Development of plasma-assisted coating method of narrow inner surface for micro molds and small advanced mechanical components

• Project/Area Number: 19740343
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Single-year Grants
• Research Field: Plasma science
• Research Institution: Nagoya University
• Principal Investigator: KOUSAKA Hiroyuki Nagoya University, 大学院・工学研究科, 准教授 (90362318)
• Project Period (FY): 2007 – 2008
• Project Status: Completed (Fiscal Year 2008)
• Budget Amount: ¥3,750,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥450,000); Fiscal Year 2008: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000); Fiscal Year 2007: ¥1,800,000 (Direct Cost: ¥1,800,000)
• Keywords: DLC / マイクロ波 / 内面 / 細穴 / 高アスペクト比 / プラズマ / 微小口径

Research Abstract

本研究により, 従来法では困難であった内径がミリメートルサイズの細穴内面へのDLC(Diamond-Like Carbon)成膜が可能となった.また, 細穴内を伝搬する電磁波の電磁界分布と電磁波からパワーを吸収することによって生成維持されるプラズマの分布とをSelf-consistentに解析できるシミュレーションコードを開発・運用し, 細穴内面の電磁界構造を明らかにするとともに, より長尺の細穴内面で均一にプラズマを生成するための指針を得た.

Research Products

• [Journal Article] Reduction of adhesion force between chloride-isobutene rubber and stainless-steel ball after oxygen plasma treatment (2009)
  • Author(s): Jong-Hyoung Kim, Hiroyuki Kousaka, etc.
  • Journal Title: Journal of Materials and Manufacturing Processes (印刷中)
  • Peer Reviewed
• [Journal Article] Relationship between Real Contact Area and Adhesion Force of Plasma-treated Rubber Sheets Against Stainless-steel Ball (2008)
  • Author(s): Jong-Hyoung Kim, Isami Nitta, Hiroyuki Kousaka, etc.
  • Journal Title: Tribology Online Vol.3 Pages: 361-365
  • NAID: 130000453665
  • Peer Reviewed
• [Journal Article] Relationship between Real Contact Area and Adhesion Force of Plasma-treated Rubber Sheets Against Stainless-steel Ball (2008)
  • Author(s): Jong-Hyoung Kim, Isami Nitta, Hiroyuki Kousaka, etc.
  • Journal Title: Tribology Online 3 Pages: 361-365
  • NAID: 130000453665
  • Peer Reviewed
• [Journal Article] High-speed and uniform deposition of amorphous carbon on inner surface of metal tube with microwave-excited high-density plasma column (2007)
  • Author(s): Hiroyuki Kousaka, Sho Kishine, and Noritsugu Umehara
  • Journal Title: IEEE Conf. Proc. Int. Symp. Micro-NanoMechatronics and Human Science Pages: 490-493
  • Peer Reviewed
• [Journal Article] High-speed and uniform deposition of amorphous carbon on inner surface of metal tube with microwave-excited high-density plasma column (2007)
  • Author(s): Hiroyuki Kousaka, Sho Kishine, and Noritsugu Umehara
  • Journal Title: IEEE Conference proceedings of International Symposium on Micro-NanoMechatronics and Human Science, 2007 (MHS'07). Pages: 490-493
  • Peer Reviewed
• [Journal Article] Reduction of adhesion force between chloride-isobutene rubber and stainless-steel ball after oxygen plasma treatment
  • Author(s): Jong-Hyoung Kim, Hiroyuki Kousaka, etc.
  • Journal Title: Journal of Materials and Manufacturing Processes accepted
  • Peer Reviewed
• [Presentation] MVP法による細管内面プラズマ生成への電磁波周波数の影響 (2009)
  • Author(s): 門脇慎之介, 上坂裕之, 梅原徳次, 他
  • Organizer: 機械学会東海支部第58期支部総会講演会
  • Place of Presentation: 岐阜大学
  • Year and Date: 2009-03-17
• [Presentation] Novel DLC synthesis method employing high-density plasma sustained by micro-wave propagation along plasma-sheath in-terface (Invited) (2009)
