Basic Research on TFT Active-Matrix Artificial Kidney

• Project/Area Number: 19680022
• Research Category: Grant-in-Aid for Young Scientists (A)
• Allocation Type: Single-year Grants
• Research Field: Biomedical engineering/Biological material science
• Research Institution: Tohoku University
• Principal Investigator: KUROKI Shin-ichiro Tohoku University, 大学院・工学研究科, 助教 (70400281)
• Project Period (FY): 2007 – 2009
• Project Status: Completed (Fiscal Year 2009)
• Budget Amount: ¥7,280,000 (Direct Cost: ¥5,600,000、Indirect Cost: ¥1,680,000); Fiscal Year 2009: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000); Fiscal Year 2008: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000); Fiscal Year 2007: ¥5,850,000 (Direct Cost: ¥4,500,000、Indirect Cost: ¥1,350,000)
• Keywords: 人工臓器工学 / ナノバイオ / マイクロ・ナノデバイス / 薄膜トランジスタ / マイクロアレイ / 人工腎臓 / TFT / 移植・再生医 / 移植・再生医療

Research Abstract

The purpose of this study was to fabricate microchannel chip with TFT active-matrix array for cell and ion manipulations. For separation of blood cells, asymmetric electrode array was suggested, and micro particles were locally manipulated by dielectrophoresis in microchannel chip. And microchannel chip with TFT active-matrix array for cell sorting was also fabricated.

