Formation of catalytic nanoparticles on metal electrodes for carbon nanotube interconnects

• Project/Area Number: 19860068
• Research Category: Grant-in-Aid for Young Scientists (Start-up)
• Allocation Type: Single-year Grants
• Research Field: Electronic materials/Electric materials
• Research Institution: Waseda University
• Principal Investigator: IWASAKI Takayuki Waseda University, 理工学術院, 助手 (80454031)
• Project Period (FY): 2007 – 2008
• Project Status: Completed (Fiscal Year 2008)
• Budget Amount: ¥2,653,000 (Direct Cost: ¥2,260,000、Indirect Cost: ¥393,000); Fiscal Year 2008: ¥1,703,000 (Direct Cost: ¥1,310,000、Indirect Cost: ¥393,000); Fiscal Year 2007: ¥950,000 (Direct Cost: ¥950,000)
• Keywords: カーボンナノチューブ / LSI配線 / イオン注入 / 触媒微粒子 / ナノ材料 / 電気電子材料 / LSI配腺 / 微粒子形成

Research Abstract

カーボンナノチューブ配線実現のために重要な金属膜上への触媒形成をイオン注入により行い、その触媒からカーボンナノチューブを合成することに成功した。Niイオンを直接金属膜に注入するとカーボンナノチューブ合成のための触媒機能を失ってしまうが、金属膜上にバッファ層を堆積させることにより活性な触媒微粒子の形成に成功した。さらに、伝導特性向上に必要な低欠陥カーボンナノチューブ合成を無水素雰囲気下での化学気相合成法により実現した。

