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Plasma CVD synthesis of atomically precise 1D nanocarbon materials and its innovative applications

Research Project

Project/Area Number 19H00664
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Review Section Medium-sized Section 14:Plasma science and related fields
Research InstitutionTohoku University

Principal Investigator

Kato Toshiaki  東北大学, 工学研究科, 准教授 (20502082)

Co-Investigator(Kenkyū-buntansha) 大塚 朋廣  東北大学, 電気通信研究所, 准教授 (50588019)
澁田 靖  東京大学, 大学院工学系研究科(工学部), 教授 (90401124)
Project Period (FY) 2019-04-01 – 2023-03-31
Project Status Completed (Fiscal Year 2022)
Budget Amount *help
¥45,370,000 (Direct Cost: ¥34,900,000、Indirect Cost: ¥10,470,000)
Fiscal Year 2022: ¥8,840,000 (Direct Cost: ¥6,800,000、Indirect Cost: ¥2,040,000)
Fiscal Year 2021: ¥9,490,000 (Direct Cost: ¥7,300,000、Indirect Cost: ¥2,190,000)
Fiscal Year 2020: ¥11,960,000 (Direct Cost: ¥9,200,000、Indirect Cost: ¥2,760,000)
Fiscal Year 2019: ¥15,080,000 (Direct Cost: ¥11,600,000、Indirect Cost: ¥3,480,000)
Keywordsカーボンナノチューブ / グラフェンナノリボン / 遷移金属ダイカルコゲナイド / 原子構造制御合成 / プラズマCVD / 量子ドット / その場観測 / 高透明太陽電池
Outline of Research at the Start

優れた物性が予測されている1次元ナノカーボン材料であるカーボンナノチューブとグラフェンナノリボンを研究対象とし、これらを実デバイスに応用する上で最大の課題とされている完全原子配列制御合成に挑戦する。さらに本手法で合成した高品質1次元ナノカーボン材料を活用した革新的エレクトロニクス応用を開拓する。具体的には、パラメータの多様性に特長のあるプラズマプロセスの潜在能力を最大限活用することで実現を目指す。

Outline of Final Research Achievements

Atomically-precise structural-controlled synthesis of 1D nanocarbon materials such as carbon nanotubes (CNTs) and graphene nanoribbons (GNRs) has been realized by using advanced plasma processing. For CNTs, ultra-high purity (>96%) synthesis of (6,5) CNTs has been realized. For GNRs, integrated synthesis of GNR-based quantum dot device has been realized by rapid heating plasma CVD. Synthesis of similar low dimensional materials, known as transition metal dichalcogenides (TMDs), has been also investigated, resulting in first development of in-situ monitoring CVD for real 2D materials. Non-classical nucleation has also been elucidated by using this method. Furthermore, as an innovative device applications of 2D materials, nearly invisible solar cell has been fabricated with monolayer TMD, where averaged visible transparency is about 79%, which is almost same with that of window glass.

Academic Significance and Societal Importance of the Research Achievements

1次元ナノカーボン材料の原子構造を精密に制御して合成する技術を開発した本成果は、今後の基礎研究と応用開発の両側面に貢献が期待できる社会的意義の高い研究成果である。特にプラズマCVDにより(6,5)CNTの超高純度合成を実現した成果は、30年以上未解決のCNTカイラリティ制御につながるものであり学術的にも極めて価値のある成果である。また、2次元結晶に関して独自に開発したその場観測装置により成長機構を定量的に解明した成果は、2次元結晶成長の学理構築の観点で重要である。さらに窓ガラスと同程度の透過率を持つ高透明太陽電池を実現した成果は、グリーンイノベーションの観点で社会的にも重要な貢献が期待できる。

Report

(4 results)
  • 2022 Final Research Report ( PDF )
  • 2020 Annual Research Report
  • 2019 Comments on the Screening Results   Annual Research Report
  • Research Products

    (43 results)

All 2021 2020 2019

All Journal Article (3 results) (of which Int'l Joint Research: 1 results,  Peer Reviewed: 3 results,  Open Access: 1 results) Presentation (37 results) (of which Int'l Joint Research: 16 results,  Invited: 9 results) Book (3 results)

