• Search Research Projects
  • Search Researchers
  • How to Use
  1. Back to previous page

Diagnostics of Electron Energy Distribution Function of Atmospheric-Pressure Plasmas with Phase-Resolved Optical Emission Spectroscopy Measurement of Continuum Spectrum

Research Project

Project/Area Number 19H01867
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Review Section Basic Section 14010:Fundamental plasma-related
Research InstitutionTokyo Institute of Technology

Principal Investigator

Akatsuka Hiroshi  東京工業大学, 科学技術創成研究院, 准教授 (50231808)

Co-Investigator(Kenkyū-buntansha) 山家 清之  新潟大学, 自然科学系, 准教授 (90452474)
Project Period (FY) 2019-04-01 – 2022-03-31
Project Status Completed (Fiscal Year 2021)
Budget Amount *help
¥17,680,000 (Direct Cost: ¥13,600,000、Indirect Cost: ¥4,080,000)
Fiscal Year 2021: ¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000)
Fiscal Year 2020: ¥3,770,000 (Direct Cost: ¥2,900,000、Indirect Cost: ¥870,000)
Fiscal Year 2019: ¥10,010,000 (Direct Cost: ¥7,700,000、Indirect Cost: ¥2,310,000)
Keywords大気圧非平衡プラズマ / 発光分光計測 / 電子エネルギー分布関数 / 連続スペクトル / 制動放射 / 逆問題 / 不完全第1種ボルテラ積分方程式 / 分光計測 / 遺伝的アルゴリズム / 衝突輻射モデル / 励起状態密度 / 励起状態密度分布 / プラズマ発光分光計測 / 連続スペクトル計測 / 位相分解計測
Outline of Research at the Start

現在、医療・農業・材料工学など、応用開発の著しい大気圧非平衡プラズマではあるが、電子温度・密度の測定方法が未確立で、電子エネルギー分布関数(EEDF)にいたっては、測定手法開発も不十分である。本研究の目的は、大気圧非平衡プラズマの放つ発光スペクトルから、電子温度・密度、更にはEEDFまでも求める方法論を確立することである。実測可能な強度で制動放射が可視光領域に現れ、そのスペクトル解析から原理的にEEDFを求めることが可能であるが、十分な実験的検証がなされていない。本研究ではその原理実証、およびデータ処理における数理的手法の確立、並びに他方法との実験的クロスチェックまでを実施する。

Outline of Final Research Achievements

A new method to determine the arbitrary electron energy distribution function (EEDF) from the optical emission spectroscopic measurement in atmospheric-pressure plasma is introduced. The optical emission spectroscopy (OES) continuum emission spectrum, dominated by electron-neutral bremsstrahlung radiation, is analyzed to inspect the usefulness of the conventional OES measurement range for EEDF determination. The EEDF is reconstructed from the OES continuum radiation spectrum by applying machine learning to solve the bremsstrahlung emissivity equation inversely. Through iterative statistical analysis, the presented genetic algorithm can locate the EEDF reliably. Preliminary experimental EEDF results of an argon dielectric barrier discharge (DBD) OES measurement are given. The electron energy range and resolution of the determined EEDF are discussed. The results showed potential for accurate determination of the arbitrary EEDF in atmospheric-pressure plasma using simple OES equipment.

Academic Significance and Societal Importance of the Research Achievements

大気圧非平衡プラズマの放つ発光スペクトルから、電子温度・密度、更には電子エネルギー分布関数EEDFまでも求める方法論を確立することができた。低温プラズマの電子と放電母ガスとの相互作用による制動放射スペクトル解析から原理的にEEDFを求めることが可能であることが見出された。大気圧非平衡プラズマのEEDFの簡便な計測手段を物理的に確立させた。実験的原理実証、およびデータ処理における数理的手法の確立、並びに他方法との実験的クロスチェックまでを実施することができた。将来医療応用も期待されるプラズマ機器について、EEDF測定機器開発の基礎を与え、プラズマ医療の基礎を根本から押し上げることもできた。

Report

(4 results)
  • 2021 Annual Research Report   Final Research Report ( PDF )
  • 2020 Annual Research Report
  • 2019 Annual Research Report
  • Research Products

    (17 results)

All 2022 2021 2020

All Journal Article (3 results) (of which Peer Reviewed: 3 results) Presentation (14 results) (of which Int'l Joint Research: 5 results,  Invited: 2 results)

  • [Journal Article] Measurement of electron temperature and density of atmospheric-pressure non-equilibrium argon plasma examined with optical emission spectroscopy2021

    • Author(s)
      Onishi Hiroshi、Yamazaki Fuminori、Hakozaki Yoshiro、Takemura Masaki、Nezu Atsushi、Akatsuka Hiroshi
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 60 Issue: 2 Pages: 026002-026002

    • DOI

      10.35848/1347-4065/abd0c8

    • Related Report
      2020 Annual Research Report 2019 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Arbitrary EEDF determination of atmospheric-pressure plasma by applying machine learning to OES measurement2021

    • Author(s)
      van der Gaag Thijs、Onishi Hiroshi、Akatsuka Hiroshi
    • Journal Title

      Physics of Plasmas

      Volume: 28 Issue: 3 Pages: 033511-033511

    • DOI

      10.1063/5.0023928

    • Related Report
      2020 Annual Research Report 2019 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Developing an optimization algorithm for diagnostic modeling of optical emission spectroscopic measurement of non-equilibrium plasmas based on the argon collisional-radiative model2021

