A position-controlled single electron transistor using anodization process of a barrier metal

• Project/Area Number: 19710118
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Single-year Grants
• Research Field: Microdevices/Nanodevices
• Research Institution: Tohoku University
• Principal Investigator: KIMURA Yasuo Tohoku University, 電気通信研究所, 助教 (40312673)
• Project Period (FY): 2007 – 2008
• Project Status: Completed (Fiscal Year 2008)
• Budget Amount: ¥3,690,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥390,000); Fiscal Year 2008: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000); Fiscal Year 2007: ¥2,000,000 (Direct Cost: ¥2,000,000)
• Keywords: 単電子 / 自己組織化 / 陽極酸化 / ナノチューブ / ナノドット / クーロンブロケード / ポーラスアルミナ / 酸化チタンナノチューブ

Research Abstract

アルミニウム細線の陽極酸化過程に及ぼす細線の断面構造の影響を調べた。その結果、アルミニウム細線のアスペクト比が陽極酸化過程に大きな影響を与えており、そのアスペクト比によって陽極酸化過程を制御することが可能であることがわかった。また、その制御された陽極酸化過程を利用して単電子トランジスタを作製し、それが室温で動作することを確かめた。本研究で提案するハイブリッドプロセスは室温動作可能なSETを作製するための有力なプロセスであることを強く示唆している。