  • [Journal Article] Improvement in growth yield of single-walled carbon nanotubes with narrow chirality distribution by pulse plasma CVD2019

    • Author(s)
      B. Xu, T. Kaneko, and T. Kato
    • Journal Title

      Frontiers of Chemical Science and Engineering

      Volume: 13 Issue: 3 Pages: 485-492

    • DOI

      10.1007/s11705-019-1831-2

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Enhanced Thermoelectric Performance of As-Grown Suspended Graphene Nanoribbons2019

    • Author(s)
      Q.-Y. Li, T. Feng, W. Okita, Y. Komori, H. Suzuki, T. Kato, T. Kaneko, T. Ikuta, X. Ruan, K. Takahashi
    • Journal Title

      ACS Nano

      Volume: 13 Issue: 8 Pages: 9182-9189

    • DOI

      10.1021/acsnano.9b03521

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Nucleation dynamics of single crystal WS2 from droplet precursors uncovered by in-situ monitoring2019

    • Author(s)
      C. Li, T. Kameyama, T. Takahashi, T. Kaneko, T. Kato
    • Journal Title

      Scientific Reports

      Volume: 9 Issue: 1

    • DOI

      10.1038/s41598-019-49113-0

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed / Open Access
  • [Presentation] Growth dynamics of 2D materials2021

    • Author(s)
      Toshiaki Kato
    • Organizer
      The 7th International Workshop on 2D Materials
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Effects of nanobar structures on device performance of graphene nanoribbons grown by plasma CVD2020

    • Author(s)
      N. Sato, T. Kaneko, and T. Kato
    • Organizer
      2020年度電気関係学会東北支部連合大会
    • Related Report
      2020 Annual Research Report
  • [Presentation] (6,4)単層カーボンナノチューブのカイラリティ選択機構における気相中炭化水素前駆体の効果2020

    • Author(s)
      椎名 悟,金子 俊郎,加藤 俊顕
    • Organizer
      第81回応用物理学会秋季学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] Effects of channel length on performance of transparent solar cell with monolayer WS22020

    • Author(s)
      X. He, T. Kaneko, and T. Kato
    • Organizer
      第59回フラーレン・ナノチューブ・グラフェン 総合シンポジウム
    • Related Report
      2020 Annual Research Report
  • [Presentation] グラフェンナノリボンを用いたサイズ制御量子ドットの直接合成2020

    • Author(s)
      M. Seo, T. Kitada, T. Kaneko, T. Otsuka, and T. Kato
    • Organizer
      第59回フラーレン・ナノチューブ・グラフェン 総合シンポジウム
    • Related Report
      2020 Annual Research Report
  • [Presentation] ゆらぎ導入ナノバーからのグラフェンナノリボン制御合成2020

    • Author(s)
      N. Sato, T. Kaneko, and T. Kato
    • Organizer
      第59回フラーレン・ナノチューブ・グラフェン 総合シンポジウム
    • Related Report
      2020 Annual Research Report
  • [Presentation] Transparent Schottky type solar cell based on uniform WS2 film2020

    • Author(s)
      X. He, T. Kaneko, and T. Kato
    • Organizer
      2020 International Conference on Solid State Devices and Materials
    • Related Report
      2020 Annual Research Report
  • [Presentation] 高集積グラフェンナノリボンの合成と成長ダイナミクス2020

    • Author(s)
      加藤 俊顕, 金子 俊郎
    • Organizer
      日本物理学会2020年秋季大会
    • Related Report
      2020 Annual Research Report
    • Invited
  • [Presentation] Plasma Synthesis of Integrated Graphene Nanoribbons and its Optoelectrical Applications2020

    • Author(s)
      Toshiaki Kato, Toshiro Kaneko
    • Organizer
      73rd Annual Gaseous Electronics Conference
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Integrated Synthesis of Millions of Suspended Graphene Nanoribbons and its Non-Volatile Memory Applications2020

    • Author(s)
      Toshiaki Kato, Toshiro Kaneko
    • Organizer
      2020 Virtual MRS spring/fall meeting & exhibit
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] 高純度(6,4)単層カーボンナノチューブ合成に向けた前駆体制御2020

    • Author(s)
      椎名 悟,金子 俊郎,加藤 俊顕
    • Organizer
      第67回応用物理学会春季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] 伝導ギャップ制御に向けたホモ接合グラフェンナノリボンの合成2020

