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Development of plasma materials processing using spatiotemporally-controlled micro-droplet

Research Project

Project/Area Number 19H01885
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Review Section Basic Section 14030:Applied plasma science-related
Research InstitutionThe University of Tokyo

Principal Investigator

Ito Tsuyohito  東京大学, 大学院新領域創成科学研究科, 准教授 (70452472)

Project Period (FY) 2019-04-01 – 2023-03-31
Project Status Completed (Fiscal Year 2022)
Budget Amount *help
¥17,680,000 (Direct Cost: ¥13,600,000、Indirect Cost: ¥4,080,000)
Fiscal Year 2022: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2021: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
Fiscal Year 2020: ¥4,680,000 (Direct Cost: ¥3,600,000、Indirect Cost: ¥1,080,000)
Fiscal Year 2019: ¥9,230,000 (Direct Cost: ¥7,100,000、Indirect Cost: ¥2,130,000)
Keywords大気圧非平衡プラズマ / インクジェット / 単分散粒子 / 描画 / 電界計測 / プラズマ誘起ミクロ液相反応 / プリンティング / プラズマプロセス / ミクロ液相 / フレキシブルデバイス / 粒子合成
Outline of Research at the Start

近年、プラズマ生成活性種が引き起こす液相内反応である“プラズマ誘起液相反応”は、バイオ応用、材料合成応用、環境応用などでの新展開をもたらし、プラズマ応用における世界的な潮流の一つとなっている。研究代表者は、液相をミクロ化する“プラズマ誘起ミクロ液相反応”の研究を推進し、世界に先駆け“プラズマ援用インクジェットプリンティング”を実現してきた。本研究では、高度に時空間制御されたミクロ液相とプラズマとの相互作用に関する研究を行い、最終的には、プラズマ援用インクジェットプリンティングによる革新的フレキシブルデバイスの実現を導くとともに、プラズマと液相との相互作用の理解を深める。

Outline of Final Research Achievements

The research has been performed using atmospheric-pressure non-equilibrium plasma and spatiotemporally-controlled liquid droplets, both by fundamental and applied aspects. As the diagnostics of the reaction environments, it has been revealed that particles provided by plasma play a certain role for the evaporation of the droplets. Highly sensitive electric field measurements have been demonstrated using laser diagnostics under atmospheric pressure conditions.
By integrating atmospheric pressure non-equilibrium plasma with inkjet printing, it becomes possible to incorporate the advantages of low temperature, high speed, high resolution, and in-situ utilization of plasma-generated reactive species, as compared to post-heat treatments. The utilization of micro-droplets as pseudo-closed reaction environments has enabled the synthesis of particles with exceptionally high monodispersity.

Academic Significance and Societal Importance of the Research Achievements

本研究では、プラズマ援用インクジェットプリンティングの深化をもたらすのみならず、サイズの揃った粒子合成手法の創出をもたらす等、プラズマ誘起液相反応の材料合成における可能性の一端を示すことができた。
また、バイオ応用、農業応用、環境応用など、多彩な広がりを見せているプラズマ誘起液相反応の理解においても、液滴の蒸発現象を通じ、深める事できた。更に、プラズマ反応場を理解するうえで重要なパラメータである電界の高感度非接触計測をもたらした点も、今後の関連分野の発展に貢献し得る成果である。

Report

(5 results)
  • 2022 Annual Research Report   Final Research Report ( PDF )
  • 2021 Annual Research Report
  • 2020 Annual Research Report
  • 2019 Annual Research Report
  • Research Products

    (48 results)

All 2023 2022 2021 2020 2019 Other

All Journal Article (13 results) (of which Peer Reviewed: 12 results,  Open Access: 1 results) Presentation (34 results) (of which Int'l Joint Research: 18 results,  Invited: 9 results) Remarks (1 results)

  • [Journal Article] Carbon Layer Formation on Hexagonal Boron Nitride by Plasma Processing in Hydroquinone Aqueous Solution2022

