Key factors that predominantly affact electrical and mechanical properties of ultrananpcrystalline diamond films

• Project/Area Number: 19H02436
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Review Section: Basic Section 26020:Inorganic materials and properties-related
• Research Institution: Kyushu University
• Principal Investigator: Yoshitake Tsuyoshi 九州大学, 総合理工学研究院, 教授 (40284541)
• Project Period (FY): 2019-04-01 – 2023-03-31
• Project Status: Completed (Fiscal Year 2022)
• Budget Amount: ¥17,420,000 (Direct Cost: ¥13,400,000、Indirect Cost: ¥4,020,000); Fiscal Year 2022: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000); Fiscal Year 2021: ¥5,070,000 (Direct Cost: ¥3,900,000、Indirect Cost: ¥1,170,000); Fiscal Year 2020: ¥5,070,000 (Direct Cost: ¥3,900,000、Indirect Cost: ¥1,170,000); Fiscal Year 2019: ¥5,980,000 (Direct Cost: ¥4,600,000、Indirect Cost: ¥1,380,000)
• Keywords: ナノダイヤモンド / ダイヤモンド / 同軸型アークプラズマ堆積法 / 物理気相成長法 / 硬質被膜 / オーミック電極 / 硬度 / 耐酸腐食性 / ヤング弾性率 / オーミック特性 / 半導体物性 / 機械特性 / 薄膜創製 / 薄膜 / 半導体 / コーティング / レーザーアブレーション法

Outline of Research at the Start

粒径10 nm以下のダイヤモンド微結晶がa-C:Hマトリックス中に無数に存在する構造を持つUNCD膜は，膜中における粒界界面の占める割合が無視できないレベルで大きくなり，その結果単結晶ダイヤモンドともa-C:Hとも異なる新奇な物性を発現する．BおよびNドープによりpおよびn型化がキャリア濃度の制御を含めて可能であり，光電変換材料として有望であることを実証してきた．またDLCの最高硬度に匹敵する60 GPaの高硬度膜を，DLC膜より一桁以上厚い数ミクロンの厚膜を堆積可能であることを実証してきた．特異な物性の発現するキーとなる粒界を含むナノ構造を，化学結合構造の視点から明らかにする．

Outline of Final Research Achievements

Physical properties specific to nanodiamond (ND) films were investigated and the following results were obtained. (1) Hardness of 85 GPa was achieved by applying a negative voltage. (2) We applied near-field Raman spectroscopy to ND films for the first time and demonstrated that Raman scattering light from ND crystal grains can be detected. (3) The conductive ND film was applied to n-type single crystal diamond, and it was demonstrated that the contact resistance was about one order of magnitude smaller than that of conventional Ti-based electrodes and that the interfacial potential was clearly lowered. (4) The acid corrosion resistance was examined by immersing the ND film in boiling mixed acid; while the Ti-based electrode peeled off immediately after the first session, the ND film remained below the initial contact resistance of the Ti-based electrode for 300 hours, demonstrating that the ND film has extremely high acid corrosion resistance.

Academic Significance and Societal Importance of the Research Achievements

同軸型アークプラズマ堆積法でナノダイヤモンド（NCD）膜の成長に唯一成功している。CVD法では結晶サイズを小さくするのが難しいのに対して我々の方法では容易である。数ナノサイズのNCD結晶がアモルファスカーボン（a-C）マトリックス中の存在していることは，化学結合構造の視点からすれば，四面体構造で規則的に配列した部分(NCD結晶)と結合角度がそろっていない部分(a-C)とが混在した状態，すなわち化学結合がナノスケールで変調された状態となっており，バルクとバルクの粒界のように異質なものの境界ではない。無数に内在する粒界の効果を解明することは学術的に極めて意義深い。

Research Products

• [Journal Article] Overcoming the impact of post-annealing on uniformity of diamond (100) Schottky barrier diodes through corrosion-resistant nanocarbon ohmic contacts (2022)
  • Author(s): Sreenath Mylo Valappil, Abdelrahman Zkria, Shinya Ohmagari, and Tsuyoshi Yoshitake
  • Journal Title: Materials Research Express Volume: 9 Issue: 11 Pages: 115901-115901
  • DOI: 10.1088/2053-1591/aca31f
  • Peer Reviewed / Open Access / Int'l Joint Research
• [Journal Article] Corrosion-Resistive and Low Specific Contact Resistance Ohmic Contacts to Semiconducting Diamonds Using Nanocarbon Electrodes (2022)
  • Author(s): Sreenath Mylo Valappil, Abdelrahman Zkria, Shinya Ohmagari, Hiroshi Naragino, Hiromitsu Kato, and Tsuyoshi Yoshitake
  • Journal Title: Physica Status Solidi A Volume: 220 Issue: 3 Pages: 2200627-2200627
  • DOI: 10.1002/pssa.202200627
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Adhesion of Nanodiamond composite films on Ti substrates at Room Temperature via hybrid ion etching gun and coaxial arc plasma deposition (2022)
  • Author(s): Lama Osman, Ali M. Ali, Abdelrahman Zkria1,, Hiroshi Naragino, and Tsuyoshi Yoshitake
  • Journal Title: Applied Physics Express Volume: 15 Issue: 11 Pages: 115004-115004
  • DOI: 10.35848/1882-0786/ac99b6
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Nanocarbon electrodes fabricated by coaxial arc plasma deposition for phosphorus-doped diamond electronics application (2022)
  • Author(s): Sreenath Mylo Valappil, Shinya Ohmagari, Abdelrahman Zkria, Phongsaphak Sittimart, Eslam Abubakr, Hiromitsu Kato, and Tsuyoshi Yoshitake
  • Journal Title: AIP Advances Volume: 12 Issue: 8 Pages: 85007-85007
  • DOI: 10.1063/5.0093470
  • Peer Reviewed / Open Access / Int'l Joint Research
• [Journal Article] Formation of p-n+ diamond homojunctions by shallow doping of phosphorus through liquid emersion excimer laser irradiation (2022)