  • Author(s): Hiroyuki Kousaka and Noritsugu Umehara
  • Organizer: First International sympo-sium on advanced Plasma Science and its Applications (ISPLASMA)
  • Place of Presentation: Nagoya University
  • Year and Date: 2009-03-11
• [Presentation] Novel DLC synthesis method employing high-density plasma sustained by microwave propagation along plasma-sheath interface (Invited) (2009)
  • Author(s): Hiroyuki Kousaka and Noritsugu Umehara
  • Organizer: First International symposium on advanced Plasma Science and its Applications (ISPLASMA)
  • Place of Presentation: 名古屋大学
  • Year and Date: 2009-03-11
• [Presentation] MVP 法による細穴内面プラズマ処理・DLC コーティング法の開発(招待) (2009)
  • Author(s): 上坂裕之
  • Organizer: 理研シンポジウム第11回「トライボコーテイングの現状と将来」
  • Place of Presentation: 理化学研究所
  • Year and Date: 2009-02-27
• [Presentation] MVP法による細穴内面プラズマ処理・DLCコーティング法の開発(招待) (2009)
  • Author(s): 上坂裕之
  • Organizer: 理研シンポジウム第11回「トライボコーテイングの現状と将来」
  • Place of Presentation: 理化学研究所
  • Year and Date: 2009-02-27
• [Presentation] Tribological properties of di-amond-like carbon film deposited on the inner surface of metal tube by using micro-wave-excited high-density plasma (2009)
  • Author(s): Hiroyuki Kousaka, Mori Kazunori, Tamura Noboru, etc.
  • Organizer: プラズマ科学シンポジウム2009/第26回プラズマプロセシング研究会
  • Place of Presentation: 名古屋大学
  • Year and Date: 2009-02-04
• [Presentation] Tribological properties of diamond-like carbon film deposited on the inner surface of metal tube by using microwave-excited high-density plasma (2009)
  • Author(s): Hiroyuki Kousaka, Mori Kazunori, Tamura Noboru, etc.
  • Organizer: プラズマ科学シンポジウム2009/第26回プラズマプロセシング研究会プロシーディングス
  • Place of Presentation: 名古屋大学
  • Year and Date: 2009-02-04
• [Presentation] マイクロ波励起高密度プラズマCVDによって細穴内面に成膜されたDLC膜の摩擦摩耗特性 (2008)
  • Author(s): 上坂裕之, 森一憲, 梅原徳次, 他
  • Organizer: 電気学会プラズマ研究会
  • Place of Presentation: 同志社大学
  • Year and Date: 2008-12-19
• [Presentation] Tribological propeties of DLC film deposited on inner surface of narrow metal tube by using a new-type plasma CVD apparatus employing microwave propagation along plas-ma-sheath interface (Invited) (2008)
  • Author(s): H. Kousaka, N. Tamura, etc.
  • Organizer: The IUMRS International Conference in Asia 2008
  • Place of Presentation: Nagoya
  • Year and Date: 2008-12-10
• [Presentation] Tribological propeties of DLC film deposited on inner surface of narrow metal tube by using a new-type plasma CVD apparatus employing microwave propagati on along plasma-sheath interface (Invited) (2008)
  • Author(s): H. Kousaka, N. Tamura, etc.
  • Organizer: The IUMRS International Conference in Asia 2008
  • Place of Presentation: 名古屋国際会議場
  • Year and Date: 2008-12-10
• [Presentation] マイクロ波励起高密度プラズマCVDによって細穴内面に成膜されたDLC膜の摩擦摩耗特性 (2008)
  • Author(s): 上坂裕之, 田村登, 他
  • Organizer: トライボロジー会議2008秋
  • Place of Presentation: 名城大学
  • Year and Date: 2008-09-16
• [Presentation] マイクロ波励起高密度プラズマCVDによつて細穴内面に成膜されたDLC膜の摩擦摩耗特性 (2008)
  • Author(s): 上坂裕之, 田村登, 他
  • Organizer: トライボロジー学会, 2008秋名古屋
  • Place of Presentation: 名城大学
  • Year and Date: 2008-09-16
• [Presentation] Axial dis-tribution of electron density in micro-wave-excited high-density plasma column sustained in narrow metal tube (2008)
