性 / 鉄-IIIA族 / 磁歪 / 鉄-ガリウム合金 / サマリウム-鉄合金 / 炭素・窒素

Research Abstract

(1) Sm-Fe thin films as giant magnetostrictive materials were prepared by d.c.magnetron sputtering process with mixed Ar-N_2 gas or Ar-CH_4 gas. The maximum value of magnetostrictive susceptibility of prepared thin films was showed at 1.0 vol% of N_2 and 0.5 vol% of CH_4.
(2) Supersaturated solid solution of Fe-In (Fe-In are immiscible system) thin films were prepared by the Ion-Plating process.
(3) The effect of ion bomberdment on the magnetostrictive characteristics of Tb-Fe and Sm-Fe films was quantitatively discussed by an ion bombardment parameter P_i. The ion bombardment parameter P_i could be applied to the design or modify the magnetostrictive susceptibility of films upon the film preparations.

Research Products

• [Journal Article] ion momentum as a novel parameter for the preparation of the magnetostrictive thin film (2009)
  • Author(s): Koji Makita, Yoshihito Matsumura, et al.
  • Journal Title: Applied Surface Science vol.256 Pages: 1265-1267
  • Peer Reviewed
• [Journal Article] Effect of Excess Energy with Plasma Process on Nanostructure of Fe-Mg (2009)
  • Author(s): Kiyoshi Shinobe、Yoshihito Matsumura, et al.
  • Journal Title: e-Journal of Surface Science and Nanotechnology vol.7 Pages: 855-858
  • NAID: 130004439200
  • Peer Reviewed
• [Journal Article] Magnetostrictive Characteristics of Fe-IIIB Alloy Thin Film by Ion-Plating Process (2009)
  • Author(s): Sho Nakamura、Yoshihito Matsumura, et al.
  • Journal Title: e-Journal of Surface Science and Nanotechnology vol.7 Pages: 801-803
  • NAID: 130004439190
  • Peer Reviewed
• [Journal Article] An ion momentum as a novel parameter for the preparation of the magnetostrictive thin film (2009)
  • Author(s): Koji Makita, 他4名
  • Journal Title: Applied Surface Science 256 Pages: 1265-1267
  • Peer Reviewed
• [Journal Article] Effect of Excess Energy with Plasma Process on Nanostructure of Fe-Mg (2009)
  • Author(s): Kiyoshi Shinobe, 他3名
  • Journal Title: e-Journal of Surface Science and Nanotechnology 7 Pages: 855-858
  • Peer Reviewed
• [Journal Article] Magnetostrictive Characteristics of Fe-IIIB Alloy Thin Film by Ion-Platins Process (2009)
  • Author(s): Sho Nakamura, 他3名
  • Journal Title: e-Joumal of Surface Science and Nanotechnology 7 Pages: 801-803
  • Peer Reviewed
• [Journal Article] 超磁歪材料のSm-Fe/Sm-Fe-C-N層状構造が磁歪特性に及ぼす影響 (2008)
  • Author(s): ジャマディル・アズワッド、松村義人, 他
  • Journal Title: 日本金属学会誌 72巻 Pages: 777-779
  • NAID: 10024326603
  • Peer Reviewed
• [Journal Article] イオンプレーティング法によるFe-Mg合金薄膜の作製 (2008)
  • Author(s): 篠辺潔、松村義人, 他
  • Journal Title: 日本金属学会誌 72巻 Pages: 719-721
  • NAID: 10024273244
  • Peer Reviewed
• [Journal Article] 超磁歪材料薄膜の磁歪特性に及ぼすイオン衝撃の影響 (2008)
  • Author(s): 蒔田晃司、松村義人, 他
  • Journal Title: 日本金属学会誌 72巻 Pages: 714-718
  • NAID: 10024273225
  • Peer Reviewed
• [Journal Article] 超磁歪材料のSm-Fe/Sm-Fe-C-N層状構造が磁歪特性に及ぼす影響 (2008)
  • Author(s): ジャマディル・アズワッド, 他
  • Journal Title: 日本金属学会誌 72巻 Pages: 777-779
  • Peer Reviewed
• [Journal Article] イオンプレーティング法によるFe-Mg合金薄膜の作製 (2008)
