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Material designs of micro gas sensors for selective detection in ppt level.

Research Project

Project/Area Number 19H02437
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Review Section Basic Section 26020:Inorganic materials and properties-related
Research InstitutionKyushu University

Principal Investigator

Shimanoe Kengo  九州大学, 総合理工学研究院, 教授 (10274531)

Co-Investigator(Kenkyū-buntansha) 渡邉 賢  九州大学, 総合理工学研究院, 准教授 (90552480)
末松 昂一  九州大学, 総合理工学研究院, 助教 (90637555)
Project Period (FY) 2019-04-01 – 2022-03-31
Project Status Completed (Fiscal Year 2021)
Budget Amount *help
¥18,070,000 (Direct Cost: ¥13,900,000、Indirect Cost: ¥4,170,000)
Fiscal Year 2021: ¥2,990,000 (Direct Cost: ¥2,300,000、Indirect Cost: ¥690,000)
Fiscal Year 2020: ¥2,990,000 (Direct Cost: ¥2,300,000、Indirect Cost: ¥690,000)
Fiscal Year 2019: ¥12,090,000 (Direct Cost: ¥9,300,000、Indirect Cost: ¥2,790,000)
Keywordsガスセンサ / 酸化物半導体 / 高感度 / 高選択性 / ナノ粒子 / レセプタ / MEMS / パルス駆動 / 半導体 / 金属酸化物 / 貴金属 / レセプター / 選択性 / マイクロ素子 / ダブル / パルス加熱 / 超高感度 / 超選択性 / 化学修飾 / 結晶面 / ppt / 水蒸気 / MEMSセンサ / ppt検出
Outline of Research at the Start

本研究は、極めて高い選択性を有するUltra-High-Sensitive(UHS)pptガスセンサを構築するための材料設計指針を構築することを目的としている。本材料設計により、呼気中に含まれているバイオマーカーを検知する小型ガスセンサシステムの構築が可能となり、IoTと連動して早期医療や地域医療に大いに貢献できる。具体的には、「制御結晶面」と「ダブルナノレセプター」の組み合わせた新しいレセプター機能を導入できれば、ガス選択性が飛躍的に高いpptガスセンサが構築できる。

Outline of Final Research Achievements

In this research, we tried to design a superior high sensitivity and selectivity gas sensor by loading two kinds of receptors which had a different function on the n-type semiconductor surface. We evaluated the gas selective detection due to the receptor, the application to an MEMS-type gas sensor, and a double nano receptor to metal oxide. As a result, we clarified that MEMS-type gas sensor showed selective gas detection by special pulse drive method even if non-receptor loading, the MEMS-type gas sensor of Pd-loaded tin oxide cluster could detect 7ppt of toluene as the world's best sensitivity, and the molybdenum oxide receptor could improve with selectivity of ethanol and methanol with sensitivity difference of 200 times.

Academic Significance and Societal Importance of the Research Achievements

本研究は、pptからサブppbレベルの超極微量ガスを高い選択性をもって検知する半導体ガスセンサおよびそのシステムを材料設計を示したものである。これまで半導体ガスセンサの材料設計は申請者が世界を牽引し、世界最高感度およびマイクロ化を達成しており、本研究はこれに高いガス選択性を導入する設計を提示したもので、高い独創性と創造性を有した世界無二のガスセンサと云える。本研究は、工業的なガス検知、生活環境の保全、癌細胞由来のバイオマーカー、新型コロナウィルス感染症由来の呼気、農産物の検疫に関連する極微量ガスなど、様々な応用展開が期待できる。

Report

(4 results)
  • 2021 Annual Research Report   Final Research Report ( PDF )
  • 2020 Annual Research Report
  • 2019 Annual Research Report
  • Research Products

    (46 results)

All 2022 2021 2020 2019 Other

All Int'l Joint Research (2 results) Journal Article (17 results) (of which Int'l Joint Research: 11 results,  Peer Reviewed: 17 results,  Open Access: 17 results) Presentation (19 results) (of which Int'l Joint Research: 16 results,  Invited: 11 results) Book (5 results) Remarks (2 results) Patent(Industrial Property Rights) (1 results)

  • [Int'l Joint Research] Jinlin University(中国)

