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Research on identification of diamond dislocations and its reduction

Research Project

Project/Area Number 19H02617
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Review Section Basic Section 30010:Crystal engineering-related
Research InstitutionKwansei Gakuin University

Principal Investigator

Shikata Shinichi  関西学院大学, 工学部, 教授 (00415689)

Co-Investigator(Kenkyū-buntansha) 寺地 徳之  国立研究開発法人物質・材料研究機構, 機能性材料研究拠点, 主席研究員 (50332747)
Project Period (FY) 2019-04-01 – 2022-03-31
Project Status Completed (Fiscal Year 2021)
Budget Amount *help
¥17,550,000 (Direct Cost: ¥13,500,000、Indirect Cost: ¥4,050,000)
Fiscal Year 2021: ¥3,770,000 (Direct Cost: ¥2,900,000、Indirect Cost: ¥870,000)
Fiscal Year 2020: ¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000)
Fiscal Year 2019: ¥9,230,000 (Direct Cost: ¥7,100,000、Indirect Cost: ¥2,130,000)
Keywordsダイヤモンド / 転位 / X線トポグラフィ / パワーデバイス / 結晶転位 / 半導体結晶 / 軽元素 / X線トポグラフィ
Outline of Research at the Start

次世代省エネパワーデバイス、量子応用デバイスで新たに研究の進むダイヤモンドにおいて「欠陥」が重要課題に浮上している。軽元素及び高対称性結晶に起因する本質的な問題があり、欠陥が詳しく同定できていない。本研究では主に放射光X線トポグラフィを駆使して、深さ方向情報の取得と幾何解析による欠陥解析手法の確立に取組み(A)、欠陥の同定を行う(B)。これにより平衡(HPHT)及び非平衡(CVD)合成結晶の欠陥の違いを明確にすると共に、これら同定された欠陥と既知の発光欠陥等との相関関係を明らかにする。さらに欠陥の低減、無害化を目的として欠陥終端手法の開発に取り組む(C)。

Outline of Final Research Achievements

Diamond, a light element that has a very deep X-ray transmission with many forbidden diffractions, is a material whose dislocations are difficult to evaluate. In this research, we have developed an analysis method for the identification of "dislocations" that are indispensable for the realization of high-power power devices and various quantum devices. Using the <404> reflection mode of synchrotron radiation X-ray topography, we made a geometrical analysis of 3D information transfer to 2D film. As a result, we have developed a method to obtain the dislocation vector as variables of the incident angle/direction and Bragg angle. Using this, we identified the dislocation vectors and dislocation types with the Burgers vector information obtained by <404> and <113> information. We have made complete analysis of high-temperature and high-pressure synthetic substrates and vapor phase growth substrates, indicating the different mode of crystal growth.

Academic Significance and Societal Importance of the Research Achievements

軽元素でX線侵入が深いダイヤモンドは、転位評価が困難な物質である。本研究では、放射光X線トポグラフィを用いて欠陥解析手法の開発を実施した。<404>反射モードを用いた計測情報を元に、転位ベクトルを解析する手法を開発した。また転位の種類を同定することが可能になった。各種の高温高圧合成や気相成長基板の転位を完全に同定し、結晶成長の様式が異なる事が明確になった。以上、転位を完全に把握する事が可能になり、よりよい結晶成長へのフィードバック、高出力パワーデバイスや各種量子デバイス実現に向けた転位の影響などの研究に適応することが可能になった。他の軽元素材料への波及も期待される。

Report

(4 results)
  • 2021 Annual Research Report   Final Research Report ( PDF )
  • 2020 Annual Research Report
  • 2019 Annual Research Report
  • Research Products

    (42 results)

All 2022 2021 2020 2019

All Journal Article (16 results) (of which Int'l Joint Research: 6 results,  Peer Reviewed: 16 results,  Open Access: 10 results) Presentation (22 results) (of which Int'l Joint Research: 10 results,  Invited: 8 results) Book (4 results)

  • [Journal Article] Charge Stability of Shallow Single Nitrogen-Vacancy Centers in Lightly Boron-Doped Diamond2022

    • Author(s)
      T. Kageura, Y. Sasama, C. Shinei, T. Teraji, K. Yamada, S. Onoda, T. Yamaguchi,
    • Journal Title

      Carbon

      Volume: 192 Pages: 473-481

    • DOI

      10.1016/j.carbon.2022.01.027

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Forbidden X-ray diffraction of highly B doped diamond substrate2021

