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Detection of protein binding by shear mode ultrasonic reflection coefficients using c-axis tilted ScAlN film in UHF range

Research Project

Project/Area Number 19H02202
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Review Section Basic Section 21060:Electron device and electronic equipment-related
Research InstitutionWaseda University

Principal Investigator

Yanagitani Takahiko  早稲田大学, 理工学術院, 教授 (10450652)

Co-Investigator(Kenkyū-buntansha) 高柳 真司  同志社大学, 生命医科学部, 助教 (00735326)
吉田 憲司  千葉大学, フロンティア医工学センター, 准教授 (10572985)
鈴木 雅視  山梨大学, 大学院総合研究部, 助教 (60763852)
Project Period (FY) 2019-04-01 – 2022-03-31
Project Status Completed (Fiscal Year 2022)
Budget Amount *help
¥16,900,000 (Direct Cost: ¥13,000,000、Indirect Cost: ¥3,900,000)
Fiscal Year 2021: ¥7,670,000 (Direct Cost: ¥5,900,000、Indirect Cost: ¥1,770,000)
Fiscal Year 2020: ¥6,370,000 (Direct Cost: ¥4,900,000、Indirect Cost: ¥1,470,000)
Fiscal Year 2019: ¥2,860,000 (Direct Cost: ¥2,200,000、Indirect Cost: ¥660,000)
Keywords複素反射率測定 / 横波トランスデューサ / すべりモード / たんぱく質センサ / 抗原抗体反応 / 圧電薄膜 / 圧電薄膜共振子センサ / 圧電デバイス / 圧電薄膜センサ / 横波デバイス
Outline of Research at the Start

本研究では、従来の質量変動による抗原抗体反応検出(QCM等)ではなく、これまで実現不可能であった数百MHz~GHz帯横波斜入射を達成し、抗原抗体反応時の粘弾性変化を検出する新しいセンサ方式を提案する。センサ感度(S/N比)は「薄膜の圧電性」と「横波入射角」に強く依存する。本研究室で新たに発見したc軸が傾斜配向した横波圧電性薄膜を用いてこの問題を解決し、S/N比を大幅向上させた高感度・低雑音・小型な高感度病変マーカ検出システムを構築する。さらに、これまで難しかったUHF帯の複素反射率測定に挑戦する。

Outline of Final Research Achievements

QCM (quartz crystal microbalance) is suitable for biomolecules sensing since AT-cut quartz operates in shear mode. However, it is not clear that whether the decrease of resonant frequency due to protein-binding on the on the resonator surface is caused by mass loading or viscoelastic change near the surface. The ultrasonic reflectometry is one of the ways to determine viscoelastic properties of liquids such as the complex acoustic impedance, the shear modulus, and the shear viscosity. These properties can be determined from the shear wave complex reflection coefficient at the solid - liquid boundary. In this study, we investigated the shear wave reflection change due to biotin-streptavidin interaction using quasi shear mode c-axis tilted ScAlN thin film. As a result, the change of amplitude and phase of shear reflection coefficient were qualitatively observed when 8-15 μg/ml streptavidin were introduced to the biotin-coated self-assembled monolayers on the reflection boundary.

Academic Significance and Societal Importance of the Research Achievements

近年の高齢化に伴って訪問診療の割合が増加している。在宅医療の高度化には、医者が手荷物で運べるまで検査機器を小型化することが重要課題である。本研究は、病変マーカの抗原抗体反応を検出できる高感度・小型センサの実現を目指すものである。
これまで実現が難しかったUHF帯横波送波受波をScAlN圧電薄膜を用いて達成している。この薄膜を用いた複素反射率測定を実現し、抗原抗体反応時の粘弾性変化を検出する新しいセンサ方式を提案している。これにより、高感度なたんぱく質の相互作用の検出に成功している。

Report

(4 results)
  • 2022 Final Research Report ( PDF )
  • 2021 Annual Research Report
  • 2020 Annual Research Report
  • 2019 Annual Research Report
  • Research Products

    (196 results)

All 2023 2022 2021 2020 2019

All Journal Article (33 results) (of which Int'l Joint Research: 21 results,  Peer Reviewed: 7 results,  Open Access: 1 results) Presentation (163 results) (of which Int'l Joint Research: 61 results,  Invited: 11 results)

  • [Journal Article] Enhanced Electromechanical Coupling in Yb-Substituted III?V Nitride Alloys2022

    • Author(s)
      Jia Junjun、Iwata Naoya、Suzuki Masashi、Yanagitani Takahiko
    • Journal Title

      ACS Applied Electronic Materials

      Volume: 4 Issue: 7 Pages: 3448-3456

    • DOI

      10.1021/acsaelm.2c00371

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed
  • [Journal Article] A method for extracting sole mechanical properties of Bragg reflector by GHz ultrasonic pulse-echo technique2022

    • Author(s)
      T. Yanagitani, N. Ishii, K. Kondo, M. Suzuki
    • Journal Title

      Appl. Phys. Lett.,

      Volume: vol.121, no. 18 Issue: 18 Pages: 182901-182901

    • DOI

      10.1063/5.0109429

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Giga-hertz ultrasonic reflectometry for fingerprint imaging using epitaxial PbTiO3 transducers2022

    • Author(s)
      K. Nakamura, Y. Koike, Y. Sato, and T. Yanagitani
    • Journal Title

      Appl. Phys. Lett.,

      Volume: vol.121, no. 17 Issue: 17 Pages: 172903-172903

    • DOI

      10.1063/5.0106931

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Oblique incidence ultrasonic reflectometry device based on c-axis tilted ScAlN films for evaluating viscoelastic properties of liquids above 100 MHz2022

    • Author(s)
      S. Kinoshita and T. Yanagitani
    • Journal Title

      Appl. Phys. Lett.,

      Volume: vol.121, no. 15 Issue: 15 Pages: 152901-152901

    • DOI

      10.1063/5.0112070

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed
  • [Journal Article] GHz BAW Piezoelectric Transformers with High Voltage Gain Using the Combination of High and Low Dielectric Constant Thin Films2020

    • Author(s)
      Sarina Kinoshita, Takahiko Yanagitani
    • Journal Title

      Proc. IEEE Ultrason. Symp.

      Volume: 1 Pages: 1-4

    • DOI

      10.1109/ius46767.2020.9251634

    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Journal Article] Enhancement of GHz Electromechanical Coupling Coefficient kt? of MgZnO and CaZnO Thin Film BAW Resonators2020

    • Author(s)
      Kota Izumi, Takahiko Yanagitani
    • Journal Title

      Proc. IEEE Ultrason. Symp.

      Volume: 1 Pages: 1-3

    • DOI

      10.1109/ius46767.2020.9251624

    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Journal Article] Experimental and Theoretical Investigation of kt? and Mechanical Quality Factor (Qm) in YbAlN Films Asing DFT2020

    • Author(s)
      Naoya Iwata, Sarina Kinoshita, Junjun Jia, Takahiko Yanagitani
    • Journal Title

      Proc. IEEE Ultrason. Symp.

      Volume: 1 Pages: 1-2

    • DOI

      10.1109/ius46767.2020.9251775

    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Journal Article] Zig-Zag ScAlN Multilayer SMR for High Power BAW Filter Application Such as RF Base Station2020

    • Author(s)
      Yusuke Sato, Takahiko Yanagitani
    • Journal Title

      Proc. IEEE Ultrason. Symp.

      Volume: 1 Pages: 1-3

    • DOI

      10.1109/ius46767.2020.9251656

    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Journal Article] Self-Standing FBAR Transformer Based on Shear Mode Zig-Zag ScAlN Multilayer for Rectenna Application2020

    • Author(s)
      Sarina Kinoshita, Takahiko Yanagitani
    • Journal Title

      Proc. IEEE Ultrason. Symp.

