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Development of compact superconducting magnetic energy storage devices for volume demand based on the silicon microfabrication technology

Research Project

Project/Area Number 19H02195
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Review Section Basic Section 21060:Electron device and electronic equipment-related
Research InstitutionNagoya University

Principal Investigator

MOTOHIRO Tomoyoshi  名古屋大学, 未来社会創造機構, 客員教授 (20394421)

Co-Investigator(Kenkyū-buntansha) 盧 柱亨  関東学院大学, 総合研究推進機構, 教授 (50313474)
佐々木 実  豊田工業大学, 工学(系)研究科(研究院), 教授 (70282100)
Project Period (FY) 2019-04-01 – 2022-03-31
Project Status Completed (Fiscal Year 2022)
Budget Amount *help
¥17,420,000 (Direct Cost: ¥13,400,000、Indirect Cost: ¥4,020,000)
Fiscal Year 2021: ¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000)
Fiscal Year 2020: ¥5,720,000 (Direct Cost: ¥4,400,000、Indirect Cost: ¥1,320,000)
Fiscal Year 2019: ¥7,150,000 (Direct Cost: ¥5,500,000、Indirect Cost: ¥1,650,000)
Keywords超電導磁気エネルギー貯蔵 / シリコン微細加工技術(MEMS) / 銅めっき / スパッタ成膜技術 / MOD成膜技術 / 極低温冷凍機 / 化学機械研磨(CMP) / 磁場計算 / 超電導コイル / 電力貯蔵 / シリコンウェハ / トレンチ / MOD法 / 銅酸化物高温超電導薄膜 / シリコン微細加工プロセス / 超電導蓄電コイル / MEMS / めっき / Siウェハ / 超電導 / コイル / 蓄電 / Si微細加工技術 / 小型化
Outline of Research at the Start

Siウェハに形成した螺旋状溝内に形成したc-軸配向YBCO膜による1ウェハ螺旋状超電導コイルを完成させた後、二つの異なるSiウェハに形成した、逆巻のコイルを貫通孔を通して、ウェハ接合技術を用いて、直列接続する。貫通孔を介した異なるSiウェハ上の回路の接続はCu配線では確立されているが、超電導薄膜では前例がない。この技術を完成し、複数ウェハの積層接続によるコンパクトSMESの実現への道を拓く。

Outline of Final Research Achievements

A 3-stepped, parallel-connected, 144-gon, plane spiral groove of total length 100 m was fabricated on a 4” Si wafer under the design to decrease coil disconnections in the groove. A new Cu plating method which does not cause corrosion of YBa2Cu3O7-δ(Y123) was developed. Electricity storage density of a stack of Si wafers with the plane spiral grooves stuffed with Y123 was estimated by calculation of magnetic fields. It was estimated to be one order or more than that of conventional ones, approaching those of supercapacitors. The O2 partial pressure and temperature for thermal processes in which the room temperature electric resistivity of Y123 films on Si substrates takes the minimum were obtained. Getting through these thermal processes, sputter-/MOD-deposited Y123 films on SrTiO3 single crystals showed a clear superconductive transition at 90K. However, they only showed a small resistivity decrease around 90K on Si without showing a clear superconductive transition.

Academic Significance and Societal Importance of the Research Achievements

本構想の、従来の十倍以上の蓄電体積密度をもつコンパクト超電導蓄電コイルが実現すると、二次電池では対応できない急速充放電に対応できる車載用等のコンパクトな蓄電装置に応用できる。たとえば、移動する雷雲を追いながら耐雷ドローンで誘雷し、車載蓄電装置に蓄電する落雷制御・蓄電技術が開発されているが、超電導蓄電コイルは、対応できる数少ない技術候補の一つである。冷却の必要性を考慮しても、超電導蓄電コイルのエネルギー損失は低く、コンパクト化ができれば、近年の冷凍装置の小型化・高効率化と相まって応用の展開が期待される。

Report

(4 results)
  • 2022 Final Research Report ( PDF )
  • 2021 Annual Research Report
  • 2020 Annual Research Report
  • 2019 Annual Research Report
  • Research Products

    (13 results)

All 2022 2021 2020 2019

All Journal Article (7 results) (of which Peer Reviewed: 5 results,  Open Access: 3 results) Presentation (6 results) (of which Int'l Joint Research: 4 results)

  • [Journal Article] 100 m-level Spiral Silicon Micro-Trenches with 3-Step Smooth Sidewalls to Deposit Superconducting Material for Miniaturized Magnetic Energy Storage2022

    • Author(s)
      Sasaki Minoru、Noh Joo-Hyong、Takai Osamu、Motohiro Tomoyoshi
    • Journal Title