  • Author(s): Eslam Abubakr, Shinya Ohmagari, Abdelrahman Zkria, Hiroshi Ikenoue, Julien Pernot, and Tsuyoshi Yoshitake
  • Journal Title: Materials Research Letters Volume: 10 Issue: 10 Pages: 666-674
  • DOI: 10.1080/21663831.2022.2083457
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Impact of Laser‐Induced Graphitization on Diamond Schottky Barrier Diodes (2022)
  • Author(s): Iwao Tomoki、Sittimart Phongsaphak、Yoshitake Tsuyoshi、Umezawa Hitoshi、Ohmagari Shinya
  • Journal Title: physica status solidi (a) Volume: - Issue: 20 Pages: 2100846-2100846
  • DOI: 10.1002/pssa.202100846
  • Peer Reviewed / Open Access / Int'l Joint Research
• [Journal Article] Laser-induced novel ohmic contact formation for effective charge collection in diamond detectors (2022)
  • Author(s): Abubakr Eslam、Ohmagari Shinya、Zkria Abdelrahman、Ikenoue Hiroshi、Yoshitake Tsuyoshi
  • Journal Title: Materials Science in Semiconductor Processing Volume: 139 Pages: 106370-106370
  • DOI: 10.1016/j.mssp.2021.106370
  • Peer Reviewed / Open Access / Int'l Joint Research
• [Journal Article] Correlated Electrical Conductivities to Chemical Configurations of Nitrogenated Nanocrystalline Diamond Films (2022)
  • Author(s): Zkria Abdelrahman、Gima Hiroki、Abubakr Eslam、Mahmoud Ashraf、Haque Ariful、Yoshitake Tsuyoshi
  • Journal Title: Nanomaterials Volume: 12 Issue: 5 Pages: 854-854
  • DOI: 10.3390/nano12050854
  • Peer Reviewed / Open Access / Int'l Joint Research
• [Journal Article] Effects of substrate temperature and intermediate layer on adhesion, structural and mechanical properties of coaxial arc plasma deposition grown nanodiamond composite films on Si substrates (2021)
  • Author(s): Ali Ali M.、Egiza Mohamed、Murasawa Koki、Sugita Hiroaki、Deckert-Gaudig Tanja、Deckert Volker、Yoshitake Tsuyoshi
  • Journal Title: Surface and Coatings Technology Volume: 417 Pages: 127185-127185
  • DOI: 10.1016/j.surfcoat.2021.127185
  • Peer Reviewed / Open Access / Int'l Joint Research
• [Journal Article] Diamond/β-Ga2O3 pn heterojunction diodes fabricated by low-temperature direct-bonding (2021)
  • Author(s): Sittimart Phongsaphak、Ohmagari Shinya、Matsumae Takashi、Umezawa Hitoshi、Yoshitake Tsuyoshi
  • Journal Title: AIP Advances Volume: 11 Issue: 10 Pages: 105114-105114
  • DOI: 10.1063/5.0062531
  • Peer Reviewed / Open Access / Int'l Joint Research
• [Journal Article] Highly Conductive Layers Formation on Singlecrystalline Diamond (2021)
  • Author(s): Eslam Abubakr，Hiroshi Ikenoue，Tsuyoshi Yoshitake
  • Journal Title: NEW DIAMOND Volume: 143 Pages: 16-17
  • Int'l Joint Research
• [Journal Article] Near- and Far-Field Raman Spectroscopic Studies of Nanodiamond Composite Films Deposited by Coaxial Arc Plasma (2020)
  • Author(s): Ali M. Ali, Tanja Deckert-Gaudig, Mohamed Egiza, Volker Deckertc, and Tsuyoshi Yoshitake
  • Journal Title: Applied Physics Letters Volume: 116 Issue: 4 Pages: 041601-041601
  • DOI: 10.1063/1.5142198
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Electrochemical Detection Characteristics of the Composite Films of Boron-doped Nanocrystalline Diamond and Amorphous Carbon Prepared using the Coaxial Arc Plasma Deposition Method (2020)
  • Author(s): Takeshi Hara, Hiroki Hashiguchi, Masumi Ogishima, Daisuke Fujimoto, Tsuyoshi Yoshitake
  • Journal Title: IEEJ Transactions on Electrical and Electronic Engineering Volume: 15 Issue: 7 Pages: 1121-1122
  • DOI: 10.1002/tee.23157
  • Peer Reviewed
• [Journal Article] Influence of adhesion intermediate layers on the stability of nanodiamond composite films deposited on Si substrates by coaxial arc plasma (2020)
  • Author(s): Ali M. Ali, Mohamed Egiza, Koki Murasawa, Hiroaki Sugita, Tanja Deckert-Gaudig, Volker Deckert, and Tsuyoshi Yoshitake
  • Journal Title: Applied Physics Express Volume: 13 Pages: 065506-065506
  • DOI: 10.35848/1882-0786/ab91d1
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Analysis of electrical characteristics of Pd/n-nanocarbon/p-Si heterojunction diodes: by C-V-f and G/w-V-f (2020)
  • Author(s): Abdelrahamn Zkria, Eslam Abubakr, Phongsaphak Sittimartt and Tsuyoshi Yoshitake
  • Journal Title: Journal of Nanomaterials Volume: 2020 Pages: 4917946-4917946
  • DOI: 10.1155/2020/4917946
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Impedance spectroscopy analysis of n-type (nitrogen-doped) ultrananocrystalline diamond/p-type Si heterojunction diodes (2020)
  • Author(s): Zkria Abdelrahman, Mahmoud Shaban, Abubakr Eslam, and Tsuyoshi Yoshitake
  • Journal Title: Physica Scripta Volume: 95 Issue: 9 Pages: 095803-095803
  • DOI: 10.1088/1402-4896/aba97e
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Spin-Valve Effects in Fe/N-Doped Carbon/Fe3Si Trilayered Films (2020)
