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simultaneous monitoring of multi-metallic atoms on sputtering process

Research Project

Project/Area Number 19760508
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeSingle-year Grants
Research Field Material processing/treatments
Research InstitutionWakayama University

Principal Investigator

OHTA Takayuki  Wakayama University, システム工学部, 助教 (10379612)

Project Period (FY) 2007 – 2008
Project Status Completed (Fiscal Year 2008)
Budget Amount *help
¥3,260,000 (Direct Cost: ¥2,900,000、Indirect Cost: ¥360,000)
Fiscal Year 2008: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2007: ¥1,700,000 (Direct Cost: ¥1,700,000)
Keywordsプラズマ診断 / スパッタリング / 吸収分光法 / プラズマ / 光源 / モニタリング
Research Abstract

スパッタプロセスは, 非常に幅広い薄膜プロセスに用いられている. 本研究では, 高機能薄膜を高品質に形成するために, スパッタプラズマ中の数種類の金属原子密度を同時にモニタリングする技術の開発を目的とした. 具体的には, 金属原子密度測定用の吸収分光用光源の開発し, 透明導電膜製膜スパッタプラズマ中のInとZn原子密度の同時モニタリングを行い, 金属原子の絶対密度計測に成功した.

Report

(3 results)
  • 2008 Annual Research Report   Final Research Report ( PDF )
  • 2007 Annual Research Report
  • Research Products

    (27 results)

All 2009 2008 2007 Other

All Journal Article (2 results) (of which Peer Reviewed: 2 results) Presentation (24 results) Remarks (1 results)

  • [Journal Article] Simultaneous monitoring of metallic atom densities in sputtering process using multi-micro hollow cathode lamp2007

    • Author(s)
      Ohta, M. Ito, Y. Tachibana, S. Taneda, S. Takashima, M. Hori, H. Kano, S. Den
    • Journal Title

      Appl. Phys. Lett. 90

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] Simultaneous monitoring of multi-metallic atom densities in plasma processes employing a multi-micro hollow cathode 1amp2007

    • Author(s)
      Takayuki Ohta
    • Journal Title

      Applied Physiscs Letters 90

      Pages: 251502-251502

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Presentation] マルチマイクロホローカソード光源を用いた金属原子密度のモニタリング2009

    • Author(s)
      田子多直樹, 太田貴之, 伊藤昌文
    • Organizer
      わかやま情報サービス産業クラスター(Embedded Information Service-Cluster)産学連携和歌山大学大学院生研究成果発表会
    • Place of Presentation
      和歌山ルミエール華月殿
    • Year and Date
      2009-01-29
    • Related Report
      2008 Annual Research Report
  • [Presentation] マイクロホローカソードプラズマを用いた複数金属同時測定用吸収分光光源の開発2009

    • Author(s)
      太田貴之
    • Organizer
      電気学会研究フォーラム先端プラズマ技術を利用したナノテクノロジーおよびバイオ分野への応用に関する研究, 第3回 : 大気圧および液体中におけるプラズマ生成と応用, 招待講演
    • Place of Presentation
      静岡大学
    • Year and Date
      2009-01-14
    • Related Report
      2008 Final Research Report
  • [Presentation] マイクロホローカソードプラズマを用いた複数金属同時測定用吸収分光光源の開発2009

    • Author(s)
      太田貴之
    • Organizer
      電気学会研究フォーラム先端プラズマ技術を利用したナノテクノロジーおよびバイオ分野への応用に関する研究,第3回 : 大気圧および液体中におけるプラズマ生成と応用
    • Place of Presentation
      静岡大学
    • Year and Date
      2009-01-14
    • Related Report
      2008 Annual Research Report
  • [Presentation] Measurement of atoms in sputtering system employing micro-plasma2009

    • Author(s)
      T. Ohta, N. Takota, M. Ito, Y. Higashijima, H. Kano, K. Yamakawa, S. Den, and M. Hori
    • Organizer
      The 8^<th> International Workshop of Advanced Plasma Processing and Diagnostics Joint Workshop with Plasma Application Monodzukuri
    • Place of Presentation
      Gifu, Japan
    • Related Report
      2008 Annual Research Report
  • [Presentation] Diagnostics of RF magnetron sputtering plasma for synthesizing Indium-Zinc-Oxide film2009

