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Development of semiconductor laser pumped nitride semiconductor waveguide nonlinear optical devices for squeezed light generation

Research Project

Project/Area Number 19H02631
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Review Section Basic Section 30020:Optical engineering and photon science-related
Research InstitutionOsaka University

Principal Investigator

Uemukai Masahiro  大阪大学, 大学院工学研究科, 助教 (80362672)

Co-Investigator(Kenkyū-buntansha) 片山 竜二  大阪大学, 大学院工学研究科, 教授 (40343115)
Project Period (FY) 2019-04-01 – 2023-03-31
Project Status Completed (Fiscal Year 2022)
Budget Amount *help
¥17,030,000 (Direct Cost: ¥13,100,000、Indirect Cost: ¥3,930,000)
Fiscal Year 2022: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000)
Fiscal Year 2021: ¥2,340,000 (Direct Cost: ¥1,800,000、Indirect Cost: ¥540,000)
Fiscal Year 2020: ¥6,240,000 (Direct Cost: ¥4,800,000、Indirect Cost: ¥1,440,000)
Fiscal Year 2019: ¥6,370,000 (Direct Cost: ¥4,900,000、Indirect Cost: ¥1,470,000)
Keywords窒化物半導体 / 半導体レーザ / 非線形光学デバイス / 量子情報処理
Outline of Research at the Start

近年発表されたスケーラブルでプログラマブルな光量子コンピュータはスクイーズド光源を必要とするが、これには大型で高価なチタンサファイアレーザやバルク強誘電体結晶を用いた不安定なボウタイ共振器型光パラメトリック発振器がいまだに使用されている。
本研究ではこれらをInGaN半導体レーザとGaNシングルパス導波路型光パラメトリック増幅器に置き換えることで、光量子コンピューティングに応用可能な小型・低消費電力で実用的なスクイーズド光源を実現することを目的する。

Outline of Final Research Achievements

400 nm band semiconductor lasers using a high-order deep groove DBR grating and periodically slotted structure, which can be fabricated by a relatively simple process without high-resolution lithography and crystal regrowth, were fabricated and evaluated. From the latter, single-mode oscillation and tunable characteristics were obtained for the first time in this wavelength band.
In addition, novel waveguide nonlinear optical device with vertical polarity inversion of nitride semiconductors were designed and fabricated, and second harmonics generations were confirmed in a wide wavelength range of 229~438 nm. A grating input coupler that couples a pump light to a high-order mode guided light required for squeezed light generation in the structure was developed.

Academic Significance and Societal Importance of the Research Achievements

光集積デバイスの光源となりうるInGaN波長可変単一モードレーザの開発に成功したことから、波長変換デバイスや導波路型マッハツェンダー干渉計などと1チップに集積した小型で高機能なモノリシック光集積デバイスの実現に向け前進したといえる。
また窒化物半導体の極性を反転して積層した新規構造導波路型非線形光学デバイスの設計・作製手法を確立するとともに、超短パルスレーザ励起においてウォークオフを考慮した理論値が実験値と比較的一致するなど評価手法においても多くの知見を得た。

Report

(5 results)
  • 2022 Annual Research Report   Final Research Report ( PDF )
  • 2021 Annual Research Report
  • 2020 Annual Research Report
  • 2019 Annual Research Report
  • Research Products

    (68 results)

All 2023 2022 2021 2020 2019 Other

All Journal Article (5 results) (of which Peer Reviewed: 5 results,  Open Access: 1 results) Presentation (62 results) (of which Int'l Joint Research: 15 results,  Invited: 5 results) Remarks (1 results)

  • [Journal Article] Polarity Inversion of GaN via AlN Oxidation Interlayer Using Metal-Organic Vapor Phase Epitaxy2023

    • Author(s)
      Murata Tomotaka、Ikeda Kazuhisa、Yamasaki Jun、Uemukai Masahiro、Tanikawa Tomoyuki、Katayama Ryuji
    • Journal Title

      physica status solidi (b)

      Volume: 260 Issue: 8 Pages: 2200583-2200583

    • DOI

      10.1002/pssb.202200583

    • Related Report
      2022 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Fabrication and evaluation of rib-waveguide-type wavelength conversion devices using GaN-QPM crystals2022

