Elucidation of Molecular Dynamicsand Reaction Mechanism of ResistMaterials for the Control of Nanosize-roughness

• Project/Area Number: 19710095
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Single-year Grants
• Research Field: Nanomaterials/Nanobioscience
• Research Institution: Osaka University
• Principal Investigator: OKAMOTO Kazumasa Osaka University, 産業科学研究所, 特任助教 (10437353)
• Project Period (FY): 2007 – 2008
• Project Status: Completed (Fiscal Year 2008)
• Budget Amount: ¥2,760,000 (Direct Cost: ¥2,400,000、Indirect Cost: ¥360,000); Fiscal Year 2008: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000); Fiscal Year 2007: ¥1,200,000 (Direct Cost: ¥1,200,000)
• Keywords: リソグラフィ / レジスト / 電子線 / パルスラジオリシス / 芳香族分子 / 分子軌道計算 / ポリスチレン

Research Abstract

半導体加工用に用いられている化学増幅型レジストは、露光源の発展に伴いその最小加工寸法が縮小している。将来の更なる加工寸法の縮小に向けて、放射線を露光源とすることが想定されているが、極微細加工用レジスト材料におけるゆらぎ(ラフネス)の低減は深刻な問題となっている。ラフネスをナノサイズに低減するために、レジスト中にイオン化後生成する、中間活性種の分子レベルのダイナミクスと反応機構を明らかにすることを目的とした。