  • Author(s): 篠辺 潔, 他
  • Journal Title: 日本金属学会誌 72巻 Pages: 719-721
  • Peer Reviewed
• [Journal Article] 超磁歪材料薄膜の磁歪特性に及ぼすイオン衝撃の影響 (2008)
  • Author(s): 蒔田 晃司, 他
  • Journal Title: 日本金属学会誌 72巻 Pages: 714-718
  • Peer Reviewed
• [Journal Article] ポリウレタンゴム基板を用いたFe3.2Tb合金薄膜の磁場誘起運動歪 (2008)
  • Author(s): 末永 竜一, 他
  • Journal Title: 日本金属学会誌 72巻 Pages: 510-514
  • Peer Reviewed
• [Journal Article] Fe2.4Sm合金薄膜の磁場誘起運動に及ぼすA1基板厚さ依存性 (2008)
  • Author(s): 中野良, 他
  • Journal Title: 日本金属学会誌 72巻 Pages: 371-375
  • Peer Reviewed
• [Journal Article] Magnetostrictive Characteristics of Fe-Ga Thin Films Formed by Ion Plating Using Dual Vapor Deposition (2008)
  • Author(s): S. Nakamura, 他
  • Journal Title: Proc. 11th Int. Conf. on New Actuators (ACTUATOR2008) Pages: 733-735
• [Journal Article] Effect of Ion Bombardment on Magnetostrictive Properties of Giant Magnetostrictive Thin Films (2008)
  • Author(s): K. Makita, 他
  • Journal Title: Proc. 11th Int. Conf. on New Actuators (ACTUATOR2008) Pages: 730-731
• [Journal Article] Magnetostrictive Characteristics Comparison of Sm-Fe-C and Sm-Fe-N Thin Films Formed by Reactive Sputtering Process (2008)
  • Author(s): K. Shinobe, 他
  • Journal Title: Proc. 11th Int. Conf. on New Actuators (ACTUATOR2008) Pages: 705-707
• [Journal Article] Sm-Fe/Sm-Fe-N Multilayer Thin Films Prepared by D. C. Magnetron Sputtering Process (2008)
  • Author(s): J. A. Pazaer
  • Journal Title: Proc. 11th Int. Conf. on New Actuators (ACTUATOR2008) Pages: 702-703
• [Journal Article] Characterization of Fe-Al Magnetostrictive Alloy (2008)
  • Author(s): Koji Makita
  • Journal Title: Proc. 11th Int. Conf. on New Actuators (ACTUATOR2008) Pages: 736-737
• [Journal Article] Design of Mover Composite thin film Constructed with Different Types of GMM (2008)
  • Author(s): D. Kubo
  • Journal Title: Proc. 11th Int. Conf. on New Actuators (ACTUATOR2008) Pages: 746-749
• [Journal Article] Influences of Process Condition of Magnetron Sputtering on Magnetostriction and its Susceptibility of Alloy Film Deposited on various Substrates (2008)
  • Author(s): S. Saso
  • Journal Title: Proc. 11th Int. Conf. on New Actuators (ACTUATOR2008) Pages: 738-741
• [Journal Article] Oblique Deposition of Giant magnetostrictive Thin Film Formed by Ion-plating Process (2008)
  • Author(s): Kiyoshi SHINOBE, 他
  • Journal Title: Proceedings of the School of Engineering of Tokai University, Series E XXXIII巻 Pages: 29-34
  • Peer Reviewed
• [Journal Article] Magnetostrictive characteristies of Fe-Al films formed at non equilibrium condition (2008)
  • Author(s): Sho Nakamura, 他
  • Journal Title: Proceedings of the School of Engineering of Tokai University, Series E XXXIII巻 Pages: 25-28
  • Peer Reviewed
• [Journal Article] Magnetostrictive Characteristics of Sm-Fe / Sm-Fe-N Multi-layers Thin Films (2008)
  • Author(s): Jamadil Azwad PAZAER, 他
  • Journal Title: Proceedings of the School of Engineering of Tokai University, Series E XXXIII巻 Pages: 21-24
  • Peer Reviewed