Research Products

• [Journal Article] Vertically aligned carbon nanotube growth from Ninanoparticles prepared by ionimplantation (2008)
  • Author(s): T. Iwasaki, S. Mejima, T. Koide, R. Morikane, H. Nakayama, T. Shinada, I. Ohdomari, H. Kawarada
  • Journal Title: Diamond and Related Materials 17 Pages: 1443-1446
  • Peer Reviewed
• [Journal Article] Vertically aligned carbon nanotube growth from Ninanoparticles prepared by ion implantation (2008)
  • Author(s): T. Iwasaki
  • Journal Title: Diamond and Related Materials 17 Pages: 1443-1446
  • Peer Reviewed
• [Journal Article] Mechanism Analysis of lnterrupted Growth of Single-Walled Carbon Nanotube Arrays (2008)
  • Author(s): T.Iwasaki, J.Robertson, H.Kawarada
  • Journal Title: Nano Letters 8 Pages: 886-890
  • Peer Reviewed
• [Journal Article] Highly Selective Growth of Vertically Aligned Double-Walled Carbon Nanotubes by a Controlled Heating Method and Their Electric Double-Layer Capacitor Properties (2008)
  • Author(s): T.Iwasaki, T.Maki, T.Asari, H.Kawarada, et. al.
  • Journal Title: phys.stat.sol.(RRL) 2 Pages: 53-55
  • Peer Reviewed
• [Journal Article] Low Temperature Grown Carbon Nanotube lnterconnects Using lnner Shells by Chemical Mechanical Polishing (2007)
  • Author(s): D.Yokoyama, T.Iwasaki, Y.Awano, H.Kawarada, et. al.
  • Journal Title: Appl.Phys.Lett. 91
  • Peer Reviewed
• [Journal Article] Growth of Dense Single-walled Carbonl Nanotubes in Nano-sized Silicon Dioxide Holes for Future Microelectronics (2007)
  • Author(s): T.Iwasaki, R.Morikane, T.Edura, H.Kawarada, et. al.
  • Journal Title: Carbon 45 Pages: 2351-2355
  • Peer Reviewed
• [Presentation] Mechanism Analysis of Interrupted Growth of Single-Walled Carbon Nanotube Arrays (2008)
  • Author(s): T. Iwasaki, J. Robertson, H. Kawarada
  • Organizer: Nanotube08
  • Place of Presentation: Motpellier, France
• [Presentation] Mechanism Analysis of Interrupted Growth of Single-Walled Carbon Nanotube Arrays (2008)
  • Author(s): T. Iwasaki
  • Organizer: Nanotube08
  • Place of Presentation: モンペリエ、フランス
• [Presentation] 集束イオンビームにより打ち込まれたNi触媒からのCNT成長 (2007)
  • Author(s): 中山智, 森金亮太, 岩崎孝之, 小出敬, 中山英樹, 品田賢宏, 大泊巌, 川原田洋
  • Organizer: 第21回ダイヤモンドシンポジウム
  • Place of Presentation: 長岡技術科学大学
• [Presentation] Vertically Aligned Carbon Nanotubes from Ni Catalysts Implanted by Focused-Ion-Beam (2007)
  • Author(s): T. Iwasaki, T. Koide, R. Morikane, S. Mejima, H. Nakayama, T. Shinada, I. Ohdomari, H. Kawarada
  • Organizer: 18th European Conference on Diamond, Diamond-Like Materials, Carbon Nanotubes, and Nitrides
  • Place of Presentation: Berlin, Germany
• [Presentation] 集束イオンビームによる打ち込みNi触媒からのCNT成長 (II) (2007)
  • Author(s): 森金亮太, 岩崎孝之, 小出敬, 目島壮一, 中山英樹, 品田賢宏, 大泊巌, 川原田洋
  • Organizer: 2007年秋季第68回応用物理学会学術講演会
  • Place of Presentation: 北海道工業大学
• [Presentation] Cutting of Layered Single-Walled Carbon Nanotubes: lnvestigation of lnterface Structure and Fabrication of Short Single-walled Carbon Nanotube Arrays (2007)
  • Author(s): T.Iwasaki, H.Kawarada
  • Organizer: 2007 MRS Fall Meeting
  • Place of Presentation: Boston,USA
• [Presentation] Growth of Half-Centimeter Long Single-and Double-Walled Carbon Nanotubes by Radical CVD (2007)
  • Author(s): T.Iwasaki, T.Maki, H.Kawarada
  • Organizer: Fifth International Symposium on Control of Semiconductor Interfaces
  • Place of Presentation: Tokyo,Japan
• [Presentation] Vertically Aligned Carbon Nanotubes from Ni Catalysts Implanted by Focused-Ion-Beam (2007)
  • Author(s): T.Iwasaki, T.Koide, I. Ohdomari, H.Kawarada, et. al.
  • Organizer: 18th European Conference on Diamond, Diamond-Like Materials, Carbon Nanotubes, and Nitrides
  • Place of Presentation: Berlin,Germany
• [Presentation] The effect of Al layer on Fe catalyst for Carbon Nanotube Synthesis (2007)
  • Author(s): T.Maki, T.Iwasaki, R.Morikane, D.Yokoyama, H.Kawarada
  • Organizer: 18th European Conference on Diamond, Diamond-Like Materials, Carbon Nanotubes, and Nitrides
  • Place of Presentation: Berlin,Germany
• [Presentation] Electrical properties of vertically-aligned carbon nanotubes grown in via-holes at low temperatures for future interconnects (2007)
  • Author(s): D.Yokoyama, T.Iwasaki, Y.Awano, H.Kawarada, et. al.
  • Organizer: 18th European Conference on Diamond, Diamond-Like Materials, Carbon Nanotubes, and Nitrides
  • Place of Presentation: Berlin,Germany
• [Presentation] Electrical properties of carbon nanotubes grown at a low temperature by radical chemical vapor deposition for future LSI interconnects (2007)
  • Author(s): D.Yokoyama, K.Ishimaru, T.Iwasaki, H.Kawarada, et. al.
  • Organizer: 2007 International Conference on Solid State Devices and Materials
  • Place of Presentation: Ibaraki,Japan
• [Presentation] Low Temperature Radical Chemical Vapor Deposition of Vertically Aligned CNTs usine Size-classified Co Particles for LSI Multi-layer Interconnects (2007)
  • Author(s): T.Iwasaki, D.Yokoyama, Y.Awano, H.Kawarada, et. al.
  • Organizer: 1st International Conference on New Diamond and Nano Carbons
  • Place of Presentation: Osaka,Japan
• [Presentation] Synthesis of Carbon Nanotubes from Focused lon Beam Implanted Ni Catalysts (2007)
  • Author(s): T.Iwasaki, T.Koide, I. Ohdomari, H.Kawarada, et. al.
  • Organizer: 1st International Conference on New Diamond and Nano Carbons
  • Place of Presentation: Osaka,Japan
• [Presentation] 集束イオンビームによる打ち込みNi触媒からのCNT成長(II) (2007)
  • Author(s): 森金 亮太, 岩崎 孝之, 大泊 巌, 川原 田洋, 他
  • Organizer: 2007年秋季第68回応用物理学会学術講演会
  • Place of Presentation: 北海道工業大学
• [Presentation] 化学機械研磨により平坦化したCNTビアの電気特性評価 (2007)
  • Author(s): 石丸 研太郎, 横山 大輔, 岩崎 孝之, 川原 田洋, 他
  • Organizer: 2007年秋季第68回応用物理学会学術講演会
  • Place of Presentation: 北海道工業大学
• [Presentation] 長寿命触媒微粒子による長尺カーボンナノチューブ成長 (2007)
  • Author(s): 加藤 良吾, 岩崎 孝之, 真木 翼, 横山 大輔, 川原田 洋
  • Organizer: 第21回ダイヤモンドシンポジウム
  • Place of Presentation: 長岡技術科学大学
• [Presentation] 配線応用に向けた低温成長CNTビアの電気特性評価 (2007)
  • Author(s): 石丸 研太郎, 横山 大輔, 岩崎 孝之, 川原田 洋, 他
  • Organizer: 第21回ダイヤモンドシンポジウム
  • Place of Presentation: 長岡技術科学大学