    • Author(s)
      Yamashita Yuya、Akiba Takuya、Iwanaga Toshihide、Yamaoka Hidehiko、Date Shuichi、Akatsuka Hiroshi
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 60 Issue: 4 Pages: 046003-046003

    • DOI

      10.35848/1347-4065/abe642

    • Related Report
      2020 Annual Research Report 2019 Annual Research Report
    • Peer Reviewed
  • [Presentation] 大気圧非平衡Arプラズマの放電電流特性の周波数依存性2022

    • Author(s)
      竹村 将沙樹, 根津 篤, 赤塚 洋
    • Organizer
      令和4年電気学会全国大会
    • Related Report
      2021 Annual Research Report
  • [Presentation] A Machine Learning Approach to Determine Arbitrary EEDF of Atmospheric Pressure Plasma from OES Measurement2021

    • Author(s)
      Thijs Van Der Gaag, Hiroshi Akatsuka
    • Organizer
      The 12th Asia-Pacific International Symposium on the Basics and Applications of Plasma Technology (APSPT-12)
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Low-Temperature Plasma Measurement: Line Spectrum for Low-pressure Plasmas and Continuum Spectrum for Atmospheric-pressure Plasmas2021

    • Author(s)
      HIROSHI AKATSUKA
    • Organizer
      The 12th Asia-Pacific International Symposium on the Basics and Applications of Plasma Technology (APSPT-12)
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Diagnosis of Electron Density and Temperature of Atmospheric Pressure Helium Plasma Based on Collisional-Radiative Model2021

    • Author(s)
      Keren Lin, Atsushi Nezu, Hiroshi Akatsuka
    • Organizer
      The 12th Asia-Pacific International Symposium on the Basics and Applications of Plasma Technology (APSPT-12)
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Development of Atmospheric Pressure Helium Collisional-Radiative Model by Including Atomic Collisions2021

    • Author(s)
      Keren Lin, Atsushi Nezu, Hiroshi Akatsuka
    • Organizer
      74th Annual Gaseous Electronics Conference (GEC2021)
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Arbitrary electron energy distribution determination from the continuum emission spectrum for atmospheric-pressure plasma electron diagnostics2021

    • Author(s)
      Thijs van der Gaag, Hiroshi Akatsuka
    • Organizer
      74th Annual Gaseous Electronics Conference (GEC2021)
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 連続スペクトル放射解析による大気圧非熱平衡アルゴンプラズマとヘリウムプラズマの比較2021

    • Author(s)
      和泉田智也, 山家清之, 赤塚洋
    • Organizer
      電気学会 東京支部 新潟支所 研究発表会
    • Related Report
      2021 Annual Research Report
  • [Presentation] Ar・N2混合大気圧非平衡プラズマにおける発光分光法による電子温度・電子密度の計測2021

    • Author(s)
      石塚 良, 根津 篤, 赤塚 洋
    • Organizer
      第82回応用物理学会秋季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] 換算電界から求めた電子エネルギー分布関数による大気圧非平衡N2プラズマの連続スペクトル解析2021

    • Author(s)
      城井智弘、根津 篤、赤塚 洋
    • Organizer
      令和3年電気学会全国大会
    • Related Report
      2020 Annual Research Report
  • [Presentation] A machine learning scheme to determine arbitrary EEDF in atmospheric-pressure plasma from OES measurement2021

    • Author(s)
      Thijs van der Gaag, Hiroshi Akatsuka
    • Organizer
      The 3rd International Conference on Data-Driven Plasma Science (ICDDPS-3)
    • Related Report
      2020 Annual Research Report 2019 Annual Research Report
    • Invited
  • [Presentation] 換算電界から求めた電子エネルギー分布関数による大気圧非平衡N2プラズマの連続スペクトル解析2021

    • Author(s)
      城井智弘、根津 篤、赤塚 洋
    • Organizer
      令和3年電気学会全国大会
    • Related Report
      2019 Annual Research Report
  • [Presentation] Determination of arbitrary EEDF of atmospheric-pressure plasma by OES continuum emission spectrum analysis2020

    • Author(s)
      Thijs Van Der Gaag, Hiroshi Akatsuka
    • Organizer
      2020年第81回応用物理学会秋季学術講演会
    • Related Report
      2020 Annual Research Report 2019 Annual Research Report
  • [Presentation] 大気圧非熱平衡プラズマにおける連続スペクトル放射解析による電子温度及び密度2020

    • Author(s)
      和泉田智也, 星見優天, 山家清之, 赤塚 洋
    • Organizer
      電気学会東京支部 支所研究発表会 新潟支所
    • Related Report
      2020 Annual Research Report 2019 Annual Research Report
  • [Presentation] 大気圧非熱平衡プラズマの電流と発光スペクトラムにおける相関関係2020

    • Author(s)
      和泉田智也, 山家清之, 赤塚洋
    • Organizer
      2020年度日本物理学会新潟支部第49回支部例会
    • Related Report
      2020 Annual Research Report 2019 Annual Research Report

URL: 

Published: 2019-04-18   Modified: 2023-01-30  

Information User Guide FAQ News Terms of Use Attribution of KAKENHI

Powered by NII kakenhi