    • Author(s)
      K. Inoue, N. Sakakibara, T. Goto, T. Ito, Y. Shimizu, Y. Hakuta, K. Ishikawa, M. Hori and K. Terashima
    • Journal Title

      ACS Applied Materials & Interfaces

      Volume: 44 Issue: 47 Pages: 53413-53420

    • DOI

      10.1021/acsami.2c15951

    • Related Report
      2022 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Generation of electric-field-induced anti-Stokes Raman scattering in the visible region (E-CARSv) from nitrogen in air2022

    • Author(s)
      Koike Takeru、Muneoka Hitoshi、Terashima Kazuo、Ito Tsuyohito
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 62 Issue: SA Pages: SA1015-SA1015

    • DOI

      10.35848/1347-4065/ac91db

    • Related Report
      2022 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Electric-Field-Induced Coherent Anti-Stokes Raman Scattering of Hydrogen Molecules in Visible Region for Sensitive Field Measurement2022

    • Author(s)
      Koike Takeru、Muneoka Hitoshi、Terashima Kazuo、Ito Tsuyohito
    • Journal Title

      Physical Review Letters

      Volume: 129 Issue: 3

    • DOI

      10.1103/physrevlett.129.033202

    • Related Report
      2022 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 電界誘起コヒーレントアンチストークスラマン散乱-高密度雰囲気における高感度電界計測-2022

    • Author(s)
      伊藤剛仁, 小池健
    • Journal Title

      静電気学会誌

      Volume: 46 Pages: 188-193

    • Related Report
      2022 Annual Research Report
  • [Journal Article] Plasma-assisted synthesis of size-controlled monodisperse submicron gold particles using inkjet droplets2021

    • Author(s)
      Nitta Kaishu、Shimizu Yoshiki、Terashima Kazuo、Ito Tsuyohito
    • Journal Title

      Journal of Physics D: Applied Physics

      Volume: 54 Issue: 33 Pages: 33LT01-33LT01

    • DOI

      10.1088/1361-6463/ac02f8

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Synthesis of a metal-organic framework by plasma in liquid to increase reduced metal ions and enhance water stability2021

    • Author(s)
      Kanno Moriyuki、Kitao Takashi、Ito Tsuyohito、Terashima Kazuo
    • Journal Title

      RSC Advances

      Volume: 11 Issue: 37 Pages: 22756-22760

    • DOI

      10.1039/d1ra00942g

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Soft X-ray emission spectroscopy for the electronic state of water molecules influenced by plasma-treated multi-walled carbon nanotubes2021

    • Author(s)
      Sakakibara Noritaka、Inoue Kenichi、Takahashi Shion、Goto Taku、Ito Tsuyohito、Akada Keishi、Miyawaki Jun、Hakuta Yukiya、Terashima Kazuo、Harada Yoshihisa
    • Journal Title

      Physical Chemistry Chemical Physics

      Volume: 23 Issue: 17 Pages: 10468-10474

    • DOI

      10.1039/d0cp05990k

    • Related Report
      2021 Annual Research Report 2020 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Cuboid Cu(HBTC)(H2O)3 synthesis via plasma pretreatment of trimesic acid solution2021

    • Author(s)
      Kanno Moriyuki、Ito Tsuyohito、Shimizu Yoshiki、Terashima Kazuo
    • Journal Title

      Plasma Processes and Polymers

      Volume: 18 Issue: 9 Pages: 2100047-2100047

    • DOI

      10.1002/ppap.202100047

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed
  • [Journal Article] One-step gold line fabrication from particle-free inorganic salt-based ink via atmospheric pressure nonequilibrium plasma-assisted inkjet printing2021

    • Author(s)
      K. Nitta, K. Ishizumi, Y. Shimizu, K. Terashima, T. Ito
    • Journal Title

      Materials Chemistry and Physics

      Volume: 258 Pages: 123836-123836

    • DOI

      10.1016/j.matchemphys.2020.123836

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Aqueous dispersion of hexagonal boron nitride via plasma processing in a hydroquinone solution2020

