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Development of rare-earth oxide based optical amplifiers and lasers integrated on Si by using magnetic light-matter interactions

Research Project

Project/Area Number 19H02207
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Review Section Basic Section 21060:Electron device and electronic equipment-related
Research InstitutionNTT Basic Research Laboratories

Principal Investigator

Xu Xuejun  日本電信電話株式会社NTT物性科学基礎研究所, フロンティア機能物性研究部, 主任研究員 (80593334)

Co-Investigator(Kenkyū-buntansha) 後藤 秀樹  日本電信電話株式会社NTT物性科学基礎研究所, 企画, 所長 (10393795)
俵 毅彦  日本大学, 工学部, 教授 (40393798)
尾身 博雄  大和大学, 理工学部, 教授 (50257218)
澤野 憲太郎  東京都市大学, 理工学部, 教授 (90409376)
稲葉 智宏  日本電信電話株式会社NTT物性科学基礎研究所, フロンティア機能物性研究部, 研究員 (90839119)
Project Period (FY) 2019-04-01 – 2022-03-31
Project Status Completed (Fiscal Year 2021)
Budget Amount *help
¥15,860,000 (Direct Cost: ¥12,200,000、Indirect Cost: ¥3,660,000)
Fiscal Year 2021: ¥3,120,000 (Direct Cost: ¥2,400,000、Indirect Cost: ¥720,000)
Fiscal Year 2020: ¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000)
Fiscal Year 2019: ¥8,840,000 (Direct Cost: ¥6,800,000、Indirect Cost: ¥2,040,000)
Keywords希土類イオン / 光増幅器 / レーザー / シリコンフォトニクス / 光導波路 / ナノ共振器 / Rare-earth oxide / Optical amplifier / Laser / Molecular beam epitaxy / Silicon photonics
Outline of Research at the Start

In this project, monolithic-integrated optical amplifiers and lasers will be demonstrated by using single crystalline rare-earth oxide (REO) epitaxially grown on Si as novel gain medium and high-index subwavelength dielectric resonators with strong magnetic response as novel device structure. Furthermore, electrically driven lasers will also be demonstrated by integrating optically pumped lasers with light emitting diodes as optical pumping source on the same silicon substrate.

Outline of Final Research Achievements

High quality single-crystal rare-earth oxide thin films (Gd2O3 and (ErGd)2O3) have been successfully grown on silicon-on-insulator substrate by using molecular beam epitaxy method. For realization optical amplifiers, a waveguide platform with low loss (2.3 dB/cm) and large optical confinement factor (~42%) has been demonstrated. Through pump-probe measurement, optical signal enhancement up to 24 dB/cm has been obtained in the waveguide and material transparency has been achieved. Microring resonators with high Q-factors have also been demonstrated for realizing lasers. High Q-factor metasurface structures have also been designed for investigation and manipulation of light emission of electric dipole and magnetic dipole transitions of Er3+ ions. Finally, the demonstrated waveguides and resonators have also found to be a promising platform for integrated quantum optical devices.

Academic Significance and Societal Importance of the Research Achievements

シリコン上にモノリシック集積可能な光増幅器とレーザーはシリコンフォトニクスにおいて最も重要かつ実現されてない要素デバイスである。本研究で実証された酸化希土類薄膜材料及びデバイス構造では、これらのデバイスの実現に非常に有望なプラットフォームと言え、モノリシック光集積回路技術に活用できると期待される。

Report

(4 results)
  • 2021 Annual Research Report   Final Research Report ( PDF )
  • 2020 Annual Research Report
  • 2019 Annual Research Report
  • Research Products

    (20 results)

All 2022 2021 2020 2019 Other

All Journal Article (3 results) (of which Int'l Joint Research: 1 results,  Peer Reviewed: 3 results,  Open Access: 2 results) Presentation (15 results) (of which Int'l Joint Research: 6 results,  Invited: 1 results) Remarks (1 results) Patent(Industrial Property Rights) (1 results)

  • [Journal Article] Low-loss erbium-incorporated rare-earth oxide waveguides on Si with bound states in the continuum and the large optical signal enhancement in them2021

    • Author(s)
      Xu Xuejun、Inaba Tomohiro、Tsuchizawa Tai、Ishizawa Atsushi、Sanada Haruki、Tawara Takehiko、Omi Hiroo、Oguri Katsuya、Gotoh Hideki
    • Journal Title

      Optics Express

      Volume: 29 Issue: 25 Pages: 41132-41132

    • DOI

      10.1364/oe.437868

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Epitaxial single-crystal rare-earth oxide in horizontal slot waveguide for silicon-based integrated active photonic devices2020

    • Author(s)
      Xuejun Xu, Viviana Fili, Wojciech Szuba, Masaya Hiraishi, Tomohiro Inaba, Takehiko Tawara, Hiroo Omi, Hideki Gotoh
    • Journal Title

      Optics Express

      Volume: 28 Issue: 10 Pages: 14448-14460

    • DOI

      10.1364/oe.389765

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Nanowire-based telecom-band light-emitting diodes with efficient light extraction2020

    • Author(s)
      Guoqiang Zhang, Dominika Gnatek, Masato Takiguchi, Xuejun Xu, Kouta Tateno, Satoshi Sasaki, Takehiko Tawara, Hideki Gotoh
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 59 Issue: 10 Pages: 105003-105003

    • DOI

      10.35848/1347-4065/abb8b9

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed
  • [Presentation] 167Er3+:Y2SiO5 における零磁場下での通信波長帯 Atomic Frequency Comb 時間多重量子メモリプロトコルの実証2022

