Study on selective molecular captured nano-micro scale filter

• Project/Area Number: 19760613
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Single-year Grants
• Research Field: Nuclear engineering
• Research Institution: Osaka University (2008); Waseda University (2007)
• Principal Investigator: OSHIMA Akihiro Osaka University, 産業科学研究所, 特任研究員 (80398924)
• Project Period (FY): 2007 – 2008
• Project Status: Completed (Fiscal Year 2008)
• Budget Amount: ¥3,620,000 (Direct Cost: ¥3,200,000、Indirect Cost: ¥420,000); Fiscal Year 2008: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000); Fiscal Year 2007: ¥1,800,000 (Direct Cost: ¥1,800,000)
• Keywords: ナノ加工 / 量子ビーム / フッ素樹脂 / 放射光 / イオンビーム / 電子線グラフト / ナノ多機能材料 / ナノ構造形成・制御 / 加速器・ビーム工学 / 新機能材料

Research Abstract

微細加工に当たっては、PTFE分散液(XAD-911、旭硝子フロロポリマーズ社製)をSiウェハ上にスピンコートしたPTFEを用いた。早大理工研設置のEB装置等を用い、各試料に対して窒素中335±3℃で600kGyの電子線照射を行い、架橋処理を施した。得られた試料を放射光やFIB装置を用いて直接加工することで、マイクロ・ナノサイズのフィルター加工を行った。加工後、EBグラフト法によりスルホン酸基を付与し機能化した。FE-SEMで試料を観察し、グラフト後の加工形状を評価した。その結果、10μm程度の孔径であれば問題ないが、600nm程度の孔径では表面が膨潤し平滑性が失われることが明らかになった。そこで、予め機能化した試料について微細加工を試みた結果、エッチング速度は遅くなるものの、面平滑性のある1μm以下のナノスケール加工が可能であることがわかった。

