Development of Ultra-Short Pulse X-ray Imaging Method through High-Precision Wolter Mirror Fabrication

• Project/Area Number: 19H00736
• Research Category: Grant-in-Aid for Scientific Research (A)
• Allocation Type: Single-year Grants
• Section: 一般
• Review Section: Medium-sized Section 18:Mechanics of materials, production engineering, design engineering, and related fields
• Research Institution: The University of Tokyo
• Principal Investigator: Mimura Hidekazu 東京大学, 先端科学技術研究センター, 教授 (30362651)
• Co-Investigator(Kenkyū-buntansha): 中川 桂一 東京大学, 大学院工学系研究科(工学部), 講師 (00737926) ; 本山 央人 東京大学, 大学院理学系研究科(理学部), 助教 (00822636)
• Project Period (FY): 2019-04-01 – 2023-03-31
• Project Status: Completed (Fiscal Year 2022)
• Budget Amount: ¥44,330,000 (Direct Cost: ¥34,100,000、Indirect Cost: ¥10,230,000); Fiscal Year 2022: ¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000); Fiscal Year 2021: ¥10,920,000 (Direct Cost: ¥8,400,000、Indirect Cost: ¥2,520,000); Fiscal Year 2020: ¥13,260,000 (Direct Cost: ¥10,200,000、Indirect Cost: ¥3,060,000); Fiscal Year 2019: ¥15,600,000 (Direct Cost: ¥12,000,000、Indirect Cost: ¥3,600,000)
• Keywords: X線ミラー / ウォルターミラー / X線イメージング / 軟X線 / Ｘ線ミラー / Ｘ線結像 / 精密加工 / 精密計測 / Ｘ線集光 / 軟X線集光

Outline of Research at the Start

本研究ではＸ線の結像イメージングが可能な高精度なウォルターミラーを開発しX線自由電子レーザーSACLAの軟X線ビームラインに導入する。ウォルターミラーは、円筒形状の内面が反射面であるため高精度化が困難であった。本研究では、円筒内面の形状修正法と形状測定法の両方を開発し高精度化を図る。具体的には、イオンビームスパッタとOAM法による二つの内面修正法を確立し、HHGを用いた位相回復法による形状計測法を開発する。高精度化されたウォルターミラーを利用し軟X線領域の超短パルスイメージングシステムを構築する。

Outline of Final Research Achievements

Improvement in X-ray analysis techniques, which are essential for analyzing various substances, requires not only excellent X-ray sources but also indispensable X-ray optical elements. In this study, we have successfully fabricated a highly accurate focusing and imaging Wolter mirror for X-rays, and combined it with an X-ray free-electron laser (XFEL) light source to develop an ultra-short pulse X-ray imaging system. We constructed a shape correction system for an axial symmetric X-ray mirror using jet processing and introduced a microscopic system consisting of two Wolter mirrors into the soft X-ray beamline BL1 at SACLA (SPring-8 Angstrom Compact Free Electron Laser). As a result, we achieved ultra-short pulse imaging with a spatial resolution of 250 nm using a 3.4 nm wavelength XFEL.

Academic Significance and Societal Importance of the Research Achievements

超高強度、超短波するのX線光源であるX線自由電子レーザーは、物質の微視的構造、組成、変化をとらえることができる。X線の物質への照射によって得られるX線吸収やX線散乱などの情報に空間分布情報を加えるためには、X線用のレンズが必要である。本研究で開発したウォルタミラーは、長年理想的なＸ線用の結像素子と考えられてきたが、その作製の困難性から実現されていなかった。本研究では、ウォルターミラーを含む回転体型ミラーの高精度化に成功し、SACLAにおいてその実用性を実証したことから、ナノテラスなど一般的な放射光施設においても今後の普及が期待できる。

