Development of AFM lithography for conductance measurements of single molecules

• Project/Area Number: 19760019
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Single-year Grants
• Research Field: Thin film/Surface and interfacial physical properties
• Research Institution: Tohoku University
• Principal Investigator: AKIYAMA Kotone Tohoku University, 原子分子材料科学高等研究機構, 助教 (60447175)
• Project Period (FY): 2007 – 2008
• Project Status: Completed (Fiscal Year 2008)
• Budget Amount: ¥3,750,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥450,000); Fiscal Year 2008: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000); Fiscal Year 2007: ¥1,800,000 (Direct Cost: ¥1,800,000)
• Keywords: 走査プローブ顕微鏡

Research Abstract

原子間力顕微鏡(AFM)の探針先端から電界蒸発により原子を飛ばし試料表面にパターン描画するAFMリソグラフィー手法をより精度の高い手法として確立した。水晶振動子に取り付けた極細金属ワイヤーを集束イオンビームにより加工してAFM探針とし、非接触法によって探針・試料間距離制御を行うことにより、自然酸化膜付きのSi基板上に線幅20〜30nm程度の金属細線描画や金属ナノドットのパターン形成を行った。

Research Products

• [Journal Article] Nanoscale chemical imaging by scanning tunneling microscopy assisted by synchrotron radiation (2009)
  • Author(s): T. Okuda, T. Eguchi, Kotone Akiyama, A. Harasawa, T. Kinoshita, Y. Hasegawa, M. Kawamori, Y. Haruyama, S. Matsui
  • Journal Title: Physical Review Letters 102 Pages: 1055031-4
  • Peer Reviewed
• [Journal Article] Nanoscale chemical imaging by scanning tunneling microscopy assisted by synchrotron radiation (2009)
  • Author(s): T. Okuda, K. Akiyama, et.al.
  • Journal Title: Physical Review Letters 102
  • Peer Reviewed
• [Journal Article] Nanoscale lithography with frequency-modulation atomic force microscopy (2008)
  • Author(s): M. Hamada, T. Eguchi, K. Akivama, Y. Hasegawa
  • Journal Title: Review of Scientific Instruments 79 Pages: 1237061-4
  • Peer Reviewed
• [Journal Article] Nanoscale lithography with frequency-modulation atomic force microscopy (2008)
  • Author(s): M. Hamada, K. Akiyama, et.al.
  • Journal Title: Review of Scientific Instruments 79
  • Peer Reviewed
• [Journal Article] Functional probes for scanning probe microscopy (2007)
  • Author(s): Kotone Akiyama, T. Eguchi, T. An, Y. Fujikawa, T. Sakurai and Y. Hasegawa
  • Journal Title: Journal of Physics : Conference Series 61 Pages: 22-25
  • Peer Reviewed
• [Journal Article] Functional probes for scanning probe microscopy (2007)
  • Author(s): Kotone Akiyama, et. al.
  • Journal Title: Journal of Physics: Conference Series 61 Pages: 22-25
  • Peer Reviewed
• [Presentation] Nano-scale lithography with frequency modulation AFM (2009)
  • Author(s): Kotone Akiyama
  • Organizer: Surface kinetics international conference
  • Place of Presentation: Salt Lake City, USA
  • Year and Date: 2009-03-20
• [Presentation] Mechanical and electrical measurements of nano-materials (2009)
  • Author(s): Kotone Akiyama
  • Organizer: WPI-AIMR annual workshop
  • Place of Presentation: Zao
  • Year and Date: 2009-03-04
• [Presentation] Nano-scale lithography with frequency modulation atom is force microscopy (2008)
  • Author(s): Kotone Akiyama
  • Organizer: 16th international colloquium on scanning probe microscopy
  • Place of Presentation: Ttagawa
  • Year and Date: 2008-12-11
• [Presentation] Nano-scale lithography with frequency modulation atomic force microscopy (2008)
  • Author(s): Kotone Akiyama
  • Organizer: 16th international colloquium on scanning probemicroscopy
  • Place of Presentation: Atagawa
  • Year and Date: 2008-12-11
• [Presentation] Nano-scale lithography with frequency modulation atom is force microscopy (2008)
  • Author(s): Kotone Akiyama
  • Organizer: ELyT Lab workshop
  • Place of Presentation: Sendai
  • Year and Date: 2008-12-01
• [Presentation] Nano-scale lithography with frequency modulation atomic force microscopy (2008)
  • Author(s): Kotone Akiyama
  • Organizer: ELyT Lab workshop
  • Place of Presentation: Sendai
  • Year and Date: 2008-12-01
• [Presentation] Nano-scale lithography with frequency-modulation atomic force microscopy (2008)
  • Author(s): Kotone Akiyama
  • Organizer: International conference on nanoscience + technology 2008
  • Place of Presentation: Keystone, USA
  • Year and Date: 2008-07-24
• [Presentation] Nano-scale lithography with frequency-modulation atomic force microscopy (2008)
  • Author(s): Kotone Akiyama
  • Organizer: International conference on nanoscience+technology 2008
  • Place of Presentation: Keystone, USA
  • Year and Date: 2008-07-24
• [Presentation] 高精度AFMリソグラフィー手法の開発による単一分子の電気伝導測定 (2008)
  • Author(s): 秋山琴音
  • Organizer: 特定領域「ナノリンク分子の電気伝導」領域会議
  • Place of Presentation: 函館
  • Year and Date: 2008-07-04
• [Presentation] Development of nano-scale AFM lithography using a metal-tip cantilever (2007)
  • Author(s): Kotone Akiyama
  • Organizer: IVC-17/ICSS-13 and ICN+T2007
  • Place of Presentation: Stockholm
  • Year and Date: 2007-07-02
• [Presentation] Development of nano-scale AFM lithography using a metal-tip cantilever (2007)
  • Author(s): Kotone Akiyama
  • Organizer: IVC-17/ICSS-13 and ICN+T2007
  • Place of Presentation: ストックホルム
  • Year and Date: 2007-07-02