    • Author(s)
      Ishihara Hiroki、Shimada Keiya、Umeda Soshi、Yokoyama Naoki、Honda Hiroto、Kurose Kazuhiro、Kawata Yoshimasa、Sugita Atsushi、Inoue Yoku、Uemukai Masahiro、Tanikawa Tomoyuki、Katayama Ryuji、Nakano Takayuki
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 61 Issue: SK Pages: SK1020-SK1020

    • DOI

      10.35848/1347-4065/ac727a

    • Related Report
      2022 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Second harmonic generation in GaN transverse quasi-phase-matched waveguide pumped with femtosecond laser2022

    • Author(s)
      Yokoyama Naoki、Morioka Yoshiki、Murata Tomotaka、Honda Hiroto、Serita Kazunori、Murakami Hironaru、Tonouchi Masayoshi、Tokita Shigeki、Ichikawa Shuhei、Fujiwara Yasufumi、Hikosaka Toshiki、Uemukai Masahiro、Tanikawa Tomoyuki、Katayama Ryuji
    • Journal Title

      Applied Physics Express

      Volume: 15 Issue: 11 Pages: 112002-112002

    • DOI

      10.35848/1882-0786/ac9511

    • Related Report
      2022 Annual Research Report
    • Peer Reviewed
  • [Journal Article] GaN channel waveguide with vertically polarity inversion formed by surface activated bonding for wavelength conversion2022

    • Author(s)
      Yokoyama Naoki、Tanabe Ryo、Yasuda Yuma、Honda Hiroto、Ichikawa Shuhei、FUJIWARA Yasufumi、HIKOSAKA TOSHIKI、Uemukai Masahiro、TANIKAWA Tomoyuki、KATAYAMA Ryuji
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 61 Issue: 5 Pages: 050902-050902

    • DOI

      10.35848/1347-4065/ac57ab

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Monolithic microcavity second harmonic generation device using low birefringence paraelectric material without polarity-inverted structure2021

    • Author(s)
      Nambu Tomoaki、Nagata Takumi、Umeda Soshi、Shiomi Keishi、Fujiwara Yasufumi、Hikosaka Toshiki、Mannan Abdul、Bagsican Filchito Renee G.、Serita Kazunori、Kawayama Iwao、Tonouchi Masayoshi、Uemukai Masahiro、Tanikawa Tomoyuki、Katayama Ryuji
    • Journal Title

      Applied Physics Express

      Volume: 14 Issue: 6 Pages: 061004-061004

    • DOI

      10.35848/1882-0786/abff9e

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed / Open Access
  • [Presentation] 2層極性反転AlN横型擬似位相整合チャネル導波路による遠紫外第二高調波発生2023

    • Author(s)
      本田 啓人、正直 花奈子、上杉 謙次郎、三宅 秀人、市川 修平、舘林 潤、藤原 康文、芹田 和則、村上 博成、斗内 政吉、上向井 正裕、谷川 智之、片山 竜二
    • Organizer
      レーザー学会学術講演会第43回年次大会
    • Related Report
      2022 Annual Research Report
  • [Presentation] GaN-QPM結晶を用いた波長変換デバイスの作製および諸特性評価2023

    • Author(s)
      嶋田 慶也、石原 弘基、梅田 颯志、横山 尚生、本田 啓人、井上 翼、上向井 正裕、谷川 智之、片山 竜二、中野 貴之
    • Organizer
      レーザー学会学術講演会第43回年次大会
    • Related Report
      2022 Annual Research Report
  • [Presentation] 高効率スクイーズド光発生に向けた MgO:CLN/GaN横型擬似位相整合導波路波長変換デバイスの作製2023

    • Author(s)
      野呂 諒介、上向井 正裕、谷川 智之、片山 竜二
    • Organizer
      レーザー学会学術講演会第43回年次大会
    • Related Report
      2022 Annual Research Report
  • [Presentation] グレーティング結合器集積化GaN横型擬似位相整合光子対発生デバイスの設計と作製2023

    • Author(s)
      古川 裕也、池田 和久、本田 啓人、村田 知駿、上向井 正裕、谷川 智之、片山 竜二
    • Organizer
      レーザー学会学術講演会第43回年次大会
    • Related Report
      2022 Annual Research Report
  • [Presentation] 多層極性反転 AlN 構造を用いた横型 QPM 導波路の設計2023