  • Author(s): Takuya Sakai, Takeru Hamasaki, Kazuki Kudo, Ken-ichiro Sakai, Hiroyuki Deguchi, and Tsuyoshi Yoshitake
  • Journal Title: JJAP Conf. Proc. Volume: 8 Pages: 011202-011202
  • DOI: 10.7567/jjapcp.8.011202
  • Peer Reviewed
• [Journal Article] Monitoring laser-induced structural evolution of hydrogenated nanodiamond composite films prepared by coaxial arc plasma deposition (2020)
  • Author(s): Abdelrahman Zkria, Mohamed Egiza, Ariful Haque, Eslam Abubakr, Jagdish Narayan, and Tsuyoshi Yoshitake
  • Journal Title: Applied Physics Express Volume: 13 Issue: 10 Pages: 105503-105503
  • DOI: 10.35848/1882-0786/abb871
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Temperature-Dependent Impedance Spectra of Nitrogen-Doped Ultrananocrystalline Diamond Films Grown on Si Substrates (2020)
  • Author(s): Mahmoud SHABAN, Abdelrahman ZKRIA, and Tsuyoshi YOSHITAKE
  • Journal Title: IEEE Access Volume: 9 Pages: 896-904
  • DOI: 10.1109/access.2020.3046969
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Laser-Induced Phosphorus-Doped Conductive Layer Formation on Single-crystal Diamond Surfaces (2020)
  • Author(s): Eslam Abubakr, Abdelrahman Zkria, Shinya Ohmagari, Yuki Katamune, Hiroshi Ikenoue, and Tsuyoshi Yoshitake
  • Journal Title: ACS Applied Materials & Interfaces Volume: 12 Issue: 51 Pages: 57619-57626
  • DOI: 10.1021/acsami.0c18435
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Optical and structural characterization of ultrananocrystalline diamond/hydrogenated amorphous carbon composite films deposited via coaxial arc plasma (2019)
  • Author(s): Abdelrahman Zkria, Fouad Abdel-Wahab, Yuki Katamune, Tsuyoshi Yoshitake
  • Journal Title: Curr. Appl. Phys. Volume: 19 Issue: 2 Pages: 143-148
  • DOI: 10.1016/j.cap.2018.11.012
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Temperature Dependence of Alternating Current Impedance in n-Type Si/B-doped p-Type Ultrananocrystalline Diamond Heterojunctions Produced through Pulsed Laser Deposition (2019)
  • Author(s): Rawiwan Chaleawpong, Nathaporn Promros, Peerasil Charoenyuenyao, Takanori Hanada, Shinya Ohmagari, and Tsuyoshi Yoshitake
  • Journal Title: Journal of Nanoscience and Nanotechnology Volume: 19 Issue: 3 Pages: 1567-1573
  • DOI: 10.1166/jnn.2019.16232
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Electrical properties of boron-incorporated ultrananocrystalline diamond/hydrogenated amorphous carbon composite films (2019)
  • Author(s): Katamune Yuki、Takeichi Satoshi、Ohtani Ryota、Koizumi Satoshi、Ikenaga Eiji、Kamitani Kazutaka、Sugiyama Takeharu、Yoshitake Tsuyoshi
  • Journal Title: Applied Physics A Volume: 125 Issue: 5 Pages: 295-295
  • DOI: 10.1007/s00339-019-2607-8
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Formation of low resistivity layers on singlecrystalline diamond by excimer laser irradiation (2019)
  • Author(s): Abubakr Eslam、Zkria Abdelrahman、Katamune Yuki、Ohmagari Shinya、Imokawa Kaname、Ikenoue Hiroshi、Yoshitake Tsuyoshi
  • Journal Title: Diamond and Related Materials Volume: 95 Pages: 166-173
  • DOI: 10.1016/j.diamond.2019.04.013
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Negative Bias Effects on Deposition and Mechanical Properties of Ultrananocrystalline Diamond/Amorphous Carbon Composite Films Deposited on Cemented Carbide Substrates by Coaxial Arc Plasma (2019)
  • Author(s): Ali M. Ali, Mohamed Egiza, Koki Murasawa, Yasuo Fukui, Hidenobu Gonda, Masatoshi Sakurai, and Tsuyoshi Yoshitake
  • Journal Title: Diamond and Related Materials Volume: 96 Pages: 67-73
  • DOI: 10.1016/j.diamond.2019.04.031
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Enhanced hardness of nanocarbon films deposited on cemented tungsten carbide substrates by coaxial arc plasma deposition owing to employing silicon-doped graphite targets (2019)
  • Author(s): Mohamed Egiza, Kouki Murasawa, Ali M. Ali, Yasuo Fukui, Hidenobu Gonda, and Masatoshi Sakurai, and Tsuyoshi Yoshitake
  • Journal Title: Japanese Journal of Applied Physics Volume: 58 Issue: 7 Pages: 075507-075507
  • DOI: 10.7567/1347-4065/ab289f
  • NAID: 210000156606
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Laser-induced structure transition of diamond-like carbon coated on cemented carbide and formation of reduced graphene oxide (2019)
  • Author(s): Zkria Abdelrahman、Haque Ariful、Egiza Mohamed、Abubakr Eslam、Murasawa Koki、Yoshitake Tsuyoshi、Narayan Jagdish
  • Journal Title: MRS Communications Volume: 9 Issue: 3 Pages: 910-915
  • DOI: 10.1557/mrc.2019.88
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Characteristics of Electrochemical Electrodes Containing Composite Films of Boron-doped Nanocrystalline Diamond and Amorphous Carbon Prepared using a Coaxial arc Plasma Deposition Method (2019)