    • Author(s)
      小倉 士忠,金子 俊郎,加藤 俊顕
    • Organizer
      第58回フラーレン・ナノチューブ・グラフェン総合シンポジウム
    • Related Report
      2019 Annual Research Report
  • [Presentation] その場観測により観測された単層WS2の高速成長2020

    • Author(s)
      亀山 智矢,金子 俊郎,加藤 俊顕
    • Organizer
      第58回フラーレン・ナノチューブ・グラフェン総合シンポジウム
    • Related Report
      2019 Annual Research Report
  • [Presentation] Fabrication of Transparent Solar Cell with Atomically Thin Layered Materials2019

    • Author(s)
      X. He , Y. Yamaguchi , T. Kaneko , and T. Kato
    • Organizer
      Compound Semiconductor Week 2019
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Integrated synthesis of graphene nanoribbon-based field effect transistor with high on/off ratio2019

    • Author(s)
      N. Ogura , H. Suzuki , T. Kaneko , and T. Kato
    • Organizer
      Compound Semiconductor Week 2019
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Structural controlled synthesis and solar cell application of TMDs2019

    • Author(s)
      T. Kato and T. Kaneko
    • Organizer
      3rd International Workshop on 2D Materials
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Performance improvement of graphene nanoribbon transistor with plasma CVD2019

    • Author(s)
      N. Ogura , H. Suzuki , T. Kaneko , T. Kato
    • Organizer
      The Joint Conference of XXXIV International Conference on Phenomena in Ionized Gases (XXXIV ICPIG) and the 10th International Conference on Reactive Plasmas (ICRP-10)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Plasma CVD synthesis of (6,4) single-walled carbon nanotubes and its growth mechanism2019

    • Author(s)
      S. Shiina , T. Shima , B. Xu , T. Kaneko , T. Kato
    • Organizer
      The Joint Conference of XXXIV International Conference on Phenomena in Ionized Gases (XXXIV ICPIG) and the 10th International Conference on Reactive Plasmas (ICRP-10)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] グラフェンナノリボンの大規模集積化合成と応用2019

    • Author(s)
      T. Kato
    • Organizer
      グラフェンコンソーシアム第20回研究講演会
    • Related Report
      2019 Annual Research Report
    • Invited
  • [Presentation] Flow rate effects on layer-number-controlled synthesis of integrated WS22019

    • Author(s)
      X. Qiang , T. Kameyama , C. Li , T. Kaneko , T. Kato
    • Organizer
      2019年度電気関係学会東北支部連合大会
    • Related Report
      2019 Annual Research Report
  • [Presentation] Efficient fabrication of graphene nanoribbon quantum dot with advanced plasma CVD2019

    • Author(s)
      M. Seo , W. Okita , H. Suzuki , T. Kaneko , T. Kato
    • Organizer
      2019年度電気関係学会東北支部連合大会
    • Related Report
      2019 Annual Research Report
  • [Presentation] Plasma CVD synthesis of high purity (6,4) single-walled carbon nanotubes2019

    • Author(s)
      S. Shiina , T. Shima , B. Xu , T. Kaneko , T. Kato
    • Organizer
      2019年度電気関係学会東北支部連合大会
    • Related Report
      2019 Annual Research Report
  • [Presentation] In-situ Monitoring of Monolayer WS2 Growth2019

    • Author(s)
      T. Kameyama , C. Li , T. Kaneko , T. Kato
    • Organizer
      第57回フラーレン・ナノチューブ・グラフェン総合シンポジウム
    • Related Report
      2019 Annual Research Report
  • [Presentation] The effect of gas phase species on chirality selectivity between (6,4) and (6,5) single-walled carbon nanotubes2019

    • Author(s)
      S. Shiina , T. Shima , B. Xu , T. Kaneko , T. Kato
    • Organizer
      第57回フラーレン・ナノチューブ・グラフェン総合シンポジウム
    • Related Report
      2019 Annual Research Report
  • [Presentation] Work function modulation of transparent electrode for fabrication of WS2-based highly transparent solar cell2019