Research Products

• [Journal Article] Enhancement of Current Drivability of Nanograting Polycrystalline Silicon Thin-Film Transistors (2010)
  • Author(s): Shin-Ichiro Kuroki, Xiaoli Zhu, Koji Kotani, Takashi Ito
  • Journal Title: Jpn. J. Appl. Phys 49
  • NAID: 210000068329
  • Peer Reviewed
• [Journal Article] Ferroelectric Properties of Lead Zirconate Titanate Thin Film on Glass Substrate Crystallized by Continuous-Wave Green Laser Annealing (2010)
  • Author(s): Jun Jiang, Shin-Ichiro Kuroki, Koji Kotani, Takashi Ito
  • Journal Title: Jpn. J. Appl. Phys 49
  • Peer Reviewed
• [Journal Article] Low-Temperature Recrystallization of Ferroelectric Lead Zirconate Titanate Thin Films on Glass Substrate Using Continuous-Wave Green Laser (2009)
  • Author(s): Shin-Ichiro Kuroki, Kiichiro Tago, Koji Kotani, Takashi Ito
  • Journal Title: Jpn. J. Appl. Phys 48
  • NAID: 210000066653
  • Peer Reviewed
• [Journal Article] Roughness Reduction in Polycrystalline Silicon Thin Films Formed by Continuous-Wave Laser Lateral Crystallization with Cap SiO2 Thin Films (2009)
  • Author(s): Shuntaro Fujii, Shin-Ichiro Kuroki, Masayuki Numata, Koji Kotani, Takashi Ito
  • Journal Title: Jpn. J. Appl. Phys 48
  • NAID: 210000066640
  • Peer Reviewed
• [Journal Article] Roughness Reduction in Polycrystalline Silicon Thin Films Formed by Continuous-Wave Laser Lateral Crystallization with Cap SiO_2 Thin Films (2009)
  • Author(s): S.Fujii
  • Journal Title: Jpn.J.Appl.Phys. 48
  • Peer Reviewed
• [Journal Article] Crystallinity and Internal Strain of One-Dimensionally Long Si Grains by CW Laser Lateral Crystallization (2008)
  • Author(s): S. Fujii, S. Kuroki, X. Zhu, M. Numata, K. Kotani, T. Ito
  • Journal Title: ECS Trans 16(9) Pages: 145-145
  • NAID: 120006581926
  • Peer Reviewed
• [Journal Article] Analysis of Continuous-Wave Laser Lateral Crystallized Polycrystalline Silicon Thin Films with Large Tensile Strain (2008)
  • Author(s): Shuntaro Fujii, Shin-Ichiro Kuroki, Xiaoli Zhu, Masayuki Numata, Koji Kotani, Takashi Ito
  • Journal Title: Jpn. J. Appl. Phys 47 Pages: 3046-3049
  • Peer Reviewed
• [Journal Article] Carrier Transport Mechanism in Poly-Si TFTs with One-Dimensionally Long Grains (2008)
  • Author(s): S. Fujii
  • Journal Title: The 2008 International Conference on Solid State Devices and Materials 47
  • Peer Reviewed
• [Presentation] Continuous manipulation of micro particles by Use of dielectrophoresis using asymmetric electrodes array (2010)
  • Author(s): Masaki Midorikawa, Shin-Ichiro Kuroki, Koji Kotani, Takashi Ito
  • Organizer: 5th International Symposium on Medical, Bio- and Nano-Electronics
  • Place of Presentation: 仙台市
  • Year and Date: 2010-02-25
• [Presentation] Continuous manipulation of micro particles by Use of dielectrophoresis using asymmetric electrodes array (2010)
  • Author(s): M.Midorikawa
  • Organizer: 5th International Symposium on Medical, Bio-and Nano-Electronics
  • Place of Presentation: 仙台エクセルホテル、仙台市
  • Year and Date: 2010-02-25
• [Presentation] One-dimensionally Long Silicon Grain Formation by Continuous-Wave Green Laser and Its Applications (2010)
  • Author(s): Shin-Ichiro Kuroki, Shuntaro Fujii, Jiang Jun, Masaki Midorikawa, Koji Kotani, Takashi Ito
  • Organizer: International Thin-Film Transistor Conference 2010
  • Place of Presentation: 姫路市
  • Year and Date: 2010-01-28
• [Presentation] One-dimensionally Long Silicon Grain Formation by Continuous-Wave Green Laser and Its Applications (2010)
  • Author(s): S.Kuroki
  • Organizer: International Thin-Film Transistor Conference 2010
  • Place of Presentation: イーグレ姫路、姫路市
  • Year and Date: 2010-01-28
• [Presentation] The Drivability Enhancement of Poly-Si TFTs by use of Nanograting Substrate (2009)
  • Author(s): Shin-Ichiro Kuroki, Xiaoli Zhu, Koji Kotani, Takashi Ito
  • Organizer: the 2009 International Conference on Solid State Devices and Materials
  • Place of Presentation: 仙台市
  • Year and Date: 2009-10-08
• [Presentation] Continuous Manipulation of Micro Particles by Use of Asymmetric Electrodes Array (2009)
  • Author(s): Masaki Midorikawa, Shin-Ichiro Kuroki, Daiki Obara, K. Kotani, T. Ito
  • Organizer: the 2009 International Conference on Solid State Devices and Materials
  • Place of Presentation: 仙台市
  • Year and Date: 2009-10-08
• [Presentation] Highly-(001)-Oriented Ferroelectric PZT Thin Films on Glass by CW Green-Laser Crystallization (2009)
  • Author(s): Jun Jiang, Shin-Ichiro Kuroki, Koji Kotani, Takashi Ito
  • Organizer: the 2009 International Conference on Solid State Devices and Materials
  • Place of Presentation: 仙台市
  • Year and Date: 2009-10-08
• [Presentation] Continuous Manipulation of Micro Particles by Use of Asymmetric Electrodes Array (2009)
  • Author(s): M.Midorikawa
