Development and structural analyses of hard and wear-resistant thin films for dry-cutting

• Project/Area Number: 19760509
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Single-year Grants
• Research Field: Material processing/treatments
• Research Institution: Okayama University
• Principal Investigator: HASEGAWA Hiroyuki Okayama University, 大学院・自然科学研究科, 助教 (60403482)
• Project Period (FY): 2007 – 2008
• Project Status: Completed (Fiscal Year 2008)
• Budget Amount: ¥3,480,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥180,000); Fiscal Year 2008: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000); Fiscal Year 2007: ¥2,700,000 (Direct Cost: ¥2,700,000)
• Keywords: コーティング / 非平衡プロセス / X線回折法 / 原子間力顕微鏡 / 微細構造 / 耐酸化性 / 電子顕微鏡 / 硬質薄膜 / 耐熱性

Research Abstract

アルミニウム含有量の増加に伴い,(Cr,Al)Nは立方晶から六方晶へ変態し,その近傍において,膜の最大硬度が得られる.本研究では,相変態近傍の組成を有する(Cr,Al)Nに希土類元素および珪素を添加した硬質膜をカソディックアークイオンプレーティング法および高周波マグネトロンスパッタリング法により作製し,耐熱性,耐酸化性,微細構造を中心とした評価を実施した.

Research Products

• [Journal Article] Micro-hardness (2008)
  • Author(s): Hiroyuki Ezura, Koji Ichijo, Hiroyuki Hasegawa, Kenji Yamamoto, Atsushi Hotta, Tetsuya Suzuki
  • Journal Title: microstructures and thermal stability of (Ti,Cr,Al,Si) N films deposited by cathodic arc method Vacuum Vol.82 Pages: 476-481
  • Peer Reviewed
• [Journal Article] Micro-hardness, microstructures and thermal stability of (Ti, Cr, Al, Si) N films deposited by cathodic arc method (2008)
  • Author(s): R. Ezura, et.al.
  • Journal Title: Vacuum 82 Pages: 476-481
  • Peer Reviewed
• [Journal Article] Characterization of quaternary (Cr,Al) N based films synthesized by cathodic arc method (2007)
  • Author(s): Hiroyuki Hasegawa, Kazuhito Ohashi, Shinya Tsukamoto, Takashi Sato, Tetsuya Suzuki
  • Journal Title: Surface & Coatings Technology Vol.202 Pages: 786-789
  • Peer Reviewed
• [Journal Article] "Microstructures of(Ti,Cr,Al,Si) N films synthesized by cathodic arc method" (2007)
  • Author(s): Koji Ichijo, Hiroyuki Hasegawa, Tetsuya Suzuki
  • Journal Title: Surface & Coatings Technology Vol.201 Pages: 5477-5480
  • Peer Reviewed
• [Journal Article] Characterization of quaternary (Cr, AI)N based films synthesized by cathodicarc method (2007)
  • Author(s): Hiroyuki Hasegawa
  • Journal Title: Surface & Coatings Technology 202 Pages: 786-789
  • Peer Reviewed
• [Journal Article] Microstructures of (Ti, Cr, Al, Si)N films synthesized by cathodic arc method (2007)
  • Author(s): Koji Ichijo
  • Journal Title: Surface & Coatings Technology 201 Pages: 5477-5480
  • Peer Reviewed
• [Journal Article] セラミック硬質薄膜の微小硬度および微細構造変化 (2007)
  • Author(s): 長谷川裕行
  • Journal Title: 高温学会誌 33 Pages: 78-83
  • Peer Reviewed
• [Presentation] Thermal Stability and Oxidation Resistance of(Cr,Al) N Based Coatings Deposited by Cathodic Arc Method (2008)
  • Author(s): Hiroyuki Hasegawa
  • Organizer: International Conference on Metallurgical Coating and Thin Films
  • Place of Presentation: 米国
  • Year and Date: 2008-05-01
• [Presentation] Thermal Stability and Oxidation Resistance of (Cr, Al) N Based Coatings Deposi (2008)
  • Author(s): H. Hasegawa, et.al.
  • Organizer: International Conference on Metallurgical Coating and Thin Films
  • Place of Presentation: サンディエゴ, 米国
  • Year and Date: 2008-05-01
• [Presentation] Characterization of quaternary quatenary Cr based nitride films synthesized by cathodic arc method (2007)
  • Author(s): Hiroyuki Hasegawa
  • Organizer: International Conference on Metallurgical Coating and Thin Films
  • Place of Presentation: 米国
  • Year and Date: 2007-04-23
• [Presentation] Characterization of quaternary quatenary Cr based nitride films synthesized by cathodic arc method (2007)
  • Author(s): Hiroyuki Hasegawa
  • Organizer: International Conference on Metallurgical Coating and Thin Films
  • Place of Presentation: USA
  • Year and Date: 2007-04-23
• [Patent(Industrial Property Rights)] Ti, Cr, Alを基底とする硬質窒化物膜及びその製造方法 (2009)
  • Inventor(s): 長谷川裕之,塚本真也,大橋一仁
  • Industrial Property Rights Holder: 長谷川裕之,塚本真也,大橋一仁
  • Industrial Property Number: 2009-048170
  • Filing Date: 2009-03-02
• [Patent(Industrial Property Rights)] Ti, Cr, Alを基底とする硬質窒化物膜及びその製造方法 (2009)
  • Inventor(s): 長谷川裕之
  • Industrial Property Rights Holder: 長谷川裕之
  • Industrial Property Number: 2009-048170
  • Filing Date: 2009-03-02