• [Journal Article] Magnetostrictive properties of Sm-Fe-N and Sm-Fe-C thin film prepared by reactive sputtering process (2008)
  • Author(s): Tempei TANAKAMARU, 他
  • Journal Title: Proceedings of the School of Engineering of Tokai University, Series E XXXIII巻 Pages: 17-20
  • Peer Reviewed
• [Journal Article] Ar ion Beam Irradiation Effects on Magnetostorictive Characteristics of Giant Magnetostrictive Thin Films (2008)
  • Author(s): Koji Makita, 他
  • Journal Title: Proceedings of the School of Engineering of Tokai University, Series E XXXIII巻 Pages: 17-20
  • Peer Reviewed
• [Journal Article] Ar ion Beam Irradiation Effects on Magnetostorictive Characteristics of Giant Magnetostrictive Thin Films (2007)
  • Author(s): K. Makita, M. Takeuchi, Y. Matsumura
  • Journal Title: Proceedings of MJISAT2007 MJISAT-204 Pages: 1-4
  • NAID: 110007694690
  • Peer Reviewed
• [Journal Article] Magnetostrictive Characteristics of Fe-Al Films For med At Non-Equilibrium Condition (2007)
  • Author(s): M. Morita, K. Shinobe, Y. Matsumura
  • Journal Title: Proceedings of MJISAT2007 MJISAT-206 Pages: 1-4
  • Peer Reviewed
• [Journal Article] Magnetostrictive Characteristics of Sm-Fe/Sm-Fe-NMulti-Layers Thin Films (2007)
  • Author(s): J. A. Pazaer, T. Tanakamaru, K. Makita, Y. Matsumura
  • Journal Title: Proceedings of MJISAT2007 MJISAT-205 Pages: 1-5
  • NAID: 110007694697
  • Peer Reviewed
• [Journal Article] Magntostrictive Properties of Sm-Fe-N and Sm-Fe-C Thin Film Prepared by Reactive Sputtering Process (2007)
  • Author(s): T. Tanakamaru, J. A. Pazaer, K. Makita, Y. Matsumura
  • Journal Title: Proceedings of MJISAT2007 MJISAT-209 Pages: 1-4
  • Peer Reviewed
• [Journal Article] Oblique Deposition of Giant Magnet Magnetostrictive Thin Film Fonned by Ion-Plating Process (2007)
  • Author(s): K. Shinobe, M. Morita, T. Yamaki, Y. Matsumura
  • Journal Title: Proceedings of MJISAT2007 MJISAT-207 Pages: 1-6
  • Peer Reviewed
• [Presentation] Ion bombardment effects on internal stress of sputtered thin film、10th Int. Sympo (2009)
  • Author(s): K.Makita、Y.Matsumura, et al.
  • Organizer: on Sputtering and Plasma Process
  • Place of Presentation: 金沢国際ホテル
  • Year and Date: 2009-07-10
• [Presentation] Ion bombardment effects on internal stress of sputtered thin film (2009)
  • Author(s): Y.Matsumura, 他2名
  • Organizer: 10th Int. Sympo. on Sputtering and Plasma Process
  • Place of Presentation: 金沢国際ホテル
  • Year and Date: 2009-07-10
• [Presentation] イオンプレーティング法によるFe系過飽和合金薄膜の作製 (2009)
  • Author(s): 中村 翔, 他
  • Organizer: 日本金属学会2009年春期(第144回)大会
  • Place of Presentation: 東京, 東工大
  • Year and Date: 2009-03-30
• [Presentation] エネルギー変換材料用表面プロセスの開発 (2009)
  • Author(s): 蒔田 晃司, 他
  • Organizer: 日本金属学会2009年春期(第144回)大会
  • Place of Presentation: 東京, 東工大
  • Year and Date: 2009-03-29
• [Presentation] イオンプレーティング法により作製した非固溶型合金薄膜の磁歪特性 (2009)
  • Author(s): 中村 翔, 他
  • Organizer: 日本金属学会2009年春期(第144回)大会
  • Place of Presentation: 東京, 東工大
  • Year and Date: 2009-03-29
• [Presentation] Fe-Sm/Fe-Tb合金薄膜三層構造素子の磁場誘起運動に及ぼす基板の影響 (2009)
  • Author(s): 佐宗 駿, 他