      Volume: 1 Pages: 1-4

    • DOI

      10.1109/ius46767.2020.9251481

    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Journal Article] Extraction of kt? of Piezoelectric Film/Substrate Structure by Conversion Loss Derived by Electromagnetic Signal Including No Acoustic Losses2020

    • Author(s)
      Ryota Tatsumi, Takahiko Yanagitani
    • Journal Title

      Proc. IEEE Ultrason. Symp.

      Volume: 1 Pages: 1-3

    • DOI

      10.1109/ius46767.2020.9251575

    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Journal Article] Deterioration in the Piezoelectric Property of ScAlN Thin Films by Negative Ion Bombardment Increased in Low-Pressure Sputtering Deposition2020

    • Author(s)
      Takumi Tominaga, Shinji Takayanagi, Takahiko Yanagitani
    • Journal Title

      Proc. IEEE Ultrason. Symp.

      Volume: 1 Pages: 1-4

    • DOI

      10.1109/ius46767.2020.9251438

    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Journal Article] Accurate Extraction of kt2 of Piezoelectric Film/Substrate Structure by Conversion Loss Method Subtracting Experimental Acoustic Losses in the Substrate2020

    • Author(s)
      Ryota Tatsumi, Takahiko Yanagitani
    • Journal Title

      Proc. IEEE Ultrason. Symp.

      Volume: 1 Pages: 1-3

    • DOI

      10.1109/ius46767.2020.9251360

    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Journal Article] c-Axis Oriented ScAlN/ SiO2 Multilayer BAW Transformer for Rectifying Antenna Applications2020

    • Author(s)
      Kota Izumi, Takahiko Yanagitani
    • Journal Title

      Proc. IEEE Ultrason. Symp.

      Volume: 1 Pages: 1-4

    • DOI

      10.1109/ius46767.2020.9251603

    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Journal Article] ScAlN Nano-Rods Structure Thin Film Grown by a Self-Shadowing Oblique Sputtering for High Electromechanical Coupling Transducer Applications2020

    • Author(s)
      Takumi Soutome, Takahiko Yanagitani
    • Journal Title

      Proc. IEEE Ultrason. Symp.

      Volume: 1 Pages: 1-4

    • DOI

      10.1109/ius46767.2020.9251311

    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Journal Article] Measurement of Antiresonant Frequency During DC Bias Voltage Application for Analysis of Second Harmonic Response of ScAlN on SMR2020

    • Author(s)
      Takumi Soutome, Takahiko Yanagitani
    • Journal Title

      Proc. IEEE Ultrason. Symp.

      Volume: 1 Pages: 1-4

    • DOI

      10.1109/ius46767.2020.9251804

    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Journal Article] Extracting Mechanical Q Factor of the Pure AlN, ZnO, and ScAlN Film Without Etching Substrate2020

    • Author(s)
      Naoya Iwata, Sarina Kinoshita, Takahiko Yanagitani
    • Journal Title

      Proc. IEEE Ultrason. Symp.

      Volume: 1 Pages: 1-2

    • DOI

      10.1109/ius46767.2020.9251667

    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Journal Article] Giga-Hertz Piezoelectric Epitaxial PZT/La-SrTiO3 Transducer for the Application of Fingerprint Imaging2020

    • Author(s)
      Yusuke Sato, Takahiko Yanagitani
    • Journal Title

      Proc. IEEE Ultrason. Symp.

      Volume: 1 Pages: 1-3

    • DOI

      10.1109/ius46767.2020.9251666

    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Journal Article] 低圧スパッタ成膜で増大する負イオン照射がScAlN薄膜の結晶性と圧電性に及ぼす影響2020

    • Author(s)
      冨永卓海、髙柳真司、柳谷隆彦
    • Journal Title

      電子情報通信学会技術研究報告

      Volume: vol. 120, no. 222 Pages: 1-6

    • Related Report
      2020 Annual Research Report
  • [Journal Article] AlNとScAlNにおける非線形性に起因するDCバイアス時の周波数シフトおよび格子ひずみの比較2020

    • Author(s)
      五月女巧、柳谷隆彦
    • Journal Title

      電子情報通信学会技術研究報告

      Volume: vol. 120, no. 222 Pages: 34-39

    • Related Report
      2020 Annual Research Report
  • [Journal Article] レクテナ昇圧素子に向けた傾斜反転ScAlN圧電薄膜トランス2020

    • Author(s)
      木下紗里那、柳谷隆彦
    • Journal Title

      電子情報通信学会技術研究報告

      Volume: vol. 120, no. 174 Pages: 45-50

    • Related Report
      2020 Annual Research Report
  • [Journal Article] ScAlスパッタターゲットから生じる負イオンがScAlN圧電薄膜の結晶配向性や電気機械結合係数に及ぼす影響2020

    • Author(s)
      木原流唯、高柳真司、柳谷隆彦
    • Journal Title

      電子情報通信学会技術研究報告

      Volume: vol. 120, no. 174 Pages: 51-56

    • Related Report
      2020 Annual Research Report
  • [Journal Article] 基板付き薄膜共振子の基板内損失を含まない新規kt2評価法と従来法の比較2020

    • Author(s)
      龍見亮汰、柳谷隆彦
    • Journal Title

      電子情報通信学会技術研究報告

      Volume: vol. 120, no. 174 Pages: 57-60

    • Related Report
      2020 Annual Research Report
  • [Journal Article] Frequency-switchable polarity-inverted BAW resonators based on electric-field-induced piezoelectric PMN-PT/PZT epitaxial film stacks2019

    • Author(s)
      T. Shimidzu and T. Yanagitani
    • Journal Title

      J. Appl. Phys.

      Volume: vol. 126 Issue: 11 Pages: 114104-114104

    • DOI

      10.1063/1.5092753

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Frequency-switchable polarity-inverted BAW resonators based on PZT/PTO epitaxial films using difference in coercive field2019

    • Author(s)
      T. Shimidzu, T. Mori, and T. Yanagitani
    • Journal Title

      Appl. Phys. Lett.,

      Volume: vol. 114 Issue: 21 Pages: 212902-212902

    • DOI

      10.1063/1.5089554

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] A method for extracting mechanical Q factor of the piezoelectric film without etching substrate2019

    • Author(s)
      S. Kinoshita and T. Yanagitani
    • Journal Title

      Proc. IEEE Ultrason. Symp.

      Volume: 1 Pages: 229-300

    • DOI

      10.1109/ultsym.2019.8926088

    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Journal Article] Shear mode polarity inverted ScAlN multilayer for application to BAW transformer in rectifying antenna2019

    • Author(s)
      S. Kinoshita and T. Yanagitani
    • Journal Title

      Proc. IEEE Ultrason. Symp.

      Volume: 1 Pages: 1118-1119

    • DOI

      10.1109/ultsym.2019.8925674

    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Journal Article] A method to estimate Kt2 of piezoelectric films from the change of lattice strain by XRD without removing substrate2019

    • Author(s)
      T. Soutome and T. Yanagitani
    • Journal Title

      Proc. IEEE Ultrason. Symp.

      Volume: 1 Pages: 301-304

    • DOI

      10.1109/ultsym.2019.8925766

    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Journal Article] Improvement of C-Axis parallel orientation of ZnO film on silica glass pipes with various diameters for SH-SAW pipe sensor2019

    • Author(s)
      T. Wakabayashi, S. Takayanagi, Y. Takamura, M. Matsukawa, and T. Yanagitani
    • Journal Title

      Proc. IEEE Ultrason. Symp.

