| Budget Amount *help |
¥14,170,000 (Direct Cost: ¥10,900,000、Indirect Cost: ¥3,270,000)
Fiscal Year 2022: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
Fiscal Year 2021: ¥2,340,000 (Direct Cost: ¥1,800,000、Indirect Cost: ¥540,000)
Fiscal Year 2020: ¥2,730,000 (Direct Cost: ¥2,100,000、Indirect Cost: ¥630,000)
Fiscal Year 2019: ¥6,890,000 (Direct Cost: ¥5,300,000、Indirect Cost: ¥1,590,000)
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| Outline of Final Research Achievements |
Stainless steel tubes for highly pure gases are fundamental parts for controlling trace moisture in bulk gases in the field of innovative semiconductor devices and rechargeable batteries. An inverse gas chromatography (IGC) using a standard trace moisture as a probe gas and a ball SAW trace-moisture sensor as a detector was developed to reveal the affection by tubing techniques such as bending and welding. Rapid measurement method of IGC chromatogram was developed by shortening recording time less than 1 s and was applied for the measurement of the passing time of the probe gas through sample tubes. In bending-induced morphology, it was found that residual adsorbed water molecules would improve the desorption of the water molecules adsorbed on them although it could be difficult for them to desorb completely at room temperature. In welding morphology, the region might be detected in the case of severely oxidized even if the fraction of it was smaller than 5% of whole the tube.
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