Development of Three-Dimensional Forming Method for Base Materials of Electronics Devices

• Project/Area Number: 19760513
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Single-year Grants
• Research Field: Material processing/treatments
• Research Institution: Kumamoto University
• Principal Investigator: OTSU Masaaki Kumamoto University, 大学院・自然科学研究科, 准教授 (20304032)
• Project Period (FY): 2007 – 2008
• Project Status: Completed (Fiscal Year 2008)
• Budget Amount: ¥3,630,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥330,000); Fiscal Year 2008: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000); Fiscal Year 2007: ¥2,200,000 (Direct Cost: ¥2,200,000)
• Keywords: レーザ加工 / 基板材料 / マイクロデバイス / 三次元成形

Research Abstract

通常は強い力を加えると割れてしまうため三次元成形が難しい電子デバイス用の基板材料であるシリコンや次世代の電子デバイスの基板材料として期待されている金属ガラス箔をレーザ照射によって曲げ加工する方法を開発し,そのための装置の作成と成形条件の探査を行った.出力50WのYAGレーザを使い,厚さ0.05mmのシリコン箔と0.017mmの金属ガラス箔の成形条件を求めた.

Research Products

• [Journal Article] Laser Forming of Thin Film Metallic Glass (2009)
  • Author(s): Masaaki Otsu, Yuki Ide, Junpei Sakurai, Seiichi Hata, Kazuki Takashima
  • Journal Title: Journal of Solid Mechanics and Materials Engineering 3-2 Pages: 387-396
  • Peer Reviewed
• [Journal Article] Laser Forming of Single Crystalline Silicon Foils (2009)
  • Author(s): Jumpei Oka, Masaaki Otsu, Kazuki Takashima
  • Journal Title: Journal of Solid Mechanics and Materials Engineering 3-4 Pages: 679-690
  • Peer Reviewed
• [Journal Article] Laser Forming of Thin Film Metallic Glass (2009)
  • Author(s): Masaaki Otsu
  • Journal Title: Journal of Solid Mechanics and Materials Engineering 3 Pages: 387-396
  • Peer Reviewed
• [Journal Article] Laser Forming of Single Crystalline Silicon Foils (2009)
  • Author(s): Jumpei Oka
  • Journal Title: Journal of Solid Mechanics and Materials Engineering 3 Pages: 679-690
  • Peer Reviewed
• [Presentation] Bending of Pd-Based Thin Film Metallic Glasses by Laser Forming Process (2008)
  • Author(s): 大津雅亮
  • Organizer: The 2nd International Student Conference on Advanced Science and Technology
  • Place of Presentation: 北京(中国)
  • Year and Date: 2008-12-22
• [Presentation] Bending of Pd-Based Thin Film Metallic Glasses by Laser Forminlg Process (2008)
  • Author(s): Yuki Ide
  • Organizer: The 2nd International Student Conference on Advanced Science and Technology
  • Place of Presentation: 北京(中国)
  • Year and Date: 2008-12-22
• [Presentation] Bending of Pd-based Thin Film Metallic Glass by Laser Forming (2008)
  • Author(s): 大津雅亮
  • Organizer: Materials Research Society Fall Meeting
  • Place of Presentation: ボストン(米国)
  • Year and Date: 2008-12-01
• [Presentation] Bending of Pd-based Thin Film Metallic Glass by Laser Fgrming (2008)
  • Author(s): Yuki Ide
  • Organizer: Materials Research Society Fall Meeting
  • Place of Presentation: ボストン (米国)
  • Year and Date: 2008-12-01
• [Presentation] Pd基金属ガラス箔のレーザフォーミング (2008)
  • Author(s): 大津雅亮
  • Organizer: 日本塑性加工学会西日本若手技術交流会
  • Place of Presentation: 名古屋市
  • Year and Date: 2008-11-14
• [Presentation] Laser Forming of Thin Film Metallic Glass (2008)
  • Author(s): 大津雅亮
  • Organizer: 3rd JSME/ASME International Conference on Materials and Processing
  • Place of Presentation: シカゴ(米国)
  • Year and Date: 2008-10-07