      Volume: 1 Pages: 671-674

    • DOI

      10.1109/ultsym.2019.8925796

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Effect of negative ions generation from sputtering target on crystalline orientation and Kt2 of ScAlN thin films2019

    • Author(s)
      R. Kihara and T. Yanagitani
    • Journal Title

      Proc. IEEE Ultrason. Symp.

      Volume: 1 Pages: 1120-1123

    • DOI

      10.1109/ultsym.2019.8925983

    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Journal Article] Ion beam induced A-Axis in-plane oriented C-Axis oriented AlN thin film growth for high-Q BAW resonator application2019

    • Author(s)
      C. Masamune and T. Yanagitani
    • Journal Title

      Proc. IEEE Ultrason. Symp.

      Volume: 1 Pages: 1127-1128

    • DOI

      10.1109/ultsym.2019.8926047

    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Journal Article] ScAlN圧電薄膜の高品質化に向けたScAl合金スパッタターゲットから発生する負イオンの抑制~電子ビーム溶融、アーク溶融、焼結ScAl合金ターゲットの比較~2019

    • Author(s)
      柳谷隆彦
    • Journal Title

      真空ジャーナル

      Volume: 2019年9月号 Pages: 11-15

    • Related Report
      2019 Annual Research Report
  • [Journal Article] 擬似すべりモードc軸傾斜配向ScAlN圧電薄膜を用いた複素反射率法による液体試料の粘弾性評価2019

    • Author(s)
      天野凌輔,山川愉生,柳谷隆彦
    • Journal Title

      電子情報通信学会技術研究報告

      Volume: vol. 119 Pages: 19-23

    • Related Report
      2019 Annual Research Report
  • [Journal Article] ZnO薄膜を用いた厚みすべりモード共振子の作製と液体負荷時の周波数特性2019

    • Author(s)
      宮田昌哉,高柳真司,松川真美,柳谷隆彦
    • Journal Title

      電子情報通信学会技術研究報告

      Volume: vol. 119 Pages: 33-37

    • Related Report
      2019 Annual Research Report
  • [Presentation] GHz 帯パルスエコー法による音響ブラッグ反射層の横波機械的通過損失の測定2023

    • Author(s)
      鈴木基嗣, 石井直輝, 近藤圭太, 柳谷隆彦
    • Organizer
      圧電材料・デバイスシンポジウム2023
    • Related Report
      2021 Annual Research Report
  • [Presentation] 基板付き圧電薄膜の様々な kt2評価法における電極面積依存性2023

    • Author(s)
      関崚, 清水祐樹, 近藤圭太, 柳谷隆彦
    • Organizer
      圧電材料・デバイスシンポジウム2023
    • Related Report
      2021 Annual Research Report
  • [Presentation] 基板付き薄膜共振子において通常の共振反共振法を用いる新しい kt2 評価法の提案2023

    • Author(s)
      島野耀康, 矢田部浩平, 柳谷隆彦
    • Organizer
      圧電材料・デバイスシンポジウム2023
    • Related Report
      2021 Annual Research Report
  • [Presentation] エピタキシャル金属薄膜から成る音響ブラッグ反射器を用いたフルエピタキシャル SMR の作製2023

    • Author(s)
      渡海智, 柳谷隆彦
    • Organizer
      圧電材料・デバイスシンポジウム2023
    • Related Report
      2021 Annual Research Report
  • [Presentation] 圧電層と基板の音響分離を目指した 30 層分極反転共振子案2023

    • Author(s)
      白岩和剛, 柳谷隆彦
    • Organizer
      圧電材料・デバイスシンポジウム2023
    • Related Report
      2021 Annual Research Report
  • [Presentation] オフ角サファイア基板を用いた ScAlN および MgZnO 薄膜の c 軸傾斜エピタキシャル成長と横波圧電特性2023

    • Author(s)
      岸大貴, 柳谷隆彦
    • Organizer
      圧電材料・デバイスシンポジウム2023
    • Related Report
      2021 Annual Research Report
  • [Presentation] オフ角 Al2O3 基板を用いた LiNbO3 薄膜の c 軸傾斜エピタキシャル成長2023

    • Author(s)
      工藤慎也, 柳谷隆彦
    • Organizer
      圧電材料・デバイスシンポジウム2023
    • Related Report
      2021 Annual Research Report
  • [Presentation] オフ角 La-SrTiO3 基板を用いた c 軸傾斜エピ PbTiO3 薄膜の高い横波圧電性2023

    • Author(s)
      國信聡太, 柳谷隆彦
    • Organizer
      圧電材料・デバイスシンポジウム2023
    • Related Report
      2021 Annual Research Report
  • [Presentation] エピ音響ブラッグ反射器およびエピScAlN, MgZnO圧電薄膜から成るSMR2023

    • Author(s)
      渡海智, 柳谷隆彦
    • Organizer
      第70回応用物理学会春季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] 基板付き圧電薄膜構造の kt2評価における電極面積依存性の実験データとFEM解析データの比較2023

    • Author(s)
      関崚, 清水祐樹, 柳谷隆彦
    • Organizer
      第70回応用物理学会春季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] 基板付き薄膜共振子における共振反共振法用いた電極を含む電気機械結合係数keff2の直接評価2023

    • Author(s)
      島野耀康, 矢田部浩平, 柳谷隆彦
    • Organizer
      第70回応用物理学会春季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] YbGaNおよびYbAlNエピタキシャル薄膜を用いたBAW共振子の特性2023

    • Author(s)
      馮子泰, 李嵩, 柳谷隆彦
    • Organizer
      第70回応用物理学会春季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] 30 層分極反転共振子による圧電層と基板の音響分離2023

    • Author(s)
      白岩和剛, 柳谷隆彦
    • Organizer
      第70回応用物理学会春季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] オフ角サファイア単結晶基板上 c 軸傾斜MgZnO, ScAlN,エピタキシャル薄膜の擬似横波励振特性2023

    • Author(s)
      小林栞, 岸大貴, 柳谷隆彦
    • Organizer
      第70回応用物理学会春季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] Li0.65Nb0.3Ta0.05O3 スパッタエピ薄膜のGHz帯励振特性2023

    • Author(s)
      中村華英, 工藤慎也, 柳谷隆彦
    • Organizer
      第70回応用物理学会春季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] オフ角基板を用いたc軸傾斜エピPbTiO 3 薄膜の擬似横波励振特性2023

    • Author(s)
      國信聡太, 柳谷隆彦
    • Organizer
      第70回応用物理学会春季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] (10-12)LiNbO3スパッタエピ薄膜のGHz帯擬似横波励振特性2023

    • Author(s)
      内田拓希, 工藤慎也, 柳谷隆彦
    • Organizer
      第70回応用物理学会春季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] Fingerprint imaging in GHz using PbTiO3 epitaxial piezoelectric thin films2022

    • Author(s)
      Y. Koike and T. Yanagitani
    • Organizer
      IEEE IC-MAM 2022
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Thickness shear mode epitaxial (10?("1" ) "2") LiNbO3 (11?("2" )0) AZO/(10?("1" ) "2") Al2O3 BAW resonator2022

    • Author(s)
      S. Kudo and T. Yanagitani
    • Organizer
      IEEE IC-MAM 2022
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Epitaxial piezoelectric layer SMR fabricated using epitaxial sacrificial layer process2022

    • Author(s)
      S. Kudo and T. Yanagitani
    • Organizer
      IEEE IC-MAM 2022
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] A method to evaluate the mechanical transmission loss of the sole Bragg reflector by using GHz pulse echo technique2022

    • Author(s)
      N. ishi and T. Yanagitani
    • Organizer
      IEEE IC-MAM 2022
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] c軸傾斜MgZnO薄膜における擬似横波励振特性2022

