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Interface structure and hydrogen detection of Schottky contact to polar-ZnO single crystal

Research Project

Project/Area Number 19760224
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeSingle-year Grants
Research Field Electronic materials/Electric materials
Research InstitutionNational Institute for Materials Science

Principal Investigator

NAGATA Takahiro  National Institute for Materials Science, 半導体材料センター, 研究員 (10421439)

Research Collaborator CHIKYOW Toyohiro  独立行政法人物質・材料研究機構, 半導体材料センター, センター長 (10354333)
Project Period (FY) 2007 – 2008
Project Status Completed (Fiscal Year 2008)
Budget Amount *help
¥3,170,000 (Direct Cost: ¥2,900,000、Indirect Cost: ¥270,000)
Fiscal Year 2008: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2007: ¥2,000,000 (Direct Cost: ¥2,000,000)
Keywords電気・電子材料(半導体、誘電体、磁性体、超誘電体、有機物、絶縁体、超伝導体など) / ワイドバンドギャップ半導体 / 電子・電気材料 / 半導体物性 / ワイドバンドギャップ / センサー / 金属 / 半導体界面
Research Abstract

酸化亜鉛(ZnO)などのワイドバンドギャップ半導体は、これまで光学応用が主であったが、近年、電子デバイス用の材料としても注目されており、電気特性制御、電極材料の最適化は重要な技術である。そこでZnOのショットキーダイオードを作成し、金属/酸化物界面における界面構造の変化と電気特性への影響を明らかにし、紫外光応答と共に、水素への応答を確認した。

Report

(3 results)
  • 2008 Annual Research Report   Final Research Report ( PDF )
  • 2007 Annual Research Report
  • Research Products

    (12 results)

All 2009 2008 2007

All Journal Article (5 results) (of which Peer Reviewed: 5 results) Presentation (7 results)

  • [Journal Article] Interface structure and the chemical states of Pt film on polar-ZnO single crystal to be published in Applied Physics Letter2009

    • Author(s)
      T. Nagata, J. Volk, M. Haemori, Y. Yamashita, H. Yoshikawa, S. Ueda, K. Kobayashi, R. Hayakawa, M. Yoshitake, and T. Chikyow
    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] Capability of focused Ar ion beam sputtering method for combinatorial synthesis of metal films2009

    • Author(s)
      T. Nagata, M. Haemori, and T. Chikyow
    • Journal Title

      Journal of Vacuum Science and Technology A Vol.27

      Pages: 492-495

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] Crystal Structures of Pt-Ru Alloys Schottky Contacts on ZnO by Combinatorial Ion Beam Deposition Method2009

    • Author(s)
      T. Nagata, P. Ahmet, and T. Chikyow
    • Journal Title

      Japanese Journal of Applied Physics Vol.46

      Pages: 2907-2909

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] Capability of focused Ar ion beam sputtering method for combinatorial synthesis of metal films2009

    • Author(s)
      T. Nagata, M. Haemori, and T. Chikyow
    • Journal Title

      Journal of Vacuum Science and Technology A 27

      Pages: 492-495

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Crystal Structures of Pt-Ru Alloy Schottky Contacts on ZnO by Conbinatorial Ion Beam Deposition2007

    • Author(s)
      長田貴弘
    • Journal Title

      JAPANESE JOURNAL OF APPLIED PHYSICS 46

      Pages: 2907-2909

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Presentation] Interface structure and chemical states of metal contact on oxide materials2009

    • Author(s)
      T. Nagata 他
    • Organizer
      The Fifth Internation Nanotechnology Conference on Communications and Cooperation
    • Place of Presentation
      Los Angels (UCLA), USA
    • Year and Date
      2009-05-20
    • Related Report
      2008 Final Research Report
  • [Presentation] Composition spread metal thin film fabrication by combinatorial sputtering technique2008

    • Author(s)
      T. Nagata 他
    • Organizer
      5th International Conference on Combinatorial and High-Throughput Materials Science
    • Place of Presentation
      Seeon, Germany
    • Year and Date
      2008-09-29
    • Related Report
      2008 Annual Research Report 2008 Final Research Report
  • [Presentation] Schottky barrier height control of Pt-based Binary-alloy on ZnO by Combinatorial Method2008

    • Author(s)
      T. Nagata, M. Haemori, J. Volk, Y. Yamashita, S. Ueda, H. Yoshikawa, K. Kobayashi, E. Hayakawa, M. Yoshitake, and T. Chikyow
    • Organizer
      50th Annual TMS Electronic Materials Conference(EMC)
    • Place of Presentation
      University of California Santa Barbara, USA
    • Year and Date
      2008-06-26
    • Related Report
      2008 Annual Research Report
  • [Presentation] Schottky barrier height control of Pt-based Binary-alloy on ZnO by Combinatorial Method2008

    • Author(s)
      T. Nagata 他
    • Organizer
      50th Annual TMS Electronic Materials Conference, June 26th
    • Place of Presentation
      Santa Barbara (UCSB), USA
    • Related Report
      2008 Final Research Report
  • [Presentation] Pt-based Binary-alloy Schottky Metal Library Fabrication for ZnO by Combinatorial Method2007

    • Author(s)
      T. Nagata 他
    • Organizer
      2007 Materials Research Society (MRS) Fall Meeting
    • Place of Presentation
      Boston USA
    • Year and Date
      2007-11-29
    • Related Report
      2008 Final Research Report
  • [Presentation] コンビナトリアル手法によるZnO上のPt系合金Schottky電極の作成2007

    • Author(s)
      長田貴弘 他
    • Organizer
      第68回秋季応用物理学会学術講演
    • Place of Presentation
      北海道工業大学,札幌市
    • Year and Date
      2007-09-06
    • Related Report
      2008 Final Research Report
  • [Presentation] コンビナトリアル手法によるZnO上のPt系合金Schgttky電極の作成2007

    • Author(s)
      長田貴弘
    • Organizer
      2007年秋季 第68回応用物理学会学術講演会
    • Place of Presentation
      北海道工業大学
    • Year and Date
      2007-09-06
    • Related Report
      2007 Annual Research Report

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Published: 2007-04-01   Modified: 2016-04-21  

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