    • Author(s)
      安井 翔一郎、平石 真也、石澤 淳、尾身 博雄、稲葉 智宏、Xu Xuejun、鍜治 怜奈、足立 智、俵 毅彦
    • Organizer
      第69回応用物理学会春季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] Er3+:Y2SiO5結晶上における表面弾性波の生成2022

    • Author(s)
      太田 竜一、徐 学俊、稲葉 智宏、眞田 治樹、石澤 淳、俵 毅彦、小栗 克弥、山口 浩司、岡本 創
    • Organizer
      第69回応用物理学会春季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] 167Er3+:Y2SiO5 における Atomic Frequency Comb 多重量子メモリプロトコルの実証2022

    • Author(s)
      安井 翔一郎, 平石 真也, 石澤 淳, 尾身 博雄, 稲葉 智宏, Xuejun Xu, 鍜治 怜奈, 足立 智, 俵 毅彦
    • Organizer
      第 57 回 応用物理学会北海道支部学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] Optical coupling between Er3+ and integrated microring resonators on Si2021

    • Author(s)
      Masaya Hiraishi, Tomohiro Inaba, Xuejun Xu, Haruki Sanada, Tai Tsuchizawa, Atsushi Ishizawa, Takehiko Tawara, Hiroo Omi, Jevon Longdell, Katsuya Oguri, and Hideki Gotoh
    • Organizer
      第82回応用物理学会秋季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] 量子情報プラットフォームとしてのEr添加固体材料の開発2021

    • Author(s)
      俵 毅彦、平石 真也、稲葉 智宏、徐 学俊、太田 竜一、足立 智、尾身 博雄
    • Organizer
      第82回応用物理学会秋季学術講演会
    • Related Report
      2021 Annual Research Report
    • Invited
  • [Presentation] Photoluminescence Enhancement of Erbium Ions in Rare-earth Oxide Thin Films Using Si-based Microring Resonators2021

    • Author(s)
      M. Hiraishi, T. Inaba, X. Xu, H. Sanada, T. Tsuchizawa, A. Ishizawa, T. Tawara, H. Omi, J. Longdell, K. Oguri, and H. Gotoh
    • Organizer
      International Symposium on Novel maTerials and quantum Technologies (ISNTT 2011)
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Optical Signal Enhancement in Er-incorporated Rare-Earth Oxide Waveguides on Si2020

    • Author(s)
      Xuejun Xu、Tomohiro Inaba、Tai Tsuchizawa、Atsushi Ishizawa、Takehiko Tawara、Hiroo Omi、Hideki Gotoh
    • Organizer
      第68回応用物理学会春季学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] Optical absorption and emission of erbium ions in integrated optical waveguides2019

    • Author(s)
      Xuejun Xu, Viviana Fili, Tomohiro Inaba, Takehiko Tawara, Hiroo Omi, and Hideki Gotoh
    • Organizer
      International School and Symposium on Nanoscale Transport and Photonics (ISNTT)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Improvement of the crystallinity of Gd2O3 on by an interface control2019

    • Author(s)
      Tomohiro Inaba, Xuejun Xu, Takehiko Tawara, Hiroo Omi, Hideki Yamamoto, and Hideki Gotoh
    • Organizer
      International School and Symposium on Nanoscale Transport and Photonics (ISNTT)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Horizontal slot waveguides based on epitaxial rare-earth oxide on Si2019

    • Author(s)
      Xuejun Xu, Viviana Fili, Tomohiro Inaba, Takehiko Tawara, Hiroo Omi, and Hideki Gotoh
    • Organizer
      International Conference on Solid State Devices and Materials (SSDM)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Horizontal slot waveguides with strong optical confinement in low refractive index oxide films2019

    • Author(s)
      Xuejun Xu, Tomohiro Inaba, Takehiko Tawara, Hiroo Omi, and Hideki Gotoh
    • Organizer
      Optoelectronics and Communications Conference/International Conferences on Photonics in Switching and Computing (OECC/PSC)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Suppressing interdiffusion of Si in Er-doped CeO2/Si(111) and its impact on the optical property2019

    • Author(s)
      Tomohiro Inaba, Xuejun Xu, Takehiko Tawara, Hiroo Omi, Hideki Yamamoto, and Hideki Gotoh
    • Organizer
      Compound Semiconductor Week (CSW)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Optical Properties of Er-incorporated rare-earth oxide in horizontal slot waveguide2019

    • Author(s)
      徐学俊、Viviana Fili、稲葉智宏、俵毅彦、尾身博雄、後藤秀樹
    • Organizer
      応用物理学会秋季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] Si基板上へのSi/Gd2O3ヘテロ構造のMBE成長2019

    • Author(s)
      Viviana Fili、Wojciech Szuba、徐学俊、稲葉智宏、俵毅彦、尾身博雄、後藤秀樹
    • Organizer
      応用物理学会秋季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] Si基板上に成長したGd2O3の高品質化における成長初期表面状態の重要性2019

    • Author(s)
      稲葉智宏、徐学俊、俵毅彦、尾身博雄、山本秀樹、後藤秀樹
    • Organizer
      応用物理学会秋季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Remarks] 低損失希土類酸化薄膜導波路 及び光信号増強の実現

    • URL

      http://www.brl.ntt.co.jp/J/activities/file/annual_report/Annual_report_2021_J.pdf

    • Related Report
      2021 Annual Research Report
  • [Patent(Industrial Property Rights)] 光導波路2021

    • Inventor(s)
      徐学俊、俵毅彦、土澤泰
    • Industrial Property Rights Holder
      徐学俊、俵毅彦、土澤泰
    • Industrial Property Rights Type
      特許
    • Filing Date
      2021
    • Related Report
      2020 Annual Research Report

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Published: 2019-04-18   Modified: 2023-01-30  

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