    • Author(s)
      本田 啓人、百崎 怜、玉野 智大、正直 花奈子、三宅 秀人、上向井 正裕、谷川 智之、片山 竜二
    • Organizer
      第70回応用物理学会春季学術講演会
    • Related Report
      2022 Annual Research Report
  • [Presentation] マルチ・スパッタアニール法による多層極性反転AlN構造の作製2023

    • Author(s)
      玉野 智大、正直 花奈子、本田 啓人、上杉 謙次郎、肖 世玉、上向井 正裕、谷川 智之、片山 竜二、三宅 秀人
    • Organizer
      第70回応用物理学会春季学術講演会
    • Related Report
      2022 Annual Research Report
  • [Presentation] Design and Fabrication of Transverse Quasi-Phase-Matched HfO2/AlN Channel Waveguide for 230-nm Far-UV Second Harmonic Generation2022

    • Author(s)
      H. Honda, K. Shujiki, H. Miyake, S. Ichikawa, Y. Fuijiwara, M. Uemukai, T. Tanikawa, R. Katayama
    • Organizer
      International Conference on Light-Emitting Devices and Their Industrial Applications 2022
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Design of Transverse Quasi-Phase-Matched Non-Polar/AlN Waveguides for 230-nm Far-UV Second Harmonic Generation2022

    • Author(s)
      H. Honda, S. Umeda, K. Shojiki, H. Miyake, M. Kushimoto, Y. Fujiwara, M. Uemukai, T. Tanikawa and R. Katayama
    • Organizer
      2022 Materials Research Society Spring Meeting
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] HfO2/AlN横型擬似位相整合チャネル導波路を用いた230 nm遠紫外第二高調波発生2022

    • Author(s)
      本田 啓人、正直 花奈子、上杉 謙次郎、三宅 秀人、芹田 和則、村上 博成、斗内 政吉、上向井 正裕、谷川 智之、片山 竜二
    • Organizer
      第83回応用物理学会秋季学術講演会
    • Related Report
      2022 Annual Research Report
    • Invited
  • [Presentation] 2層極性反転AlN横型擬似位相整合チャネル導波路を用いた230 nm遠紫外第二高調波発生2022

    • Author(s)
      本田 啓人、正直 花奈子、上杉 謙次郎、三宅 秀人、芹田 和則、村上 博成、斗内 政吉、上向井 正裕、谷川 智之、片山 竜二
    • Organizer
      第83回応用物理学会秋季学術講演会
    • Related Report
      2022 Annual Research Report
  • [Presentation] MOVPEエピタキシャル極性反転技術を用いたGaN横型擬似位相整合光子対発生デバイスの作製2022

    • Author(s)
      池田 和久、村田 知駿、市川 修平、藤原 康文、上向井 正裕、谷川 智之、片山 竜二
    • Organizer
      第83回応用物理学会秋季学術講演会
    • Related Report
      2022 Annual Research Report
  • [Presentation] Second Harmonic Generation of 230 nm DUV Light from Transverse Quasi-Phase-Matched -c-AlN/+c-AlN Channel Waveguide2022

    • Author(s)
      H. Honda, S. Umeda, K. Shojiki, H. Miyake, S. Ichikawa, J. Tatebayashi, Y. Fujiwara, K. Serita, H. Murakami, M. Tonouchi, M. Uemukai, T. Tanikawa and R. Katayama
    • Organizer
      International Workshop on Nitride Semiconductors 2022
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Polarity Inversion of GaN via AlN Oxidation Interlayer using Metalorganic Vapor Phase Epitaxy2022

    • Author(s)
      T. Murata, K. Ikeda, J. Yamazaki, T. Tanikawa, M. Uemukai and R. Katayama
    • Organizer
      International Workshop on Nitride Semiconductors 2022
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Fabrication of GaN Transverse Quasi Phase Matching Photon Pair Generation Device using MOVPE-Based Epitaxial Polarity Inversion Technology2022

    • Author(s)
      K. Ikeda, T. Murata, S. Ichikawa, Y. Fujiwara, M. Uemukai, T. Tanikawa, and R. Katayama
    • Organizer
      第41回電子材料シンポジウム
    • Related Report
      2022 Annual Research Report
  • [Presentation] Demonstration of 230-nm Far-UV Second Harmonic Generation from HfO2/AlN Transverse Quasi-Phase Matched Channel Waveguide2022