    • Related Report
      2021 Annual Research Report
  • [Int'l Joint Research] 吉林大学/太原理工大学(中国)

    • Related Report
      2020 Annual Research Report
  • [Journal Article] Amplifying the receptor function on Ba0.9La0.1FeO3-SnO2 composite particle surface for high sensitivity toward ethanol gas sensing2022

    • Author(s)
      Suematsu Koichi、Hiroyama Yuki、Watanabe Ken、Shimanoe Kengo
    • Journal Title

      Sensors and Actuators B: Chemical

      Volume: 354 Pages: 131256-131256

    • DOI

      10.1016/j.snb.2021.131256

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Highly Sensitive Carbon Monoxide Sensor Element with Wide-Range Humidity Resistance by Loading Pd Nanoparticles on SnO2 Surface2022

    • Author(s)
      Suematsu Koichi、Uchiyama Akihito、Watanabe Ken、Shimanoe Kengo
    • Journal Title

      Sensors

      Volume: 22 Issue: 8 Pages: 2934-2934

    • DOI

      10.3390/s22082934

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] MOF-derived Au-NiO/In2O3 for selective and fast detection of toluene at ppb-level in high humid environments2022

    • Author(s)
      Sun Yongjiao、Zhao Zhenting、Suematsu Koichi、Zhang Wenlei、Zhang Wendong、Zhuiykov Serge、Shimanoe Kengo、Hu Jie
    • Journal Title

      Sensors and Actuators B: Chemical

      Volume: 360 Pages: 131631-131631

    • DOI

      10.1016/j.snb.2022.131631

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Highly sensitive isoprene gas sensor using Au-loaded pyramid-shaped ZnO particles2021

    • Author(s)
      Saito Noriko、Haneda Hajime、Watanabe Ken、Shimanoe Kengo、Sakaguchi Isao
    • Journal Title

      Sensors and Actuators B: Chemical

      Volume: 326 Pages: 128999-128999

    • DOI

      10.1016/j.snb.2020.128999

    • Related Report
      2021 Annual Research Report 2020 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] N-pentanol sensor based on ZnO nanorods functionalized with Au catalysts2021

    • Author(s)
      Wang Hongtao、Li Yueyue、Wang Chenchang、Li Yuan、Bai Jihao、liu Yueying、Zhou Linsheng、Liu Fengmin、Shimanoe Kengo、Lu Geyu
    • Journal Title

      Sensors and Actuators B: Chemical

      Volume: 339 Pages: 129888-129888

    • DOI

      10.1016/j.snb.2021.129888

    • Related Report
      2021 Annual Research Report 2020 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Impact of Pd nanoparticle loading method on SnO2 surface for natural gas detection in humid atmosphere2021

    • Author(s)
      Liu Chengcheng、Suematsu Koichi、Uchiyama Akihito、Watanabe Ken、Guo Yanbao、Wang Deguo、Shimanoe Kengo
    • Journal Title

      Journal of Materials Science

      Volume: 56 Issue: 25 Pages: 13975-13988

    • DOI

      10.1007/s10853-021-06214-4

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Sn doping effect on NiO hollow nanofibers based gas sensors about the humidity dependence for triethylamine detection2021

    • Author(s)
      Yang Jiaqi、Han Wenjiang、Ma Jian、Wang Chong、Shimanoe Kengo、Zhang Sumei、Sun Yanfeng、Cheng Pengfei、Wang Yinglin、Zhang Hong、Lu Geyu
    • Journal Title

      Sensors and Actuators B: Chemical

      Volume: 340 Pages: 129971-129971

    • DOI

      10.1016/j.snb.2021.129971

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] High sensitivity and low detection limit of acetone sensor based on NiO/Zn2SnO4 p-n heterojunction octahedrons2021

    • Author(s)
      Zhou Chaoge、Meng Fanqi、Chen Ke、Yang Xueli、Wang Tianshuang、Sun Peng、Liu Fangmeng、Yan Xu、Shimanoe Kengo、Lu Geyu
    • Journal Title

      Sensors and Actuators B: Chemical

      Volume: 339 Pages: 129912-129912

    • DOI

      10.1016/j.snb.2021.129912

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] The gas sensor utilizing polyaniline/ MoS2 nanosheets/ SnO2 nanotubes for the room temperature detection of ammonia2021