  • Organizer: 日本金属学会2009年春期(第144回)大会
  • Place of Presentation: 東京, 東工大
  • Year and Date: 2009-03-29
• [Presentation] 薄膜の内部応力に及ぼすイオン衝撃の影響 (2008)
  • Author(s): 蒔田 晃司, 他
  • Organizer: 日本金属学会2009年春期(第144回)大会
  • Place of Presentation: 東京, 東工大
  • Year and Date: 2008-11-12
• [Presentation] Effects of ion bombardment on internal stress of sputtered thin film (2008)
  • Author(s): Koji Makita, 他
  • Organizer: The 5^<th> International Symposium on Surface Science and Nanotechnology
  • Place of Presentation: 東京, 早稲田大学
  • Year and Date: 2008-11-12
• [Presentation] Magnetostrictive characteristies of Fe-IIIB alloy thin film by Ion-plating process (2008)
  • Author(s): Sho Nakamura, 他
  • Organizer: The 5^<th> International Symposium on Surface Science and Nanotechnology
  • Place of Presentation: 東京, 早稲田大学
  • Year and Date: 2008-11-12
• [Presentation] Effect of Excess Energy with Plasma Process on Nanostructure of Fe-Mg (2008)
  • Author(s): Kiyoshi Shinobe, 他
  • Organizer: The 5^<th> International Symposium on Surface Science and Nanotechnology
  • Place of Presentation: 東京, 早稲田大学
  • Year and Date: 2008-11-12
• [Presentation] Magnetostrictive Properties of Sm-Fe/Sm-Fe-C-N Multilayer Thin Film Prepared by d. c. Magnetron Sputtering Process (2008)
  • Author(s): Jamadil Azwad Pazaer, 他
  • Organizer: The 5^<th> International Symposium on Surface Science and Nanotechnology
  • Place of Presentation: 東京, 早稲田大学
  • Year and Date: 2008-11-12
• [Presentation] Magnetostrictive Characteristies of Sm-Fe-C-N thin films formed by reactive sputtering process (2008)
  • Author(s): Katsuhiro Katoh, 他
  • Organizer: 4th Vacuum and Surface Sciences Conference of Asia and Australia (VASSCAA-4)
  • Place of Presentation: 松江, くにびきメッセ
  • Year and Date: 2008-10-28
• [Presentation] Characteristics of Fe-Al Magnetostrictive Alloy (2008)
  • Author(s): Koji Makita, 他
  • Organizer: 4th Vacuum and Surface Sciences Conference of Asia and Australia (VASSCAA-4)
  • Place of Presentation: 松江, くにびきメッセ
  • Year and Date: 2008-10-28
• [Presentation] Effect of Ion bombardment on Magnetostrictive Properties of RE( : Rare Earth)-Fe Thin Films (2008)
  • Author(s): Koji Makita, 他
  • Organizer: 4th Vacuum and Surface Sciences Conference of Asia and Australia (VASSCAA-4)
  • Place of Presentation: 松江, くにびきメッセ
  • Year and Date: 2008-10-28
• [Presentation] イオンプレーティング法で作製したFe-In薄膜の磁歪特性 (2008)
  • Author(s): 中村 翔, 他
  • Organizer: 日本金属学会2008年秋期(第143回)大会
  • Place of Presentation: 熊本, 熊本大学
  • Year and Date: 2008-09-24
• [Presentation] Fe-Al合金の磁気特性に及ぼすAl添加量の影響 (2008)
  • Author(s): 蒔田 晃司, 他
  • Organizer: 日本金属学会2008年秋期(第143回)大会
  • Place of Presentation: 熊本, 熊本大学
  • Year and Date: 2008-09-24
• [Presentation] Fe-45at%Pd合金薄膜の磁場誘起運動歪に及ぼす成膜時の基板温度の影響 (2008)
  • Author(s): 佐宗 駿, 他
  • Organizer: 日本金属学会2008年秋期(第143回)大会
  • Place of Presentation: 熊本, 熊本大学
  • Year and Date: 2008-09-24
• [Presentation] Magnetostrictive Characteristics Comparison of Sm-Fe-C and Sm-Fe-N Thin Films Formed by Reactive Sputtering Process (2008)
  • Author(s): K.Shinobe、Y.Matsumura, et al.