  • Author(s): TAKESHI HARA, MASAYA ONISHI, TAKUMI TAKENAGA, YUTA INOUE, MASUMI OGISHIMA, DAISUKEFUJIMOTO, TSUYOSHI YOSHITAKE
  • Journal Title: Journal of the Institute of Industrial Applications Engineers Volume: 17 Issue: 3 Pages: 99-105
  • DOI: 10.12792/jiiae.7.99
  • NAID: 40022604561
  • Peer Reviewed
• [Presentation] 同軸型アークプラズマ成膜法による超ナノ微結晶ダイヤモンド電極の作製と電気化学的耐腐食性 (2023)
  • Author(s): 楢木野 宏、長野 里基、橋口 寛生、吉武 剛
  • Organizer: 2023年第70回応用物理学会春季学術講演会、令和５年３月１５～１８日、上智大学四谷キャンパス＋オンライン
• [Presentation] Influence of negative bias voltages on mechanical and structural properties of nanodiamond composite films on Ti substrates (2023)
  • Author(s): Lama Osman Mohamed、Abdelrahman Zkria、Ali M Ali、Hiroshi Naragino、Tsuyoshi Yoshitake
  • Organizer: The 70th JSAP Spring Meeting 2023, March 15-18, 2023, Yotsuya Campus, Sophia University + online
• [Presentation] Application of nanosecond laser annealing to diamond materials (2023)
  • Author(s): Abdelrahman Zkria Ahmed、Eslam Abubakr、Tsuyoshi Yoshitake
  • Organizer: The 70th JSAP Spring Meeting 2023, March 15-18, 2023, Yotsuya Campus, Sophia University + online
• [Presentation] Low Specific Contact Resistance Nanocarbon Ohmic Contacts Fabricated by Coaxial Arc Plasma Deposition on Semiconducting Diamonds and Their Device Applications (2023)
  • Author(s): Sreenath Mylo Valappil、Shinya Ohmagari、Abdelrahman Zkria、Tsuyoshi Yoshitake
  • Organizer: The 70th JSAP Spring Meeting 2023, March 15-18, 2023, Yotsuya Campus, Sophia University + online
• [Presentation] Fabrication of Nitrogen-doped Ultrananocrystalline Diamond Electrodes on Titanium Substrates Using Interlayer (2022)
  • Author(s): Satoki Nagano, Hiroki Hashiguchi, Lama Osman, Hiroshi Naragino, Abdelrahman Zkria, Tsuyoshi Yoshitake
  • Organizer: The 7th Asian Applied Physics Conference、Nov 26-27, 2022, Oita University
  • Int'l Joint Research
• [Presentation] Durability for Electrochemical Corrosion of Conductive Ultrananocrystalline Diamond Electrodes Prepared by Coaxial Arc Plasma Deposition (2022)
  • Author(s): Hiroki Hashiguchi, Satoki Nagano, Hiroshi Naragino, Tsuyoshi Yoshitake
  • Organizer: The 7th Asian Applied Physics Conference、Nov 26-27, 2022, Oita University
  • Int'l Joint Research
• [Presentation] Visible-light photodetection of N-doped diamond via charge neutralized impurity levels for harsh-environmental implementations (2022)
  • Author(s): Phongsaphak Sittimart, Shiya Ohmagari, Hiroya Nakahara, Hitoshi Umezawa, Hiromitsu Kato, Norio Tokuda, Tsuyoshi Yoshitake
  • Organizer: The 7th Asian Applied Physics Conference、Nov 26-27, 2022, Oita University
  • Int'l Joint Research / Invited
• [Presentation] 同軸型アークプラズマ成膜法によるチタン基板上への窒素ドープ超ナノ微結晶ダイヤモンド電極の作製 (2022)
  • Author(s): 長野 里基，橋口 寛生，楢木野 宏，Abdelrahman Zkia，吉武 剛
  • Organizer: 第13回半導体材料・デバイスフォーラム、令和４年１０月１０日（月）、熊本大学・工学部（ハイブリッド開催）
• [Presentation] 同軸型アークプラズマ成膜法による導電性超ナノ微結晶ダイヤモンド薄膜の電気化学特性 (2022)
  • Author(s): 橋口 寛生、長野 里基、楢木野 宏、吉武 剛
  • Organizer: 2022年度第83回応用物理学会秋季学術講演会、東北大学川内北キャンパス＋オンライン、2022年9月20日～23日
• [Presentation] CAPD法によって成膜されたナノダイヤモンド混相膜の構造的・機械的特性に対する負バイアス周波数の影響 (2022)
  • Author(s): 齊藤 誠志郎、アリ モハメド、村澤 功基、楢木野 宏、吉武 剛
  • Organizer: 2022年度第83回応用物理学会秋季学術講演会、東北大学川内北キャンパス＋オンライン、2022年9月20日～23日
• [Presentation] Alternative Carbon-based Ohmic Electrodes for Phosphorus-doped Diamond-electronics Applications (2022)
  • Author(s): Sreenath Mylo Valappil、Shinya Ohmagari、Abdelrahman Zkria、Phongsaphak Sittimart、Eslam Abubakr、Hiromitsu Kato、Tsuyoshi Yoshitake
  • Organizer: 2022年度第83回応用物理学会秋季学術講演会、東北大学川内北キャンパス＋オンライン、2022年9月20日～23日
• [Presentation] チタン基板上への導電性超ナノ微結晶ダイヤモンド薄膜の成膜とその電気化学特性 (2022)
  • Author(s): 楢木野 宏、橋口 寛生、長野 里基、吉武 剛
  • Organizer: 2022年度第83回応用物理学会秋季学術講演会、東北大学川内北キャンパス＋オンライン、2022年9月20日～23日
• [Presentation] 導電性超ナノ微結晶ダイヤモンド薄膜の電気化学への応用 (2022)
  • Author(s): 橋口寛生，楢木野宏，吉武剛
  • Organizer: 第59回化学関連支部合同九州大会，北九州国際会議場，2022年7月2日
• [Presentation] Negative Bias Voltage Enhanced Growth and Mechanical Properties of Nanodiamond Composite Films Deposited by CAPD (2022)
  • Author(s): Ali Mohamed Ali Abdelgawad, Kouki Murasawa, Hiroaki Sugita, Seishiro Saito, Hiroshi Naragino, Tsuyoshi Yoshitake
  • Organizer: 15th International Conference on New Diamond and Nano Carbons (NDNC) 2022, Kanazawa Bunka Hall, Japan, June 5-9, 2022
  • Int'l Joint Research
• [Presentation] Nanodiamond composite film deposited on Titanium substrates using Coaxial Arc Plasma gun for implant applications (2022)
  • Author(s): Lama Osman Abdelbaset, Ali Abdelgawad, Eslam Abubakr, Abdelrahman Zkria, Hiroshi Naragino, Tsuyoshi Yoshitake
  • Organizer: 15th International Conference on New Diamond and Nano Carbons (NDNC) 2022, Kanazawa Bunka Hall, Japan, June 5-9, 2022