    • Author(s)
      K. Kouda, Y.Sato, M.Takeuchi, H.Takahashi and S. Shikata
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 60 Issue: 7 Pages: 071002-071002

    • DOI

      10.35848/1347-4065/ac0b23

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Analysis method of diamond dislocation vectors using reflectance mode X-ray topography2021

    • Author(s)
      S.Shikata, K.Miyajima, and N.Akashi
    • Journal Title

      Diamond and Related Materials

      Volume: 118 Pages: 108502-108502

    • DOI

      10.1016/j.diamond.2021.108502

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Comprehensive nanoscopic analysis of tungsten carbide/Oxygenated-diamond contacts for Schottky barrier diodes2021

    • Author(s)
      Alba G.、Leinen D.、Villar M.P.、Alcantara R.、Pinero J.C.、Fiori A.、Teraji T.、Araujo D.
    • Journal Title

      Applied Surface Science

      Volume: 537 Pages: 147874-147874

    • DOI

      10.1016/j.apsusc.2020.147874

    • Related Report
      2021 Annual Research Report 2020 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Determining the position of a single spin relative to a metallic nanowire2021

    • Author(s)
      da Silva Barbosa J. F.、Lee M.、Campagne-Ibarcq P.、Jamonneau P.、Kubo Y.、Pezzagna S.、Meijer J.、Teraji T.、Vion D.、Esteve D.、Heeres R. W.、Bertet P.
    • Journal Title

      Journal of Applied Physics

      Volume: 129 Issue: 14 Pages: 144301-144301

    • DOI

      10.1063/5.0042987

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Equilibrium charge state of NV centers in diamond2021

    • Author(s)
      C. Shinei, M. Miyakawa, S. Ishii, S. Saiki, S. Onoda, T. Taniguchi, T. Ohshima and T. Teraji,
    • Journal Title

      Applied Physics Letters

      Volume: 119 Issue: 25 Pages: 254001-254001

    • DOI

      10.1063/5.0079687

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Polarized Raman spectroscopy of phophorous doped diamond films2021

    • Author(s)
      M.Matsuoka, Y.Tsuchida, N.Ohtani, T.Yamada, S.Koizumi and S.Shikata
    • Journal Title

      Diamond and Related Materials

      Volume: 114 Pages: 108283-108283

    • DOI

      10.1016/j.diamond.2021.108283

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Influence of threading dislocation on diamond Schottky barrier diode characteristics2020

    • Author(s)
      N.Akashi, N.Fujimaki, and S.Shikata
    • Journal Title

      Diamond and Related Materials

      Volume: 109 Pages: 108024-108024

    • DOI

      10.1016/j.diamond.2020.108024

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Spin coherence and depths of single nitrogen-vacancy centers created by ion implantation into diamond via screening masks2020

    • Author(s)
      S. Ishizu, K. Sasaki, D. Misonou, T. Teraji, K.M. Itoh, E. Abe,
    • Journal Title

      Journal of Applied Physics

      Volume: 127 Issue: 24 Pages: 244502-244502

    • DOI

      10.1063/5.0012187

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Benchmark for Synthesized Diamond Sensors Based on Isotopically Engineered Nitrogen‐Vacancy Spin Ensembles for Magnetometry Applications2020

    • Author(s)
      C. Osterkamp, P. Balasubramanian, G. Wolff, T. Teraji, M. Nesladek, F. Jelezko,
    • Journal Title

      Advanced Quantum Technologies

      Volume: 3 Issue: 9 Pages: 2000074-2000074

    • DOI

      10.1002/qute.202000074

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Dislocations in chemical vapor deposition diamond layer detected by confocal Raman imaging2020

    • Author(s)
      K. Ichikawa, T. Shimaoka, Y. Kato, S. Koizumi, T. Teraji
    • Journal Title

      Journal of Applied Physics

      Volume: 128 Issue: 15 Pages: 155302-155302

    • DOI

      10.1063/5.0021076

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Comparison of different methods of nitrogen-vacancy layer formation in diamond for wide-field quantum microscopy2020

    • Author(s)
      A.J. Healey, A. Stacey, B.C. Johnson, D.A. Broadway, T. Teraji, D.A. Simpson, J-P. Tetienne, L.C.L. Hollenberg
    • Journal Title

      Physical Review Materials

      Volume: 4 Issue: 10 Pages: 104605-104605

    • DOI

      10.1103/physrevmaterials.4.104605

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Evaluation of diamond mosaic wafer crystallinity by electron backscatter diffraction2020