Research Products

• [Journal Article] Dynamics of radical cation of poly(4-hydroxystyrene) and its copolymer for extreme ultraviolet and electron beam resists (2009)
  • Author(s): K. Okamoto, M. Tanaka, T. Kozawa, S. Tagawa
  • Journal Title: Jpn. J. Appl. Phys. (in press)
  • NAID: 210000066906
  • Peer Reviewed
• [Journal Article] Formation of intramolecular poly(4-hydroxystyrene) dimer radical cation (2008)
  • Author(s): K. Okamoto, T. Kozawa, K. Natsuda, S. Seki, S. Tagawa
  • Journal Title: J. Phys. Chem. B 112 Pages: 9275-9280
  • Peer Reviewed
• [Journal Article] Formation of Intramolecular Poly(4-hydroxystyrene) Dimer Radical Cation (2008)
  • Author(s): Kazumasa Okamoto
  • Journal Title: J. Phys. Chem. B 112 Pages: 9275-9280
  • Peer Reviewed
• [Journal Article] Subpicosecond pulse radiolysis in liquid methyl-substituted benzene derivatives (2007)
  • Author(s): K. Okamoto, T. Kozawa, A. Saeki, Y. Yoshida, S. Tagawa
  • Journal Title: Radiat. Phys. Chem. 76 Pages: 818-826
  • Peer Reviewed
• [Journal Article] Subpicosecond pulse radiolysis in liquid methyl-substituted benzene derivaties (2007)
  • Author(s): Okamoto Kazumasa, Kozawa Takahiro, Saeki Akinori, Yoshida Yoichi, Tagawa Seiichi
  • Journal Title: Radiation Physics and Chemistry 76 Pages: 818-826
  • Peer Reviewed
• [Presentation] Hole Dynamics in Poly(4-Hydroxystyrene) and its Copolymer (2009)
  • Author(s): Kazumasa Okamoto, Masafumi Tanaka, Takahiro Kozawa, Seiichi Tagawa
  • Organizer: The 12th SANKEN International Symposium
  • Place of Presentation: Osaka Univ.
  • Year and Date: 2009-01-22
• [Presentation] Hole Dynamics in Poly(4-Hydroxystyrene) and its Copolymer (2009)
  • Author(s): Kazumasa Okamoto
  • Organizer: The 12th SANKEN International Symposium
  • Place of Presentation: 大阪大学
  • Year and Date: 2009-01-22
• [Presentation] Dynamics of Radical Cation of Poly (4-Hydroxystyrene) and its Copolymer (2008)
  • Author(s): Kazumasa Okamoto
  • Organizer: 21st International Microprocesses and Nanotechnology Conference
  • Place of Presentation: JAL Resort Sea Hawk Hotel Fukuoka
  • Year and Date: 2008-10-29
• [Presentation] ポリ(4-メトキシスチレン)のパルスラジオリシス-ダイマーラジカルカチオン生成の置換基依存性 (2008)
  • Author(s): 田中将史, 岡本一将, 古澤孝弘, 田川精一
  • Organizer: 第51回放射線化学討論会
  • Place of Presentation: 産総研
  • Year and Date: 2008-10-17
• [Presentation] ポリ(4-メトキシスチレン)のパルスラジオリシスーダイマーラジカルカチオン生成の置換基依存性 (2008)
  • Author(s): 岡本一将
  • Organizer: 第51回放射線化学討論会
  • Place of Presentation: 産総研、つくば
  • Year and Date: 2008-10-17
• [Presentation] 化学増幅型レジストベースポリマーのラジカルカチオンのダイナミクス (2008)
  • Author(s): 岡本一将, 田中将史, 古澤孝弘, 田川精一
  • Organizer: 2008年秋季 第69回応用物理学会学術講演会
  • Place of Presentation: 中部大学
  • Year and Date: 2008-09-02
• [Presentation] 化学増幅型レジストベースポリマーのラジカルカチオンのダイナミクス (2008)
  • Author(s): 岡本一将
  • Organizer: 第69回応用物理学会学術講演会
  • Place of Presentation: 中部大学
  • Year and Date: 2008-09-02
• [Presentation] Dynamics of Radical Cations of Resist Model Compounds (2008)
  • Author(s): Kazumasa Okamoto
  • Organizer: APSRC-2008 The 2nd Asia-Pacific Symposium on Radiation Chemistry
  • Place of Presentation: 早稲田大学
  • Year and Date: 2008-08-29
• [Presentation] Dynamics of PHS Radical Cation (2008)
  • Author(s): Kasumasa Okamoto, Takahiro Kozawa, Seiichi Tagawa
  • Organizer: SPIE Advanced Lithography 2008
  • Place of Presentation: San Jose, CA, USA
  • Year and Date: 2008-02-25
• [Presentation] Dynamics of Poly(4-hydroxystyrene) Radical Cation (2008)
  • Author(s): Kazumasa Okamoto, Takahiro Kozawa, Seiichi Tagawa
  • Organizer: SPIE Advanced Lithography
  • Place of Presentation: San Jose, USA
  • Year and Date: 2008-02-25
• [Presentation] Dynamics of Radical Cation of Poly (4-Hydroxystyrene) and its Copolymer (2008)
  • Author(s): Kazumasa Okamoto, Masafumi Tanaka, Takahiro Kozawa, Seiichi Tagawa
  • Organizer: 21st International Microprocesses and Nanotechnology Conference
  • Place of Presentation: Fukuoka, Japan
• [Presentation] Dynamics of Radical Cations of Resist Model Compounds (2008)
  • Author(s): Kazumasa Okamoto, Masafumi Tanaka, Takahiro Kozawa, Seiichi Tagawa
  • Organizer: 2nd Asia-Pacific Symposium on Radiation Chemistry
  • Place of Presentation: Waseda University
• [Presentation] Pulse Radiolysis of Polystyrene and Derivatives (2007)
  • Author(s): Kazumasa Okamoto, Masafumi Tanaka, Shu Seki, Takahiro Kozawa, Seiichi Tagawa
  • Organizer: 13^<th> International Congress of Radiation Research
  • Place of Presentation: San Francisco USA,
  • Year and Date: 2007-07-13
• [Presentation] Study on Dynamics of Radical Ions of Polystyrenes by Pulse Radiolysis (2007)
  • Author(s): Kazumasa Okamoto, Masafumi Tanaka, Takahiro Kozawa, Shu Seki, Seiichi Tagawa
  • Organizer: 13^<th> International Congress of Radiation Research
  • Place of Presentation: San Francisco USA,
  • Year and Date: 2007-07-13
• [Presentation] Pulse Radiolysis of Polsystyrene and Derivatives (2007)
  • Author(s): Kazumasa Okamoto, Masafumi Tanaka, Shu Seki, Seiichi Tagawa
  • Organizer: 13th International Congress of Radiation Research
  • Place of Presentation: San Francisco, USA
  • Year and Date: 2007-07-13
• [Presentation] Study on Dynamics of adical Ions of Polystyrenes by Pulse Radiolysis (2007)
  • Author(s): Kazumasa Okamoto, Masafumi Tanaka, Takahiro Kozawa, Shu Seki, Seiichi Tagawa
  • Organizer: 13th International Congress of Radiation Research
  • Place of Presentation: San Francisco, USA
  • Year and Date: 2007-07-09
• [Presentation] ポリスチレン誘導体のパルスラジオリシス法を用いたラジカルカチオンのダイナミクスの研究 (2007)
  • Author(s): 田中将史, 岡本一将, 古澤孝弘, 関修平, 田川精一
  • Organizer: 第50回放射線化学討論会
  • Place of Presentation: 京都大学