    • Author(s)
      Liu Ao、Lv Siyuan、Jiang Li、Liu Fangmeng、Zhao Lianjing、Wang Jing、Hu Xiaolong、Yang Zijie、He Junming、Wang Chenguang、Yan Xu、Sun Peng、Shimanoe Kengo、Lu Geyu
    • Journal Title

      Sensors and Actuators B: Chemical

      Volume: 332 Pages: 129444-129444

    • DOI

      10.1016/j.snb.2021.129444

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Selective Detection of Toluene Using Pulse-Driven SnO2 Micro Gas Sensors2020

    • Author(s)
      Koichi Suematsu, Tokiharu Oyama, Wataru Mizukami, Yuki Hiroyama, Ken Watanabe, Kengo Shimanoe
    • Journal Title

      ACS Applied Electronic Materials

      Volume: 2 Issue: 9 Pages: 2913-2920

    • DOI

      10.1021/acsaelm.0c00547

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Double-Step Modulation of Pulse-Driven Mode for High Performance SnO2 Micro Gas Sensor: Designing the Particles Surface via Rapid Preheating Process2020

    • Author(s)
      Koichi Suematsu, Yuki Hiroyama, Wataru Harano, Wataru Mizukami, Ken Watanabe, Kengo Shimanoe
    • Journal Title

      ACS Sensors

      Volume: 5 Issue: 11 Pages: 3449-3456

    • DOI

      10.1021/acssensors.0c01365

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] One-Trillionth Level Toluene Detection Using Dual-Designed Semiconductor Gas Sensor: Materials and Sensor Driven Designs2020

    • Author(s)
      Koichi Suematsu, Wataru Harano, Shigeto Yamasaki, Ken Watanabe, Kengo Shimanoe
    • Journal Title

      ACS Applied Electronic Materials

      Volume: 2 Issue: 12 Pages: 4122-4126

    • DOI

      10.1021/acsaelm.0c00902

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] High-performance acetone gas sensor based on Ru-doped SnO2 nanofibers2020

    • Author(s)
      Kou Xueying、Meng Fanqi、Chen Ke、Wang Tianshuang、Sun Peng、Liu Fangmeng、Yan Xu、Sun Yanfeng、Liu Fengmin、Shimanoe Kengo、Lu Geyu
    • Journal Title

      Sensors and Actuators B: Chemical

      Volume: 320 Pages: 128292-128292

    • DOI

      10.1016/j.snb.2020.128292

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Rapid and Stably Detection of Carbon Monoxide in Humidity Changed Atmospheres using Clustered In2O3/CuO Nanospheres2020

    • Author(s)
      Yongjiao Sun, Zhenting Zhao, Koichi Suematsu, Pengwei Li, Zhichao Yu, Wendong Zhang, Jie Hu, Kengo Shimanoe
    • Journal Title

      ACS sensors

      Volume: 5 Issue: 4 Pages: 1040-1049

    • DOI

      10.1021/acssensors.9b02557

    • Related Report
      2020 Annual Research Report 2019 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Ultra-High-Sensitive Detection Using Pulse-Heating of MEMS-Type Oxide Semiconductor Gas Sensor: (1) Detection of Toluene in Ppt Level2020

    • Author(s)
      K. Shimanoe, K. Suematsu, K. Watanabe
    • Journal Title

      237th ECS Meeting with the 18th International Meeting on Chemical Sensors (IMCS 2020

      Volume: -

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Ultra-High-Sensitive Detection Using Pulse-Heating of MEMS-Type Oxide Semiconductor Gas Sensor: (2) Detection of Ethanol in Ppb Level By Introducing Oxygen Supplier2020

    • Author(s)
      K. Shimanoe, Y. Hiroyama, K. Suematsu, and K. Watanabe
    • Journal Title

      237th ECS Meeting with the 18th International Meeting on Chemical Sensors (IMCS 2020

      Volume: -

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Ultra-High Sensitive Gas Detection Using Pulse-Driven MEMS Sensor Based on Tin Dioxide2019