    • Author(s)
      島野耀康, 柳谷隆彦
    • Organizer
      日本音響学会第148回
    • Related Report
      2021 Annual Research Report
  • [Presentation] c軸10°傾斜配向ZnOエピタキシャル薄膜における擬似横波励振特性2022

    • Author(s)
      岸大貴, 柳谷隆彦
    • Organizer
      日本音響学会第148回
    • Related Report
      2021 Annual Research Report
  • [Presentation] (10-12)LiNbO3エピタキシャル薄膜/(10-12)Al2O3基板のGHz帯向け擬似横波励振特性2022

    • Author(s)
      工藤慎也, 柳谷隆彦
    • Organizer
      日本音響学会第148回
    • Related Report
      2021 Annual Research Report
  • [Presentation] PZTエピタキシャル薄膜のZr/Ti比における機械的品質Qmの依存性2022

    • Author(s)
      國信聡太, 清水祐樹, 柳谷隆彦
    • Organizer
      第83回応用物理学会秋季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] ウルツ鉱型強誘電体薄膜におけるGHz帯kt2-Eヒステリシス特性2022

    • Author(s)
      石井直輝, 小林栞, 柳谷隆彦
    • Organizer
      第83回応用物理学会秋季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] 基板付きの圧電薄膜と自立構造の圧電薄膜に対する 各種 kt2値評価法の比較2022

    • Author(s)
      関崚, 清水祐樹, 柳谷隆彦
    • Organizer
      第83回応用物理学会秋季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] 20%を超える高いkt2値のc軸配向Sc0.4Al0.6N薄膜および高いk´352値のc軸傾斜配向Sc0.4Al0.6N薄膜2022

    • Author(s)
      内田拓希, 清水 祐樹, 鈴木 雅視, 高柳 真司, 柳谷 隆彦
    • Organizer
      第83回応用物理学会秋季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] 耐電力性向上を目的とした分極反転ScAlN薄膜ブラッグ反射共振子2022

    • Author(s)
      柴田真之, 柳谷隆彦
    • Organizer
      第83回応用物理学会秋季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] c軸10°傾斜配向ZnOエピタキシャル薄膜の成長と擬似横波励振特性2022

    • Author(s)
      岸大貴, 柳谷隆彦
    • Organizer
      第83回応用物理学会秋季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] 分極反転多層デバイスに向けた極性制御MgZnO圧電薄膜の作製2022

    • Author(s)
      島野耀康, 高柳真司, 柳谷隆彦
    • Organizer
      第83回応用物理学会秋季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] (100)AgNbO3エピタキシャル薄膜/(100)STO基板のGHz帯超音波励振特性2022

    • Author(s)
      浴田航平, 大森拳, 工藤慎也, 柳谷隆彦
    • Organizer
      第83回応用物理学会秋季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] GHz帯パルスエコー法による音響多層膜単体の機械特性評価2022

    • Author(s)
      鈴木基嗣, 石井直輝, 近藤圭太, 柳谷隆彦
    • Organizer
      第83回応用物理学会秋季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] 基板付き薄膜構造からの圧電薄膜のQ値抽出における横方向伝搬の影響2022

    • Author(s)
      清水祐樹, 柳谷隆彦
    • Organizer
      第83回応用物理学会秋季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] Polarization inverted 2 layer ScAlN thin film resonator fabricated by applying external electric field2022

    • Author(s)
      N. Ishi and T. Yanagitani
    • Organizer
      IEEE IUS 2022
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Transversal type BAW filter based on polarization-inverted ScAlN multilayers2022

    • Author(s)
      S. Shibata and T. Yanagitan
    • Organizer
      IEEE IUS 2022
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Power Durability Evaluation of Higher-order Mode Polarization-inverted ScAlN Thin Film Resonators2022

    • Author(s)
      S. Shibata and T. Yanagitan
    • Organizer
      IEEE IUS 2022
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Epitaxial PbTiO3 ultrasonic transducer for higher resolution of fingerprint imaging using GHz reflectometry of back side of substrate2022

    • Author(s)
      Y. Koike and T. Yanagitani
    • Organizer
      IEEE IUS 2022
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] SMR-type piezoelectric transformer based on c-axis zig-zag polarization inverted ScAlN multilayer2022

    • Author(s)
      K. Shiraiwa and T. Yanagitani
    • Organizer
      IEEE IUS 2022
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Fabrication of epitaxial piezoelectric layer on acoustic Bragg reflector using epitaxial sacrificial layer2022

    • Author(s)
      S. Tokai and T. Yanagitani
    • Organizer
      IEEE IUS 2022
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Quasi-shear mode electromechanical coupling coefficient of c-axis tilted MgZnO thin films2022

    • Author(s)
      Y. Shimano and T. Yanagitani
    • Organizer
      IEEE IUS 2022
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] A method for evaluating sole mechanical properties of acoustic Bragg reflector by pulse echo technique in the GHz range2022

    • Author(s)
      M. Suzuki and T. Yanagitani
    • Organizer
      IEEE IUS 2022
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Improvement of electromechanical coupling coefficient of piezoelectric LiNbO3 by doping praseodymium2022

    • Author(s)
      K. Nakamura and T. Yanagitani
    • Organizer
      IEEE IUS 2022
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Fabrication of high kt2 and k’352 Sc0.4Al0.6N thin films by RF magnetron sputtering2022

    • Author(s)
      Y. Shimizu and T. Yanagitani
    • Organizer
      IEEE IUS 2022
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Sputter epitaxial (101??2) LiNbO3 film / (112??0) AZO / (101??2) Al2O3 shear mode thin film resonators2022

    • Author(s)
      S. Kudo and T. Yanagitani
    • Organizer
      IEEE IUS 2022
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] IBAD c-axis parallel ZnO piezoelectric film stack?for gyroscope applications2022

    • Author(s)
      S. Kudo and T. Yanagitani
    • Organizer
      IEEE IUS 2022
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Experimental and theoretical investigation of enhanced electromechanical properties in YbAlN and YbGaN films2022

    • Author(s)
      S. Li and T. Yanagitani
    • Organizer
      IEEE IUS 2022
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Grow of O-polar and Zn polar ferroelectric MgZnO thin films controlled by sputtering geometry2022

    • Author(s)
      Y. Shimano and T. Yanagitani
    • Organizer
      IEEE IUS 2022
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Evaluation of mechanical Q factor of sputter-grown Pb(ZrxTi1-x)O3 epitaxial films without removing substrate2022

    • Author(s)
      Y. Shimizu and T. Yanagitan
    • Organizer
      IEEE IUS 2022
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] GHz electromechanical coupling hysteresis curves for ferroelectric ScAlN and epitaxial MgZnO films2022

    • Author(s)
      N. Ishi and T. Yanagitani
    • Organizer
      IEEE IUS 2022
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] piezoelectric gyroscope with tilted c-axis ScAlN thin-films2022

    • Author(s)
      Y. Koike and T. Yanagitani
    • Organizer
      IEEE IUS 2022
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Extracting Q factor of the piezoelectric thin films from film/high-Q substrate HBAR structure2022

    • Author(s)
      M. Suzuki and T. Yanagitani
    • Organizer
      IEEE IUS 2022
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Quasi-shear mode excitation of c-axis tilted MgZnO epitaxial thin film2022

    • Author(s)
      H. Kishi and T. Yanagitani
    • Organizer
      The 43rd Symposium on UltraSonic Electronics (USE2022)
    • Related Report
      2021 Annual Research Report
  • [Presentation] Extraction of mechanical reflectance of acoustic Bragg reflector by GHz pulse echo technique2022