    • Author(s)
      A.Matsushita, N. Fujimori, Y. Tsuchida, N. Ohtani, D. Dojima, K. Koide, T. Kaneko and S.Shikata
    • Journal Title

      Diamond and Related Materials

      Volume: 101 Pages: 107558-107558

    • DOI

      10.1016/j.diamond.2019.107558

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed
  • [Journal Article] X-ray absorption near edge structure and extended X-ray absorption fine structure study of P doped (111) diamond2020

    • Author(s)
      S.Shikata, K.Yamaguchi, A.Fujiwara, Y.Tamenori, K.Tsuruta, T.Yamada, S.S.Nicley, K.Haenen and S.Koizumi
    • Journal Title

      Diamond and Related Materials

      Volume: 105 Pages: 107769-107769

    • DOI

      10.1016/j.diamond.2020.107769

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Competition between electric field and magnetic field noise in the decoherence of a single spin in diamond2019

    • Author(s)
      P. Jamonneau, M. Lesik, J. P. Tetienne, I. Alvizu, L. Mayer, A. Dreau, S. Kosen, J. F. Roch, S. Pezzagna, J. Meijer, T. Teraji, Y. Kubo, P. Bertet, J. R. Maze and V. Jacques
    • Journal Title

      Physical Review B

      Volume: 99 Issue: 24 Pages: 249903-249903

    • DOI

      10.1103/physrevb.99.249903

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Triple nitrogen-vacancy centre fabrication by C5N4Hn ion implantation2019

    • Author(s)
      M.Haruyama, S.Onoda, T.Higuchi, W.Kada, A.Chiba, Y.Hirano, T.Teraji, R.Igarashi, S.Kawai, H.Kawarada, Y.Ishii, R.Fukuda, T.Tanii, J.Isoya, T.Ohshima, O.Hanaizum
    • Journal Title

      Nature Communications

      Volume: 10 Issue: 1 Pages: 2664-2664

    • DOI

      10.1038/s41467-019-10529-x

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed / Open Access
  • [Presentation] Influence of dislocations on diamond schottky barrier diode characteristics2021

    • Author(s)
      N.Mikata, M.Takeuchi,K.Ichikawa, T.Teraji, and S.Shikata
    • Organizer
      New Diamond and Nano Carbons 2020 &2021
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Dislocation type identification of Band A in diamond epitaxial film2021

    • Author(s)
      K. Miyajima, K.Ichikawa, T.Teraji and S.Shikata
    • Organizer
      New Diamond and Nano Carbons 2020 &2021
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Polarized Raman spectroscopy of P doped diamond2021

    • Author(s)
      M.Matsuoka, Y.Tsuchida, N.Ohtani, T.Yamada, S.Koizumi and S.Shikata
    • Organizer
      New Diamond and Nano Carbons 2020 &2021
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Dislocation features of various type of diamond substrates2021

    • Author(s)
      S. Shikata, K.Miyajima, E. Kamei, and N. Akashi
    • Organizer
      New Diamond and Nano Carbons 2020 &2021
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] X線トポグラフィを用いたダイヤモンドHPHT基板の結晶転位解析2021

    • Author(s)
      佐藤雄哉、宮嶋孝輔、明石直也、鹿田真一
    • Organizer
      第35回ダイヤモンドシンポジウム
    • Related Report
      2021 Annual Research Report
  • [Presentation] 逆方向リーク電流の違いを有するダイヤモンド貫通転位の観察2021

    • Author(s)
      竹内 茉莉花,見方 尚輝,市川 公善、寺地 徳之、大谷 昇,鹿田 真一
    • Organizer
      応用物理学会 先進パワー半導体分科会 第8回講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] Growth of High-Purity Diamond Films and Doping for Quantum Device Applications2021

    • Author(s)
      T.Teraji
    • Organizer
      2021 MRS Spring Meeting & Exhibit
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] 電子デバイス・量子デバイスを目指したダイヤモンドCVD成長2021

    • Author(s)
      寺地徳之
    • Organizer
      第59回センサ&アクチュエータ技術シンポジウム
    • Related Report
      2021 Annual Research Report
    • Invited
  • [Presentation] 量子デバイス応用のためのダイヤモンド化学気相成長2021

    • Author(s)
      寺地徳之
    • Organizer
      第50回結晶成長国内会議
    • Related Report
      2021 Annual Research Report
    • Invited
  • [Presentation] 量子磁気センサのためのダイヤモンド結晶成長技術2021