    • Author(s)
      Y. Furukawa, H. Honda, K. Shojiki, K. Uesugi, H. Miyake, K. Serita, H. Murakami, M. Tonouchi, M. Uemukai, T. Tanikawa and R. Katayama
    • Organizer
      第41回電子材料シンポジウム
    • Related Report
      2022 Annual Research Report
  • [Presentation] 高効率スクイーズド光発生に向けたLiNbO3/GaN横型擬似位相整合波長変換デバイスの設計2022

    • Author(s)
      野呂 諒介、上向井 正裕、谷川 智之、片山 竜二
    • Organizer
      第69回応用物理学会春季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] 230 nm遠紫外第二高調波発生に向けたHfO2/AlN横型擬似位相整合チャネル導波路の作製2022

    • Author(s)
      本田 啓人、俵 悠弥、藤原 康文、正直 花奈子、三宅 秀人、上向井 正裕、谷川 智之、片山 竜二
    • Organizer
      第69回応用物理学会春季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] Experimental Determination of Wavelength Conversion Efficiency in Transverse Quasi-Phase-Matched GaN SHG Waveguide Excited with Femtosecond Laser2021

    • Author(s)
      N. Yokoyama, Y. Morioka, T. Murata, H. Honda, F. R. G. Bagsican, K. Serita, H. Murakami, M. Tonouchi, S. Ichikawa, Y. Fujiwara, M. Uemukai, T. Tanikawa, R. Katayama
    • Organizer
      2021 International Conference on Solid State Devices and Materials
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 230 nm遠紫外第二高調波発生に向けた横型擬似位相整合HfO2/AlN導波路の設計2021

    • Author(s)
      本田啓人、梅田颯志、正直花奈子、三宅秀人、上向井正裕、谷川智之、片山竜二
    • Organizer
      第82回応用物理学会秋季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] 230 nm遠紫外第二高調波発生に向けた横型擬似位相整合2層極性反転AlN導波路の作製2021

    • Author(s)
      梅田颯志、本田啓人、南部誠明、市川修平、藤原康文、正直花奈子、三宅秀人、上向井正裕、谷川智之、片山竜二
    • Organizer
      第82回応用物理学会秋季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] 有機金属気相成長法を用いたGaNエピタキシャル極性反転技術の開発2021

    • Author(s)
      村田知駿、谷川智之、上向井正裕、片山竜二
    • Organizer
      第82回応用物理学会秋季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] Efficiency Evaluation of GaN Transverse Quasi-Phase-Matched Wavelength Conversion Device under Femtosecond Laser Excitation2021

    • Author(s)
      N. Yokoyama, H. Honda, T. Murata, K. Serita, H. Murakami, M. Tonouchi*, S. Tokita, S. Ichikawa, Y. Fujiwara, M. Uemukai, T. Tanikawa and R. Katayama
    • Organizer
      第40回電子材料シンポジウム
    • Related Report
      2021 Annual Research Report
  • [Presentation] Fabrication of GaN Polarity Inverted Structure via Ultrathin AlN Oxidation Interlayer using Metalorganic Vapor Phase Epitaxy2021

    • Author(s)
      T. Murata, T. Tanikawa, M. Uemukai and R. Katayama
    • Organizer
      第40回電子材料シンポジウム
    • Related Report
      2021 Annual Research Report
  • [Presentation] Design of Non-Polar/AlN Transverse Quasi-Phase Matched Channel Waveguides for 230-nm Far-UV Second Harmonic Generation2021

    • Author(s)
      H. Honda, K. Shojiki, H. Miyake, M. Uemukai, T. Tanikawa and R. Katayama
    • Organizer
      第40回電子材料シンポジウム
    • Related Report
      2021 Annual Research Report
  • [Presentation] Improved Fabrication of Transverse Quasi-Phase-Matched Double-Layer Polarity Inverted AlN Waveguide for 230-nm Second Harmonic Generation2021

    • Author(s)
      S. Umeda, H. Honda, T. Nambu, S. Ichikawa, Y. Fujiwara, K. Shojiki, H. Miyake, M. Uemukai, T. Tanikawa, and R. Katayama
    • Organizer
      第40回電子材料シンポジウム
    • Related Report
      2021 Annual Research Report
  • [Presentation] Novel Method of Short-Wavelength Emission from Polarity-Inverted Nitride Semiconductor Waveguides2021