Research Products

• [Journal Article] An extensively valid and stable method for derivation of all parameters of a solar cell from a single current voltage characteristic (2008)
  • Author(s): K. Ishibashi, Y. Kimura, and M. Niwano
  • Journal Title: J. Appl. Phys 103
  • Peer Reviewed
• [Journal Article] Fabrication of Titanium Oxide Nanotubes by Rapid and Homogeneous Anodization in a Mixture of Perchloric Acid and Ethanol (2008)
  • Author(s): K. Ishibashi, R. Yamaguchi, Y. Kimura and M. Niwano
  • Journal Title: J. Electrochem. Soc 155
  • Peer Reviewed
• [Journal Article] An extensively valid and stable method for derivation of all parameters of a solar cell from a single current voltage characteristic (2008)
  • Author(s): K. Ishibashi, Y. Kimura, and M. Niwano
  • Journal Title: Journal of Applied Physics 103
  • Peer Reviewed
• [Journal Article] Fabrication of Titanium Oxide Nanotubes by Rapid and Homogeneous Anodization in a Mixture of Perchloric Acid and Ethanol (2008)
  • Author(s): K. Ishibashi, R. Yamaguchi, Y. Kimura and M. Niwano
  • Journal Title: Journal of The Electrochemical Society 155
  • Peer Reviewed
• [Journal Article] 陽極酸化により作製したアルミニウムナノドットからのクーロン階段の室温観測 (2007)
  • Author(s): 木村康男、庭野道夫
  • Journal Title: 電子情報通信学会信学技報 107 Pages: 15-19
  • NAID: 110006389006
• [Journal Article] 陽極酸化により作製したアルミニウムナノドットからのクーロン階段の室温観測 (2007)
  • Author(s): 木村康男、庭野道夫
  • Journal Title: 電子情報通信学会信学技法 107 Pages: 15-19
  • NAID: 110006389006
• [Presentation] The Formation Mechanism of Aluminum Nanodots by Inhomogeneous Anodization as a Self-Alignment Technique for a Room-Temperature Operating Single - Electron Transistor (2008)
  • Author(s): T. Muto, Y. Kimura, and M. Niwano
  • Organizer: The 5th International Symposium on Surface Science and Nanotechnology
  • Place of Presentation: Waseda, Japan
  • Year and Date: 2008-11-11
• [Presentation] The Formation Mechanism of Aluminum Nanodots by Inhomogeneous Anodization as a Self-Alignment Technique for a Room-Temperature Operating Single-Electron Transistor (Invited) (2008)
  • Author(s): T. Muto, Y. Kimura, and M. Niwano
  • Organizer: The 5th International Symposium on Surface Science and Nanotechnology
  • Place of Presentation: Waseda, Japan
  • Year and Date: 2008-11-11
• [Presentation] Monte Carlo Simulation of Porous Silicon Formation (2008)
  • Author(s): N. Shimakura, Y. Kimura, and M. Niwano
  • Organizer: The 5th International Symposium on Surface Science and Nanotechnology
  • Place of Presentation: Waseda, Japan
  • Year and Date: 2008-11-10
• [Presentation] In-Situ Infrared Spectroscopic Study of Electrochemical Etching Processes at Si Surfaces (2008)
  • Author(s): Y. Kimura, and M. Niwano
  • Organizer: Pacific rim meeting on electrochemical and solid state science, 214th ECS meeting
  • Place of Presentation: Honolulu, USA
  • Year and Date: 2008-10-14
• [Presentation] Inhomogeneous anodization of aluminum for nanofabrication (2008)
  • Author(s): Y. Kimura, T. Muto, N. Shimakura, and M. Niwano
  • Organizer: Pacific rim meeting on electrochemical and solid state science, 214th ECS meeting
  • Place of Presentation: Honolulu, USA
  • Year and Date: 2008-10-14
• [Presentation] In situ observation of electrochemical etching process using infrared spectroscopy and its Monte Carlo etching simulation (2008)
  • Author(s): N. Shimakura,, Y. Kimura, and M. Niwano
  • Organizer: Pacific rim meeting on electrochemical and solid state science, 214th ECS meeting
  • Place of Presentation: Honolulu, USA
  • Year and Date: 2008-10-14
• [Presentation] In-Situ Infrared Spectroscopic Study of Electrochemical Etching Processes at Si Surfaces (2008)
  • Author(s): Y. Kimura, and M. Niwano
  • Organizer: Pacific rim meeting on electrochemical and solidstate science, 214th ECS meeting
  • Place of Presentation: Honolulu, USA
  • Year and Date: 2008-10-14
• [Presentation] Inhomogeneous anodization of aluminum for nanofabrication (2008)
  • Author(s): Y. Kimura, T. Muto, N. Sbimak ura. and M. Niwano
  • Organizer: Pacific rim meeting on electrochemical and solidstate science, 214th ECS meeting
  • Place of Presentation: Honolulu, USA
  • Year and Date: 2008-10-14
• [Presentation] In situ observation of electrochemical etching process using infrared spectrosconv and its Monte Carlo etching simulation (2008)
  • Author(s): N. Shimakura,, Y. Kimura, and M. Niwano
  • Organizer: Pacific rim meeting on electrochemical and solidstate science, 214th ECS meeting
  • Place of Presentation: Honolulu, USA
  • Year and Date: 2008-10-14
• [Presentation] Anodization process of aluminum microelectrode for a single-electron transistor operating at room temperature (2008)