  • Int'l Joint Research
• [Presentation] Nanocarbon Electrodes Fabricated by Coaxial Arc Plasma Deposition for Phosphorus-doped Diamond Electronics Application (2022)
  • Author(s): Sreenath Mylo Valappil, Shinya Ohmagari, Abdelrahman Zkria, Phongasaphak Sittimart, Eslam Abubakar, Hiromatsu Kato, Tsuyoshi Yoshitake
  • Organizer: 15th International Conference on New Diamond and Nano Carbons (NDNC) 2022, Kanazawa Bunka Hall, Japan, June 5-9, 2022
  • Int'l Joint Research
• [Presentation] Effective Charge Collection in Diamond Detectors Through Direct OhmicContact Writing by Nanosecond Laser Irradiation (2022)
  • Author(s): Eslam N. H. ABUBAKR, Shinya Ohmagari, Abdelrahman Zkria, Hiroshi Ikenoue, Tsuyoshi Yoshitake
  • Organizer: 15th International Conference on New Diamond and Nano Carbons (NDNC) 2022, Kanazawa Bunka Hall, Japan, June 5-9, 2022
  • Int'l Joint Research
• [Presentation] Fabrication of Ultrananocrystalline Diamond Electrodes on Titanium Substrates by Coaxial Arc Plasma Deposition (2022)
  • Author(s): Hiroshi Naragino, Hiroki Hashiguchi, Lama Abdelbaset, Abdelrahman Zkria, Tsuyoshi Yoshitake
  • Organizer: 15th International Conference on New Diamond and Nano Carbons (NDNC) 2022, Kanazawa Bunka Hall, Japan, June 5-9, 2022
  • Int'l Joint Research
• [Presentation] 同軸型アークプラズマ成膜法による導電性超ナノ微結晶ダイヤモンド電極の作製 (2022)
  • Author(s): 楢木野宏，橋口寛生，吉武剛
  • Organizer: 第69回応用物理学会春季学術講演会，2022年3月22-26日，青山学院大学相模原キャンパス+オンライン開催 22p-P06-11
• [Presentation] Mechanical and structural properties of Si doped nanodiamond composite coatings deposited on cemented carbide (2021)
  • Author(s): H. Naragino, M. Egiza, H. Ohue, A. M. Ali, K. Murasawa, H. Sugita, Y. Fukui, H. Gonda, M. Sakurai, and T. Yoshitake
  • Organizer: International Conference on New Diamond and Nano Carbons 2020/2021 (NDNC2020/2021), June 7-9, 2021, (online). 8A-13
  • Int'l Joint Research
• [Presentation] Polishing of Polycrystalline Diamond Films on WC-Co by KrF-Laser-Induced Surface Modification (2021)
  • Author(s): Y. Katamune, K. Murasawa, T. Kikuchi, T. Yoshitake, and H. Ikenoue
  • Organizer: International Conference on New Diamond and Nano Carbons 2020/2021 (NDNC2020/2021), June 7-9, 2021, (online). 8A-11
  • Int'l Joint Research
• [Presentation] Direct Printing of Low-Resistance Ohmic Contacts to p-type Diamond (100) Through Nanosecond Excimer Laser Irradiation (2021)
  • Author(s): E. N. H. Abubakr, S. Ohmagari, A. Zkria, Y. Katamune, H. Ikenoue, and T. Yoshitake
  • Organizer: International Conference on New Diamond and Nano Carbons 2020/2021 (NDNC2020/2021), June 7-9, 2021, (online). 8A-07
  • Int'l Joint Research
• [Presentation] Nanosecond pulsed laser treatments of diamond like carbon, nanodiamond composite and singlecrystalline diamond (2021)
  • Author(s): A. Z. Ahmed, E. N. Abubakr, M. B. Egiza, A. Haque, J. Narayan, and T. Yoshitake
  • Organizer: International Conference on New Diamond and Nano Carbons 2020/2021 (NDNC2020/2021), June 7-9, 2021, (online). 7A-21
  • Int'l Joint Research
• [Presentation] Structural properties and adhesion enhanced of Nanodiamond Composite Films Deposited on Si Substrates at Room Temperature by Employing Buffer Layer (2021)
  • Author(s): A. Mohamed Ali, M. Egiza, K. Murasawa, H. Sugita, Y. Fukui, H. Gonda, M. Sakurai, and T. Yoshitake
  • Organizer: International Conference on New Diamond and Nano Carbons 2020/2021 (NDNC2020/2021), June 7-9, 2021, (online). II-06-1
  • Int'l Joint Research
• [Presentation] Structural and physical characterization of nanodiamond composite thin films synthesized by pulsed-laser ablation method (review) (2021)
  • Author(s): Lama Osman, Abdelrahman Zkria, and Tsuyoshi Yoshitake
  • Organizer: 7th International Exchange and Innovation Conference on Engineering & Sciences (IEICES 2021), Oct. 21-22, 2021, Kyushu University, Oral.
  • Int'l Joint Research
• [Presentation] Ultrananocrystalline diamond film coated on Titanium substrates by Arc Plasma Deposition Technique for biomedical applications (2021)
  • Author(s): Lama Osman, Abdelrahman Zkria, Hiroshi Naragino and Tsuyoshi Yoshitake
  • Organizer: International Thin Films Conference, National Taipei University of Technology (TACT 2021), Taipei, Taiwan, Nov. 15-18, 2021, Oral (online). D-O-231
  • Int'l Joint Research
• [Presentation] Evaluation of N-type nanodiamond films deposited on p-type silicon for optoelectronic applications (2021)
  • Author(s): Abdelrahman Zkria, and Tsuyoshi Yoshitake
  • Organizer: International Thin Films Conference, National Taipei University of Technology (TACT 2021), Taipei, Taiwan, Nov. 15-18, 2021, Poster (online). C-P-074
  • Int'l Joint Research