Research Products

• [Journal Article] Abrasive slurry jet machining system using polyurethane silica coreshell particles for internal surfaces of axisymmetric x-ray mirrors (2023)
  • Author(s): Shunya Yokomae, Yoko Takeo, Takenori Shimamura, Yasunori Senba, Hikaru Kishimoto, Haruhiko Ohashi, Hidekazu Mimura
  • Journal Title: Review of Scientific Instruments Volume: 94 Issue: 1 Pages: 015106-015106
  • DOI: 10.1063/5.0125242
  • Peer Reviewed
• [Journal Article] Fabrication of soft x-ray monolithic Wolter mirror based on surface scanning measurement using touch probe (2022)
  • Author(s): Takehiro Kume, Kentaro Hiraguri, Yoichi Imamura, Yusuke Matsuzawa, Takahiro Saito, Hiroaki Miyashita, Yoko Takeo, Yasunori Senba, Hikaru Kishimoto, Haruhiko Ohashi,Hirokazu Hashizume, Hidekazu Mimura
  • Journal Title: Review of Scientific Instruments Volume: 93 Issue: 6
  • DOI: 10.1063/5.0087171
• [Journal Article] Organic abrasive machining system for optical fabrication with 0.1-mm spatial resolution (2022)
  • Author(s): Y. Matsuzawa, K. Hiraguri, H. Hashizume, H. Mimura,
  • Journal Title: Review of Scientific Instruments Volume: 93 Issue: 1 Pages: 013101-013101
  • DOI: 10.1063/5.0068556
  • Peer Reviewed
• [Journal Article] Copper electroforming replication process for soft x-ray mirrors (2021)
  • Author(s): G. Yamaguchi, H. Motoyama, S. Owada, Y. Kubota, S. Egawa, T. Kume, Y. Takeo, M. Yabashi, H. Mimur
  • Journal Title: Review of Scientific Instruments Volume: 92 Issue: 12 Pages: 123106-123106
  • DOI: 10.1063/5.0065684
  • Peer Reviewed
• [Journal Article] A highly efficient nanofocusing system for soft x rays (2020)
  • Author(s): Y. Takeo, H. Motoyama, T. Shimamura, T. Kimura, T. Kume, Y. Matsuzawa, T Saito, Y. Imamura, H. Miyashita, K. Hiraguri, H. Hashizume, Y. Senba, H. Kishimoto, H. Ohashi, and H. Mimura
  • Journal Title: Appl. Phys. Lett. Volume: 117 Issue: 15 Pages: 151104-151104
  • DOI: 10.1063/5.0027118
  • Peer Reviewed
• [Journal Article] Development of precise electroformed Wolter mirror for X-ray astronomy (2020)
  • Author(s): Gota Yamaguchi, Takehiro Kume, Yoko Takeo, Yusuke Matsuzawa, Kentaro Hiraguri, Yoichi Imamura, Hiroaki Miyashita, Keisuke Tamura, Yusuke Takehara, Ayumu Takigawa, Tetsuo Kanoh, Kenji Tachibana, Ikuyuki Mitsuishi, Hirokazu Hashizume, Hidekazu Mimura
  • Journal Title: SPIE Proceedings Volume: 11491 Pages: 19-19
  • DOI: 10.1117/12.2569834
  • Peer Reviewed
• [Journal Article] Design of two-stage soft-X-ray nano-focusing system with a ring-focusing mirror and quasi-Wolter mirror (2020)