• [Presentation] Laser Forming of Single Crystalline Silicon (2008)
  • Author(s): 大津雅亮
  • Organizer: 3rd JSME/ASME International Conference on Materials and Processing
  • Place of Presentation: シカゴ(米国)
  • Year and Date: 2008-10-07
• [Presentation] Laser Forming of Single Crystalline Silicon (2008)
  • Author(s): J. Oka
  • Organizer: 3rd JSME/ASME International Conference on Materials and Processing
  • Place of Presentation: シカゴ (米国)
  • Year and Date: 2008-10-07
• [Presentation] Laser Forming of Thin Film Metallic Glass (2008)
  • Author(s): M. Otsu
  • Organizer: 3rd JSME/ASME International Conference on Materials and Processing
  • Place of Presentation: シカゴ (米国)
  • Year and Date: 2008-10-07
• [Presentation] レーザフォーミングを用いたPd基金属ガラス箔の成形 (2008)
  • Author(s): 大津雅亮
  • Organizer: 第143回日本金属学会秋期大会
  • Place of Presentation: 熊本市
  • Year and Date: 2008-09-23
• [Presentation] Bending of Single Crystalline Silicon and Borosilicate Glass Foils by Laser Forming (2008)
  • Author(s): 大津雅亮
  • Organizer: 9th International Conference on Technology of Plasticity
  • Place of Presentation: 慶州(韓国)
  • Year and Date: 2008-09-07
• [Presentation] Bending of Single Crystalline Silicon and Borosilicate Glass Foils by Laser Forming (2008)
  • Author(s): M. Otsu
  • Organizer: 9th International Conference on Techno logy of Plasticity
  • Place of Presentation: 慶州 (韓国)
  • Year and Date: 2008-09-07
• [Presentation] Pd基金属ガラス箔のレーザフォーミング (2008)
  • Author(s): 大津雅亮
  • Organizer: 日本金属学会九州支部日本鉄鋼協会九州支部共催平成20年度合同学術講演大会
  • Place of Presentation: 福岡市
  • Year and Date: 2008-06-07
• [Presentation] 金属ガラス箔のレーザフォーミング (2008)
  • Author(s): 大津雅亮
  • Organizer: 平成20年度塑性加工春季講演会
  • Place of Presentation: 習志野市
  • Year and Date: 2008-05-23
• [Presentation] Laser Forming of Pd-Based Thin Film Metallic Glass (2008)
  • Author(s): 大津雅亮
  • Organizer: 4th KU-KITECH Symposium on Bulk Metallic Glasses and Advanced Materials
  • Place of Presentation: 熊本市
  • Year and Date: 2008-05-19
• [Presentation] Laser Forming of Pd-Based Thin Film Metallic Glass (2008)
  • Author(s): Yuki Ide
  • Organizer: 4th KU-KITECH Symposium on Bulk Metallic G1 asses and Advanced Materials
  • Place of Presentation: 熊本市
  • Year and Date: 2008-05-19
• [Presentation] Laser Forming of single crystalline silicon (2008)
  • Author(s): 大津雅亮
  • Organizer: The 1st International Student Conference on Advanced Science and Technology
  • Place of Presentation: 熊本市
  • Year and Date: 2008-03-14
• [Presentation] Laser Forming of single crystalline silicon (2008)
  • Author(s): Masaaki Otsu
  • Organizer: The 1st International Student Conference on Advanced Science and Technology
  • Place of Presentation: 熊本大学(熊本市)
  • Year and Date: 2008-03-14
• [Presentation] Laser Forming of Single Crystal Silicon (2007)
  • Author(s): 大津雅亮
  • Organizer: Asian Workshop on Nano/Micro Forming Technology
  • Place of Presentation: 札幌市
  • Year and Date: 2007-10-26
• [Presentation] 単結晶シリコンのレーザフォーミング (2007)
  • Author(s): 大津雅亮
  • Organizer: 日本金属学会九州支部日本鉄鋼協会九州支部共催平成19年度合同学術講演大会
  • Place of Presentation: 熊本市
  • Year and Date: 2007-06-08
• [Presentation] 単結晶シリコンのレーザフォーミング (2007)
  • Author(s): 大津雅亮
  • Organizer: 日本金属学会九州支部日本鉄鋼協会九州支部共催平成19年度合同学術講演大会
  • Place of Presentation: 熊本大学(熊本市)
  • Year and Date: 2007-06-08