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Development of low-energy molecular sensors with nanosale thermal-aware device design and operand spectroscopy

Research Project

Project/Area Number 19H00756
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Review Section Medium-sized Section 21:Electrical and electronic engineering and related fields
Research InstitutionThe University of Tokyo

Principal Investigator

Uchida Ken  東京大学, 大学院工学系研究科(工学部), 教授 (30446900)

Co-Investigator(Kenkyū-buntansha) 近藤 寛  慶應義塾大学, 理工学部(矢上), 教授 (80302800)
Project Period (FY) 2019-04-01 – 2023-03-31
Project Status Completed (Fiscal Year 2022)
Budget Amount *help
¥45,630,000 (Direct Cost: ¥35,100,000、Indirect Cost: ¥10,530,000)
Fiscal Year 2022: ¥6,110,000 (Direct Cost: ¥4,700,000、Indirect Cost: ¥1,410,000)
Fiscal Year 2021: ¥10,400,000 (Direct Cost: ¥8,000,000、Indirect Cost: ¥2,400,000)
Fiscal Year 2020: ¥11,570,000 (Direct Cost: ¥8,900,000、Indirect Cost: ¥2,670,000)
Fiscal Year 2019: ¥17,550,000 (Direct Cost: ¥13,500,000、Indirect Cost: ¥4,050,000)
Keywords分子センサ / ジュール熱 / オペランド分光 / 電子輸送 / 準大気圧XPS / 分子認識センサ / 熱配慮設計 / 金属触媒 / オペランド計測 / 金属ナノシート / ガスセンサ / 触媒
Outline of Research at the Start

IoT時代の到来により,我々の身の回りの情報を長期間にわたりセンシングすることが益々重要になっている.本研究では,気相中に漂う低分子ガスの分子種と濃度を,超長期にわたり低エネルギーで認識するセンサを合金ナノシートで創出することを目的とした.そのために,申請者らの①ナノ材料の熱配慮設計によりジュール熱を局在化させ低エネルギーかつ高速に化学反応と分子の吸着脱離を制御する技術と②軟X線と赤外線により表面の合金組成や分子の状態をオペランド計測する技術を発展させる.このようなセンサが実現できれば,呼気診断や環境測定が常時可能になり,そのインパクトは計り知れない

Outline of Final Research Achievements

As the Internet of Things era is going to be realized, long-term sensing of various kinds of information around us is becoming increasingly important. However, it is difficult to continuously measure the concentration and kinds of low-molecular-weight gases floating in our living space and environments. In this research project, we have developed a technique for activating the surface of a noble metal nanosheet sensor by self-Joule heating, which can activate the sensor surface with higher reliability and lower energy. We have also investigated the principle of sensor operation by utilizing in-situ measurement of the sensor surface reaction (operando measurement technique). As a result, we succeeded in developing an alloy molecular sensor that can detect molecules at low energy for a long period of time.

Academic Significance and Societal Importance of the Research Achievements

分子センサの開発では,ジュール加熱による低エネルギーの分子センサを実現するとともに,ジュール加熱に直流バイアスを用いた場合と比較して,交流バイアスでは周波数を高くするほど寿命が長くなることを明らかにした.また,Ptナノシートセンサの抵抗値が,Pt表面におけるガス分子の結合状態に大きな影響を受けることを,センサ動作時の表面状態の観察(オペランド計測)で示し,さらに2つの元素からなる二元合金を用いることで,分子センサの性能が向上することを実証した.長寿命かつ高性能な分子センサの実現は,日常的な健康状態チェックなどに使える可能性があり,社会に大きなインパクトを与えると期待できる.

Report

(5 results)
  • 2022 Final Research Report ( PDF )
  • 2021 Annual Research Report
  • 2020 Annual Research Report
  • 2019 Comments on the Screening Results   Annual Research Report
  • Research Products

    (34 results)

All 2022 2021 2020 2019

All Journal Article (7 results) (of which Int'l Joint Research: 1 results,  Peer Reviewed: 7 results,  Open Access: 3 results) Presentation (27 results) (of which Int'l Joint Research: 9 results,  Invited: 6 results)

  • [Journal Article] Experimental study on shallow and deep dopant properties at the interface of PtO<sub>x</sub>/ZnO Schottky diodes2022

    • Author(s)
      Matsumura Mikiya、Tanaka Takahisa、UCHIDA Ken
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: - Issue: SD Pages: SD1031-SD1031

    • DOI

      10.35848/1347-4065/ac54f3

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Simultaneous Detection of Mixed-Gas Components by Ionic-Gel Sensors with Multiple Electrodes2022

    • Author(s)
      Tanaka Takahisa、Hamanaka Yusuke、Kato Taro、Uchida Ken
    • Journal Title