  • Author(s): H. Kousaka, S. Kadowaki, etc.
  • Organizer: The 26th Int. Symposium on Rarefied Gas Dynamics
  • Place of Presentation: Kyoto University
  • Year and Date: 2008-07-25
• [Presentation] Axial distribution of electron density in microwave-excited high-density plasma column sustained in narrow metal tube (2008)
  • Author(s): H. Kousaka, S. Kadowaki, etc.
  • Organizer: The 26 th Int. Symposium on Rarefied Gas Dynamics
  • Place of Presentation: 京都大学
  • Year and Date: 2008-07-25
• [Presentation] 表面波励起プラズマを用いた円筒内面DLC成膜の高速化に関する研究 (2008)
  • Author(s): 上坂裕之, 岸根翔, 梅原徳次
  • Organizer: 電気学会プラズマ研究会
  • Place of Presentation: 名古屋工業大学
  • Year and Date: 2008-05-23
• [Presentation] 金属部品の細穴内面処理のためのマイクロ波励起高密度プラズマ生成 (2008)
  • Author(s): 上坂裕之, 門脇慎之介, 梅原徳次
  • Organizer: 電気学会プラズマ研究会
  • Place of Presentation: 名古屋工業大学
  • Year and Date: 2008-05-23
• [Presentation] 微小口径金属管内に生成されるマイクロ波励起高密度プラズマの電子密度分布 (2008)
  • Author(s): 門脇慎之介, 上坂裕之, 他
  • Organizer: 平成20年春季第55回応用物理学関係連合講演会
  • Place of Presentation: 日本大学(船橋)
  • Year and Date: 2008-03-28
• [Presentation] 表面波励起プラズマCVDによるDLC成膜速度に及ぼす印加バイアスの影響 (2008)
  • Author(s): 上坂裕之, 岸根翔, 他
  • Organizer: 平成20年春季第55回応用物理学関係連合講演会
  • Place of Presentation: 日本大学(船橋)
  • Year and Date: 2008-03-27
• [Presentation] 表面波励起高密度プラズマ柱による円筒内面高速DLCコーティング法の開発 (2008)
  • Author(s): 岸根 翔, 上坂 裕之, 他
  • Organizer: 日本機会学会東海支部第57期総会講演会
  • Place of Presentation: 名古屋大学
  • Year and Date: 2008-03-10
• [Presentation] 表面波励起高密度プラズマ柱による円筒内面高速DLCコーティング法の開発 (2008)
  • Author(s): 岸根 翔, 上坂 裕之, 他
  • Organizer: 日本機会学会東海支部 第57期総会講演会
  • Place of Presentation: 名古屋大学
  • Year and Date: 2008-03-10
• [Presentation] New DLC Coating Technology (Invited) (2008)
  • Author(s): H. Kousaka
  • Organizer: The 6th International Workshop on Advanced Plasma Processing and Diagnostics & The 3rd Plasma Application Monodzukuri (PLAM)
  • Place of Presentation: Nagoya University
  • Year and Date: 2008-01-06
• [Presentation] New DLC Coating Technology (Invited) (2008)
  • Author(s): H. Kousaka
  • Organizer: The 6th International Workshop on Advanced Plasma Processing and Diagnostics & The 3rd Plasma Application Monodzukuri (PLAM)
  • Place of Presentation: 名古屋大学
  • Year and Date: 2008-01-06
• [Patent(Industrial Property Rights)] 配管内外気圧差を利用して配管内のみにマイクロ波励起高密度プラズマを生成する方法及び装置 (2008)
  • Inventor(s): 上坂裕之, 守谷修二, 中尾 賢
  • Industrial Property Rights Holder: 名古屋大学, 東京エレクトロン(株)
  • Industrial Property Number: 2008-081840
  • Filing Date: 2008-03-26
• [Patent(Industrial Property Rights)] 配管内外気圧差を利用して配管内のみにマイクロ波励起高密度プラズマを生成する方法及び装置 (2008)
  • Inventor(s): 上坂裕之, 守谷修二, 中尾賢
  • Industrial Property Rights Holder: 名古屋大学, 東京エレクトロン(株)
  • Industrial Property Number: 2008-081840
  • Filing Date: 2008-03-26
• [Patent(Industrial Property Rights)] 配管内外気圧差を利用して配管内のみにマイクロ波励起高密度プラズマを生成する方法及び装置 (2007)
  • Inventor(s): 上坂裕之, 近藤明弘, 進藤豊彦
  • Industrial Property Rights Holder: 名古屋大学, (有)CCS
  • Industrial Property Number: 2007-239533
  • Filing Date: 2007-09-14
• [Patent(Industrial Property Rights)] 電磁波プラズマ発生装置 (2007)
  • Inventor(s): 上坂裕之, 近藤明弘, 進藤豊彦
  • Industrial Property Rights Holder: 名古屋大学, (有)CCS
  • Industrial Property Number: 2007-239533
  • Filing Date: 2007-09-14