  • Organizer: The 2009 International Conference on Solid State Devices and Materials
  • Place of Presentation: 仙台国際ホテル、仙台市
  • Year and Date: 2009-10-08
• [Presentation] The Drivability Enhancement of Poly-Si TFTs by use of Nanograting Substrate (2009)
  • Author(s): S.Kuroki
  • Organizer: The 2009 International Conference on Solid State Devices and Materials
  • Place of Presentation: 仙台国際ホテル、仙台市
  • Year and Date: 2009-10-08
• [Presentation] 非対称電極を用いたマイクロビーズの連続的操作 (2009)
  • Author(s): 緑川真己、黒木伸一郎、小原大輝、小谷光司、伊藤隆司
  • Organizer: 第56回応用物理学関係連合講演会講演会
  • Place of Presentation: つくば市
  • Year and Date: 2009-03-31
• [Presentation] CWレーザー多重回照射によるシリコン薄膜の(100)結晶配向性向上 (2009)
  • Author(s): 岩田英範、黒木伸一郎、藤井俊太朗、小谷光司、伊藤隆司
  • Organizer: 第56回応用物理学関係連合講演会講演会
  • Place of Presentation: つくば市
  • Year and Date: 2009-03-31
• [Presentation] Cap SiO2薄膜によるラテラル結晶化Poly-Si薄膜のラフネス低減 (2009)
  • Author(s): 藤井俊太朗、黒木伸一郎、岩田英範、沼田雅之、小谷光司、伊藤隆司
  • Organizer: 第56回応用物理学関係連合講演会講演会
  • Place of Presentation: つくば市
  • Year and Date: 2009-03-31
• [Presentation] CapSiO2薄膜によるラテラル結晶化Poly-Si薄膜のラフネス低減 (2009)
  • Author(s): 藤井俊太朗
  • Organizer: 第56回応用物理学会関係連合講演会
  • Place of Presentation: 筑波大学, つくば市
  • Year and Date: 2009-03-31
• [Presentation] 非対称電極を用いたマイクロビーズの連続的操作 (2009)
  • Author(s): 緑川真己
  • Organizer: 第56回応用物理学会関係連合講演会
  • Place of Presentation: 筑波大学, つくば市
  • Year and Date: 2009-03-31
• [Presentation] エタノール添加スラリーを用いたCWレーザ結晶化Si薄膜のCMP (2008)
  • Author(s): 黒木伸一郎、沼田雅之、藤井俊太朗、小谷光司、伊藤隆司
  • Organizer: 薄膜材料デバイス研究会第5回研究集会
  • Place of Presentation: 奈良市
  • Year and Date: 2008-10-31
• [Presentation] エタノール添加スラリーを用いたCMPによるCWレーザ結晶化Si薄膜の平坦化 (2008)
  • Author(s): 沼田雅之、黒木伸一郎、藤井俊太朗、小谷光司、伊藤隆司
  • Organizer: 電子情報通信学会SDM研究会
  • Place of Presentation: 仙台市
  • Year and Date: 2008-10-09
• [Presentation] Carrier Transport Mechanism in Poly-Si TFTs with One-Dimensionally Long Grains (2008)
  • Author(s): S. Fujii, S. Kuroki, X. Zhu, M. Numata, K. Kotani, T. Ito
  • Organizer: the 2008 International Conference on Solid State Devices and Materials
  • Place of Presentation: つくば市
  • Year and Date: 2008-09-13
• [Presentation] Roughness Reduction Technique for High Performance Poly-Si TFTs by CW Laser Lateral Crystallization with Cap SiO2 Thin Films (2008)
  • Author(s): S. Fujii, S. Kuroki, M. Numata, K. Kotani, T. Ito
  • Organizer: the 2008 International Conference on Solid State Devices and Materials
  • Place of Presentation: つくば市
  • Year and Date: 2008-09-13
• [Presentation] Carrier Transport Mechanism in Poly-Si TFTs with One-Dimensionally Long Grains (2008)
  • Author(s): S. Fujii
  • Organizer: The 2008 International Conference on Solid State Devices and Materials
  • Place of Presentation: つくば国際会議場、つくば市
  • Year and Date: 2008-09-13
• [Presentation] CLC poly-Si TFTのキャリア輸送メカニズムの解析 (2008)
  • Author(s): 藤井俊太朗、黒木伸一郎、朱小莉、沼田雅之、小谷光司、伊藤隆司
  • Organizer: 第69回応用物理学会学術講演会講演会
  • Place of Presentation: 春日井市
  • Year and Date: 2008-09-02
• [Presentation] CLCpoly-SiTFTのキギリア輸送メカニズムの解析 (2008)
  • Author(s): 藤井俊太朗
  • Organizer: 第69回応用物理学会学術講演会
  • Place of Presentation: 中部大学, 春日井
  • Year and Date: 2008-09-02
• [Presentation] CLC poly-Si TFTの電界効果電子移動度 (2008)
  • Author(s): 藤井俊太朗、黒木伸一郎、朱小莉、田主裕一朗、小谷光司、伊藤隆司
  • Organizer: 第55回応用物理学関係連合講演会講演会
  • Place of Presentation: 船橋市
  • Year and Date: 2008-03-28
• [Presentation] エタノール添加CMPによるCWレーザ結晶化Si薄膜の平坦化 (2008)
  • Author(s): 雅之、黒木伸一郎、藤井俊太朗、小谷光司、伊藤隆司
  • Organizer: 第55回応用物理学会関係連合講演会
  • Place of Presentation: 船橋市
  • Year and Date: 2008-03-28
• [Presentation] 連続波グリーンレーザ再結晶化Si薄膜における結晶性と歪み (2007)
  • Author(s): 黒木伸一郎、藤井俊太朗、朱小莉、沼田雅之、小谷光司、伊藤隆司
  • Organizer: 薄膜材料デバイス研究会第4回研究集会
  • Place of Presentation: 京都市
  • Year and Date: 2007-11-02
• [Presentation] 連続波グリーンレーザ再結晶化Si薄膜における結晶性と歪み (2007)
  • Author(s): 黒木伸一郎
  • Organizer: 薄膜材料デバイス研究会第4回研究集会
  • Place of Presentation: 龍谷大学
  • Year and Date: 2007-11-02
• [Presentation] Lateral Recrystallized Si Thin Films with Large Tensile Strain for High Performance Thin Film Transistors (2007)
  • Author(s): S. Fujii, S. Kuroki, Z. Xiaoli, M. Numata, K. Kotani, T. Ito
  • Organizer: the 2007 International Conference on Solid State Devices and Materials
  • Place of Presentation: つくば市
  • Year and Date: 2007-09-19
• [Presentation] Lateral Recrystallized Si Thin Films with Large Tensile Strain for High Performance Thin Film Transistors (2007)
  • Author(s): Shuntaro Fujii
  • Organizer: International Conference on Solid StateDevices and Materials
  • Place of Presentation: つくば国際会議場
  • Year and Date: 2007-09-19
• [Remarks]
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• [Patent(Industrial Property Rights)] マイクロ流路デバイス (2009)
  • Inventor(s): 黒木伸一郎、伊藤隆司
  • Industrial Property Rights Holder: 東北大学
  • Industrial Property Number: 2009-074999
  • Filing Date: 2009-03-25