    • Author(s)
      M. Suzuki and T. Yanagitani
    • Organizer
      The 43rd Symposium on UltraSonic Electronics (USE2022)
    • Related Report
      2021 Annual Research Report
  • [Presentation] Mechanical Q factor dependence on Zr/Ti ratio of sputter-grown PZT epitaxial thin films2022

    • Author(s)
      Y. Shimizu and T. Yanagitani
    • Organizer
      The 43rd Symposium on UltraSonic Electronics (USE2022)
    • Related Report
      2021 Annual Research Report
  • [Presentation] Thickness shear mode BAW resonator based on epitaxial (10-12) LiNbO3 (11-20) AZO/(10-12) Al2O32022

    • Author(s)
      S. Kudo and T. Yanagitani
    • Organizer
      The 43rd Symposium on UltraSonic Electronics (USE2022)
    • Related Report
      2021 Annual Research Report
  • [Presentation] GHz frequency switchable BAW filter applications of ferroelectric ScAlN and MgZnO thin films2022

    • Author(s)
      T. Yanagitani
    • Organizer
      2022 US-Japan Seminar on Dielectric and Piezoelectric Ceramics
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] kt2 hysteresis curves of PbTiO3 epitaxial film resonators before and after removing substrate2022

    • Author(s)
      S. Kuninobu and T. Yanagitani
    • Organizer
      2022 US-Japan Seminar on Dielectric and Piezoelectric Ceramics
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Fingerprint imaging using GHz PbTiO3 epitaxial thin film ultrasonic transducer2022

    • Author(s)
      K. Nakamura and T. Yanagitani
    • Organizer
      2022 US-Japan Seminar on Dielectric and Piezoelectric Ceramics
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Mechanical Q factor extraction of sputter-grown Pb(ZrxTi1-x)O3 epitaxial thin films without removing substrate2022

    • Author(s)
      Y. Shimizu and T. Yanagitani
    • Organizer
      2022 US-Japan Seminar on Dielectric and Piezoelectric Ceramics
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 基板付き薄膜共振子を用いたScAlN、ZnO、PZT圧電薄膜層のQ値抽出2022

    • Author(s)
      清水祐樹, 柳谷隆彦
    • Organizer
      超音波研究会
    • Related Report
      2021 Annual Research Report
  • [Presentation] 基板付き圧電薄膜の kt2評価における電極面積の影響2022

    • Author(s)
      関崚, 清水祐樹, 近藤圭太, 柳谷隆彦
    • Organizer
      超音波研究会
    • Related Report
      2021 Annual Research Report
  • [Presentation] c軸20°傾斜配向MgZnOエピタキシャル薄膜の擬似横波励振特性2022

    • Author(s)
      岸大貴, 柳谷隆彦
    • Organizer
      超音波研究会
    • Related Report
      2021 Annual Research Report
  • [Presentation] LiNbO3スパッタエピ薄膜のGHz帯励振特性2022

    • Author(s)
      工藤慎也, 柳谷隆彦
    • Organizer
      超音波研究会
    • Related Report
      2021 Annual Research Report
  • [Presentation] SiO2遅延層を用いたGHz帯パルスエコー法による音響ブラッグ反射層の機械的通過損失の測定2022

    • Author(s)
      近藤圭太, 石井直輝, 鈴木基嗣, 柳谷隆彦
    • Organizer
      超音波研究会
    • Related Report
      2021 Annual Research Report
  • [Presentation] YbGaNおよびYbAlNエピタキシャル薄膜共振子の特性2022

    • Author(s)
      李嵩, 賈軍軍, 柳谷隆彦
    • Organizer
      超音波研究会
    • Related Report
      2021 Annual Research Report
  • [Presentation] MgおよびCaドーピングによるZnO薄膜のUHF帯電気機械結合係数kt2の向上2021

    • Author(s)
      泉航太、柳谷隆彦
    • Organizer
      第68回応用物理学会春季学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] PbTiO3エピタキシャル薄膜の基板裏面における反射率測定を用いたGHz帯指紋イメージング2021

    • Author(s)
      佐藤裕友、石井 直輝、柳谷 隆彦
    • Organizer
      第68回応用物理学会春季学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] イオン照射を用いたScAlN薄膜の極性制御2021

    • Author(s)
      工藤 慎也、天野 凌輔、柳谷 隆彦
    • Organizer
      第68回応用物理学会春季学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] c軸傾斜配向ScAlN薄膜の横波反射率測定による液体の粘性評価2021

    • Author(s)
      山下美穂、木下紗里那、柳谷隆彦
    • Organizer
      第68回応用物理学会春季学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] エピタキシャルPbTiO3 自立薄膜共振子のGHz 帯圧電特性2021

    • Author(s)
      渡海智、國信 総太、柳谷 隆彦
    • Organizer
      第68回応用物理学会春季学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] 基板付き圧電薄膜構造におけるkt2評価法に寄生インダクタンスが与える影響2021

    • Author(s)
      山中 恵理、近藤 圭太、龍見 亮汰、柳谷 隆彦
    • Organizer
      第68回応用物理学会春季学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] 誘電率の異なる材料を組み合わせた圧電薄膜トランスの作製2021

    • Author(s)
      岸大貴、木下紗里那、泉航太、柳谷隆彦
    • Organizer
      第68回応用物理学会春季学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] 窒化物強誘電体圧電薄膜材料の5G向けBAWフィルタ応用2020

    • Author(s)
      柳谷隆彦
    • Organizer
      第37回強誘電体応用会議
    • Related Report
      2020 Annual Research Report
    • Invited
  • [Presentation] 傾斜反転ScAlN圧電薄膜を用いた積層型トランス2020

    • Author(s)
      泉航太、木下紗里那、柳谷隆彦
    • Organizer
      第37回強誘電体応用会議
    • Related Report
      2020 Annual Research Report
  • [Presentation] スパッタ法によるPZT系膜を用いた高効率超音波トランスデューサ2020

    • Author(s)
      佐藤裕友、柳谷隆彦
    • Organizer
      第37回強誘電体応用会議
    • Related Report
      2020 Annual Research Report
  • [Presentation] 負イオン発生抑制を目指したSc粒埋め込みAl金属ターゲットによる高配向ScAlN薄膜の成長と評価2020

    • Author(s)
      岩田直也、木原流唯、高柳真司、柳谷隆彦
    • Organizer
      第37回強誘電体応用会議
    • Related Report
      2020 Annual Research Report
  • [Presentation] GHz BAW Piezoelectric Transformers with High Voltage Gain Using the Combination of High and Low Dielectric Constant Thin Films2020

    • Author(s)
      S. Kinoshita, T. Yanagitani
    • Organizer
      2020 IEEE International Ultrasonics
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Enhancement of GHz Electromechanical Coupling Coefficient kt? of MgZnO and CaZnO Thin Film BAW Resonators2020

    • Author(s)
      K. Izumi, T. Yanagitani
    • Organizer
      2020 IEEE International Ultrasonics
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Experimental and Theoretical Investigation of kt? and Mechanical Quality Factor (Qm) in YbAlN Films Asing DFT2020

    • Author(s)
      N. Iwata, S. Kinoshita, J. Jia, T. Yanagitani
    • Organizer
      2020 IEEE International Ultrasonics
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Zig-Zag ScAlN Multilayer SMR for High Power BAW Filter Application Such as RF Base Station2020

    • Author(s)
      Y. Sato, T. Yanagitani
    • Organizer
      2020 IEEE International Ultrasonics
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Self-Standing FBAR Transformer Based on Shear Mode Zig-Zag ScAlN Multilayer for Rectenna Application2020

    • Author(s)
      S. Kinoshita, T. Yanagitani
    • Organizer
      2020 IEEE International Ultrasonics
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Extraction of kt? of Piezoelectric Film/Substrate Structure by Conversion Loss Derived by Electromagnetic Signal Including No Acoustic Losses2020