    • Author(s)
      寺地徳之
    • Organizer
      第69回応用物理学会春季学術講演会シンポジウム
    • Related Report
      2021 Annual Research Report
    • Invited
  • [Presentation] X線トポグラフィによるダイヤモンド単結晶膜のBand-A欠陥同定2021

    • Author(s)
      宮嶋孝輔,市川公善,寺地 徳之, 鹿田真一
    • Organizer
      第68回応用物理学会春季学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] ダイヤモンド結晶転位が縦型デバイスに及ぼす影響評価2021

    • Author(s)
      見方尚輝,市川公善,寺地徳之, 鹿田 真一
    • Organizer
      第68回応用物理学会春季学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] ダイヤモンドウェハ・エピの貫通欠陥とデバイスへの影響2020

    • Author(s)
      鹿田真一
    • Organizer
      応用物理学会 先進パワーエレクトロニクス分科会 第7回講演会
    • Related Report
      2020 Annual Research Report
    • Invited
  • [Presentation] Diamond Growth for Power Electronics and Quantum Applications2020

    • Author(s)
      T.Teraji
    • Organizer
      Second Workshop on Diamond Electronics 2020
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Dislocation analysis using XRT and their effect to the device characteristics2019

    • Author(s)
      S.Shikata, N.Akashi, and N.Fujimaki
    • Organizer
      New Diamond and Nano Carbons 2019
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Dislocation vector analysis method of deep dislocation having c-axis segment in diamond2019

    • Author(s)
      S.Shikata and N.Akashi
    • Organizer
      Int’l Conf. SiC and Related Materials
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Evaluation of heavily B doped HPHT crystals for power device application2019

    • Author(s)
      S.Shikata, K.Miyajima, and N.Akashi
    • Organizer
      The 9th Asia-Pacific Workshop on Wide gap Semiconductors
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] ダイヤモンドエピタキシャル膜起因のCL発光欠陥の同定2019

    • Author(s)
      宮嶋孝輔、寺地徳之、鹿田真一
    • Organizer
      第33回 ダイヤモンドシンポジウム
    • Related Report
      2019 Annual Research Report
  • [Presentation] X線トポグラフィによる転位ベクトル解析手法2019

    • Author(s)
      鹿田真一、明石直也
    • Organizer
      第33回 ダイヤモンドシンポジウム
    • Related Report
      2019 Annual Research Report
  • [Presentation] 接合型ダイヤモンド単結晶基板の配向性2019

    • Author(s)
      松下晁生,藤森直治,土田有記,大谷昇,堂島大地,小出和典,金子忠昭,鹿田真一
    • Organizer
      第6回先進パワーエレクトロニクス研究会
    • Related Report
      2019 Annual Research Report
  • [Presentation] 量子デバイス応用を目指したダイヤモンド結晶成長2019

    • Author(s)
      寺地徳之
    • Organizer
      大阪大学ナノ理工学人材育成産学コンソーシアム 令和元年度第3回ナノ理工学情報交流会 「センシング技術の進化」
    • Related Report
      2019 Annual Research Report
    • Invited
  • [Presentation] Growth of high-purity and high-quality diamond films for quantum device applications2019

    • Author(s)
      T. Teraji
    • Organizer
      DCM2019
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research / Invited
  • [Book] 次世代パワー半導体の開発動向と応用展開 第2章42021

    • Author(s)
      鹿田真一
    • Total Pages
      7
    • Publisher
      シーエムシー出版
    • ISBN
      9784781316130
    • Related Report
      2021 Annual Research Report
  • [Book] ワイドバンドギャップ材料の結晶成長の最前線 48-3-062021

    • Author(s)
      寺地徳之
    • Total Pages
      9
    • Publisher
      日本結晶成長学会
    • Related Report
      2021 Annual Research Report
  • [Book] Semiconductors and Semimetals: Diamond for Quantum Applications Part 12020

    • Author(s)
      T.Teraji
    • Total Pages
      19
    • Publisher
      Academic Press
    • ISBN
      9780128202401
    • Related Report
      2020 Annual Research Report
  • [Book] NEW DIAMOND2019

    • Author(s)
      笹間 陽介, 小松 克伊, 森山 悟士, 井村 将隆, 寺地 徳之, 渡邊 賢司, 谷口 尚, 内橋 隆, 山口 尚秀
    • Total Pages
      7
    • Publisher
      ニューダイヤモンドフォーラム
    • Related Report
      2019 Annual Research Report

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Published: 2019-04-18   Modified: 2023-01-30  

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