Low-temperature deposition of crystalline metal oxide film under reactive field using supercritical fluid

• Project/Area Number: 19760222
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Single-year Grants
• Research Field: Electronic materials/Electric materials
• Research Institution: Sophia University
• Principal Investigator: HIROSHI Uchida Sophia University, 理工学部, 助教 (60327880)
• Project Period (FY): 2007 – 2008
• Project Status: Completed (Fiscal Year 2008)
• Budget Amount: ¥3,230,000 (Direct Cost: ¥2,900,000、Indirect Cost: ¥330,000); Fiscal Year 2008: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000); Fiscal Year 2007: ¥1,800,000 (Direct Cost: ¥1,800,000)
• Keywords: 超臨界流体 / 薄膜 / 酸化物 / 二酸化炭素 / 半導体デバイス / シリコンウェハー / 有機金属化合物 / 金属板

Research Abstract

超臨界流体応用の技術を利用し、従来の手法よりも低温での無機材料薄膜合成プロセスの構築を検討した。超臨界二酸化炭素(CO2)流体中においてSi ウェハ、Pt, Cu, Al、SUS、ナイロン系高分子等の基板物質は約200℃程度まで変質せず安定に存在した。一方、有機金属化合物Ti(O・i-C3H7)2(C11H19O2)2等のβ-ジケトン錯体は約100℃付近から分解を開始し、薄膜状の結晶質酸化チタンTiO2(anatase)堆積物を形成した。

Research Products

• [Journal Article] Low-TemperatureProcessing of Sol-Gel Derived Metal OxideThin Films using Supercritical Carbon Dioxide Fluid
  • Author(s): Hiroshi UCHIDA, Kaori FUJIOKA andSeiichiro KODA
  • Journal Title: Meter. Res. Soc. Proc 1113E(in press)
  • Peer Reviewed
• [Presentation] Low-Temperature Processing of Sol-Gel Derived Metal Oxide Thin Films using Supercritical Carbon Dioxide Fluid (2008)
  • Author(s): Hiroshi UCHIDA, Kaori FUJIOKA and Seiichiro KODA
  • Organizer: MRS Fall Meeting 2008
  • Place of Presentation: Boson, MA, USA
• [Presentation] Low- Temperature Processing of Sol- Gel Derived Metal Oxide Thin Films using Supercritical Carbon Dioxide Fluid (2008)
  • Author(s): Hiroshi UCHIDA, et.al.
  • Organizer: MRS Fall Meeting 2008
  • Place of Presentation: Hynes Convention Center (Boston, MA, USA)
• [Presentation] 超臨界二酸化炭素流体中における有機金属化合物の分解および酸化物薄膜の堆積 (2007)
  • Author(s): 内田寛、加納富由樹、助川太一、由井和子、幸田清一郎
  • Organizer: 日本セラミックス協会第20回秋季シンポジウム
  • Place of Presentation: 名古屋工業大学
  • Year and Date: 2007-09-12
• [Remarks]
  • URL: http://pweb.cc.sophia.ac.jp/h-uchida/