    • Author(s)
      R. Tatsumi, T. Yanagitani
    • Organizer
      2020 IEEE International Ultrasonics
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Deterioration in the Piezoelectric Property of ScAlN Thin Films by Negative Ion Bombardment Increased in Low-Pressure Sputtering Deposition2020

    • Author(s)
      T. Tominaga, S. Takayanagi, T. Yanagitani
    • Organizer
      2020 IEEE International Ultrasonics
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Accurate Extraction of kt? of Piezoelectric Film/Substrate Structure by Conversion Loss Method Subtracting Experimental Acoustic Losses in the Substrate2020

    • Author(s)
      R. Tatsumi, T. Yanagitani
    • Organizer
      2020 IEEE International Ultrasonics
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] c-Axis Oriented ScAlN/ SiO2 Multilayer BAW Transformer for Rectifying Antenna Applications2020

    • Author(s)
      K. Izumi, T. Yanagitani
    • Organizer
      2020 IEEE International Ultrasonics
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Measurement of Time Response of Electrical Properties in Thickness Shear Mode Resonator with Liquid Loadings2020

    • Author(s)
      M. Watabe, S. Takayanagi, T. Yanagitani
    • Organizer
      2020 IEEE International Ultrasonics
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Improvement of Crystallization and Shear-Mode Electromechanical Coupling of c-Axis-ParallelOriented ZnO Film by Annealing Treatment2020

    • Author(s)
      S. Takayanagi, K. Kimoto, T. Yanagitani
    • Organizer
      2020 IEEE International Ultrasonics
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] ScAlN Nano-Rods Structure Thin Film Grown by a Self-Shadowing Oblique Sputtering for High Electromechanical Coupling Transducer Applications2020

    • Author(s)
      T. Soutome, T. Yanagitani
    • Organizer
      2020 IEEE International Ultrasonics
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Measurement of Antiresonant Frequency During DC Bias Voltage Application for Analysis of Second Harmonic Response of ScAlN on SMR2020

    • Author(s)
      T. Soutome, T. Yanagitani
    • Organizer
      2020 IEEE International Ultrasonics
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Extracting Mechanical Q Factor of the Pure AlN, ZnO, and ScAlN Film Without Etching Substrate2020

    • Author(s)
      N. Iwata, S. Kinoshita, T. Yanagitani
    • Organizer
      2020 IEEE International Ultrasonics Symposium (IUS)
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Effect of Negative-Ion-Bombardment Suppression by Applying Voltage to Grids Set Between Substrate and Sputtering Target During Sputtering Deposition on Crystalline Orientation of ZnO Film2020

    • Author(s)
      K. Tominaga, S. Takayanagi, T. Yanagitani
    • Organizer
      2020 IEEE International Ultrasonics Symposium (IUS)
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Multilayer Piezoelectric ScAlN Film Transducers for Ultrasonic Microscopy in the VHF Range2020

    • Author(s)
      Y. Korai, M. Suzuki, T. Yanagitani
    • Organizer
      2020 IEEE International Ultrasonics Symposium (IUS)
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Giga-Hertz Piezoelectric Epitaxial PZT/La-SrTiO3 Transducer for the Application of Fingerprint Imaging2020

    • Author(s)
      Y. Sato, T. Yanagitani
    • Organizer
      2020 IEEE International Ultrasonics Symposium (IUS)
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] レクテナ昇圧素子に向けた傾斜反転ScAlN圧電薄膜トランス2020

    • Author(s)
      木下紗里那、柳谷隆彦
    • Organizer
      電子情報通信学会超音波研究会
    • Related Report
      2020 Annual Research Report
  • [Presentation] ScAlスパッタターゲットから生じる負イオンがScAlN圧電薄膜の結晶配向性や電気機械結合係数に及ぼす影響2020

    • Author(s)
      木原流唯、高柳真司、柳谷隆彦
    • Organizer
      電子情報通信学会超音波研究会
    • Related Report
      2020 Annual Research Report
  • [Presentation] 基板付き薄膜共振子の基板内損失を含まない新規kt2評価法と従来法の比較2020

    • Author(s)
      龍見亮汰、柳谷隆彦
    • Organizer
      電子情報通信学会超音波研究会
    • Related Report
      2020 Annual Research Report
  • [Presentation] ZnO薄膜のMgおよびCaドーピングによるUHF帯電気機械結合係数kt2の向上2020

    • Author(s)
      泉航太、柳谷隆彦
    • Organizer
      第49回EMシンポジウム
    • Related Report
      2020 Annual Research Report
  • [Presentation] GHz帯PZT系エピ薄膜トランスデューサを用いた指紋イメージング2020

    • Author(s)
      佐藤裕友、柳谷隆彦
    • Organizer
      第49回EMシンポジウム
    • Related Report
      2020 Annual Research Report
  • [Presentation] レクテナ昇圧素子に向けたScAlN/SiO2積層型圧電薄膜トランス2020

    • Author(s)
      岸大貴、泉航太、木下紗里那、柳谷隆彦
    • Organizer
      第49回EMシンポジウム
    • Related Report
      2020 Annual Research Report
  • [Presentation] 低圧スパッタ成膜で増大する負イオン照射がScAlN薄膜の結晶性と圧電性に及ぼす影響2020

    • Author(s)
      冨永卓海、髙柳真司、柳谷隆彦
    • Organizer
      電子情報通信学会超音波研究会
    • Related Report
      2020 Annual Research Report
  • [Presentation] AlNとScAlNにおける非線形性に起因するDCバイアス時の周波数シフトおよび格子ひずみの比較2020

    • Author(s)
      五月女巧、柳谷隆彦
    • Organizer
      電子情報通信学会超音波研究会
    • Related Report
      2020 Annual Research Report
  • [Presentation] ScAlN, ZnO, and PbTiO3 polarization inverted thin multilayers for BAW and SAW applications2020

    • Author(s)
      T. Yanagitani
    • Organizer
      The 41th Symposium on Ultrasonic Electronics (USE 2020)
    • Related Report
      2020 Annual Research Report
    • Invited
  • [Presentation] 低圧スパッタ成膜において増大する負イオン照射が ScAlN 薄膜の圧電性に及ぼす影響2020

    • Author(s)
      冨永卓海、髙柳真司、柳谷隆彦
    • Organizer
      The 41th Symposium on Ultrasonic Electronics (USE 2020)
    • Related Report
      2020 Annual Research Report
  • [Presentation] スパッタ成膜中に基板へ照射されるイオンの抑制をした ZnO 薄膜の形成と圧電性への影響2020

    • Author(s)
      富永浩平、髙柳真司、柳谷隆彦
    • Organizer
      The 41th Symposium on Ultrasonic Electronics (USE 2020)
    • Related Report
      2020 Annual Research Report
  • [Presentation] 円管構造 SH-SAW センサに向けた c 軸平行配向 ZnO 薄膜の石英ガラス管回転成膜2020

    • Author(s)
      若林拓也、髙柳真司、柳谷隆彦
    • Organizer
      The 41th Symposium on Ultrasonic Electronics (USE 2020)
    • Related Report
      2020 Annual Research Report
  • [Presentation] ウェハー状態の圧電薄膜共振子の基板内音響損失を除いた変換損 kt2 導出法2020

    • Author(s)
      龍見亮汰、柳谷隆彦
    • Organizer
      The 41th Symposium on Ultrasonic Electronics (USE 2020)
    • Related Report
      2020 Annual Research Report
  • [Presentation] PZT, ScAlN, MgZnOにおける圧電薄膜/基板構造からのGHz帯電気機械結合係数kt2の抽出A method for extracting kt2 of PZT, ScAlN, and MgZnO from piezoelectric film/substrate structure without removing substrate2020