  • Author(s): Yoko Takeo, Hiroto Motoyama, Takenori Shimamura, Takashi Kimura, Takehiro Kume, Yusuke Matsuzawa, Takahiro Saito, Yoichi Imamura, Hiroaki Miyashita, Kentarou Hiraguri, Hirokazu Hashizume, Yasunori Senba, Hikaru Kishimoto, Haruhiko Ohashi, and Hidekazu Mimura
  • Journal Title: SPIE Proceedings Volume: 11492 Pages: 21-21
  • DOI: 10.1117/12.2570007
  • Peer Reviewed
• [Journal Article] Advanced fabrication technologies for ultraprecise replicated mirrors for x-ray telescopes (2020)
  • Author(s): Hidekazu Mimura, Gota Yamaguchi, Takehiro Kume, Yoko Takeo, Akinari Ito, Yusuke Matsuzawa, Takahiro Saito, Kentarou Hiraguri, Yusuke Takehara, Ayumu Takigawa, Keisuke Tamura, Tetsuo Kanoh, Kenji Tachibana, Hirokazu Hashizume, Ikuyuki Mitsuishi
  • Journal Title: SPIE Proceedings Volume: 11444 Pages: 155-155
  • DOI: 10.1117/12.2560892
  • Peer Reviewed
• [Journal Article] Development of shape measurement system for high precision Wolter mandrel (2020)
  • Author(s): Takehiro Kume, Hirokazu Hashizume, Kentarou Hiraguri, Yusuke Matsuzawa, Yoichi Imamura, Hiroaki Miyashita, Takahiro Saito, Gota Yamaguchi, Yoko Takeo, Yasunori Senba, Hikaru Kishimoto, Haruhiko Ohashi, Hidekazu Mimura
  • Journal Title: SPIE Proceedings Volume: 11492 Pages: 20-20
  • DOI: 10.1117/12.2568929
  • Peer Reviewed
• [Journal Article] Single-shot achromatic imaging for a broadband soft X-ray pulse (2020)
  • Author(s): S. Egawa, H. Motoyama, A. Iwasaki, G. Yamaguchi, T. Kume, K. Yamanouchi, H. Mimura
  • Journal Title: Optics Letters Volume: 45(2) Issue: 2 Pages: 515-518
  • DOI: 10.1364/ol.381538
  • Peer Reviewed
• [Journal Article] Full-field microscope with twin Wolter mirrors for soft X-ray free-electron lasers (2019)
  • Author(s): S. Egawa, S. Owada, H. Motoyama, G. Yamaguchi, Y. Matsuzawa, T. Kume, Y. Kubota, K. Tono, M. Yabashi, H. Ohashi, H. Mimura
  • Journal Title: Optics Express Volume: 27(23) Issue: 23 Pages: 33889-33897
  • DOI: 10.1364/oe.27.033889
• [Presentation] 細穴放電加工の放射光高速X線撮像による解析 (2023)
  • Author(s): 工藤悠佑，山本祥大，内田大悟，山口豪太, 三村秀和
  • Organizer: 2023年度精密工学会春季大会学術講演会
• [Presentation] 高精度X線望遠鏡用電鋳ウォルターミラーの開発 ―内面形状計測システムの開発― (2023)
  • Author(s): 伊藤駿佑，伊藤旺成，毛利柊太郎，山口豪太, 三村秀和
  • Organizer: 2023年度精密工学会春季大会学術講演会
• [Presentation] 高精度X線望遠鏡用電鋳ウォルターミラーの開発 ―内面成膜システムの開発― (2023)
  • Author(s): 毛利柊太郎，伊藤旺成，伊藤駿佑，山口豪太, 三村秀和
  • Organizer: 2023年度精密工学会春季大会学術講演会
• [Presentation] 回転体ミラーと自由曲面X線ミラー (2023)
  • Author(s): 三村秀和
  • Organizer: 第36回日本放射光学会年会・放射光科学合同シンポジウム
  • Invited
• [Presentation] 軟X線から硬X線領域にわたる放射光ミラーに関する研究開発 (2023)
  • Author(s): 三村秀和
  • Organizer: 第36回日本放射光学会年会・放射光科学合同シンポジウム
  • Invited
• [Presentation] High-speed imaging of metal drilling using 100-keV X-rays at SPring-8 (2022)
  • Author(s): Hidekazu Mimura, Gota Yamaguchi, Keito Tamura, Hirokatsu Yumoto, Takahisa Koyam, Hidekazu Takano, Yujiro Hayashi, Makina Yabashi, Haruhiko Ohash