• [Presentation] Thermal stability of nanodiamond composite films coated on Silicon and Tungsten carbide substrates by arc plasma deposition method (2021)
  • Author(s): Abdelrahman Zkria, Eslam Abubakr, Ali Mohamed, and Tsuyoshi Yoshitake
  • Organizer: International Thin Films Conference, National Taipei University of Technology (TACT 2021), Taipei, Taiwan, Nov. 15-18, 2021, Oral (online). B-O-73
  • Int'l Joint Research
• [Presentation] p-Type diamond/n-type β-Ga2O3 heterojunctions fabricated using direct-bonding technique (2021)
  • Author(s): Phongsaphak Sittimart, Shinya Ohmagari, Takashi Matsumae, Hitoshi Umezawa, and Tsuyoshi Yoshitake
  • Organizer: 2021 Fall Meeting & Exhibit - The Virtual Experience, Dec 6 - 8, 2021, online EQ19.10.01
  • Int'l Joint Research
• [Presentation] 二酸化炭素の電気化学還元に向けた導電性超ナノ微結晶ダイヤモンド電極の作製 (2021)
  • Author(s): 橋口寛生，楢木野宏，吉武剛
  • Organizer: 2021年（令和3年度）応用物理学会九州支部学術講演会/The 5th Asian Applied Physics Conference (Asian-APC)，2021 年12月4 日(土) ～ 5 日(日)，オンライン開催 4Ap-4
• [Presentation] Direct contact-writing to diamond through nanosecond pulsed laser irradiation (2021)
  • Author(s): Eslam Abubakr, Shinya Ohmagari, Abdelrahman Zkria, Hiroshi Ikenoue, Tsuyoshi Yoshitake
  • Organizer: The 6thAsian Applied Physics Conference(Asian-APC), Dec. 4th to 5th, 2021. Oral
  • Int'l Joint Research
• [Presentation] Nanodiamond composite film coated on Titanium substrates by Arc Plasma Deposition for biomedical applications (2021)
  • Author(s): Lama Osman, Abdelrahman Zkria, Hiroshi Naragino and Tsuyoshi Yoshitake
  • Organizer: The 6thAsian Applied Physics Conference (Asian-APC), Dec. 4th to 5th, 2021, Oral (Online)
  • Int'l Joint Research
• [Presentation] PVD nanodiamond composite hard coatings for cutting tools application: structural, mechanical, and tribological properties (2021)
  • Author(s): Mohamed Egiza, Ali Mohamed Ali, Koki Murasawa, Lama Abdelbaset, Hiroshi Naragino, and Tsuyoshi Yoshitake
  • Organizer: 2021年応用物理学会九州支部学術講演会/The 6th Asian Applied Physics Conference (Asian-APC), Dec. 4-5, 2021, Oral (online, invited). 4Ep-2
  • Int'l Joint Research
• [Presentation] Influence of Negative Bias Frequency on Deposition Processes and Structural Properties of Deposited Nanodiamond Composite Film (2021)
  • Author(s): Ali Mohamed Ali, Koki Murasawa, Hiroaki Sugita, and Tsuyoshi Yoshitake
  • Organizer: 2021年応用物理学会九州支部学術講演会/The 6th Asian Applied Physics Conference (Asian-APC), Dec. 4-5, 2021, Oral (online). 4Dp-5
  • Int'l Joint Research
• [Presentation] 二酸化炭素の電気化学還元に向けた導電性超ナノ微結晶ダイヤモンド電極の作製 (2021)
  • Author(s): 橋口寛生，楢木野宏，吉武剛
  • Organizer: 2021年応用物理学会九州支部学術講演会/The 6th Asian Applied Physics Conference (Asian-APC), Dec. 4-5, 2021, Oral (online). 4Ap-4
• [Presentation] シリコン基板上に成膜されたナノダイヤモンド混相膜の機械的・構造的特性に基板温度及び中間層がもたらす影響 (2021)
  • Author(s): S. Saito，A. M. Ali1，M. Egiza，K. Murasawa，H. Sugita，T. Deckert-Gaudig，Volker Deckrt， and T. Yoshitake
  • Organizer: 2021年応用物理学会九州支部学術講演会/The 6th Asian Applied Physics Conference (Asian-APC), Dec. 4-5, 2021, Oral (online). 4Ap-3
• [Presentation] p-Type diamond/n-type β-Ga2O3 heterojunctions fabricated using direct-bonding technique (2021)
  • Author(s): Phongsaphak Sittimart, Shinya Ohmagari, Takashi Matsumae, Hitoshi Umezawa, and Tsuyoshi Yoshitake
  • Organizer: 2021 MRS Fall Meeting & Exhibit, Dec 6 - 8, 2021, (online). EQ19.10.01
  • Int'l Joint Research
• [Presentation] 窒素ドープ超ナノ微結晶ダイヤモンド電極の作製と CO2還元特性 (2021)
  • Author(s): 橋口寛生，楢木野宏，吉武剛
  • Organizer: 第12回半導体材料・デバイスフォーラム，2021年12月11日（土），オンライン開催 O-10
• [Presentation] Nanodiamond film formation by physical vapor deposition and their applications (2020)
  • Author(s): Tsuyoshi Yoshitake
  • Organizer: Campus Asia EEST Asia 2020 Summer School, Aug 18-28, 2020, online
  • Int'l Joint Research / Invited
• [Presentation] ナノダイヤモンド膜の光電変換素子および硬質被膜への応用 (2020)
  • Author(s): 吉武剛
  • Organizer: 第14 回九州シンクロトロン光研究センター研究成果報告会、令和２年１０月２１日、佐賀市
• [Presentation] Si 上に成膜された接着層を有するナノダイヤモンド混相膜の機械的および構造的特性 (2020)
  • Author(s): S. Saito, H. Ohue, A. M. Ali, M. Egiza, K. Murasawa, H. Sugita, Tanja Deckert-Gaudig, Volker Deckert, T. Yoshitake
  • Organizer: ２ ０ ２ ０ 年（令和２年度）応用物理学会九州支部学術講演会/The 5th Asian Applied Physics Conference (Asian-APC)、2020 年11 月28 日(土) ～ 29 日(日)、オンライン開催
• [Presentation] 同軸型アークプラズマ蒸着法による量子センターを含むナノダイヤモンドの作成 (2020)
  • Author(s): 中原大哉, 森田修平, Sreenath M V, Ali M. Ali, Abdelrahman Zkria, Dong Wang, 坪内信輝, 大曲新矢, 吉武剛
  • Organizer: ２ ０ ２ ０ 年（令和２年度）応用物理学会九州支部学術講演会/The 5th Asian Applied Physics Conference (Asian-APC)、2020 年11 月28 日(土) ～ 29 日(日)、オンライン開催
• [Presentation] 窒素ドープ超ナノ微結晶ダイヤモンドとp型シリコンで構成されるヘテロ結合ダイオードの評価 (2020)
  • Author(s): 岩尾 友貴, Abdelrahman Zkria, 吉武 剛
