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Edge engineering of atomic-layer semiconductors

Research Project

Project/Area Number 19H02561
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Review Section Basic Section 28030:Nanomaterials-related
Research InstitutionOsaka Prefecture University

Principal Investigator

Nouchi Ryo  大阪府立大学, 工学(系)研究科(研究院), 准教授 (70452406)

Co-Investigator(Kenkyū-buntansha) 永村 直佳  国立研究開発法人物質・材料研究機構, 先端材料解析研究拠点, 主任研究員 (40708799)
Project Period (FY) 2019-04-01 – 2022-03-31
Project Status Completed (Fiscal Year 2021)
Budget Amount *help
¥17,940,000 (Direct Cost: ¥13,800,000、Indirect Cost: ¥4,140,000)
Fiscal Year 2021: ¥2,340,000 (Direct Cost: ¥1,800,000、Indirect Cost: ¥540,000)
Fiscal Year 2020: ¥2,730,000 (Direct Cost: ¥2,100,000、Indirect Cost: ¥630,000)
Fiscal Year 2019: ¥12,870,000 (Direct Cost: ¥9,900,000、Indirect Cost: ¥2,970,000)
Keywords原子層半導体 / 遷移金属ダイカルコゲナイド / 二硫化モリブデン / グラフェン / エッジ終端化 / ダングリングボンド / エッジ状態 / ギャップ内準位 / 多層 / ヒステリシス / 移動度 / 電界効果トランジスタ / フッ素終端 / フェルミ準位ピニング / 膜厚不均一性 / 異常な伝達特性
Outline of Research at the Start

従来のシリコン等の3次元半導体と違い、面内で結合が閉じた2次元構造を有する原子層半導体の場合、ダングリングボンド(以下DB;化学結合の相手を失った状態)は主に端(エッジ)に存在する。エッジ構造自体は1~数原子の幅でしかなくとも、エッジDBが電気的特性に及ぼす悪影響はマイクロメートルスケールに渡る。本研究は、原子層半導体のエッジ状態が電気的特性に与える影響を詳らかにすると共に、異種元素や分子によるエッジ終端化でDB低減を図る。これまでのエッジ終端化研究の根本的な困難(エッジ終端化効果のみを切り分けることができない)を解決することで、「原子層半導体のエッジエンジニアリング」の実現を目指す。

Outline of Final Research Achievements

Atomic layer materials are expected to contribute to the miniaturization of electronic devices, but the miniaturization is expected to be accompanied by narrowing of the atomic layers. In such cases, it is important to terminate the edges with different elements/molecules in order to reduce the deleterious effects of the edges, since the edge effects become larger as the atomic layers become narrower. In this study, field-effect transistors, which are typical electronic devices, were fabricated using thick atomic layer crystals as suitable samples for investigating the edge termination effect. First, by analyzing the basic characteristics of the transistors based on the thick crystal, we clarified the points to be considered when investigating the edge termination effect. Next, based on the results, we conducted edge termination by fluorine plasma treatment and succeeded in obtaining information on the edge termination effect on the transistor characteristics.

Academic Significance and Societal Importance of the Research Achievements

原子層物質は1~数原子の厚みしかないため、表面に吸着した外来原子・分子の影響を強く受ける。従って、エッジ終端化を目指して導入する異種元素や分子がエッジのみに吸着するならば良いが、表面にも付着してしまうと、エッジ終端化効果のみを観測することはできない。これが、原子層物質のエッジ終端化研究の根本的な難しさである。このような状況に対し、本研究では、エッジ終端化効果を表面吸着効果と切り分けて評価する方法論として、分厚い結晶を用いたバックゲート型電界効果トランジスタを用いる手法を試みた。この素子構造では電流の流れる部分が結晶厚さの分だけ表面から離れることを利用し、エッジ終端化効果のみの調査に成功した。

Report

(4 results)
  • 2021 Annual Research Report   Final Research Report ( PDF )
  • 2020 Annual Research Report
  • 2019 Annual Research Report
  • Research Products

    (33 results)

All 2022 2021 2020 2019 Other

All Journal Article (6 results) (of which Peer Reviewed: 6 results,  Open Access: 6 results) Presentation (26 results) (of which Int'l Joint Research: 9 results,  Invited: 4 results) Remarks (1 results)

  • [Journal Article] Field-effect surface chemistry: chemical reactions on two-dimensional materials controlled by field-effect transistor configurations2022