    • Author(s)
      柳谷隆彦
    • Organizer
      日本MRS学会招待講演
    • Related Report
      2020 Annual Research Report
    • Invited
  • [Presentation] 厚膜成長と粉体化により応力を緩和したScAlNにおける結晶構造のSc濃度依存性2020

    • Author(s)
      白寧蕊、柳谷隆彦
    • Organizer
      圧電材料・デバイスシンポジウム2021
    • Related Report
      2020 Annual Research Report
  • [Presentation] AlNとScAlN薄膜共振子の非線形性に起因する周波数シフトとDCバイアス時の格子ひずみの比較2020

    • Author(s)
      五月女巧、柳谷隆彦
    • Organizer
      圧電材料・デバイスシンポジウム2021
    • Related Report
      2020 Annual Research Report
  • [Presentation] GHz帯PbTiO3エピ薄膜の基板裏面における反射率差を用いた指紋イメージング2020

    • Author(s)
      佐藤裕友、柳谷隆彦
    • Organizer
      圧電材料・デバイスシンポジウム2021
    • Related Report
      2020 Annual Research Report
  • [Presentation] 基板付きAlN、ScAlN、ZnO薄膜共振子の機械的Qm値の抽出2020

    • Author(s)
      清水祐樹、木下紗里那、岩田直也、柳谷隆彦
    • Organizer
      圧電材料・デバイスシンポジウム2021
    • Related Report
      2020 Annual Research Report
  • [Presentation] 基板付き圧電薄膜構造における変換損失kt2評価法に寄生インダクタンスが与える影響2020

    • Author(s)
      近藤圭太、龍見亮汰、柳谷隆彦
    • Organizer
      圧電材料・デバイスシンポジウム2021
    • Related Report
      2020 Annual Research Report
  • [Presentation] 自立薄膜共振子の作製を目指したPbTiO3エピタキシャル薄膜のMgO下地エッチング2020

    • Author(s)
      國信聡太、柳谷隆彦
    • Organizer
      圧電材料・デバイスシンポジウム2021
    • Related Report
      2020 Annual Research Report
  • [Presentation] 低圧スパッタ成膜で増大する負イオン照射と ScAlN 薄膜の結晶性および圧電性の劣化2020

    • Author(s)
      冨永卓海、高柳真司、柳谷隆彦
    • Organizer
      圧電材料・デバイスシンポジウム2021
    • Related Report
      2020 Annual Research Report
  • [Presentation] E-3 円管構造 SH-SAW センサに向けた c 軸平行配向 ZnO 薄膜の石英ガラス管への成膜2020

    • Author(s)
      若林拓也、高柳真司、柳谷隆彦
    • Organizer
      圧電材料・デバイスシンポジウム2021
    • Related Report
      2020 Annual Research Report
  • [Presentation] 基板へのイオン照射を抑制したスパッタ法によるZnO 薄膜形成と結晶性および圧電性への影響2020

    • Author(s)
      富永浩平、高柳真司、柳谷隆彦
    • Organizer
      圧電材料・デバイスシンポジウム2021
    • Related Report
      2020 Annual Research Report
  • [Presentation] c 軸配向 ZnO 薄膜を用いた極性反転共振子の圧電トランス応用2020

    • Author(s)
      間島毅、柳谷隆彦
    • Organizer
      圧電材料・デバイスシンポジウム2020
    • Related Report
      2019 Annual Research Report
  • [Presentation] 基板付き薄膜共振子の電磁結合信号もしくは音響信号を用いた変換損 kt2評価法の比較2020

    • Author(s)
      龍見亮汰、柳谷隆彦
    • Organizer
      圧電材料・デバイスシンポジウム2020
    • Related Report
      2019 Annual Research Report
  • [Presentation] レクテナ用の昇圧回路応用を目指した積層型圧電トランスのモデル化と試作2020

    • Author(s)
      平澤直人、木下紗里那、柳谷隆彦
    • Organizer
      第67回応用物理学会春季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] PZT系エピタキシャル薄膜共振子の600 ?C以上の高温域における圧電特性2020

    • Author(s)
      松田友佳、柳谷隆彦
    • Organizer
      第67回応用物理学会春季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] イオンビームにより面内a軸方向を揃えたc軸配向AlN薄膜の成長2020

    • Author(s)
      正宗千明、柳谷隆彦
    • Organizer
      第67回応用物理学会春季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] 圧電トランス応用に向けたc軸配向極性反転ZnO薄膜共振子の作製2020

    • Author(s)
      間島毅、柳谷隆彦
    • Organizer
      第67回応用物理学会春季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] レクテナ昇圧素子に向けたSMR型傾斜反転ScAlN圧電薄膜トランス2020

    • Author(s)
      木下紗里那、柳谷隆彦
    • Organizer
      第67回応用物理学会春季学術講演会
    • Related Report
      2019 Annual Research Report
    • Invited
  • [Presentation] イオンビーム成膜を用いた結晶配向制御と極性反転デバイス応用2019

    • Author(s)
      柳谷隆彦
    • Organizer
      弾性波素子技術第150委員会第156回委員会
    • Related Report
      2019 Annual Research Report
  • [Presentation] 微弱電波による環境発電用の新しい昇圧素子2019

    • Author(s)
      柳谷隆彦
    • Organizer
      JST 新技術説明会
    • Related Report
      2019 Annual Research Report
  • [Presentation] Sc 粒埋め込みスパッタターゲットによる成膜中負イオン照射抑制と ScAlN 薄膜結晶性向上2019

    • Author(s)
      白 寧蕊、柳谷隆彦
    • Organizer
      第48回EMシンポジウム
    • Related Report
      2019 Annual Research Report
  • [Presentation] イオンビームアシストスパッタ法による a軸方向が揃った c 軸配向 AlN 薄膜の成長2019

    • Author(s)
      正宗千明、柳谷隆彦
    • Organizer
      第48回EMシンポジウム
    • Related Report
      2019 Annual Research Report
  • [Presentation] 自立構造エピタキシャル PbTiO3薄片の共振特性と温度特性2019

    • Author(s)
      松田友佳、柳谷隆彦
    • Organizer
      第48回EMシンポジウム
    • Related Report
      2019 Annual Research Report
  • [Presentation] レクテナ昇圧素子への応用を目指したc軸ジグザグ配向ScAlN圧電薄膜トランス2019

    • Author(s)
      柳谷隆彦
    • Organizer
      同志社大学 超音波応用科学研究センター7月例会
    • Related Report
      2019 Annual Research Report
  • [Presentation] 擬似すべりモードc軸傾斜配向ScAlN圧電薄膜を用いた複素反射率法による液体試料の粘弾性評価2019

    • Author(s)
      天野凌輔、山川愉生、柳谷隆彦
    • Organizer
      電子情報通信学会超音波研究会
    • Related Report
      2019 Annual Research Report
  • [Presentation] Enhancement of Electromechanical Coupling kt2 in Rare Earth Doped AlN Films for Bulk Acoustic Wave Filter Applications2019

    • Author(s)
      T. Yanagitani
    • Organizer
      ICoSEM2019
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] PZT Family Epitaxial Thick Film for Ultrasonic Transducer at Frequencies Below 100MHz2019

    • Author(s)
      Y. Mazda and T. Yanagitani
    • Organizer
      ICoSEM2019
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] ScAlN Free?standing 0.1 mm Piezoelectric Plates in the 30?50 MHz Resonance Frequency2019

    • Author(s)
      C. Masamune, R. Karasawa and T. Yanagitani
    • Organizer
      ICoSEM2019
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] グラフェン上巨大圧電性ScAlN薄膜の弾性波デバイス応用2019