    • Author(s)
      K. Inoue, T. Goto, M. Iida, T. Ito, Y. Shimizu, Y. Hakuta, K. Terashima
    • Journal Title

      Journal of Physics D: Applied Physics

      Volume: 53 Issue: 42 Pages: 42LT01-42LT01

    • DOI

      10.1088/1361-6463/ab97dd

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed
  • [Journal Article] In-plane modification of hexagonal boron nitride particles via plasma in solution2020

    • Author(s)
      T. Ito, T. Goto, K. Inoue, K. Ishikawa, H. Kondo, M. Hori, Y. Shimizu, Y. Hakuta, K. Terashima
    • Journal Title

      Applied Physics Express

      Volume: 13 Issue: 6 Pages: 066001-066001

    • DOI

      10.35848/1882-0786/ab916c

    • Related Report
      2020 Annual Research Report 2019 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Spatiotemporal optical emission spectroscopy to estimate electron density and temperature of plasmas in solution2020

    • Author(s)
      Kenichi Inoue, Shion Takahashi, Noritaka Sakakibara, Susumu Toko, Tsuyohito Ito, Kazuo Terashima
    • Journal Title

      Journal of Physics D: Applied Physics

      Volume: 53 Issue: 23 Pages: 235202-235202

    • DOI

      10.1088/1361-6463/ab78d5

    • Related Report
      2020 Annual Research Report 2019 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Printing PEDOT from EDOT via plasma-assisted inkjet printing2019

    • Author(s)
      Kaishu Nitta, Masanao Tsumaki, Tomoya Kawano, Kazuo Terashima, Tsuyohito Ito
    • Journal Title

      J. Phys. D: Appl. Phys.

      Volume: 52 Issue: 31 Pages: 315202-315202

    • DOI

      10.1088/1361-6463/ab1ef2

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed
  • [Presentation] Droplet Evaporation Behavior in Atmospheric-Pressure Nonequilibrium Plasma2023

    • Author(s)
      K. Nitta, H. Muneoka, Y. Shimizu, H. Kobayashi, K. Terashima, and T. Ito
    • Organizer
      ISPlasma2023 and IC-PLANTS2023
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Functionalization of Carbon Layer on Hexagonal Boron Nitride Formed by Plasma Processing in Solution2023

    • Author(s)
      K. Inoue, T. Ito, Y. Shimizu, K. Ito, and K. Terashima
    • Organizer
      ISPlasma2023 and IC-PLANTS2023
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Synthesis of metal and metal oxide particles via atmospheric-pressure plasma processing with inkjet droplets2023

    • Author(s)
      K. Nitta, T. Hato, T. Sakai, H. Muneoka, Y. Shimizu, K. Terashima, T. Ito
    • Organizer
      Advances in Functional Materials 2023
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Electric field measurements in high-pressure hydrogen and nitrogen environments by detecting visible lights induced in coherent anti-Stokes Raman scattering scheme2022

    • Author(s)
      T. Koike, H. Muneoka, K. Terashima, T. Ito
    • Organizer
      2022 MRS Fall Meeting and Exhibit
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Development of sensitive electric-field measurement method via electric- field-induced coherent anti-Stokes Raman scattering2022

    • Author(s)
      T. Koike, H. Muneoka, K. Terashima, T. Ito
    • Organizer
      11th International Conference on Reactive Plasmas / 75th Annual Gaseous Electronics Conference
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Analysis of OH Emission Spectra Using Deep Learning2022

    • Author(s)
      S. Takamatsu, K. Inoue, H. Muneoka, T. Ito, K. Terashima
    • Organizer
      11th International Conference on Reactive Plasmas / 75th Annual Gaseous Electronics Conference
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Plasma-assisted materials processing with inkjet droplets2022

    • Author(s)
      T. Ito
    • Organizer
      11th International Workshop on Microplasmas
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Surface charges of hexagonal boron nitride with carbon layers formed by plasma in hydroquinone aqueous solution2022