  • Organizer: 11th Int. Conf. on New Actuators (ACTUATOR2008)
  • Place of Presentation: Bremen, Germany
  • Year and Date: 2008-06-16
• [Presentation] Magnetostrictive Characteristics of Fe-Ga Thin Films Formed by Ion Plating Using Dual Vapor Deposition (2008)
  • Author(s): S. Nakamura, 他
  • Organizer: 11^<th> International Conference on New Actuators (ACTUAT0R2008)
  • Place of Presentation: ドイツ, ブレーメン
  • Year and Date: 2008-06-10
• [Presentation] Effect of Ion Bombardment on Magnetostrictive Properties of Giant Magnetostrictive Thin Films (2008)
  • Author(s): K. Makita, 他
  • Organizer: 11^<th> International Conference on New Actuators (ACTUATOR2008)
  • Place of Presentation: ドイツ, ブレーメン
  • Year and Date: 2008-06-10
• [Presentation] Magnetostrictive Characteristies Comparison of Sm-Fe-C and Sm-Fe-N Thin Films Formed by Reactive Sputtering Process (2008)
  • Author(s): K. Shinobe, 他
  • Organizer: 11^<th> International Conference on New Actuators (ACTUAT0R2008)
  • Place of Presentation: ドイツ, ブレーメン
  • Year and Date: 2008-06-10
• [Presentation] Sm-Fe/Sm-Fe-N Multilayer Thin Films Prepared by D. C. Magnetron Sputtering Process (2008)
  • Author(s): J. A. Pazaer, 他
  • Organizer: 11^<th> International Conference on New Actuators (ACTUATOR2008)
  • Place of Presentation: ドイツ, ブレーメン
  • Year and Date: 2008-06-10
• [Presentation] characterization of Fe-Al Magnetostrictive Alloy (2008)
  • Author(s): K. Makita, 他
  • Organizer: 11^<th> International Conference on New Actuators (ACTUATOR2008)
  • Place of Presentation: ドイツ, ブレーメン
  • Year and Date: 2008-06-10
• [Presentation] Design of Mover Composite thin film Constructed with Different Types of GMM (2008)
  • Author(s): D. Kubo, 他
  • Organizer: 11^<th> International Conference on New Actuators (ACTUATOR2008)
  • Place of Presentation: ドイツ, ブレーメン
  • Year and Date: 2008-06-10
• [Presentation] Influences of Process Condition of Magnetron Sputtering on Magnetostriction and its Susceptibility of Alloy Film Deposited on various Substrates (2008)
  • Author(s): S. Saso, 他
  • Organizer: 11^<th> International Conference on New Actuators (ACTUATOR2008)
  • Place of Presentation: ドイツ, ブレーメン
  • Year and Date: 2008-06-10
• [Presentation] 超磁歪材料薄膜の磁歪特性に及ぼすイオン照射の影響 (2008)
  • Author(s): 蒔田 晃司, 他
  • Organizer: 第25回希土類討論会講演
  • Place of Presentation: 東京, タワーホール船堀
  • Year and Date: 2008-05-29
• [Presentation] 磁歪材料を用いた運動機能素子に及ぼす基板種類と厚さの影響 (2008)
  • Author(s): 佐宗 駿, 他
  • Organizer: 日本機械学会2008年度年次大会
  • Place of Presentation: 横浜, 横浜国立大学
  • Year and Date: 2008-04-06
• [Presentation] 超磁歪材料薄膜の磁歪特性に及ぼす内部応力の影響 (2008)
  • Author(s): 蒔田 晃司, 田中丸 天兵, 竹内 光明, 内田 裕久, 松村 義人
  • Organizer: 日本金属学会2008年春期大会
  • Place of Presentation: 武蔵工業大学
  • Year and Date: 2008-03-28
• [Presentation] 高応答性を有する超磁歪薄膜の作製 (2007)
  • Author(s): 鍋谷 俊一, 田中丸 天兵, Jalnadil Azwad, 松村 義人
  • Organizer: 07SAS Intelligent Symposium
  • Place of Presentation: 東海大学
  • Year and Date: 2007-11-16
• [Presentation] イオンプレーティング法の二元蒸着により組成制御したFe-Ga合金薄膜の磁歪特性 (2007)
  • Author(s): 中村翔、松村義人, 他
  • Organizer: 日本金属学会2007年秋期大会
  • Place of Presentation: 岐阜大学
  • Year and Date: 2007-09-20
• [Presentation] 超磁歪材料の層状構造が磁歪特性に及ぼす影響 (2007)
  • Author(s): Jamadil Azwad, 田中 丸天兵, 蒔田 晃司, 松村 義人
  • Organizer: 日本金属学会2007年秋期大会
  • Place of Presentation: 岐阜大学
  • Year and Date: 2007-09-20
• [Presentation] 反応性スパッタリング法を用いた高応答性を有する超磁歪材料 (2007)
  • Author(s): 田中丸 天兵, ジャマディルア ズワッド, 村上 篤史, 松村 義人
  • Organizer: 日本金属学会2007年秋期大会
  • Place of Presentation: 岐阜大学
  • Year and Date: 2007-09-20
• [Presentation] Fe-Ga合金薄膜の磁歪特性 (2007)
  • Author(s): 森田 真英, 篠辺 潔, 松村 義人
  • Organizer: 第19回「電磁力関連のダイナミクス」シンポジウム
  • Place of Presentation: 早稲田大学
  • Year and Date: 2007-05-17
• [Presentation] Sm-Fe-C薄膜の磁歪特性 (2007)
  • Author(s): 田中丸 天兵, Jamadil Azwad, 松村 義人
  • Organizer: 第19回「電磁力関連のダイナミクス」シンポジウム
  • Place of Presentation: 早稲田大学
  • Year and Date: 2007-05-17