    • Author(s)
      T. Ohta, N. Takota, M. Ito, Y. Higashijima, H. Kano, S. Den, and M. Hori
    • Organizer
      First International Symposium on Advanced Plasma Science and its Applications (ISPlasma2009)
    • Place of Presentation
      Nagoya, Japan
    • Related Report
      2008 Annual Research Report
  • [Presentation] マルチマイクロホローカソード光源を用いた透明導電膜成膜スパッタプロセスにおける金属原子密度のモニタリング2009

    • Author(s)
      田子多直樹、家苗毅司、太田貴之、伊藤昌文、東島康裕、加納浩之、田昭治、堀勝
    • Organizer
      プラズマ科学シンポジウム2009/第26回プラズマプロセシング研究会
    • Place of Presentation
      名古屋大学
    • Related Report
      2008 Annual Research Report
  • [Presentation] インジウム酸化亜鉛膜形成のためのRFマグネトロンスパッタリングプラズマの診断2009

    • Author(s)
      太田貴之, 田子多直樹, 伊藤昌文, 東島康裕, 加納浩之, 田昭治, 堀勝
    • Organizer
      第56回応用物理学会関係連合講演会
    • Place of Presentation
      筑波大学
    • Related Report
      2008 Annual Research Report
  • [Presentation] Simultaneous monitoring of absolute densities of In and Zn atoms in indium zinc oxide sputtering process2008

    • Author(s)
      T.Ohta, N. Takota, Y. Tachibana, M. Ito, Y. Higashijima, H. Kano, S. Den, M. Hori
    • Organizer
      The International Union of Materials Research Societies International Conference in Asia 2008(IUMRS-ICA2008), 招待講演
    • Place of Presentation
      Nagoya, Japan
    • Related Report
      2008 Final Research Report
  • [Presentation] Simultaneous monitoring of absolute densities of multi metallic atoms in magnetron sputtering employing micro hollow cathode lamp2008

    • Author(s)
      T. Ohta, Y. Tachibana, N. Takota, M. Ito, S. Takashima, Y. Higashijima, H. Kano, S. Den, M. Hori
    • Organizer
      11th international conference on plasma surface engineering
    • Place of Presentation
      Garmisch-Partenkirchen, Germany
    • Related Report
      2008 Final Research Report
  • [Presentation] Effects of cathode dimension on plasma charactristics of multi-micro hollow cathode lamp2008

    • Author(s)
      T. Ohta, Y. Tachibana, N. Takota, M. Ito, S. Takashima, Y. Higashijima, H. Kano, S. Den, M. Hori
    • Organizer
      19th European Conference on Atomic & Molecular Physics of Ionized Gases
    • Place of Presentation
      Granada, Spain
    • Related Report
      2008 Final Research Report
  • [Presentation] Effects of cathode dimension on plasma characteristics of multi-micro hollow cathode lamp2008

    • Author(s)
      Hori T. Ohta, Y. Tachibana, N. Takota, M. Ito, S. Takashima, Y. Higashijima, H. Kano, S. Den, M.
    • Organizer
      19th European Conference on Atomic & Molecular Physics of Ionized Gases
    • Place of Presentation
      Granada, Spain
    • Related Report
      2008 Annual Research Report
  • [Presentation] Simultaneous monitoring of absolute densities of multi metallic atoms in magnetron sputtering employing micro hollow cathode lamp2008

    • Author(s)
      T. Ohta, Y. Tachibana, N. Takota, M. Ito, S. Takashima, Y. Higashijima, H. Kano, S. Den, M. Hori
    • Organizer
      11^<th> international conference on plasma surface engineering
    • Place of Presentation
      Garmisch-Partenkirchen, Germany
    • Related Report
      2008 Annual Research Report
  • [Presentation] Emission characteristics on light source array using micro hollow cathode plasma2008

    • Author(s)
      T. Ohta, Y. Tachibana, N. Takota, M. Ito, S. Takashima, Y. Higashijima, H. Kano, S. Den, M. Hori
    • Organizer
      61th Gaseous Electronics Conference
    • Place of Presentation
      Dallas, USA
    • Related Report
      2008 Annual Research Report
  • [Presentation] Simultaneous monitoring of absolute densities of In and Zn atoms in indium zinc oxide sputtering process2008

