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Micro/Nano Fusion Process based Nanopore Sensing Device for Optical and Electrical Combined Detection

Research Project

Project/Area Number 19H02571
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Review Section Basic Section 28050:Nano/micro-systems-related
Research InstitutionKyoto University of Advanced Science

Principal Investigator

TABATA OSAMU  京都先端科学大学, 工学部, 教授 (20288624)

Co-Investigator(Kenkyū-buntansha) 菅野 公二  神戸大学, 工学研究科, 准教授 (20372568)
山下 直輝  東京理科大学, 理工学部機械工学科, 助教 (50847746)
川合 健太郎  大阪大学, 工学研究科, 助教 (90514464)
Project Period (FY) 2019-04-01 – 2022-03-31
Project Status Completed (Fiscal Year 2021)
Budget Amount *help
¥17,290,000 (Direct Cost: ¥13,300,000、Indirect Cost: ¥3,990,000)
Fiscal Year 2021: ¥5,200,000 (Direct Cost: ¥4,000,000、Indirect Cost: ¥1,200,000)
Fiscal Year 2020: ¥5,720,000 (Direct Cost: ¥4,400,000、Indirect Cost: ¥1,320,000)
Fiscal Year 2019: ¥6,370,000 (Direct Cost: ¥4,900,000、Indirect Cost: ¥1,470,000)
Keywordsナノプロセス / DNA / グラフェン / ナノポアセンシング / SERS
Outline of Research at the Start

提案する光電気複合型ナノポアセンシングデバイスを作製し、サブnmサイズの分子識別と構造変化のセンシングを実証するために、以下の4つのステップで研究を遂行する。
ステップ1:直径5nm程度のナノポアを形成した単層グラフェン自立メンブレンとトンネル電流測定用電極を形成したシリコンデバイス構造の作製
ステップ2:NAナノ構造と金ナノ粒子(AuNP)をセルフアセンブルしたDNA/AuNP複合構造の作製
ステップ3:NA/AuNP複合構造のナノポア/電極基板へのアセンブル
ステップ4:DNAナノ構造除去によるAuNPとトンネル電流測定用電極接合とAuNPナノギャップ形成と提案デバイスの原理検証

Outline of Final Research Achievements

A CVD method using gallium as a liquid metal catalyst was proposed as a direct formation process for freestanding film of monolayer graphene. Nanopore milling was performed on freestanding CVD graphene films using a helium ion microscope. The nanopore fabrication was reproducible with a minimum size of 3.5 nm to freestanding CVD graphene.
As a result of the investigation of the removal process of AuNP surface molecules, it was possible to perform SERS measurements free from noise effects caused by molecules that had previously coated the surface. SERS measurements of single-stranded DNA with AuNP dimers of 200 nm on a substrate were performed. We investigated the possibility of optical single molecule/single base detection and identification of DNA oligomers. Nanogap electrodes were fabricated by nano-wiring on AuNP dimers. Electrical and optical evaluation of the nanogap was performed based on tunneling current and SERS characteristics, respectively.

Academic Significance and Societal Importance of the Research Achievements

液体ガリウム触媒を用いることで常圧CVDにより単層グラフェン自立膜の直接形成を実現した。また、ヘリウムイオン顕微鏡による最小直径1.5nmのナノポア加工と組み合わせることで単一原子厚さを持つセンシング部を構築した。また、DNAナノ構造を使った大粒径AuNPダイマーの形成に成功した。直径200 nmのAuNPダイマーを用いた電気的・光学的なDNAオリゴマー1分子検出の可能性を示した。本研究で得られた成果は、光電気複合型センサデバイスによる新しいDNA計測技術の構築に資するものである。

Report

(4 results)
  • 2021 Annual Research Report   Final Research Report ( PDF )
  • 2020 Annual Research Report
  • 2019 Annual Research Report
  • Research Products

    (32 results)

All 2022 2021 2020 2019 Other

All Journal Article (5 results) (of which Peer Reviewed: 5 results,  Open Access: 1 results) Presentation (23 results) (of which Int'l Joint Research: 16 results,  Invited: 7 results) Remarks (4 results)

  • [Journal Article] Dynamic surface-enhanced Raman spectroscopy of DNA oligomer with a single hotspot of a gold nanoparticle dimer2022

    • Author(s)
      Koji Sugano, Katsunari Maruoka, Kohei Ikegami, Akio Uesugi, Yoshitada Isono
    • Journal Title

      Optics Letters

      Volume: 47 Issue: 2 Pages: 373-376

    • DOI

      10.1364/ol.441580

    • NAID

      120007188915

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Silicon-coated gold nanodiffraction grating structures as plasmonic absorber for short wavelength infrared light2021