  • Author(s): T. Muto, Y. Kimura, .M. Niwano
  • Organizer: 66th Device Research Conference
  • Place of Presentation: Y. Kimura, K. Ishibashi, M. Niwano
  • Year and Date: 2008-06-23
• [Presentation] Fabrication of titanium oxide nanotubes through anodization of titanium in a mixture of perchloric acid and ethanol (2008)
  • Author(s): Y. Kimura, K. Ishibashi, M. Niwano
  • Organizer: The 4th Asian Conference on Crystal Growth and Crystal Technology(CGCT-4)
  • Place of Presentation: Sendai, Japan
  • Year and Date: 2008-05-24
• [Presentation] Fabrication of titanium oxide nanotubes through anodization of titanium in a mixture of nerchloric acid and ethanol (2008)
  • Author(s): Santa Barbara, USA
  • Organizer: The 4th Asimi Conference on Crystal Growth and Crystal Technology(CGCT-4)
  • Place of Presentation: Sendai, Japan
  • Year and Date: 2008-05-24
• [Presentation] An extensively valid and stable method for determination of all parameters of a solar cell from a single I-V characteristic (2008)
  • Author(s): Yasuo Kimura, Ken-ichi Ishibashi, and Michio Niwano
  • Organizer: 213th ECS Meeting
  • Place of Presentation: Phoenix, USA
  • Year and Date: 2008-05-20
• [Presentation] Anodization process of aluminum microelectrode for a single-electron transistor operating at room temperature (2008)
  • Author(s): T. Muto, Y. Kimura, M. Niwano
  • Organizer: 66th Device Research Conference
  • Place of Presentation: Santa Barbara
  • Year and Date: 2008-01-26
• [Presentation] Selforganization of Nanodots and Nanogaps by Anodization and Room-temperature Observation of a Giant Coulomb Blockade Voltage (2007)
  • Author(s): Y. Kimura, T. Muto, R. Yamaguchi, K. Ishibashi, K. Itaya, M. Niwano
  • Organizer: 2007 MRS Fall Meeting
  • Place of Presentation: Boston, USA
  • Year and Date: 2007-11-28
• [Presentation] Selforganization of Nanodots and Nanogaps by Anodization and Room-temperature Observation of a Giant Coulomb Blockade Vbltage (2007)
  • Author(s): Y. Kimura, T. Muto, R. Yamaguchi, K. Ishibashi, K. Itaya, M. Niwano
  • Organizer: 2007 MRS Fall Meeting
  • Place of Presentation: Boston, MA, USA
  • Year and Date: 2007-11-28
• [Presentation] 陽極酸化により作製したアルミニウムナノドットからのクーロン階段の室温観測 (2007)
  • Author(s): 木村康男、庭野道夫
  • Organizer: 電子情報通信学会研究会電子部品・材料研究会(CPM8)
  • Place of Presentation: 米沢
  • Year and Date: 2007-08-09
• [Presentation] 【招待講演】陽極酸化により作製したアルミニウムナノドットからのクーロン階段の室温観測 (2007)
  • Author(s): 木村康男、庭野道夫
  • Organizer: 電子情報通信学会研究会電子部品・材料研究会(CPM8)
  • Place of Presentation: 山形大学、米沢
  • Year and Date: 2007-08-09
• [Presentation] Room-temperature observation of Coulomb staircases in aluminum nanodots fabricated by anodization of an aluminum microelectrode (2007)
  • Author(s): Y. Kimura, K. Itoh, T. Mutoh, R. Yamaguchi, K. Ishibashi, A. Hirano, K. Itaya, and M. Niwano
  • Organizer: International Conference on Nanoscience and Technology (China Nano2007)
  • Place of Presentation: Beijing, China
  • Year and Date: 2007-06-05
• [Presentation] Fabrication of anodic titanium nanotubes with high growth rate and their application to a dye-sensitized solar cell (2007)
  • Author(s): K. Ishibashi, T. Mutoh,R. Yamaguchi Y. Kimura and M. Niwano
  • Organizer: 211th ECS Meeting
  • Place of Presentation: Chicago, USA
  • Year and Date: 2007-05-07
• [Presentation] Room-temperature observation of Coulomb blockade staircases in aluminum nanodots fabricated by an anodization process (2007)
  • Author(s): Y. Kimura, K. Itoh, T. Mutoh, R. Yamaguchi, K. Ishibashi, A. Hirano, K. Itaya, and M. Niwano
  • Organizer: 211th ECS Meeting
  • Place of Presentation: Chicago, Illinois, USA
  • Year and Date: 2007-05-07
• [Presentation] Fabrication of anodic titanium nanotubes with high growth rate and their application to a dye-sensitized solar cell. (2007)
  • Author(s): K. Ishibashi, T. Mutoh, R. Yamaguchi Y. Kimura and M. Niwano
  • Organizer: 211th ECS Meeting
  • Place of Presentation: Chicago, Illinois, USA
  • Year and Date: 2007-05-07
• [Presentation] Room-temperature observation of Coulomb staircases in aluminum nanodots fabricated by anodization of an aluminum microelectrode (2007)
  • Author(s): Y. Kimura, K. Itoh, T. Mutoh, R. Yamaguchi, K. Ishibashi, A. Hirano, K. Itaya, and M. Niwano
  • Organizer: International Conference on Nanoscience and Technology (ChinaNano2007)
  • Place of Presentation: Beijing, China
  • Year and Date: 2007-01-07
• [Patent(Industrial Property Rights)] 評価方法、評価装置、評価プログラム、太陽電池解析評価方法 (2008)
  • Inventor(s): 木村康男、庭野道夫、石橋健一
  • Industrial Property Rights Holder: 東北大学
  • Industrial Property Number: 2008-005559
  • Filing Date: 2008-01-15