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Research about ultra-high hermetic seal bonding for microcavity by quantum sensing

Research Project

Project/Area Number 19H02045
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Review Section Basic Section 18020:Manufacturing and production engineering-related
Research InstitutionNational Institute of Advanced Industrial Science and Technology

Principal Investigator

Yuichi Kurashima  国立研究開発法人産業技術総合研究所, エレクトロニクス・製造領域, 研究グループ長 (70408730)

Co-Investigator(Kenkyū-buntansha) 松前 貴司  国立研究開発法人産業技術総合研究所, エレクトロニクス・製造領域, 主任研究員 (10807431)
柳町 真也  国立研究開発法人産業技術総合研究所, 計量標準総合センター, 上級主任研究員 (70358216)
Project Period (FY) 2019-04-01 – 2022-03-31
Project Status Completed (Fiscal Year 2021)
Budget Amount *help
¥17,420,000 (Direct Cost: ¥13,400,000、Indirect Cost: ¥4,020,000)
Fiscal Year 2021: ¥4,940,000 (Direct Cost: ¥3,800,000、Indirect Cost: ¥1,140,000)
Fiscal Year 2020: ¥5,460,000 (Direct Cost: ¥4,200,000、Indirect Cost: ¥1,260,000)
Fiscal Year 2019: ¥7,020,000 (Direct Cost: ¥5,400,000、Indirect Cost: ¥1,620,000)
KeywordsMEMS / 気密封止 / 接合 / 量子干渉 / 脱ガス / マイクロデバイス / 量子干渉効果 / ゲッター
Outline of Research at the Start

マイクロデバイスの高性能化には、デバイスが実装されている微小キャビティ内部の圧力を高精度に維持する必要がある。これまで気密封止接合された微小キャビティの気密性はキャビティ内部と外部の気体の流出入を評価するものがほとんどであった。微小キャビティ内部の圧力を評価する方法も提案されてはいるが、測定精度やドリフトが課題で微小なキャビティ内部の圧力変動を高精度に計測するに至っていない。そこで、本研究では量子干渉効果に基づくCPT共鳴現象により、気密封止接合された微小キャビティ内部の圧力変動を高精度に評価し、圧力を一定に担保できる気密封止接合技術の確立を図る。

Outline of Final Research Achievements

We developed a hermetic sealing technique that minimizes pressure change due to degassing after encapsulation, and evaluated a pressure inside the cavity of a Cs gas cell by the CPT (coherent population trapping) resonance phenomenon based on quantum interference effects. As a result, it was found that Cs can be hermetically sealed at a high level. Although the CPT resonance frequency changed slightly, it was considered to be dominated by a collision shift temperature dependence rather than a collision shift pressure dependence. Therefore, it is important that the hermetic sealed cavity was measured in a high-precision thermostatic chamber for measurement of inside pressure more precisely.

Academic Significance and Societal Importance of the Research Achievements

キャビティの内部圧力を一定に担保できる気密封止接合技術及び量子干渉効果に基づくCPT共鳴現象を元にした封止性の評価は新原理や高性能なマイクロデバイスを実現する上で社会的意義があるだけでなく、封止接合のミクロのメカニズム解明や気密性の評価手法の追求は学術的意義があり、最終的には気体分子レベルでの気密性の評価につながると考えている。

Report

(4 results)
  • 2021 Annual Research Report   Final Research Report ( PDF )
  • 2020 Annual Research Report
  • 2019 Annual Research Report
  • Research Products

    (10 results)

All 2022 2021 2020 2019

All Journal Article (3 results) (of which Peer Reviewed: 3 results) Presentation (7 results) (of which Int'l Joint Research: 1 results)

  • [Journal Article] Simple and low-temperature vacuum packaging process by using Au/Ta/Ti metal multilayer2022

    • Author(s)
      Kariya Shingo、Matsumae Takashi、KURASHIMA Yuichi、Takagi Hideki、Hayase Masanori、Higurashi Eiji
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: - Issue: 5 Pages: 051004-051004

    • DOI

      10.35848/1347-4065/ac52b8

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Application of thin Au/Ti double-layered films as both low-temperature bonding layer and residual gas gettering material for MEMS encapsulation2021

    • Author(s)
      Kurashima Yuichi、Matsumae Takashi、Higurashi Eiji、Yanagimachi Sinya、Kusui Takaaki、Watanabe Mitsuhiro、Takagi Hideki
    • Journal Title

      Microelectronic Engineering

      Volume: 238 Pages: 111513-111513

    • DOI

      10.1016/j.mee.2021.111513

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Gas Absorption in Package Using Au/Pt/Ti Bonding Layer2020

    • Author(s)
      Matsumae Takashi、Kariya Shingo、Kurashima Yuichi、Takagi Hideki、Hayase Masanori、Higurashi Eiji
    • Journal Title

      ECS Transactions

      Volume: 98 Issue: 4 Pages: 211-215

    • DOI

      10.1149/09804.0211ecst

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed
  • [Presentation] 真空封止用 Au/Ta/Ti 接合層を用いたガス吸収プロセスの開 発とその低温化2021

    • Author(s)
      狩谷 真悟, 松前 貴司, 倉島 優一, 髙木 秀樹, 早瀬 仁則
    • Organizer
      第38回「センサ・マイクロマシンと応用システム」 シンポジウム
    • Related Report
      2021 Annual Research Report
  • [Presentation] Simplified vacuum packaging process by gas gettering using the Au/Ta/Ti metal bonding layer2021

    • Author(s)
      狩谷 真悟、松前 貴司、倉島 優一、高木 秀樹、早瀬仁則、日暮 栄治
    • Organizer
      2021 7th International Workshop on Low Temperature Bonding for 3D Integration
    • Related Report
      2021 Annual Research Report
  • [Presentation] Development of Au/Pt/Ti multilayers for wafer-level packaging and residual gas gettering2021

    • Author(s)
      狩谷 真悟、松前 貴司、倉島 優一、高木 秀樹、早瀬仁則、日暮 栄治
    • Organizer
      International Conference on Electronics Packaging 2021
    • Related Report
      2021 Annual Research Report
  • [Presentation] キャビティ内部にて残留ガスを吸収させたTi/Pt/Au封止接合膜の構造観察2020

    • Author(s)
      狩谷 真悟, 松前 貴司, 倉島 優一, 髙木 秀樹, 早瀬 仁則, 日暮 栄治
    • Organizer
      2020年度精密工学会秋季大会
    • Related Report
      2020 Annual Research Report
  • [Presentation] Au/Ti薄膜の低温接合及びゲッター材への適応性評価2020

    • Author(s)
      倉島 優一、楠井 貴晶、松前 貴司、日暮 栄治、髙木 秀樹、渡邉満洋
    • Organizer
      精密工学会春季大会講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] 脱ガス処理後の真空 封止と内部残留ガス ゲッタリングが可能 な MEMS 封止用金属接合膜の開発2020

    • Author(s)
      狩谷真悟、松前貴司、倉島優一、日暮栄治、早瀬仁則、高木秀樹
    • Organizer
      精密工学会春季大会講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] Au/Ti double-layered films for bonding and residual gas gettering in MEMS encapsulation2019

    • Author(s)
      Y. Kurashima, T. Matsumae, E. Higurashi, S. Yanagimachi, H. Takagi, Sudiyarmanto, E. Kondoh
    • Organizer
      45th International Conference Micro and Nano Engineering
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research

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Published: 2019-04-18   Modified: 2023-01-30  

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