    • Author(s)
      Tatsuya Tsubota, Naoyuki Arai, Atsuya Harada, Akio Uesugi, Koji Sugano, Yoshitada Isono
    • Journal Title

      Journal of the Optical Society of America B

      Volume: 38 Issue: 10 Pages: 2863-2872

    • DOI

      10.1364/josab.427768

    • NAID

      120007165706

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Dynamic electrical measurement of biomolecule behavior via plasmonically-excited nanogap fabricated by electromigration2021

    • Author(s)
      Akihiro Morita, Takayuki Sumitomo, Akio Uesugi, Koji Sugano, Yoshitada Isono
    • Journal Title

      Nano Express

      Volume: 2 Issue: 1 Pages: 010032-010032

    • DOI

      10.1088/2632-959x/abe9c0

    • NAID

      120007097074

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Polarization Dependence of Near-infrared Absorption Spectrum of Si-deposited Gold Nano-grating Structures2020

    • Author(s)
      新居直之,上杉晃生,菅野公二,磯野吉正
    • Journal Title

      IEEJ Transactions on Sensors and Micromachines

      Volume: 140 Issue: 4 Pages: 72-78

    • DOI

      10.1541/ieejsmas.140.72

    • NAID

      130007825102

    • ISSN
      1341-8939, 1347-5525
    • Year and Date
      2020-04-01
    • Related Report
      2020 Annual Research Report 2019 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Surface‐enhanced Raman spectroscopy with gold nanoparticle dimers created by sacrificial DNA origami technique2020

    • Author(s)
      Yamashita Naoki、Park Seongsu、Kawai Kentaro、Hirai Yoshikazu、Tsuchiya Toshiyuki、Tabata Osamu
    • Journal Title

      Micro & Nano Letters

      Volume: 15 Issue: 6 Pages: 384-389

    • DOI

      10.1049/mnl.2019.0416

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed
  • [Presentation] Manipulation and detection of a single DNA oligomer using a gold nanoparticle dimer2022

    • Author(s)
      Koji Sugano
    • Organizer
      The 17th International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS2022)
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] ヘリウムイオン顕微鏡でのナノポア形成における加工前処理条件の検討2021

    • Author(s)
      杉田祥吾,野田晃平,有馬健太,山村和也,川合健太郎
    • Organizer
      精密工学会2021年度関西地方定期学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] Fabrication and observation of nanopore in two-dimensional materials using Helium ion microscope2021

    • Author(s)
      Kentaro Kawai
    • Organizer
      34th International Microprocesses and Nanotechnology Conference (MNC 2021)
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Characterization of nanogap with gold nanoparticle dimer controlled by four-point bending for electrical and optical single molecule measurement2021

    • Author(s)
      Yuanzhi Chang, Takayuki Sumitomo, Akio Uesugi, Koji Sugano, Yoshitada Isono
    • Organizer
      34th International Microprocesses and Nanotechnology Conference (MNC 2021)
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] DNA シーケンシングデバイスのためのマイクロ流路を用いたナノピラー/横型ナノポア集積化2021

    • Author(s)
      野田晃平, 辻友希, 杉田祥吾, 山村和也, 有馬健太, 川合健太郎
    • Organizer
      2021年度精密工学会春季大会学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] DNAオリガミを利用したSERS分析用金ナノ粒子二量体の形成とその固定化技術2020

    • Author(s)
      山下直輝
    • Organizer
      第37回「センサ・マイクロマシンと応用システム」シンポジウム
    • Related Report
      2020 Annual Research Report
    • Invited
  • [Presentation] 金ナノ粒子二量体を用いたナノギャップ電極の作製とその電気的・光学的評価2020

    • Author(s)
      住友孝行, 森田明宏, 上杉晃生, 菅野公二, 磯野吉正
    • Organizer
      第37回「センサ・マイクロマシンと応用システム」シンポジウム
    • Related Report
      2020 Annual Research Report
  • [Presentation] Electrical and Optical Characterization of Nanogap Electrodes with an Assembled Gold Nanoparticle Chain2020

    • Author(s)
      T. Sumitomo, A. Morita, A. Uesugi, K. Sugano Y. Isono
    • Organizer
      33rd International Microprocesses and Nanotechnology Conference (MNC2020)
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Reproducible formation of graphene nanopore within 10 nm using helium ion microscope2020

    • Author(s)
      S. Sugita, T. Tsuji, K. Arima, K. Yamamura, K. Kawai
    • Organizer
      8th International Conference on Precision Engineering (ICPE2020)
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Surface-Enhanced Raman Spectroscopy Using Gold Nanoparticle Dimers Formed by DNA Origami as a Sacrificial Nanostructure2020

    • Author(s)
      N. Yamashita
    • Organizer
      The 14th IEEE International Conference on Nano/Molecular Medicine & Engineering
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] DNA origami assembly in gradient tempareture microfluidic channel2019