  • Organizer: ２ ０ ２ ０ 年（令和２年度）応用物理学会九州支部学術講演会/The 5th Asian Applied Physics Conference (Asian-APC)、2020 年11 月28 日(土) ～ 29 日(日)、オンライン開催
• [Presentation] 単結晶ダイヤモンドを用いた横型スピンバルブ素子の評価 (2020)
  • Author(s): 荒巻枚希, 濵崎健, 坂井拓也, 吉武剛, 堺研一郎
  • Organizer: ２ ０ ２ ０ 年（令和２年度）応用物理学会九州支部学術講演会/The 5th Asian Applied Physics Conference (Asian-APC)、2020 年11 月28 日(土) ～ 29 日(日)、オンライン開催
• [Presentation] Mechanical and Structural Properties of Nanodiamond Composite Films Deposited on Si Substrates with Intermediate Layers (2020)
  • Author(s): H. Ohue, A. M. Ali, M. Egiza, K. Murasawa, H. Sugita, Tanja Deckert-Gaudig, Volker Deckert, T. Yoshitake
  • Organizer: The 5th Asian Applied Physics Conference (Asian-APC), Nov 28-29, 2020, online
  • Int'l Joint Research
• [Presentation] Laser-Induced heavy-doping for forming ohmic contacts (2020)
  • Author(s): Eslam Abubakr, Abdelrahman Zkria, Shinya Ohmagari, Yuki Katamune, Hiroshi Ikenoue, Tsuyoshi Yoshitake
  • Organizer: The 5th Asian Applied Physics Conference (Asian-APC), Nov 28-29, 2020, online
  • Int'l Joint Research
• [Presentation] Quantum Centers in Nanocrystalline Diamond Prepared by Coaxial Arc Plasma Deposition (2020)
  • Author(s): Shuhei Morita, Sreenath M V, Hiroya Nakahara, Ali M. Ali, Abdelrahman Zkria, Dong Wang, Tsuyoshi Yoshitake, Nobuteru Tsubouchi, Shinya Ohmagari
  • Organizer: The 5th Asian Applied Physics Conference (Asian-APC), Nov 28-29, 2020, online
  • Int'l Joint Research
• [Presentation] Negative Bias Frequency Effects on Structural and Mechanical Properties of Nanodiamond Composite Films Deposited by Coaxial Arc Plasma (2020)
  • Author(s): Ali Mohamed Ali, Mohamed Egiza, Koki Murasawa, Hiroaki Sugita, Tsuyoshi Yoshitake
  • Organizer: The 5th Asian Applied Physics Conference (Asian-APC), Nov 28-29, 2020, online
  • Int'l Joint Research
• [Presentation] Formation of Nitrogen and Silicon Quantum Centers in Nanodiamonds using Coaxial Arc Plasma Deposition (2020)
  • Author(s): Sreenath Mylo Valappil, Shuhei Morita, Hiroya Nakahara, Abdelrahman Zkria, Ali Mohamed Ali, Dong Wang, Nobuteru Tsubouchi, Shinya Ohmagari, Tsuyoshi Yoshitake
  • Organizer: The 5th Asian Applied Physics Conference (Asian-APC), Nov 28-29, 2020, online
  • Int'l Joint Research
• [Presentation] Evaluations of Lateral-Type Spinvalve Junctions Comprising Singlecrystalline Diamond (2020)
  • Author(s): T. Hamasaki, S. Ohmagari, K. Aramaki, T. Sakai, H. Ikenoue, K. Sakai, T. Yoshitake
  • Organizer: The 5th Asian Applied Physics Conference (Asian-APC), Nov 28-29, 2020, online
  • Int'l Joint Research
• [Presentation] MECHANICAL AND STRUCTURAL PROPERTIES OF NANODIAMOND COMPOSITE FILMS DEPOSITED ON Si SUBSTRATES WITH INTERMEDIATE LAYERS (2020)
  • Author(s): Hideki Ohue, Ali M. Ali, Mohamed Egiza, Koki Murasawa, Hiroaki Sugita, Tanja Deckert-Gaudig, Volker Deckert and Tsuyoshi Yoshitake
  • Organizer: The 22nd Cross Straits Symposium on Energy and Environmental Science and Technology (CSS-EEST), Dec 2-3, 2020, online
  • Int'l Joint Research
• [Presentation] FORMATION OF COLOR CENTERS IN NANODIAMONDS USING COAXIAL ARC PLASMA DEPOSITION (2020)
  • Author(s): Shuhei Morita, Sreenath M V, Hiroya Nakahara, Ali M. Ali, Abdelrahman Zkria, Dong Wang, Nobuteru Tsubouchi, Shinya Ohmagari and Tsuyoshi Yoshitake
  • Organizer: The 22nd Cross Straits Symposium on Energy and Environmental Science and Technology (CSS-EEST), Dec 2-3, 2020, online
  • Int'l Joint Research
• [Presentation] FABRICATION AND EVALUATION OF LATERAL TYPE SPINVALVE JUNCTIONS COMPRISING SINGLECRYSTALLINE DIAMOND (2020)
  • Author(s): Takeru Hamasaki, Takuya Sakai, Kazuki Aramaki, Eslam Abubakr, Hiroshi Ikenoue, Shinya Ohmagari, Ken ichiro Sakai and Tsuyoshi Yoshitake
  • Organizer: The 22nd Cross Straits Symposium on Energy and Environmental Science and Technology (CSS-EEST), Dec 2-3, 2020, online
  • Int'l Joint Research
• [Presentation] Shallow boron doping of Singlecrystalline diamond by excimer laser irradiation (2019)
  • Author(s): Eslam Abubakr, Abdelrahman Zkria, Yuki Katamune, Shinya Ohmagari, Kaname Imokawa, Hiroshi Ikenoue, and Tsuyoshi Yoshitake
  • Organizer: The 13th New Diamond and Nano Carbon Conference(NDNC 2019), Taiwan, May 12-17, 2019
  • Int'l Joint Research
• [Presentation] Atomic structures, mechanical, and tribological properties of B-doped ultrananocrystalline diamond/ nonhydrogenated amorphous carbon composite films deposited on cemented carbide (2019)
  • Author(s): M. Egiza, A. M. Ali1, K. Murasawa, Y. Fukui, H. Gonda, M. Sakurai, and T. Yoshitake
  • Organizer: The 13th New Diamond and Nano Carbon Conference(NDNC 2019), Taiwan, May 12-17, 2019
  • Int'l Joint Research
• [Presentation] Application of undoped and Si-doped ultrananocrystalline diamond/amorphous carbon composite films to hard coating on cemented carbide (2019)
