| Budget Amount *help |
¥17,420,000 (Direct Cost: ¥13,400,000、Indirect Cost: ¥4,020,000)
Fiscal Year 2022: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2021: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
Fiscal Year 2020: ¥5,330,000 (Direct Cost: ¥4,100,000、Indirect Cost: ¥1,230,000)
Fiscal Year 2019: ¥8,970,000 (Direct Cost: ¥6,900,000、Indirect Cost: ¥2,070,000)
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| Outline of Final Research Achievements |
The purpose of this study is to develop advanced measurement system of ion dynamics in plasmas, based on the laser-induced fluorescence spectroscopy method. In the first half of the research period, we constructed a spectroscopic system using a continuous diode laser as a light source and succeeded in capturing ion motion along magnetic fields and ion density fluctuations caused by impurity molecules in low-pressure plasma sources. In the latter half of the research period, we also measured ion acceleration features in the pre-sheath/ion sheath regions formed in front of the metal electrode and demonstrated time-resolved measurements of ion energy distribution following an AC bias voltage on the order of kHz.
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