      IEEJ Transactions on Sensors and Micromachines

      Volume: 142 Issue: 5 Pages: 78-84

    • DOI

      10.1541/ieejsmas.142.78

    • ISSN
      1341-8939, 1347-5525
    • Year and Date
      2022-05-01
    • Related Report
      2021 Annual Research Report
    • Peer Reviewed
  • [Journal Article] めっき法によるPEEK樹脂樹脂上への銅皮膜パターン形成およびYBCO上への銅皮膜形成2022

    • Author(s)
      信夫勇佑
    • Journal Title

      横浜国立大学理工学府 修士論文

      Volume: 1 Pages: 1-65

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Estimation of the Electricity Storage Volume Density of Compact SMESs of a New Concept Based on Si Microfabrication Technologies2021

    • Author(s)
      Motohiro Tomoyoshi、Sasaki Minoru、Noh Joo-hyong、Takai Osamu
    • Journal Title

      Magnetochemistry

      Volume: 7 Issue: 3 Pages: 44-44

    • DOI

      10.3390/magnetochemistry7030044

    • NAID

      120007180197

    • Related Report
      2021 Annual Research Report 2020 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Estimation of Electricity Storage Density of Compact SMESs Composed of Si-wafer Stacks Loaded with Superconducting Thin Film Coils in Spiral Trenches under the Constraints of the Critical Magnetic Flux Density2020

    • Author(s)
      Motohiro T、Sasaki M、Noh J-H、Takai O、Honma H
    • Journal Title

      Journal of Physics: Conference Series

      Volume: 1590 Issue: 1 Pages: 012045-012045

    • DOI

      10.1088/1742-6596/1590/1/012045

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] 微細加工技術を用いた超電導磁気エネルギー貯蔵デバイスの開発における表面処理技術2020

    • Author(s)
      元廣友美、佐々木 実、盧 柱亨
    • Journal Title

      工業材料

      Volume: 68(2) Pages: 66-74

    • Related Report
      2020 Annual Research Report
  • [Journal Article] Estimation of electricity storage capacity of compact SMESs composed of stacks of Si-wafers loaded with superconducting thin film coils in spiral trenches formed by MEMS process2019

    • Author(s)
      Ichiki Y、Ichiki A、Hioki T、Sasaki M、Noh J-H、Takai O、Honma H、Motohiro T
    • Journal Title

      Journal of Physics: Conference Series

      Volume: 1293 Issue: 1 Pages: 012058-012058

    • DOI

      10.1088/1742-6596/1293/1/012058

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] 微細加工技術を用いた超小型超電導磁気エネルギー貯蔵技術の開発2019

    • Author(s)
      元廣友美
    • Journal Title

      ケミカルエンジニアリング

      Volume: 64(6) Pages: 412-422

    • NAID

      40021931352

    • Related Report
      2019 Annual Research Report
  • [Presentation] めっき法を用いた小型SMESのための超電導体材料上への銅膜形成2021

    • Author(s)
      信夫勇佑, 荒川太郎,盧柱亨,高井治, 本間英雄, 元廣友美, 佐々木実
    • Organizer
      日本材料科学学会2021年度学術講演大会
    • Related Report
      2021 Annual Research Report
  • [Presentation] マイクロマシン・センサシステム技術委員会の活動について」1-A-p1-1, 企画セッション:スマート社会・ライフサイエンス応用に向けたセンサ・マイクロマシンの研究動向2020

    • Author(s)
      佐々木実
    • Organizer
      令和 2 年 電気学会 基礎・材料・共通部門大会
    • Related Report
      2020 Annual Research Report
  • [Presentation] Estimation of Electricity Storage Density of Compact SMESs Composed of Si wafer Stacks Loaded with Superconducting Thin Film Coils in Spiral Trenches under the Constraint of Critical Magnetic Flux Density2019

    • Author(s)
      T. Motohiro, M. Sasaki, J.-H. Noh
    • Organizer
      The 32nd International Symposium on Superconductivity (ISS2019), December 3rd-5th, Kyoto, Japan
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Stacking 4” Si Wafer with Parallel 3-Stepped Micro-Trenches to Deposit Superconducting Material for Magnetic Energy Storage2019

    • Author(s)
      M. Sasaki, Y. Suzuki, T. Hioki, T. Motohiro,
    • Organizer
      2019 6th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Over 100m Length Single Spiral Silicon Micro-Trench with 3-Step Smooth Sidewalls to Deposit Superconducting Material for Magnetic Energy Storage2019

    • Author(s)
      M. Sasaki, Y. Suzuki, K. Adachi, T. Hioki, T. Motohiro
    • Organizer
      International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma 2019)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Copper thin film formation on superconductor material for compact SMES using plating method2019

    • Author(s)
      Kaito Seki, Joo-Hyoung Noh, Yoshio Horiuchi, Osamu Takai, Hideo Honma, Tomoyoshi Motohiro, Tatsumi Hioki, Minoru Sasaki and Taro Arakawa
    • Organizer
      The 8th International Symposium on Materials Science and Surface Technology (MSST2019)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research

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Published: 2019-04-18   Modified: 2024-01-30  

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