Selective growth of metallic/semiconducting single-walled carbon nanotubes by precise supply control of chemically active species
| Project/Area Number |
19740339
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| Research Category |
Grant-in-Aid for Young Scientists (B)
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| Allocation Type | Single-year Grants |
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| Research Field |
Plasma science
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| Research Institution | Toyohashi University of Technology (2008)
Hokkaido University (2007) |
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Principal Investigator |
SUDA Yoshiyuki Toyohashi University of Technology, 工学部, 准教授 (70301942)
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| Co-Investigator(Renkei-kenkyūsha) |
SUGAWARA Hirotake 北海道大学大学院, 情報科学研究科, 准教授
TAKAYAMA Junichi 北海道大学大学院, 情報科学研究科, 修士課程
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| Project Period (FY) |
2007 – 2008
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| Project Status |
Completed (Fiscal Year 2008)
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| Budget Amount *help |
¥3,510,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥210,000)
Fiscal Year 2008: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2007: ¥2,600,000 (Direct Cost: ¥2,600,000)
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| Keywords | プラズマ応用 / 単層カーボンナノチューブ / カイラリティ / 化学気相堆積 / エッチング / 二酸化炭素 / 化学活性種 / ラマン分光 |
|---|
| Research Abstract |
(1) カーボンナノチューブ(CNT)の原料ガスであるCH_4にCO_2ガスを添加したところ,多層CNTの層数・内径・外径が増加した。また,CO_2添加により単層CNTの直径分布を太い方へ変化できた。(2)CNT成長領域から60cm程度の距離にプラズマを発生させることで,Si基板上に堆積したAl_2O_3/Fe/Al_2O_3の3層構造触媒から欠陥のほとんどない高品質な単層CNTが合成できた。
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Report
(3 results)
Research Products
(105 results)
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[Journal Article] Carbon Nanotube Growth in Alcohol Vapor Plasma
Author(s)
Yoshiyuki Suda, Atsushi Okita, Junichi Takayama, Akinori Oda, Hirotake Sugawara, Yosuke Sakai, (他2)
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Journal Title
Special issue : IEEE Transactions on Plasma Science Plasma-Based Surface Modification and Treatment Technologies (accepted)
NAID
Related Report
Peer Reviewed
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[Presentation] プラズマ支援化学気相堆積によるカーボンナノチューブ成長におけるメタンと水素ガスの役割2007
Author(s)
須田善行, 沖田篤士, 小田昭紀, 中村潤児, 前川将之, 高山純一, 浅岡典央, 福田祐司, 酒井洋輔, 菅原広剛
Organizer
2007年放電学会年次大会, D-5-2
Place of Presentation
芝浦工業大学
Year and Date
2007-11-15
Related Report
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[Presentation] Growth Promotion and Etching of Carbon Nanotubes by CO_2 in Chemical Vapor Deposition using CH_4 Gas2007
Author(s)
須田善行, 齊藤武, 沖田篤士, 高山純一, 中村潤児, 酒井洋輔, 菅原広剛
Organizer
AVS 54th International Symposium & Exhibition, NS-ThM7
Place of Presentation
Washington State Convention Center, Seattle, WA, USA
Related Report
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[Presentation] Investigation of Catalyst Reduction and Etching of Carbon Nanotubes Caused by Hydrogen During Carbon Nanotube Growth in CH_4/H_2 Plasmas2007
Author(s)
沖田篤士, 須田善行, 小田昭紀, 中村潤児, 日詰洋平, 菅原広剛, 酒井洋輔
Organizer
2007 MRS Fall Meeting, II5.10
Place of Presentation
Hynes Convention Center and Sheraton Boston Hotel, Boston, MA, USA
Related Report
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[Presentation] Growth Promotion and Etching of Carbon Nanotubes by Carbon Dioxide in Chemical Vapor Deposition using Methane Gas2007
Author(s)
須田善行, 齊藤武, 沖田篤士, 高山純一, 中村潤児, 酒井洋輔, 菅原広剛
Organizer
2007 MRS Fall Meeting, II5.15
Place of Presentation
Hynes Convention Center and Sheraton Boston Hotel, Boston, MA, USA
Related Report
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