    • Author(s)
      Koichi Suematsu, Wataru Harano, Tokiharu Oyama, Nan Ma, Ken Watanabe, Kengo Shimanoe
    • Journal Title

      2019 IEEE International Symposium on Olfaction and Electronic Nose

      Volume: - Pages: 1-3

    • DOI

      10.1109/isoen.2019.8823211

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed / Open Access
  • [Presentation] MoO3をレセプターとするSnO2-MEMSガスセンサの検知特性2022

    • Author(s)
      三田村康平、末松昂一、増本勝司、渡邉 賢、島ノ江憲剛
    • Organizer
      電気化学会第89回大会 The 70th Chemical Sensor Symposium
    • Related Report
      2021 Annual Research Report
  • [Presentation] 加湿下における低濃度メタン検出に向けたSnO2表面へのPd担持法の検討2022

    • Author(s)
      末松昂一、劉 承誠、内山瑛人、渡邉 賢、島ノ江憲剛
    • Organizer
      電気化学会第89回大会 The 70th Chemical Sensor Symposium
    • Related Report
      2021 Annual Research Report
  • [Presentation] New Design of MEMS-Type Gas Sensors Based on SnO22021

    • Author(s)
      Kengo Shimanoe
    • Organizer
      The 8th International Conference on Ceramics(ICC8)
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] SnO2ガスセンサのVOCガス検出特性におけるMoO3担持法の影響2021

    • Author(s)
      三田村康平, 増本勝司, 末松昂一, 渡邉賢, 島ノ江憲剛
    • Organizer
      公益社団法人日本セラミックス協会 第34回秋季シンポジウム
    • Related Report
      2021 Annual Research Report
  • [Presentation] Toward a New Concept for Development of MEMS-Type Gas Sensor2021

    • Author(s)
      Kengo Shimanoe
    • Organizer
      The International Union of Materials Research Societies - International Conference in Asia 2021 (IUMRS-ICA 2021)
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Development of Ultra-High-Sensitive MEMS-type Gas Sensor in ppt Level2021

    • Author(s)
      Kengo Shimanoe
    • Organizer
      The 6th International Conference on Advanced Electromaterials (ICAE 2021)
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] MEMS-type gas sensor toward ultra-high-detection in ppt level2021

    • Author(s)
      Kengo Shimanoe, Koichi Suematsu, Ken Watanabe
    • Organizer
      The 9th International Symposium on Functional Materials (ISFM 2020)
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Ultra-High-Sensitive Detection Using Pulse-Heating of MEMS-Type Oxide Semiconductor Gas Sensor: (1) Detection of Toluene in Ppt Level2020

    • Author(s)
      Kengo Shimanoe, Koichi Suematsu, Ken Watanabe
    • Organizer
      The Electrochemical Society
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Design of Ultra-High-Sensitive Gas Sensors By Combination of Metal Oxides Semiconductor and MEMS2020

    • Author(s)
      Kengo Shimanoe, Koichi Suematsu, Ken Watanabe
    • Organizer
      PRiME 2020
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Ultra-High-Sensitive Detection Using Pulse-Heating of MEMS-Type Oxide Semiconductor Gas Sensor: (1) Detection of Toluene in Ppt Level2020

    • Author(s)
      K. Shimanoe, K. Suematsu, K. Watanabe
    • Organizer
      237th ECS Meeting with the 18th International Meeting on Chemical Sensors (IMCS 2020
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Ultra-High-Sensitive Detection Using Pulse-Heating of MEMS-Type Oxide Semiconductor Gas Sensor: (2) Detection of Ethanol in Ppb Level By Introducing Oxygen Supplier2020

    • Author(s)
      K. Shimanoe, Y. Hiroyama, K. Suematsu, and K. Watanabe
    • Organizer
      237th ECS Meeting with the 18th International Meeting on Chemical Sensors (IMCS 2020
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Ultra-High Sensitive Gas Detection Using Pulse-Driven MEMS Sensor Based on Tin Dioxide2019

    • Author(s)
      Koichi Suematsu, Wataru Harano, Tokiharu Oyama, Nan Ma, Ken Watanabe, Kengo Shimanoe
    • Organizer
      2019 IEEE International Symposium on Olfaction and Electronic Nose
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Ultra-High Sensitive (Ppt) Gas Sensor Based on the Pulse Heating Using MEMS Technique2019