    • Author(s)
      K. Inoue, T. Ito, Y. Shimizu, K. Terashima
    • Organizer
      第32回MRS年次大会(国際シンポジウム)
    • Related Report
      2022 Annual Research Report
  • [Presentation] Zirconia hollow particles synthesis via plasma-assisted inkjet processing2022

    • Author(s)
      T. Sakai, K. Nitta, H. Muneoka, Y. Shimizu, K. Terashima, T. Ito
    • Organizer
      第32回MRS年次大会(国際シンポジウム)
    • Related Report
      2022 Annual Research Report
  • [Presentation] コヒーレント反ストークスラマン散乱を用いた高感度電界計測手法の開発2022

    • Author(s)
      小池 健、宗岡 均、寺嶋 和夫、伊藤 剛仁
    • Organizer
      第69回応用物理学会春季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] 大気圧非平衡プラズマ中のインクジェット液滴の蒸発挙動の観察2022

    • Author(s)
      新田 魁洲、宗岡 均、清水 禎樹、小林 宏充、寺嶋 和夫、伊藤 剛仁
    • Organizer
      第69回応用物理学会春季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] プラズマ援用インクジェット:プラズマ・液体相互作用の材料分野への一応用2022

    • Author(s)
      伊藤 剛仁
    • Organizer
      第69回応用物理学会春季学術講演会
    • Related Report
      2021 Annual Research Report
    • Invited
  • [Presentation] プラズマ援用インクジェットプロセスによる酸化亜微粒子の合成2022

    • Author(s)
      羽藤 健、新田 魁洲、宗岡 均、清水 禎樹、寺嶋 和夫、伊藤 剛仁
    • Organizer
      第69回応用物理学会春季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] 軟X線発光分光測定を用いたプラズマ表面改質カーボンナノチューブが水分子の電子状態に与える影響の解明2022

    • Author(s)
      榊原 教貴、井上 健一、高橋 史音、後藤 拓、伊藤 剛仁、赤田 圭史、宮脇 淳、伯田 幸也、寺嶋 和夫、原田 慈久
    • Organizer
      第69回応用物理学会春季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] Highly Sensitive Electric Field Measurement via Electric-Field-Induced Coherent Anti-Stokes Raman Scattering in Visible Region2021

    • Author(s)
      Takeru Koike, Hitoshi Muneoka, Kazuo Terashima, and Tsuyohito Ito
    • Organizer
      ISPlasma2022 and IC-PLANTS2022
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Plasma Materials Processing with Controlled Microdroplets: Printing and Particles Synthesis2021

    • Author(s)
      T. Ito, K. Nitta, Y. Shimizu, K. Terashima
    • Organizer
      2021 MRS Fall Meeting and Exhibit
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Synthesis of Cuboid Cu(HBTC)(H2O)3 Using Plasma-in-Solution Treatment to Organic Ligands2021

    • Author(s)
      M. Kanno, T. Ito, Y. Shimizu, and K. Terashima
    • Organizer
      2021 MRS Fall Meeting and Exhibit
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] In-situ observation of inkjet droplets in atmospheric-pressure radio frequency argon plasma and demonstration for synthesis of monodisperse submicron gold particles2021

    • Author(s)
      K. Nitta, H. Muneoka, Y. Shimizu, K. Terashima, T. Ito
    • Organizer
      74th Annual Gaseous Electronics Conference
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Particles synthesis via atmospheric-pressure plasma with solution microdroplets2021

    • Author(s)
      T. Ito, K. Nitta, M. Tsumaki, Y. Shimizu, K. Terashima
    • Organizer
      5th Asia-Pacific Conference on Plasma Physics
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Plasma-assisted Deposition using Microdroplets2021

    • Author(s)
      T. Ito, K. Nitta, K. Terashima
    • Organizer
      The International Conference on Metallurgical Coatings and Thin Films 2021 (ICMCTF-2021)
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] 液相を用いたプラズマ材料プロセシング2021

