Ultra-Precision Measurement System for Large Aspheric Molding Die

• Project/Area Number: 19760092
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Single-year Grants
• Research Field: Production engineering/Processing studies
• Research Institution: Chubu University
• Principal Investigator: CAO Guohui Chubu University, 先進計測研究センター, 研究員 (80424927)
• Project Period (FY): 2007 – 2008
• Project Status: Completed (Fiscal Year 2008)
• Budget Amount: ¥2,960,000 (Direct Cost: ¥2,600,000、Indirect Cost: ¥360,000); Fiscal Year 2008: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000); Fiscal Year 2007: ¥1,400,000 (Direct Cost: ¥1,400,000)
• Keywords: 超精密加工 / 非球面金型 / X線望遠鏡 / 形状計測

Research Abstract

大型非球面金型(直径300mm及び500mm、ミラー面の長さ400mmの放物面と双曲面からなる)を超精密ダイヤモンド切削し、その形状を機上の変位センサーで測定し、補正加工した。その結果、形状精度±92nmを得た。円筒の場合、形状精度±54nmを得た。上記の形状計測実験を通じて、機上超精密非球面形状計測法を開発した。

Research Products

• [Journal Article] Straightness Error Compensation for Ultra-Precision Machining Based on a Straightness Gauge (2008)
  • Author(s): Cao, Guohui
  • Journal Title: Key Engineering Materials 381-382 Pages: 105-108
  • Peer Reviewed
• [Journal Article] Straightness Error Compensation for Ultra-Precision Machining Based on a Straightness Gauge (2005)
  • Author(s): Guohui Cao, Yoshiharu Namba
  • Journal Title: Key Engineering Materials Vol.381-382 Pages: 105-10
  • Peer Reviewed
• [Presentation] 非球面光学素子の形状計測 (2009)
  • Author(s): 曹国輝,難波義治
  • Organizer: 2008秋季第69回応用物理学会学術講演会
  • Place of Presentation: 中部大学,春日井市,日本
  • Year and Date: 2009-09-04
• [Presentation] Precision Shape Measurement of Large Aspheric Optics Based on Error Compensation (2008)
  • Author(s): Guohui Cao, Yoshiharu Namba
  • Organizer: The 6th CHINA-JAPAN International Conference on Ultra-Precision Machining (CJICUPM2008)
  • Place of Presentation: Hunan Univ., China
  • Year and Date: 2008-11-24
• [Presentation] Precision Shape Measurement of Large Aspheric Optics Based on Error Compensation (2008)
  • Author(s): Cao, Guohui
  • Organizer: The 6th CHINA-JAPAN International Conference on Ultra-Precision Machining (CJICUPM2008)
  • Place of Presentation: Hunan University, Changsha, China
  • Year and Date: 2008-11-24
• [Presentation] 誤差補正による非球面光学素子の超精密形状計測 (2008)
  • Author(s): 曹国輝,難波義治
  • Organizer: 日本機械学会第7回生産加工・工作機械部門講演会
  • Place of Presentation: 長良川国際会議場,岐阜,日本
  • Year and Date: 2008-11-21
• [Presentation] 誤差補正による非球面光学素子の超精密形状計測 (2008)
  • Author(s): 曹国輝
  • Organizer: 第7回生産加工・工作機械部門講演会
  • Place of Presentation: 長良川国際会議場,岐阜
  • Year and Date: 2008-11-21
• [Presentation] 非球面光学素子の形状計測 (2008)
  • Author(s): 曹国輝
  • Organizer: 2008秋季第69回応用物理学会学術講演会
  • Place of Presentation: 中部大学, 春日井市
  • Year and Date: 2008-09-04
• [Presentation] Straightness Error Compensation for Ultra-Precision Machining Based on a Straightness Gauge (2007)
  • Author(s): Guohui Cao, Yoshiharu Namba
  • Organizer: 8th International Symposium on Measurement Technology and Intelligent Instruments
  • Place of Presentation: Tohoku Univ., Sendai, Japan
  • Year and Date: 2007-09-25
• [Presentation] Straightness Error Compensation for Ultra-Precision Machining Based on a Straighfness Gauge (2007)
  • Author(s): Guohui CAO
  • Organizer: 8th International Symposium on Measurement Technology and Intelligent Instruments
  • Place of Presentation: Tohoku University Sendai, Japan
  • Year and Date: 2007-09-25