  • Organizer: SPIE Optical Engineering + Applications
  • Int'l Joint Research
• [Presentation] アクリル板と水のみによるガラス表面とシリコン表面の原子レベル平坦化 (2022)
  • Author(s): 三村秀和
  • Organizer: 第4回ナノ茶論
  • Invited
• [Presentation] 超高分解能X線望遠鏡の実現に向けたNi電鋳ミラーの形状精度向上ーシミュレーションモデルの構築と遮蔽物配置による膜厚分布の均一化ー (2022)
  • Author(s): 伊藤旺成，伊藤駿祐，毛利柊太郎，山口豪太，三村秀和
  • Organizer: 電気加工学会全国大会(2022)
• [Presentation] X 線望遠鏡用ウォルターミラーの高精度作製プロセスの開発 ―電鋳プロセスにおけるミラー長手方向膜厚分布の均一化― (2022)
  • Author(s): 伊藤旺成，伊藤駿佑，毛利柊太郎，山口豪太, 三村秀和
  • Organizer: 2022年度精密工学会秋季大会学術講演会
• [Presentation] 細穴放電加工の放射光高速X線撮像による解析 (2022)
  • Author(s): 工藤悠佑，山口豪太，山本祥大，内田大悟，三村秀和
  • Organizer: 2022年度精密工学会秋季大会学術講演会
• [Presentation] 小径工具を用いた金属ミーリング加工の放射光高速X線撮像による解析 (2022)
  • Author(s): 山本祥大，工藤悠佑，内田大悟，山口豪太，三村秀和
  • Organizer: 2022年度精密工学会秋季大会学術講演会
• [Presentation] Development of figure correction system for axisymmetric x-ray mirrors (2021)
  • Author(s): S. Yokomae, Y. Takeo, T. Shimamura, Y. Matsuzawa, T. Kume, Y. Senba, H. Kishimoto, H. Ohashi and H. Mimura,
  • Organizer: SPIE Optical Engineering + Applications
  • Int'l Joint Research
• [Presentation] Development of precise electroformed Wolter mirror for X-ray astronomy (2021)
  • Author(s): G. Yamaguchi, T. Kume, Y. Takeo, Y. Matsuzawa, K. Hiraguri, Y. Imamura, H. Miyashita, K. Tamura, Y. Takehara, A. Takigawa, T. Kanoh, K. Tachibana, I. Mitsuishi, H. Hashizume, H. Mimura
  • Organizer: SPIE Optical Engineering + Applications
  • Int'l Joint Research
• [Presentation] X線宇宙望遠鏡用高精度大型ウォルターミラーの開発 (2021)
  • Author(s): 三村秀和
  • Organizer: 2021年度日本表面真空学会学術講演会シンポジウム講演
  • Invited
• [Presentation] 銅電鋳製回転楕円ミラーによる軟X線FELのサブミクロン集光 (2021)
  • Author(s): 山口 豪太, 本山 央人, 大和田 成起, 久保田 雄也, 江川 悟, 竹尾 陽子, 矢橋 牧名, 三村 秀和
  • Organizer: 第34回日本放射光学会年会・放射光科学合同シンポジウム, オンライン開催
• [Presentation] アクリル定盤と水によるガラス表面の平坦化－平坦性と除去レート向上の試み― (2021)
  • Author(s): 郭建麗，松澤雄介，三村秀和
  • Organizer: 2021年度精密工学会春季大会，2021年度精密工学会春季大会学術講演会，オンライン開催
• [Presentation] 高分解能なＸ線望遠鏡実現に向けたウォルターミラーの電鋳プロセスの高精度化―電流密度分布の有限要素解析を通じた最適なめっき条件の探求― (2021)
  • Author(s): 伊藤 旺成, 山口 豪太, 竹尾 陽子, 三村 秀和
  • Organizer: 2021年度精密工学会春季大会, 2021年度精密工学会春季大会学術講演会, オンライン開催
• [Presentation] 回転体形状を有する光学素子のX線CT による高精度形状評価法 (2021)
  • Author(s): 清水冴月, 三村秀和
  • Organizer: 第88回精密工学会現物融合型エンジニアリング専門委員会
• [Presentation] Development of precise electroformed Wolter mirror for X-ray astronomy (2020)
  • Author(s): Gota Yamaguchi, Takehiro Kume, Yoko Takeo, Yusuke Matsuzawa, Kentaro Hiraguri, Yoichi Imamura, Hiroaki Miyashita, Keisuke Tamura, Yusuke Takehara, Ayumu Takigawa, Tetsuo Kanoh, Kenji Tachibana, Ikuyuki Mitsuishi, Hirokazu Hashizume, Hidekazu Mimura