Research Products

• [Journal Article] Surface Modification of Polymeric Materials Using Ultra Low Energy Electron Beam Irradiation (2011)
  • Author(s): Akihiro Oshima, Fumiya Shiraki, Hajime Fujita, Masakazu Washio
  • Journal Title: Radiation Physics and Chemistry Volume: 80 Pages: 196-200
  • Peer Reviewed
• [Journal Article] Nano-and Micro-Fabrication of Perfluorinated Polymers Using Quantum Beam Technology (2011)
  • Author(s): Nozomi Miyoshi, Akihiro Oshima, Tatsuya Urakawa, Naoyuki Fukutake, Hiroyuki Nagai, Tomoko Gowa, Yuya Takasawa, Tomohiro Takahashi, Yukari Numata, Takanori Katoh, Etsuko Katoh, Seiichi Tagawa, Masakazu Washio
  • Journal Title: Radiation Physics and Chemistry Volume: 80 Pages: 230-235
  • Peer Reviewed
• [Journal Article] Study on Synchrotron Radiation Induced Photo Etching of Perfluorinated Polymers by K-edge Absorption of F-atom (2010)
  • Author(s): A. Oshima, H. Nagai, T. Hyuga, N. Miyoshi, T. Urakawa, K. Murata, T. Katoh, E. Katoh, M. Washio
  • Journal Title: J. Photopolym. Sci. Technol.. Volume: 23 Pages: 391-386
  • NAID: 40017173790
  • Peer Reviewed
• [Journal Article] Micro-and Nano-Scale Fabrication of Fluorinated Polymers by Direct Etching Using Focused Ion Beam (2010)
  • Author(s): N. Fukutake, N. Miyoshi, Y. Takasawa, T. Urakawa, T. Gowa, K. Okamoto, A. Oshima, S. Tagawa, M. Washio
  • Journal Title: Jpn. J. App. Phys. Volume: 49
  • NAID: 40017176033
  • Peer Reviewed
• [Presentation] Fabrication of Micro- and Nano-Structures of Crosslinked Polytetrafluoroethylene by Means of Focused Ion Beam (2008)
  • Author(s): A. Oshima, N. Miyoshi, N. Fukutake, Y. Takasawa, Y. Matsui, K. Okamoto, S. Seki, M. Washio, S. Tagawa
  • Organizer: The IUMRS International Conference in Asia 2008 (IUMRS-ICA 2008)
  • Place of Presentation: Nagoya, Japan
  • Year and Date: 2008-12-12
• [Presentation] Nano-fabrication of Fluoropolymers using Focused Ion Beam (2008)
  • Author(s): N. Fukutake, T. Urakawa, Y. Takasawa, T. Gowa, T. Takahashi, Y. Hirano, M. Washio, A. Oshima, K. Okamoto, S. Tagawa
  • Organizer: FLUOROPOLYMER-2008
  • Place of Presentation: South Carolina, USA
  • Year and Date: 2008-10-21
• [Presentation] Nano-fabrication of Fluoropolymers using Focused Ion Beam (2008)
  • Author(s): N. Fukutake, T. Urakawa, Y. Takasawa, T. Gowa, T. Takahashi, Y. Hirano, M. Washio, A. Oshima, K. Okamoto, S. Tagawa
  • Organizer: FLUOROPOLYMER2008
  • Place of Presentation: South Carolina, USA
  • Year and Date: 2008-10-20
• [Presentation] Nano- and Micro- Fabrication of Polymeric Materials Using Beam Technology (2008)
  • Author(s): A. Oshima, M. Washio, S. Tagawa
  • Organizer: 8^<th> International Symposium on Ionizing Radiation and Polymers (IRaP 2008)(Invited)
  • Place of Presentation: Angra dos Reis, Rio de Janeiro, Brazil
  • Year and Date: 2008-10-14
• [Presentation] Nano- and Micro- Fabrication of Polymeric Materials Using Beam Technology (2008)
  • Author(s): A. Oshima, M. Washio, S. Tagawa
  • Organizer: 8^<th> International Symposium on Ionizing Radiati on and Polymers (IRaP 2008)
  • Place of Presentation: Angra dos Reis, Rio de Janeiro, Brazil
  • Year and Date: 2008-10-14
• [Presentation] Nano- and Micro- Fabrication of Polymeric Materials Using Beam Technology (2008)
  • Author(s): A. Oshima, M. Washio, S. Tagawa
  • Organizer: 8^<th> International Symposium on Ionizing Radiation and Polymers (IRaP 2008)
  • Place of Presentation: Angra dos Reis, Rio de Janeiro, Brazil
  • Year and Date: 2008-10-14
• [Presentation] Microfabrication of nano - scale pattern on crosslinked PTFE using focused ion beam (2008)
  • Author(s): N. Fukutake, T. Urakawa, Y. Takasawa, A. Oshima, M.Washio, K. Okamoto, S. Tagawa
  • Organizer: 2^<nd> Asia Pacific Symposium on Radiation Chemistry
  • Place of Presentation: Shinjuku, Tokyo, Japan
  • Year and Date: 2008-08-31
• [Presentation] Surface Modification of Polymeric Materials Using Ultra Low Energy Electron Beam Irradiation (2008)
  • Author(s): A. Oshima, Y. Takasawa, N. Fukutake, T. Urakawa, F. Shiraki M. Washio
  • Organizer: 2^<nd> Asia Pacific Symposium on Radiation Chemistry
  • Place of Presentation: Shinjuku, Tokyo, Japan
  • Year and Date: 2008-08-30
• [Presentation] Micro- and Nano- Fabrication of Fluorinated- Polymers by means of SR and FIB (2008)
  • Author(s): A. Oshima, T. Urakawa, N. Fukutake, Y. Takasawa, K. Okamoto, S. Seki, T. Katoh, M. Washio, S. Tagawa
  • Organizer: The 9^<th> RadTech China(Invited)
  • Place of Presentation: Hangzhou, China
  • Year and Date: 2008-04-19
• [Presentation] Micro- and Nano- Fabrication of Fluorinated- Polymers by means of SR and FIB (2008)
  • Author(s): A. Oshima, T. Urakawa, N. Fukutake, Y. Takasawa, K. Okamoto, S. Seki, T. Katoh, M. Washio, S. Tagawa
  • Organizer: The 9^<th> RadTech China
  • Place of Presentation: Hangzhou, China
  • Year and Date: 2008-04-09
• [Presentation] 超低エネルギー電子線照射による高分子材料の表面改質 (2008)
  • Author(s): 大島明博
  • Organizer: 日本化学会58回年会
  • Place of Presentation: 立教大学
  • Year and Date: 2008-03-30
• [Presentation] Direct Photo Etching and Surface Modification of Perfluorinated Polymers by Synchrotron Radiation (2008)
  • Author(s): A. Oshima, et al
  • Organizer: TSRP2008
  • Place of Presentation: Pune, India
  • Year and Date: 2008-01-08
• [Presentation] Synchrotron Radiation Induced Photo Etching of Perfluor inated Polymers by Direct K-edge Absorption of Fluorine-Atom (2007)
  • Author(s): A. Oshima, et al
  • Organizer: ASR2007
  • Place of Presentation: 原子力機構東海
  • Year and Date: 2007-11-08