    • Author(s)
      Ryo Nouchi
    • Journal Title

      Nano Express

      Volume: 3 Issue: 2 Pages: 024001-024001

    • DOI

      10.1088/2632-959x/ac603f

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Tolerance against conducting filament formation in nanosheet-derived titania thin films2020

    • Author(s)
      Masaya Sato、Masahiro Hara、Asami Funatsu、Ryo Nouchi
    • Journal Title

      Nano Express

      Volume: 1 Issue: 1 Pages: 010034-010034

    • DOI

      10.1088/2632-959x/ab9024

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Water permeation pathways in laminated organic single-crystal devices2020

    • Author(s)
      Ryo Nouchi、Yoshiaki Ishihara、Susumu Ikeda
    • Journal Title

      AIP Advances

      Volume: 10 Issue: 7 Pages: 075312-075312

    • DOI

      10.1063/5.0009912

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Photochemical reaction on graphene surfaces controlled by substrate-surface modification with polar self-assembled monolayers2020

    • Author(s)
      Nouchi Ryo、Ikeda Kei-ichiro
    • Journal Title

      Physical Chemistry Chemical Physics

      Volume: 22 Issue: 3 Pages: 1268-1275

    • DOI

      10.1039/c9cp05389a

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Staircase-like transfer characteristics in multilayer MoS2 field-effect transistors2020

    • Author(s)
      Ohoka Takuya、Nouchi Ryo
    • Journal Title

      Nano Express

      Volume: 1 Issue: 1 Pages: 010002-010002

    • DOI

      10.1088/2632-959x/ab70e6

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Adsorbates as a charge-carrier reservoir for electrostatic carrier doping to graphene2019

    • Author(s)
      Nouchi Ryo、Ikeda Kei-ichiro
    • Journal Title

      Applied Physics Express

      Volume: 13 Issue: 1 Pages: 015005-015005

    • DOI

      10.7567/1882-0786/ab5e0b

    • NAID

      130008155709

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed / Open Access
  • [Presentation] 酸化イリジウムナノシート超薄膜による室温メタン酸化とその電気的検出2021

    • Author(s)
      野内亮
    • Organizer
      2021年度CREST「革新的触媒」領域公開シンポジウム
    • Related Report
      2021 Annual Research Report
  • [Presentation] ケルビンプローブによるグラフェン上水吸着のカイネティクス測定と基板表面修飾の効果2021

    • Author(s)
      廣瀬巧武、野内亮
    • Organizer
      第82回応用物理学会秋季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] 電界効果トランジスタの動作解析による多層MoS2に対するフッ素プラズマ処理効果の理解2021

    • Author(s)
      木井浩喜、野内亮
    • Organizer
      第82回応用物理学会秋季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] ゾルゲルBaSnO3薄膜FETの不安定性と抵抗変化スイッチング現象2021

    • Author(s)
      前山滉貴、野内亮
    • Organizer
      第82回応用物理学会秋季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] 単一の電流電圧特性を用いた電極接合パラメータの抽出:ルブレン単結晶素子の電荷注入障壁スイッチング現象への適用2021

    • Author(s)
      水上詢、野内亮
    • Organizer
      第82回応用物理学会秋季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] 電界効果トランジスタによる二次元物質表面反応の制御2021

    • Author(s)
      野内亮
    • Organizer
      2021年日本表面真空学会学術講演会
    • Related Report
      2021 Annual Research Report
    • Invited
  • [Presentation] Gate-Controlled Chemical Reactions at Graphene Surfaces2021

    • Author(s)
      Ryo Nouchi、Morihiro Matsumoto、Kei-ichiro Ikeda、Nobuhiko Mitoma
    • Organizer
      The 9th International Symposium on Surface Science
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Electrical monitoring of CH4 oxidation with atomically thin films of IrO2 nanosheets2021

    • Author(s)
      Ryo Nouchi、Yoshiaki Ishihara、Masaya Sato、Wataru Sugimoto
    • Organizer
      2021 International Chemical Congress of Pacific Basin Societies
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 貼り付け有機単結晶FETの水誘起動作不安定性に対するソース・ドレイン電極厚さの効果2021

    • Author(s)
      濱比嘉勇人、野内亮
    • Organizer
      第69回応用物理学会春季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] ELECTRICAL MONITORING OF METHANE OXIDATION USING ATOMICALLY THIN FILMS OF TRANSITION-METAL OXIDE NANOSHEETS2020