    • Author(s)
      Koichi Suematsu, Wataru Harano, Yuki Hiroyama, Ken Watanabe, Kengo Shimanoe
    • Organizer
      the 8th GOSPEL Workshop. Gas Sensors Based on Semiconducting Metal Oxides
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Consideration for Oxygen Adsorption Species on SnO2 Semiconductor Gas Sensors2019

    • Author(s)
      Kengo Shimanoe, Takaharu Mizukami, Koichi Suematsu, Ken Watanabe
    • Organizer
      the 8th GOSPEL Workshop. Gas Sensors Based on Semiconducting Metal Oxides
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Ultra-high sensitive gas sensor using MEMS device2019

    • Author(s)
      K. Shimanoe, K. Suematsu, K. Watanabe
    • Organizer
      2019 The Korean Ceramic Society Spring Meeting
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] High performance MEMS-type gas sensors2019

    • Author(s)
      K. Shimanoe, K. Suematsu, K. Watanabe
    • Organizer
      The 22nd International Conference on Solid State Ionics
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Ultra-High-Sensitive Gas Detection Using Pulse-heating of MEMS-Type Pd-SnO2 Sensor2019

    • Author(s)
      K. Shimanoe, K. Suematsu, K. Watanabe
    • Organizer
      The 5th International Conference on Advanced Electromaterials
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Ultra-High-Sensitive Detection Using Pulse-heating of MEMS-Type Gas Sensor2019

    • Author(s)
      K. Shimanoe, K. Suematsu, K. Watanabe
    • Organizer
      中国電子学会
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] MEMS -Type Gas Sensor of Pd-Loaded SnO2 for Ultra-High-Sensitive Detection in ppt Level2019

    • Author(s)
      K. Shimanoe, K. Suematsu, K. Watanabe
    • Organizer
      2019 Materials Research Society (MRS)Fall Meeting
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research / Invited
  • [Book] 固体表面キャラクタリゼーション 機能性材料・ナノマテリアルのためのスペクトロスコピー2022

    • Author(s)
      山下 弘巳、吉田 寿雄、田中 庸裕
    • Total Pages
      304
    • Publisher
      講談社
    • ISBN
      9784065261262
    • Related Report
      2021 Annual Research Report
  • [Book] Semiconductor Gas Sensors (Second Edition)2020

    • Author(s)
      Noboru Yamazoe, Kengo Shimanoe
    • Total Pages
      497
    • Publisher
      Elsevier Ltd.
    • Related Report
      2020 Annual Research Report
  • [Book] 薄膜作製応用ハンドブック2020

    • Author(s)
      島ノ江憲剛、末松昂一、渡邉 賢
    • Total Pages
      1570
    • Publisher
      (株)エヌ・ティー・エス
    • Related Report
      2020 Annual Research Report
  • [Book] においのセンシング、分析とその可視化、数値化2020

    • Author(s)
      島ノ江憲剛、末松昂一、渡邉 賢
    • Total Pages
      543
    • Publisher
      技術情報協会
    • ISBN
      9784861048104
    • Related Report
      2020 Annual Research Report
  • [Book] Semiconductor Gas Sensors2020

    • Author(s)
      Noboru Yamazoe, Kengo Shimanoe
    • Total Pages
      510
    • Publisher
      Elsevier
    • ISBN
      9780081025604
    • Related Report
      2019 Annual Research Report
  • [Remarks]

    • URL

      https://www.mm.kyushu-u.ac.jp/lab_03/thesis.html

    • Related Report
      2021 Annual Research Report
  • [Remarks] 九州大学プレスリリース

    • URL

      https://www.kyushu-u.ac.jp/f/34011/18_08_29.pdf

    • Related Report
      2019 Annual Research Report
  • [Patent(Industrial Property Rights)] ガス検出装置2020

    • Inventor(s)
      末松昂一、渡邉 賢、島ノ江憲剛
    • Industrial Property Rights Holder
      フィガロ技研
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2020-074548
    • Filing Date
      2020
    • Related Report
      2020 Annual Research Report

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Published: 2019-04-18   Modified: 2023-01-30  

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