      ACS Sensors

      Volume: 7 Issue: 3 Pages: 716-721

    • DOI

      10.1021/acssensors.1c02721

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Atomistic Simulation Study of Impacts of Surface Carrier Scatterings on Carrier Transport in Pt Nanosheets2021

    • Author(s)
      Tanaka Takahisa、Kato Taro、Yajima Takeaki、Uchida Ken
    • Journal Title

      IEEE Electron Device Letters

      Volume: 42 Issue: 7 Pages: 1057-1060

    • DOI

      10.1109/led.2021.3077466

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Temperature dependence of resistivity increases induced by thiols adsorption in gold nanosheets2021

    • Author(s)
      Kato Taro、Tanaka Takahisa、Yajima Takeaki、Uchida Ken
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 60 Issue: SB Pages: SBBH13-SBBH13

    • DOI

      10.35848/1347-4065/abd6de

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] In situ AP-XPS analysis of a Pt thin-film sensor for highly sensitive H2 detection2020

    • Author(s)
      Toyoshima Ryo、Tanaka Takahisa、Kato Taro、Uchida Ken、Kondoh Hiroshi
    • Journal Title

      Chemical Communications

      Volume: 56 Issue: 70 Pages: 10147-10150

    • DOI

      10.1039/d0cc04030d

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Impact of defects in self-assembled monolayer on humidity sensing by molecular functionalized transistors2020

    • Author(s)
      T. Tanaka, T. Yajima, K. Uchida
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 59 Issue: SI Pages: SIIE04-SIIE04

    • DOI

      10.35848/1347-4065/ab80dc

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Low-Power and ppm-Level Multimolecule Detection by Integration of Self-Heated Metal Nanosheet Sensors2019

    • Author(s)
      Tanaka Takahisa、Yanagida Takeshi、Uchida Ken、Tabuchi Kenta、Tatehora Kohei、Shiiki Yohsuke、Nakagawa Shuya、Takahashi Tsunaki、Shimizu Ryota、Ishikuro Hiroki、Kuroda Tadahiro
    • Journal Title

      IEEE Transactions on Electron Devices

      Volume: 66 Issue: 12 Pages: 5393-5398

    • DOI

      10.1109/ted.2019.2945932

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed / Open Access
  • [Presentation] AP-XPSを活用した機能性材料表面のその場分析2022

    • Author(s)
      豊島遼 、近藤 寛
    • Organizer
      NanospecFY2021mini 合同ミニコンファレンス (SPring-8ユーザー協同体顕微ナノ材料科学研究会 日本表面真空学会放射光表面科学研究部会 日本表面真空学会プローブ顕微鏡研究部会)
    • Related Report
      2021 Annual Research Report
    • Invited
  • [Presentation] Enhanced electron phonon scattering in Si nanowires covered by oxide2021

    • Author(s)
      T. Tanaka, K. Uchida
    • Organizer
      240th ECS Meeting
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Selective Recognition of Acetone in Air Against Hydrogen By Impedance Measurement of Two-Terminal Electrochemical Sensors Based on Ionic Liquids2021

    • Author(s)
      Y. Hamanaka, T. Tanaka, K. Uchida
    • Organizer
      240th ECS Meeting
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Experimental Investigation of Interface Defect Properties in PtOx/ZnO Schottky Diodes by Deep Level Transient Spectroscopy2021

    • Author(s)
      M. Matsumura, T. Tanaka, K. Uchida
    • Organizer
      34th International Microprocesses and Nanotechnology Conference (MNC)
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 社会課題解決を目指したナノ電子材料・デバイスにおける熱の課題と利用2021

    • Author(s)
      内田建
    • Organizer
      日本伝熱学会創立60周年記念 第58回 日本伝熱シンポジウム
    • Related Report
      2021 Annual Research Report
    • Invited
  • [Presentation] Auナノシートを用いた小型・低エネルギー硫化水素センサ2021

    • Author(s)
      加藤太朗,田中貴久,内田建
    • Organizer
      第82回応用物理学会秋季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] ナノスケール化学センサ集積に向けた局所熱制御と表面/界面設計2021

    • Author(s)
      田中貴久,内田建
    • Organizer
      第82回応用物理学会秋季学術講演会
    • Related Report
      2021 Annual Research Report
    • Invited
  • [Presentation] 低エネルギー・集積化分子認識センサ2021

    • Author(s)
      内田建,田中貴久
    • Organizer
      2021年 電気学会 電子・情報・システム部門大会
    • Related Report
      2021 Annual Research Report
  • [Presentation] 自己ジュール加熱金属ナノシートアレイによる微量な多分子の低消費電力ガスセンシング2021