    • Author(s)
      天野凌輔、柳谷隆彦
    • Organizer
      2019年 電気学会 電子・情報・システム部門大会
    • Related Report
      2019 Annual Research Report
  • [Presentation] レクテナ昇圧素子を目指したジグザグ配向ScAlN圧電薄膜トランス2019

    • Author(s)
      木下紗里那、柳谷隆彦
    • Organizer
      2019年 電気学会 電子・情報・システム部門大会
    • Related Report
      2019 Annual Research Report
  • [Presentation] 基板付き薄膜構造を用いた圧電薄膜の機械的品質Qm値の推定法2019

    • Author(s)
      木下紗里那、柳谷隆彦
    • Organizer
      2019年 電気学会 電子・情報・システム部門大会
    • Related Report
      2019 Annual Research Report
  • [Presentation] スパッタ法によるScAlN厚膜を用いたVHF帯高効率超音波トランスデューサ2019

    • Author(s)
      佐藤裕友、柳谷隆彦
    • Organizer
      2019年 電気学会 電子・情報・システム部門大会
    • Related Report
      2019 Annual Research Report
  • [Presentation] CVDグラフェン上のRFスパッタc軸配向ScAlN薄膜の圧電特性2019

    • Author(s)
      天野凌輔、柳谷隆彦
    • Organizer
      第80回応用物理学会秋季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] 自立構造エピタキシャル PbTiO3薄片の共振特性と温度特性2019

    • Author(s)
      松田友佳、柳谷隆彦
    • Organizer
      第80回応用物理学会秋季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] YbAlN圧電薄膜のUHF帯における電気機械結合係数kt2の増幅2019

    • Author(s)
      木原流唯、柳谷隆彦
    • Organizer
      第80回応用物理学会秋季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] レクテナ昇圧素子に向けた傾斜反転ScAlN圧電薄膜HBAR型トランス2019

    • Author(s)
      木下紗里那、柳谷隆彦
    • Organizer
      第80回応用物理学会秋季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] Estimation of the mechanical Q factor of the piezoelectric film without removing substrate2019

    • Author(s)
      S. Kinoshita and T. Yanagitani
    • Organizer
      International Workshop on Piezoelectric Materials and Applications in Actuators (IWPMA2019)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] ScAlN thin film stack for BAW transformer in rectifying antenna2019

    • Author(s)
      S. Kinoshita and T. Yanagitani
    • Organizer
      International Workshop on Piezoelectric Materials and Applications in Actuators (IWPMA2019)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] レクテナ昇圧回路への応用を目指したc軸ジグザグ傾斜ScAlN圧電薄膜トランス2019

    • Author(s)
      柳谷隆彦
    • Organizer
      弾性波素子技術第150委員会第158回委員会
    • Related Report
      2019 Annual Research Report
  • [Presentation] ScAlN Polarization Inverted Resonators and Enhancement of Kt2 in New YbAlN Materials for BAW Devices2019

    • Author(s)
      T. Yanagitani
    • Organizer
      2019 IEEE International Ultrasonics
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] A Method for Extracting Mechanical Q Factor of the Piezoelectric Film without Etching Substrate2019

    • Author(s)
      S. Kinoshita and T. Yanagitani
    • Organizer
      2019 IEEE International Ultrasonics
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Shear Mode Polarity Inverted ScAlN Multilayer for Application to BAW Transformer in Rectifying Antenna2019

    • Author(s)
      S. Kinoshita and T. Yanagitani
    • Organizer
      2019 IEEE International Ultrasonics
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] A Method to Estimate Kt2 of Piezoelectric Films from the Change of Lattice Strain by XRD without Removing Substrate2019

    • Author(s)
      T. Soutome and T. Yanagitani
    • Organizer
      2019 IEEE International Ultrasonics
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Effect of Negative Ions Generation from Sputtering Target on Crystalline Orientation and Kt2 of ScAlN Thin Films2019

    • Author(s)
      R. Kihara and T. Yanagitani
    • Organizer
      2019 IEEE International Ultrasonics
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Ion Beam Induced A-Axis In-Plane Oriented C-Axis Oriented AlN Thin Film Growth for High-Q BAW Resonator Application2019

    • Author(s)
      C. Masamune and T. Yanagitani
    • Organizer
      2019 IEEE International Ultrasonics
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 5Gのスマートフォン向けフィルタ(BAW filter)の薄膜材料2019

    • Author(s)
      柳谷隆彦
    • Organizer
      粉体粉末冶金協会2019年度秋季大会
    • Related Report
      2019 Annual Research Report
    • Invited
  • [Presentation] c軸配向ZnO薄膜成長におけるZn面またはO面極性制御および分極反転多層圧電デバイスへの応用2019

    • Author(s)
      間島毅、柳谷隆彦
    • Organizer
      粉体粉末冶金協会2019年度秋季大会
    • Related Report
      2019 Annual Research Report
  • [Presentation] 巨大圧電性ScAlN厚膜の成長および粉体化による結晶構造解析2019

    • Author(s)
      白寧蕊、柳谷隆彦
    • Organizer
      粉体粉末冶金協会2019年度秋季大会
    • Related Report
      2019 Annual Research Report
  • [Presentation] ウエハ付き状態の圧電薄膜のBAWフィルタ向け評価法およびScAlN薄膜成長のノウハウ2019

    • Author(s)
      柳谷隆彦
    • Organizer
      圧電MEMS研究会第20回研究会
    • Related Report
      2019 Annual Research Report
    • Invited
  • [Presentation] Polarization inverted ScAlN films and new high kt2 YbAlN films for BAW device applications2019

    • Author(s)
      Y. Mazda and T. Yanagitani
    • Organizer
      The 13th Pacific Rim Conference of Ceramic Societies (PACRIM13)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Giant piezoelectricity and temperature characteristics of free-standing sputter-epitaxial PbTiO3 plates2019

    • Author(s)
      Y. Mazda and T. Yanagitani
    • Organizer
      The 13th Pacific Rim Conference of Ceramic Societies (PACRIM13)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Improvement of crystalline orientation and kt2 of ScAlN thin films by suppression of negative ions generation from sputtering target2019

    • Author(s)
      R. Kihara, S. Takayanagi and T. Yanagitani
    • Organizer
      The 13th Pacific Rim Conference of Ceramic Societies (PACRIM13)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Measurement of lattice strain change in ScAlN piezoelectric films by XRD for kt 2 estimation without removing substrate2019

    • Author(s)
      T. Sotome and T. Yanagitani
    • Organizer
      The 13th Pacific Rim Conference of Ceramic Societies (PACRIM13)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] BAW type transformer with ScAlN multilayer for rectifying antenna2019

    • Author(s)
      S. Kinoshita and T. Yanagitani
    • Organizer
      The 13th Pacific Rim Conference of Ceramic Societies (PACRIM13)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 自立構造エピタキシャル PbTiO3薄片の高い電気機械結合係数と温度特性2019

    • Author(s)
      松田友佳、柳谷隆彦
    • Organizer
      The 40th Symposium on Ultrasonic Electronics (USE 2019)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] イオンビームアシストスパッタ法による a 軸方向の揃った c 軸配向 ScAlN 薄膜の成長2019

    • Author(s)
      正宗千明、柳谷隆彦
    • Organizer
      The 40th Symposium on Ultrasonic Electronics (USE 2019)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 超高周波帯超音波映像装置用プローブの新しい分極反転圧電薄膜材料2019

    • Author(s)
      柳谷隆彦
    • Organizer
      超音波計測に関する萌芽技術研究会
    • Related Report
      2019 Annual Research Report
    • Invited

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Published: 2019-04-18   Modified: 2024-01-30  

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