    • Author(s)
      伊藤 剛仁, 新田 魁洲, 妻木 正尚, 宗岡 均, 清水 禎樹, 寺嶋 和夫
    • Organizer
      第38回 プラズマ・核融合学会 年会
    • Related Report
      2021 Annual Research Report
    • Invited
  • [Presentation] プラズマ援用インクジェットプロセスによる単分散粒子 の合成2021

    • Author(s)
      新田 魁洲, 宗岡 均, 清水 禎樹, 寺嶋 和 夫, 伊藤 剛仁
    • Organizer
      第82回応用物理学会秋季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] 大気圧水素雰囲気におけるCARSを用いた高感度電界計測2021

    • Author(s)
      小池 健, 宗岡 均, 寺嶋 和夫, 伊藤 剛仁
    • Organizer
      第82回応用物理学会秋季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] インクジェット液滴を用いたプラズマ支援単分散粒子合成2021

    • Author(s)
      新田 魁洲, 清水 禎樹, 寺嶋 和夫, 伊藤 剛仁
    • Organizer
      日本金属学会2021年春期(第168回)講演大会
    • Related Report
      2020 Annual Research Report
  • [Presentation] Spatiotemporal optical emission spectroscopy of plasma in solution2020

    • Author(s)
      K. Inoue, S. Takahashi, N. Sakakibara, S. Toko, T. Ito, K. Terashima
    • Organizer
      ISplasma 2021 & IC-PLANTS2021
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Further development of plasma-assisted inkjet printing2020

    • Author(s)
      T. Ito
    • Organizer
      73rd Annual Gaseous Electronics Virtual Conference
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] 塩化金酸水溶液をインクとしたプラズマ援用インクジェットプロセスによる金細線の描画2020

    • Author(s)
      新田 魁洲, 石角 健, 清水 禎樹, 寺嶋 和夫, 伊藤 剛仁
    • Organizer
      日本金属学会第167回講演大会
    • Related Report
      2020 Annual Research Report
  • [Presentation] ミクロ液相を用いた大気圧プラズマ材料プロセシング2020

    • Author(s)
      伊藤剛仁
    • Organizer
      第37回プラズマ・核融合学会年会
    • Related Report
      2020 Annual Research Report
    • Invited
  • [Presentation] 塩化金酸溶液からの金のプラズマ援用インクジェットプリンティング2020

    • Author(s)
      新田 魁洲, 石角 健, 寺嶋 和夫, 伊藤 剛仁
    • Organizer
      第67回応用物理学会春季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] 時空間分解発光分光測定による液中プラズマの電子密度/電子温度推定2020

    • Author(s)
      井上 健一, 高橋 史音, 榊原 教貴, 都甲 将, 伊藤 剛仁, 寺嶋 和夫
    • Organizer
      第67回応用物理学会春季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] 液中プラズマ表面改質六方晶BN微粒子のESR測定2020

    • Author(s)
      伊藤 剛仁, 後藤 拓, 井上 健一, 石川 健治, 近藤 博基, 堀 勝, 清水 禎樹, 伯田 幸也, 寺嶋 和夫
    • Organizer
      第67回応用物理学会春季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] Plasma-assisted inkjet printing of poly(3,4-ethylenedioxythiophene) from 3,4-ethylenedioxythiophene stock solution2019

    • Author(s)
      K. Nitta, M. Tsumaki, T. Kawano, K. Terashima, T. Ito
    • Organizer
      72nd Annual Gaseous Electronics Conference
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Plasma-assisted inkjet printing2019

    • Author(s)
      T. Ito, K. Nitta, M. Tsumaki, T. Kawano, K. Terashima
    • Organizer
      XXXIV ICPIG & ICRP-10
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Plasma-assisted inkjet printing of molybdenum disulfide from ammonium tetrathiomolybdate aqueous solution2019

    • Author(s)
      K. Nitta, M. Tsumaki, K. Terashima T. Ito
    • Organizer
      10th International Workshop on Microplasmas
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Remarks] 所属研究室ホームページ

    • URL

      http://www.plasma.k.u-tokyo.ac.jp/

    • Related Report
      2021 Annual Research Report

URL: 

Published: 2019-04-18   Modified: 2024-01-30  

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