  • Author(s): M. Egiza, A. M. Ali1, K. Murasawa, Y. Fukui, H. Gonda, M. Sakurai, and T. Yoshitake
  • Organizer: The 13th New Diamond and Nano Carbon Conference(NDNC 2019), Taiwan, May 12-17, 2019
  • Int'l Joint Research
• [Presentation] Structural and mechanical properties of ultrananocrystalline diamond films deposited on negatively biased substrates by coaxial arc plasma (2019)
  • Author(s): Ali M. Ali, M. Egiza, K. Murasawa, Y. Fukui, H. Gonda, M. Sakurai, and T. Yoshitake
  • Organizer: The 13th New Diamond and Nano Carbon Conference(NDNC 2019), Taiwan, May 12-17, 2019
  • Int'l Joint Research
• [Presentation] Si doping effects on mechanical properties of ultrananocrystalline diamond/ amorphous carbon composite films deposited on cemented carbide (2019)
  • Author(s): M. Egiza, K. Murasawa, A.M. Ali, Y. Fukui, H. Gonda, M. Sakurai, T. Yoshitake
  • Organizer: 30th International conference in Diamond and Carbon materials (ICDCM-2019) , Sep. 8-12, 2019, Melia Lebreros, Seville, Spain
  • Int'l Joint Research
• [Presentation] Structural evolution of nanostructure carbon films by ultrafast pulsed laser annealing (2019)
  • Author(s): A. Zkria, E.Abubakr, T. Yoshitake, J. Narayan
  • Organizer: 30th International conference in Diamond and Carbon materials (ICDCM-2019) , Sep. 8-12, 2019, Melia Lebreros, Seville, Spain
  • Int'l Joint Research
• [Presentation] Boron Doping Effects on Mechanical Properties of Ultrananocrystalline Diamond/Amorphous Carbon Composite Films Deposited on Cemented Carbide Substrates by Coaxial Arc Plasma Deposition (2019)
  • Author(s): Tsuyoshi Yoshitake, Mohamed Egiza, Kouki Murasawa, Ali M. Ali, Yasuo Fukui, Hidenobu Gonda, and Masatoshi Sakurai
  • Organizer: 2019年第80回応用物理学会秋季学術講演会，令和元年９月１８-２１日，北海道大学札幌キャンパス
• [Presentation] Laser-induced conductive layer on singlecrystalline diamond (2019)
  • Author(s): Tsuyoshi Yoshitake, Eslam Abubakr, Abdelrahman Zkria, Yuki Katamune, Shinya Ohmagari, Kaname Imokawa, and Hiroshi Ikenoue
  • Organizer: 2019年第80回応用物理学会秋季学術講演会，令和元年９月１８-２１日，北海道大学札幌キャンパス
• [Presentation] ナノダイヤモンド膜の硬質被膜への応用 (2019)
  • Author(s): 吉武 剛，エギザ モハメド，村澤功基，アリ モハメド アリ，杉田博昭，福井康雄，権田英修，櫻井正俊
  • Organizer: 第33回ダイヤモンドシンポジウム，2019 年11 月13 日(水)～15 日(金)，東京工業大学大岡山キャンパス
• [Presentation] Ultrafast pulsed laser irradiation on amorphous carbon and singlecrystalline diamond (2019)
  • Author(s): Abdelrahman Zkria, Tsuyoshi Yoshitake, Eslam Abubakr, Jagdish Narayan
  • Organizer: JSAP Kyushu Chapter Annual Meeting 2019 /The 4th Asian Applied Physics Conference (Asian-APC), Nov 23-24, 2019, Kumamoto Univ
  • Int'l Joint Research
• [Presentation] Bias effects on deposition and mechanical properties of nanodiamond composite films deposited by coaxial arc plasma (2019)
  • Author(s): Ali Mohamed Ali, Mohamed Egiza, Koki Murasawa, Yasuo Fukui, Hidenobu Gonda, Masatoshi Sakurai, Tsuyoshi Yoshitake
  • Organizer: JSAP Kyushu Chapter Annual Meeting 2019 /The 4th Asian Applied Physics Conference (Asian-APC), Nov 23-24, 2019, Kumamoto Univ
  • Int'l Joint Research
• [Presentation] Laser induced conductive layers on surface of singlecrystalline diamond (2019)
  • Author(s): Eslam Abubakr, Abdelrahman Zkria, Shinya Ohmagari, Yuki Katamune, Hiroshi Ikenoue, Tsuyoshi Yoshitake
  • Organizer: JSAP Kyushu Chapter Annual Meeting 2019 /The 4th Asian Applied Physics Conference (Asian-APC), Nov 23-24, 2019, Kumamoto Univ
  • Int'l Joint Research
• [Presentation] Mechanical and structural properties of Si doped nanodiamond composite films coatings deposited on cemented carbide (2019)
  • Author(s): H.Ohue, M.Egiza, A.M.Ali, K.Murasawa, Y.Fukui, H.Gonda, M.Sakurai, T.Yoshitake
  • Organizer: JSAP Kyushu Chapter Annual Meeting 2019 /The 4th Asian Applied Physics Conference (Asian-APC), Nov 23-24, 2019, Kumamoto Univ
  • Int'l Joint Research
• [Remarks] 九州大学大学院 総合理工学研究院 エネルギー科学部門 吉武研究室
  • URL: http://yoshitake.private.coocan.jp/univ_lab/index-j.htm
• [Remarks] 吉武研究室、九州大学大学院総合理工学研究院エネルギー科学部門
  • URL: http://yoshitake.private.coocan.jp/univ_lab/index-j.htm
• [Remarks] 九州大学 総合理工学研究院 エネルギー科学部門 吉武研究室
  • URL: http://yoshitake.private.coocan.jp/univ_lab/index-j.htm
• [Patent(Industrial Property Rights)] 硬質炭素被膜成膜装置 (2020)
  • Inventor(s): 村澤功基、吉武剛、アリ モハメド アリ
  • Industrial Property Rights Holder: オーエスジー(株)、九州大学
  • Industrial Property Rights Type: 特許
  • Industrial Property Number: 2020-186197
  • Filing Date: 2020
• [Patent(Industrial Property Rights)] 複合硬質炭素被膜、複合硬質炭素被膜被覆工具、および複合硬質炭素被膜の製造方法 (2019)
  • Inventor(s): 村澤功基、吉武剛、アリ モハメド アリ
  • Industrial Property Rights Holder: 九州大学、オーエスジー（株）
  • Industrial Property Rights Type: 特許
  • Filing Date: 2019
  • Overseas