    • Author(s)
      T. Ohta, N. Takota, Y. Tachibana, M. Ito, Y. Higashijima, H. Kano, S. Den, M. Hori
    • Organizer
      The International Union of Materials Research Societies International Conference in Asia 2008(IUMRS-ICA 2008)
    • Place of Presentation
      Nagoya, Japan
    • Related Report
      2008 Annual Research Report
  • [Presentation] マイクロホローカソードプラズマを用いた金属原子密度測定のための吸収分光用光源の開発2008

    • Author(s)
      太田貴之, 橘善洋, 田子多直樹, 伊藤昌文, 高島成剛, 東島康裕, 加納浩之, 田昭治, 堀勝
    • Organizer
      電気学会プラズマ研究会
    • Place of Presentation
      名古屋工業大学
    • Related Report
      2008 Annual Research Report
  • [Presentation] マルチマイクロホローカソード光源を用いたIZO膜成膜スパッタプロセスにおける金属原子密度のモニタリング2008

    • Author(s)
      田子多直樹, 太田貴之, 伊藤昌文, 東島康裕, 加納浩之, 田昭治, 堀勝
    • Organizer
      第69回応用物理学会学術講演会
    • Place of Presentation
      中部大学
    • Related Report
      2008 Annual Research Report
  • [Presentation] 吸収分光法を用いた金属原子密度リアルタイムモニタリング用マルチマイクロホローカソード光源の発光特性2008

    • Author(s)
      太田貴之
    • Organizer
      第55回応用物理学会関係連合講演会
    • Place of Presentation
      日本大学
    • Related Report
      2007 Annual Research Report
  • [Presentation] マルチマイクロホローカソード光源の発光特性2008

    • Author(s)
      太田貴之
    • Organizer
      第25回プラズマプロセシング研究会
    • Place of Presentation
      山口県教育会館
    • Related Report
      2007 Annual Research Report
  • [Presentation] plasma diagnostics on multi-micro hollow light source2007

    • Author(s)
      T. Ohta, Y. Tachibana, M. Ito, S. Takashima, Y. Higashijima, H. Kano, S. Den, M. Hori
    • Organizer
      18th international symposium on plasma chemistry
    • Place of Presentation
      Kyoto, Japan
    • Related Report
      2008 Final Research Report
  • [Presentation] Development of multi metallic emission array using micro hollow cathode plasma2007

    • Author(s)
      T. Ohta, Y. Tachibana, M. Ito, S. Takashima, Y. Higashijima, H. Kano, S. Den, M. Hori
    • Organizer
      XXVIII International Conference on Phenomena in Ionized Gases
    • Place of Presentation
      Prague, Czech Republic
    • Related Report
      2008 Final Research Report 2007 Annual Research Report
  • [Presentation] Developmetn of light source using micro hollow cathode plasma for monitoring absolute densities of metal atoms in magnetron sputtering2007

    • Author(s)
      Takayuki Ohta
    • Organizer
      60th Gaseous Electronics Conference
    • Place of Presentation
      Arlington, USA
    • Related Report
      2007 Annual Research Report
  • [Presentation] plasma diagnostics on multi-micro hollow light source2007

    • Author(s)
      Takayuji Ohta
    • Organizer
      18_th international symposium on plasma chemistry
    • Place of Presentation
      Kyoto, Japan
    • Related Report
      2007 Annual Research Report
  • [Presentation] マルチマイクロホローカソード光源の開発(II)2007

    • Author(s)
      太田貴之
    • Organizer
      第68回応用物理学会学術講演会
    • Place of Presentation
      北海道工業大学
    • Related Report
      2007 Annual Research Report
  • [Presentation] Development of light source for simultaneous monitoring of multi elements using micro hollow cathode plasma2007

    • Author(s)
      橘 善洋
    • Organizer
      第20回プラズマ材料科学シンポジウム
    • Place of Presentation
      名古屋大学
    • Related Report
      2007 Annual Research Report
  • [Remarks] ホームページ等

    • URL

      http://www.sys.wakayama-u.ac.jp/om/photonics/

    • Related Report
      2008 Final Research Report

URL: 

Published: 2007-04-01   Modified: 2016-04-21  

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