Stamping transfer method for large-area, function-integration, flexible MEMS devices

• Project/Area Number: 19681014
• Research Category: Grant-in-Aid for Young Scientists (A)
• Allocation Type: Single-year Grants
• Research Field: Microdevices/Nanodevices
• Research Institution: The University of Tokyo
• Principal Investigator: IWASE Eiji The University of Tokyo, 大学院・情報理工学系研究科, 助教 (70436559)
• Project Period (FY): 2007 – 2008
• Project Status: Completed (Fiscal Year 2008)
• Budget Amount: ¥22,360,000 (Direct Cost: ¥17,200,000、Indirect Cost: ¥5,160,000); Fiscal Year 2008: ¥8,970,000 (Direct Cost: ¥6,900,000、Indirect Cost: ¥2,070,000); Fiscal Year 2007: ¥13,390,000 (Direct Cost: ¥10,300,000、Indirect Cost: ¥3,090,000)
• Keywords: MEMS / スタンピング転写 / フレキシブルデバイス / マイクロマシン

Research Abstract

スタンピング転写を用いることにより、別々の基板上で製作したMEMS構造をフレキシブルシート上に集積した。これにより、今までフレキシブルシート上には製作が困難であった3次元構造や可動機構をもつMEMSデバイスが実現可能となる。本研究を実現する過程で、スタンピング転写の転写率・転写位置精度、平面ギャップの製作精度の評価を行った。また、実際に3次元構造および可動機構を有する応用的な光MEMSデバイスをPDMSシート上に作成できることを示した。

Research Products

• [Presentation] Temperature-Controlled Transfer and Self-Wiring for Multi-Color LED Display on a Flexible Substrate (2009)
  • Author(s): Eiji Iwase, Hiroaki Onoe, Akihito Nakai, Kiyoshi Matsumoto, Isao Shimoyama
  • Organizer: The 22nd IEEE International Conference on Microelectromechanical Systems (MEMS2009)
  • Place of Presentation: Sorrento, Italy
  • Year and Date: 2009-01-28
• [Presentation] emperature-Controlled Transfer and Self-Wiring for Multi-Color LED Display on a Flexible Substrate (2009)
  • Author(s): Eiji Iwase
  • Organizer: The 22nd IEEE International Conference on Micro Electro Mechanical Systems (MEMS '09)
  • Place of Presentation: Sorrento, Italy
  • Year and Date: 2009-01-28
• [Presentation] Hidden Vertical Comb-Drive Actuator on PDMS Fabricated by Parts-Transfer (2008)
  • Author(s): Eiji Iwase, Hiroaki Once, Kiyoshi Matsumoto, Isao Shimoyama
  • Organizer: The 21st IEEE International Conference on Microelectromechanical Systems (MEMS2008)
  • Place of Presentation: Tucson, Arizona, USA
  • Year and Date: 2008-01-16
• [Presentation] Hidden Vertical Comb-Drive Actuator on PDMS Fabricated by Parts-Transfer (2008)
  • Author(s): Eiji Iwase, Hiroaki Onoe, Kiyoshi Matsumoto, Isao Shimoyama
  • Organizer: The 21st IEEE International Conference on Micro Electro Mechanical Systems (MEMS 08)
  • Place of Presentation: Tucson, Arizona, USA
  • Year and Date: 2008-01-16
• [Remarks]
  • URL: http://www.leooardiu-tokvo.ac.iD/research/iwase/iwase5.html