  • Organizer: Advances in Metrology for X-Ray and EUV Optics IX,Optical Engineering + Applications, SPIE Optics + Photonics 2020 Digital Forum, Online Only
  • Int'l Joint Research
• [Presentation] Design of two-stage soft-X-ray nano-focusing system with a ring-focusing mirror and quasi-Wolter mirror (2020)
  • Author(s): Yoko Takeo, Hiroto Motoyama, Takenori Shimamura, Takashi Kimura, Takehiro Kume, Yusuke Matsuzawa, Takahiro Saito, Yoichi Imamura, Hiroaki Miyashita, Kentarou Hiraguri, Hirokazu Hashizume, Yasunori Senba, Hikaru Kishimoto, Haruhiko Ohashi, Hidekazu Mimura
  • Organizer: Advances in Metrology for X-Ray and EUV Optics IX, Optical Engineering + Applications, SPIE Optics + Photonics 2020 Digital Forum, Online Only
  • Int'l Joint Research
• [Presentation] Two-stage reflective focusing system for soft X-rays at BL25SU of SPring-8 (2020)
  • Author(s): Yoko Takeo, Hiroto Motoyama, Takenori Shimamura, Takashi Kimura , Takehiro Kume, Yusuke Matsuzawa, Takahiro Saito, Yoichi Imamura , Hiroaki Miyashita, Kentaro Hiraguri, Hirokazu Hashizume, Yasunori Senba, Hikaru Kishimoto, Haruhiko Ohashi, and Hidekazu Mimura
  • Organizer: XOPT2-02, XOPT2020 (International Conference on X-ray Optics and Application), OPIC2020 (OPTICS & PHOTONICS International Congress 2020), Online Only
  • Int'l Joint Research
• [Presentation] Advanced fabrication technologies for ultraprecise replicated mirrors for x-ray telescopes (2020)
  • Author(s): Hidekazu Mimura, Gota Yamaguchi, Takehiro Kume, Yoko Takeo, Akinari Ito, Yusuke Matsuzawa, Takahiro Saito, Kentarou Hiraguri, Yusuke Takehara, Ayumu Takigawa, Keisuke Tamura, Tetsuo Kanoh, Kenji Tachibana, Hirokazu Hashizume, Ikuyuki Mitsuishi
  • Organizer: SPIE Astronomical Telescopes + Instrumentation, Online Only
  • Int'l Joint Research
• [Presentation] Development of shape measurement system for high precision Wolter mandrel (2020)
  • Author(s): Takehiro Kume, Hirokazu Hashizume, Kentarou Hiraguri, Yusuke Matsuzawa, Yoichi Imamura, Hiroaki Miyashita, Takahiro Saito, Gota Yamaguchi, Yoko Takeo, Yasunori Senba, Hikaru Kishimoto, Haruhiko Ohashi, Hidekazu Mimura
  • Organizer: S Advances in Metrology for X-Ray and EUV Optics IX, Optical Engineering + Applications, SPIE Optics + Photonics 2020 Digital Forum, Online Only
  • Int'l Joint Research
• [Presentation] 軟Ｘ線用集光ミラーの開発と大学研究の事業化の一例 (2020)
  • Author(s): 三村秀和
  • Organizer: 強光子場科学研究懇談会
  • Invited
• [Presentation] Fabrication and testing of Wolter type-I mirrors for femtosecond soft x-ray imaging (2019)
  • Author(s): . S. Egawa, H. Motoyama, G. Yamaguchi, S. Owada, Y. Kubota, Y. Matsuzawa, T. Kume, M. Yabashi, H. Mimura
  • Organizer: SPIE Optics + Photonics
  • Int'l Joint Research