    • Author(s)
      Ryo Nouchi、Yoshiaki Ishihara、Masaya Sato、Wataru Sugimoto
    • Organizer
      International Symposium Catalysis Science ? Quo Vadis?
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 電極接合が無い状態でのグラフェンへの電界効果キャリアドーピング2020

    • Author(s)
      野内亮、池田京一郎
    • Organizer
      第81回応用物理学会秋季学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] Operando electrical characterization of methane oxidation with atomically thin films of IrO2 nanosheets2020

    • Author(s)
      野内亮、石原良晃、杉本渉
    • Organizer
      第59回フラーレン・ナノチューブ・グラフェン総合シンポジウム
    • Related Report
      2020 Annual Research Report
  • [Presentation] IrO2ナノシート超薄膜を用いたメタン酸化反応の電気的検出2020

    • Author(s)
      野内亮、石原良晃、杉本渉
    • Organizer
      2020年日本表面真空学会学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] Staircase-Like Transfer Characteristics in Multilayer MoS2 Field-Effect Transistors2020

    • Author(s)
      Takuya Ohoka、Ryo Nouchi
    • Organizer
      The 2nd edition of the 1&2D Materials International Conference and Exhibition (1&2DM 2020)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] グラフェンへの電界効果キャリアドーピングにおける電荷キャリア溜めとしての吸着子の働き2020

    • Author(s)
      野内亮、池田京一郎
    • Organizer
      第67回応用物理学会春季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] 遷移金属酸化物ナノシート単層膜を用いたメタン酸化反応の電気的モニタリング2020

    • Author(s)
      野内亮、石原良晃、杉本渉
    • Organizer
      第58回フラーレン・ナノチューブ・グラフェン総合シンポジウム
    • Related Report
      2019 Annual Research Report
  • [Presentation] グラフェンへの電界効果キャリアドーピングにおける電荷注入層としての吸着子2020

    • Author(s)
      野内亮、池田京一郎
    • Organizer
      日本物理学会第75回年次大会
    • Related Report
      2019 Annual Research Report
  • [Presentation] Gate-controlled chemical reactions at graphene surface2019

    • Author(s)
      Ryo Nouchi
    • Organizer
      6th International Congress on Microscopy and Spectroscopy
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Gate-Controlled Chemical Modification of Graphene2019

    • Author(s)
      Ryo Nouchi、Nobuhiko Mitoma、Morihiro Matsumoto、Kei-ichiro Ikeda
    • Organizer
      2nd European Conference on Chemistry of Two-Dimensional Materials (chem2Dmat)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 遷移金属酸化物ナノシート超薄膜を用いたメタン酸化反応の電気的モニタリング2019

    • Author(s)
      石原良晃、杉本渉、野内亮
    • Organizer
      第80回応用物理学会秋季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] 多層MoS2電界効果トランジスタで観測される階段状の伝達特性2019

    • Author(s)
      大岡拓也、野内亮
    • Organizer
      第80回応用物理学会秋季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] チタニアナノシート膜を用いた抵抗変化型メモリ動作と安定性の評価2019

    • Author(s)
      佐藤匡哉、原正大、船津 麻美、野内亮
    • Organizer
      第80回応用物理学会秋季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] Chemical Modification of Graphene Controlled by Polar Self-Assembled Monolayers2019

    • Author(s)
      Ryo Nouchi、Kei-ichiro Ikeda
    • Organizer
      Recent Progress in Graphene & 2D Materials Research 2019
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Gate-controlled chemical reactions at 2D materials surfaces2019

    • Author(s)
      Ryo Nouchi
    • Organizer
      CA2D: Carrier Doping in two-dimensional layered materials: toward novel physical properties and electronic device applications
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Electrical sensing of methane oxidation with ultrathin films of transition metal oxide nanosheets2019

    • Author(s)
      Yoshiaki Ishihara、Wataru Sugimoto、Ryo Nouchi
    • Organizer
      2019 Materials Research Society Fall Meeting
    • Related Report
      2019 Annual Research Report
  • [Presentation] Gate-controlled chemical reactions at surfaces of two-dimensional materials2019

    • Author(s)
      Ryo Nouchi
    • Organizer
      2nd European conference on Smart Nanomaterials
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research / Invited
  • [Remarks] 研究室ホームページ

    • URL

      http://www.pe.osakafu-u.ac.jp/pe10/

    • Related Report
      2021 Annual Research Report 2020 Annual Research Report

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Published: 2019-04-18   Modified: 2023-01-30  

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