Interface structure and hydrogen detection of Schottky contact to polar-ZnO single crystal

• Project/Area Number: 19760224
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Single-year Grants
• Research Field: Electronic materials/Electric materials
• Research Institution: National Institute for Materials Science
• Principal Investigator: NAGATA Takahiro National Institute for Materials Science, 半導体材料センター, 研究員 (10421439)
• Research Collaborator: CHIKYOW Toyohiro 独立行政法人物質・材料研究機構, 半導体材料センター, センター長 (10354333)
• Project Period (FY): 2007 – 2008
• Project Status: Completed (Fiscal Year 2008)
• Budget Amount: ¥3,170,000 (Direct Cost: ¥2,900,000、Indirect Cost: ¥270,000); Fiscal Year 2008: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000); Fiscal Year 2007: ¥2,000,000 (Direct Cost: ¥2,000,000)
• Keywords: 電気・電子材料(半導体、誘電体、磁性体、超誘電体、有機物、絶縁体、超伝導体など) / ワイドバンドギャップ半導体 / 電子・電気材料 / 半導体物性 / ワイドバンドギャップ / センサー / 金属 / 半導体界面

Research Abstract

酸化亜鉛(ZnO)などのワイドバンドギャップ半導体は、これまで光学応用が主であったが、近年、電子デバイス用の材料としても注目されており、電気特性制御、電極材料の最適化は重要な技術である。そこでZnOのショットキーダイオードを作成し、金属/酸化物界面における界面構造の変化と電気特性への影響を明らかにし、紫外光応答と共に、水素への応答を確認した。

Research Products

• [Journal Article] Interface structure and the chemical states of Pt film on polar-ZnO single crystal to be published in Applied Physics Letter (2009)
  • Author(s): T. Nagata, J. Volk, M. Haemori, Y. Yamashita, H. Yoshikawa, S. Ueda, K. Kobayashi, R. Hayakawa, M. Yoshitake, and T. Chikyow
  • Peer Reviewed
• [Journal Article] Capability of focused Ar ion beam sputtering method for combinatorial synthesis of metal films (2009)
  • Author(s): T. Nagata, M. Haemori, and T. Chikyow
  • Journal Title: Journal of Vacuum Science and Technology A Vol.27 Pages: 492-495
  • Peer Reviewed
• [Journal Article] Crystal Structures of Pt-Ru Alloys Schottky Contacts on ZnO by Combinatorial Ion Beam Deposition Method (2009)
  • Author(s): T. Nagata, P. Ahmet, and T. Chikyow
  • Journal Title: Japanese Journal of Applied Physics Vol.46 Pages: 2907-2909
  • Peer Reviewed
• [Journal Article] Capability of focused Ar ion beam sputtering method for combinatorial synthesis of metal films (2009)
  • Author(s): T. Nagata, M. Haemori, and T. Chikyow
  • Journal Title: Journal of Vacuum Science and Technology A 27 Pages: 492-495
  • Peer Reviewed
• [Journal Article] Crystal Structures of Pt-Ru Alloy Schottky Contacts on ZnO by Conbinatorial Ion Beam Deposition (2007)
  • Author(s): 長田貴弘
  • Journal Title: JAPANESE JOURNAL OF APPLIED PHYSICS 46 Pages: 2907-2909
  • Peer Reviewed
• [Presentation] Interface structure and chemical states of metal contact on oxide materials (2009)
  • Author(s): T. Nagata 他
  • Organizer: The Fifth Internation Nanotechnology Conference on Communications and Cooperation
  • Place of Presentation: Los Angels (UCLA), USA
  • Year and Date: 2009-05-20
• [Presentation] Composition spread metal thin film fabrication by combinatorial sputtering technique (2008)
  • Author(s): T. Nagata 他
  • Organizer: 5th International Conference on Combinatorial and High-Throughput Materials Science
  • Place of Presentation: Seeon, Germany
  • Year and Date: 2008-09-29
• [Presentation] Schottky barrier height control of Pt-based Binary-alloy on ZnO by Combinatorial Method (2008)
  • Author(s): T. Nagata, M. Haemori, J. Volk, Y. Yamashita, S. Ueda, H. Yoshikawa, K. Kobayashi, E. Hayakawa, M. Yoshitake, and T. Chikyow
  • Organizer: 50th Annual TMS Electronic Materials Conference(EMC)
  • Place of Presentation: University of California Santa Barbara, USA
  • Year and Date: 2008-06-26
• [Presentation] Schottky barrier height control of Pt-based Binary-alloy on ZnO by Combinatorial Method (2008)
  • Author(s): T. Nagata 他
  • Organizer: 50th Annual TMS Electronic Materials Conference, June 26th
  • Place of Presentation: Santa Barbara (UCSB), USA
• [Presentation] Pt-based Binary-alloy Schottky Metal Library Fabrication for ZnO by Combinatorial Method (2007)
  • Author(s): T. Nagata 他
  • Organizer: 2007 Materials Research Society (MRS) Fall Meeting
  • Place of Presentation: Boston USA
  • Year and Date: 2007-11-29
• [Presentation] コンビナトリアル手法によるZnO上のPt系合金Schottky電極の作成 (2007)
  • Author(s): 長田貴弘 他
  • Organizer: 第68回秋季応用物理学会学術講演
  • Place of Presentation: 北海道工業大学,札幌市
  • Year and Date: 2007-09-06
• [Presentation] コンビナトリアル手法によるZnO上のPt系合金Schgttky電極の作成 (2007)
  • Author(s): 長田貴弘
  • Organizer: 2007年秋季 第68回応用物理学会学術講演会
  • Place of Presentation: 北海道工業大学
  • Year and Date: 2007-09-06