    • Author(s)
      X. He , Y. Yamaguchi , T. Kaneko , and T. Kato
    • Organizer
      第57回フラーレン・ナノチューブ・グラフェン総合シンポジウム
    • Related Report
      2019 Annual Research Report
  • [Presentation] Graphene nanoribbon electronics fabricated with advanced plasma processing2019

    • Author(s)
      T. Kato , H. Suzuki , and T. Kaneko
    • Organizer
      The 12th Asian-European International Conference on Plasma Surface Engineering
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] 二次元シートの集積化合成と層数制御2019

    • Author(s)
      強 効銘,亀山 智矢,李 超,金子 俊郎,加藤 俊顕
    • Organizer
      第13回プラズマエレクトロニクスインキュベーションホール
    • Related Report
      2019 Annual Research Report
  • [Presentation] プラズマCVDによるグラフェンナノリボン量子ドットの形成2019

    • Author(s)
      瀬尾 瑞樹,大北 若奈,鈴木 弘朗,金子 俊郎,加藤 俊顕
    • Organizer
      第13回プラズマエレクトロニクスインキュベーションホール
    • Related Report
      2019 Annual Research Report
  • [Presentation] (6,4)単層カーボンナノチューブのプラズマCVD合成における気相効果2019

    • Author(s)
      椎名 悟,志摩 拓哉,許 斌,金子 俊郎,加藤 俊顕
    • Organizer
      第13回プラズマエレクトロニクスインキュベーションホール
    • Related Report
      2019 Annual Research Report
  • [Presentation] その場観測による単層WS2合成物理因子の直接計測2019

    • Author(s)
      亀山 智矢,李 超,金子 俊郎,加藤 俊顕
    • Organizer
      第80回応用物理学会秋季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] Mechanism of persistent photo conductivity in functionalized graphene nanoribbons2019

    • Author(s)
      N. Ogura , H. Suzuki , T. Kaneko , T. Kato
    • Organizer
      RECENT PROGRESS IN GRAPHENE & 2D MATERIALS RESEARCH 2019
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Scalable fabrication of TMD-based highly-transparent solar cells2019

    • Author(s)
      X. He , Y. Yamaguchi , T. Kaneko , and T. Kato
    • Organizer
      RECENT PROGRESS IN GRAPHENE & 2D MATERIALS RESEARCH 2019
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] CVD growth of 1 million graphene nanoribbons on the device2019

    • Author(s)
      T. Kato and T. Kaneko
    • Organizer
      The 4th Graphene Flagship EU-Japan Workshop on Graphene and related 2D materials
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Highly-transparent photovoltaic based on atomically thin 2D materials2019

    • Author(s)
      X. He , Y. Yamaguchi , T. Kaneko , and T. Kato
    • Organizer
      Materials Research Meeting 2019
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Wafer scale fabrication and optoelectrical applications of suspended graphene nanoribbon arrays2019

    • Author(s)
      T. Kato and T. Kaneko
    • Organizer
      The 11th International Conference on Advanced Materials and Devices
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Fabrication of graphene nanoribbon-based quantum device with Plasma CVD2019

    • Author(s)
      M. Seo , W. Okita , H. Hiroo , T. Kaneko , T. Kato
    • Organizer
      Materials Research Meeting 2019
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Chirality selective growth of (6,4) single-walled nanotubes by plasma CVD2019

    • Author(s)
      S. Shiina , T. Shima , B. Xu , T. Kaneko , T. Kato
    • Organizer
      Materials Research Meeting 2019
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Book] 月刊ファインケミカル(ナノグラフェンの合成と用途開発)2020

    • Author(s)
      加藤俊顕, 金子俊郎
    • Total Pages
      77
    • Publisher
      株式会社シーエムシー出版
    • Related Report
      2019 Annual Research Report
  • [Book] 表面と真空2019

    • Author(s)
      加藤俊顕, 鈴木弘朗, 金子俊郎
    • Total Pages
      68
    • Publisher
      日本表面真空学会
    • Related Report
      2019 Annual Research Report
  • [Book] SciTech Europa Quarterly2019

    • Author(s)
      T. Kato
    • Total Pages
      232
    • Publisher
      Pan European Networks Ltd
    • Related Report
      2019 Annual Research Report

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Published: 2019-04-18   Modified: 2024-01-30  

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