    • Author(s)
      田中貴久,田渕健太,舘洞浩平,椎木陽介,中川修哉,高橋綱己,清水涼太,石黒仁揮,黒田忠広,柳田剛,内田建
    • Organizer
      第69回応用物理学会春季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] 二端子間イオン液体のインピーダンス変化による低分子ガスの選択的認識2021

    • Author(s)
      濱中悠輔,田中貴久,内田建
    • Organizer
      第69回応用物理学会春季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] IrOxナノシートによるCH4センサの作製2021

    • Author(s)
      梅田竜生,田中貴久,内田建
    • Organizer
      第69回応用物理学会春季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] 極低温(4K)におけるMOS容量評価手法の開発2021

    • Author(s)
      宮尾知寿,田中貴久,内田建
    • Organizer
      第69回応用物理学会春季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] PtOx/ZnO ショットキー接合の界面近傍におけるドナー濃度とその起源について2021

    • Author(s)
      松村美貴也,田中貴久,内田建
    • Organizer
      第69回応用物理学会春季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] In situ analysis of a Pt thin film H2 gas sensor surface by AP-XPS2021

    • Author(s)
      R. Toyoshima, and H. Kondoh
    • Organizer
      8th International Workshop on Ambient Pressure X-ray Photoelectron Spectroscopy
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] X線その場計測で見る機能性表面2021

    • Author(s)
      近藤 寛
    • Organizer
      第128回触媒討論会
    • Related Report
      2021 Annual Research Report
  • [Presentation] 白金薄膜センサの/In Situ/XAFS分析2021

    • Author(s)
      長谷川暁士、豊島 遼、田中貴久、阿部 仁、内田 建、近藤 寛
    • Organizer
      2020年度量子ビームサイエンスフェスタ
    • Related Report
      2020 Annual Research Report
  • [Presentation] 酸素吸着によるPt薄膜抵抗率変化の原子論的解析2020

    • Author(s)
      田中貴久,内田建
    • Organizer
      第68回応用物理学会春季学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] Auナノシートを用いた硫化水素センサの創出2020

    • Author(s)
      加藤太朗,田中貴久,内田建
    • Organizer
      第68回応用物理学会春季学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] Modeling of Graphene Sensor Functionalized with Pt Nanoparticles by Molecular Dynamics and Grand Canonical Monte Carlo Simulations with Reactive Force Field2020

    • Author(s)
      T. Tanaka, T. Yajima, and K. Uchida
    • Organizer
      2020 International Conference on Solid State Devices and Materials (SSDM)
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Experimental Evidence for Temperature Dependence of Adsorbate-induced Scattering in Metal Nanosheets and Its Implication to Gas Sensing Applications2020

    • Author(s)
      T. Kato, T. Tanaka, T. Yajima, and K. Uchida
    • Organizer
      2020 > International Conference on Solid State Devices and Materials (SSDM)
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] A Wide Range and High Accuracy Sensor Interface with Switching Regulator for Coin-Cell Powered Tiny Wirelesss Sensor Node2020

    • Author(s)
      K. Tatehora, Y. Shiiki, S. Nakagawa, T. Tanaka, K. Uchida, and H. Ishikuro
    • Organizer
      IEEE ISCAS
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Nanoscale Thermal Management for Low-energy Integrated Electronics in the Internet-of-Things Era2020

    • Author(s)
      K. Uchida
    • Organizer
      Nanotechnology for a Sustainable Future, Waterloo Institute for Nanotechnology
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] 金属ナノシートへの分子吸着による キャリア移動度変化の解析2020

    • Author(s)
      加藤太朗,田中貴久,矢嶋赳彬,内田建
    • Organizer
      第81回応用物理学会秋季学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] 時間的・空間的に局在化したナノ熱による機能性電子デバ > イスの創製2020

    • Author(s)
      内田建,田中貴久
    • Organizer
      第81回応用物理学会秋季学術講演会
    • Related Report
      2020 Annual Research Report
    • Invited
  • [Presentation] In-situ AP-XPS を用いたPt 薄膜H_2 ガスセンサの分析2020

    • Author(s)
      豊島 遼, 田中 貴久, 加藤 太朗, 内田 建, 近藤 寛
    • Organizer
      2020年日本表面真空学会学術講演会
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 金属ナノシートの電気抵抗に分子吸着が及ぼす影響2020

    • Author(s)
      加藤太朗,田中貴久,矢嶋赳彬,内田建
    • Organizer
      第67回応用物理学会春季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] 高感度H2検知Pt薄膜センサのオペランドAP-XPS分析2020

    • Author(s)
      豊島遼,田中貴久,加藤太朗,内田建,近藤寛
    • Organizer
      2019年度量子ビームサイエンスフェスタ
    • Related Report
      2019 Annual Research Report

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Published: 2019-04-18   Modified: 2024-12-25  

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