    • Author(s)
      Kentaro Kawai, Keita Hara, Kenta Arima, Kazuya Yamamura, Osamu Tabata
    • Organizer
      The 14th International Conference on Nano/Micro Engineered and Molecular Systems
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Rapid assembly of DNA origami in microfluidic temperature gradient2019

    • Author(s)
      Kentaro Kawai, Keita Hara, Kenta Arima, Kazuya Yamamura, Osamu Tabata
    • Organizer
      The 20th International Conference on Solid-State Sensors, Actuators and Microsystems
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Freestanding graphene CVD growth on insulating substrate using Ga catalyst2019

    • Author(s)
      Tomoki Tsuji, Kenta Arima, Kazuya Yamamura, and Kentaro Kawai
    • Organizer
      The 23rd International Conference on Miniaturized Systems for Chemistry and Life Sciences
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Surface-Enhanced Raman Spectroscopy with Gold Nanoparticle Dimers Created by Sacrificial DNA Origami Technique2019

    • Author(s)
      Naoki Yamashita, Seongsu Park, Kentaro Kawai, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    • Organizer
      The 14th International Conference on Nano/Micro Engineered and Molecular Systems
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 犠牲DNAオリガミ技術によって形成した金ナノ粒子二量体を用いた表面増強ラマン分光法による分子検出2019

    • Author(s)
      山下直輝,朴晟洙,馬志鵬,川合健太郎,平井義和,土屋智由,田畑修
    • Organizer
      第36回「センサ・マイクロマシンと応用システム」シンポジウム
    • Related Report
      2019 Annual Research Report
  • [Presentation] Manipulation of Biomolecules Into Nanogap by Plasmonic Optical Excitation for Highly Sensitive Biosensing2019

    • Author(s)
      Akihiro Morita, Akio Uesugi, Koji Sugano, and Yoshitada Isono
    • Organizer
      The 20th International Conference on Solid-State Sensors, Actuators and Microsystems
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] SERS Detection of a Single Nucleobase in a DNA Oligomer Using a Gold Nanoparticle Dimer2019

    • Author(s)
      Koji Sugano, Katsunari Maruoka, Akio Uesugi, and Yoshitada Isono
    • Organizer
      The 20th International Conference on Solid-State Sensors, Actuators and Microsystems
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Effect of Gold Nanoparticle Diameter on Raman Intensity of DNA Oligomers toward Single Nucleobase Detection2019

    • Author(s)
      Kenji. Murotani, Katsunari Maruoka, Akio Uesugi, Koji Sugano, Yoshitada Isono
    • Organizer
      32nd International Microprocesses and Nanotechnology Conference
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Surface-Enhanced Raman Spectroscopy of DNA with Single-Molecule Sensitivity Using Gold Nanoparticle Dimer2019

    • Author(s)
      Koji Sugano
    • Organizer
      The 19th IEEE International Conference on Nanotechnology
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Single-molecule Surface Enhanced Raman Spectroscopy Using Gold Nanoparticle Dimer2019

    • Author(s)
      Koji Sugano
    • Organizer
      2019 International Conference on Optical MEMS and Nanophotonics
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] 金ナノ粒子二量体表面増強ラマン分光によるDNAオリゴマーの1塩基検出2019

    • Author(s)
      金谷恭臣,丸岡克成,森田明宏,上杉晃生,菅野公二,磯野吉正
    • Organizer
      第36回「センサ・マイクロマシンと応用システム」シンポジウム
    • Related Report
      2019 Annual Research Report
  • [Presentation] 光励起ナノギャップ電極を用いたDNA オリゴマーの光トラップおよび1分子検出2019

    • Author(s)
      森田明宏,上杉晃生,菅野公二,磯野吉正
    • Organizer
      第36回「センサ・マイクロマシンと応用システム」シンポジウム
    • Related Report
      2019 Annual Research Report
  • [Presentation] DNA as an Engineering Material to Bridge between MEMS and Nanotechnology2019

    • Author(s)
      Osamu Tabata
    • Organizer
      The 19th IEEE International Conference on Nanotechnology
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research / Invited
  • [Remarks] 菅野公二

    • URL

      https://researchmap.jp/read0144548

    • Related Report
      2020 Annual Research Report 2019 Annual Research Report
  • [Remarks] 川合健太郎

    • URL

      https://researchmap.jp/kawai_k

    • Related Report
      2020 Annual Research Report 2019 Annual Research Report
  • [Remarks] 田畑修

    • URL

      https://researchmap.jp/tabata.osamu

    • Related Report
      2020 Annual Research Report
  • [Remarks] 田畑 修

    • URL

      https://researchmap.jp/tabata.osamu

    • Related Report
      2019 Annual Research Report

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Published: 2019-04-18   Modified: 2023-01-30  

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