    • Author(s)
      R. Katayama, M. Uemukai, and T. Tanikawa
    • Organizer
      The 8th Asian Conference on Crystal Growth and Crystal Technology
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Novel wavelength converters made of nitride semiconductors: transverse QPM waveguides and monolithic microcavities2021

    • Author(s)
      R. Katayama, M. Uemukai, and T. Tanikawa
    • Organizer
      SPIE Photonics West 2021
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] GaN横型擬似位相整合第二高調波発生デバイスの効率評価2021

    • Author(s)
      横山尚生、村田知駿、本田啓人、市川修平、藤原康文、上向井正裕、谷川智之、片山竜二
    • Organizer
      第68回応用物理学会春季学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] AlN微小二重共振器型面発光DUV第二高調波発生デバイスの検討2021

    • Author(s)
      南部誠明、矢野岳人、永田拓実、田辺 凌、梅田颯志、市川修平、藤原康文、上向井正裕、谷川智之、片山竜二
    • Organizer
      第68回応用物理学会春季学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] 230 nm深紫外光発生に向けた2層極性反転AlN導波路の設計と作製2021

    • Author(s)
      本田啓人、永田拓実、市川修平、藤原康文、正直花奈子、三宅秀人、上向井正裕、谷川智之、片山竜二
    • Organizer
      第68回応用物理学会春季学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] 広帯域光子対発生に向けたGaN導波路型微小共振器デバイスの作製2021

    • Author(s)
      永田拓実、梅田颯志、隈部岳瑠、安藤悠人、出来真斗、本田善央、天野 浩、トーマスポージン、山田和輝、岩谷素顕、上向井正裕、谷川智之、片山竜二
    • Organizer
      第68回応用物理学会春季学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] InGaN高次結合ディープエッチDBRレーザ2021

    • Author(s)
      樋口晃大、松下就哉、上向井正裕、谷川智之、片山竜二
    • Organizer
      第68回応用物理学会春季学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] Fabrication process of InGaN high-order deeply etched DBR laser2020

    • Author(s)
      A. Higuchi, D. Tazuke, M. Uemukai, T. Tanikawa, R. Katayama
    • Organizer
      The 8th International Conference on Light-Emitting Devices and Their Industrial Applications
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Design of AlN doubly-resonant waveguide microcavity SHG device2020

    • Author(s)
      S. Umeda, T. Nagata, M. Uemukai, T. Tanikawa, R. Katayama
    • Organizer
      The 8th International Conference on Light-Emitting Devices and Their Industrial Applications
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] グレーティング結合器集積GaN横型擬似位相整合第二高調波発生デバイス2020

    • Author(s)
      横山尚生、森岡佳紀、森川隆哉、藤原康文、上向井正裕、谷川智之、片山竜二
    • Organizer
      第81回応用物理学会秋季学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] 周期的スロット構造を用いたInGaN波長可変単一モードレーザ2020

    • Author(s)
      樋口晃大、上向井正裕、谷川智之、片山竜二
    • Organizer
      第81回応用物理学会秋季学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] ワイドギャップ半導体の分極制御と量子光学応用:遠UVC全固体光源2020

    • Author(s)
      片山竜二、上向井正裕、谷川智之
    • Organizer
      第81回応用物理学会秋季学術講演会
    • Related Report
      2020 Annual Research Report
    • Invited
  • [Presentation] Design of GaN Waveguide Microcavity Device for Broadband Photon Pair Generation2020

    • Author(s)
      T. Nagata, S. Umeda, M. Uemukai, T. Tanikawa, and R. Katayama
    • Organizer
      第39回電子材料シンポジウム
    • Related Report
      2020 Annual Research Report
  • [Presentation] Design of Waveguide Directional Coupler for Electric-Field Driven GaN Mach-Zehnder Interferometer2020

    • Author(s)
      Y. Hisada, A. Tomibayashi, M. Uemukai, T. Tanikawa, and R. Katayama
    • Organizer
      第39回電子材料シンポジウム
    • Related Report
      2020 Annual Research Report
  • [Presentation] Design of Ttransverse Quasi-Phase-Matched Double-Layer AlN Waveguide for 230-nm DUV Second Harmonic Generation2020

    • Author(s)
      H. Honda, N. Yokoyama, A. Yamauchi, T. Komatsu, K. Shojiki, H. Miyake, M. Uemukai, T. Tanikawa and R. Katayama
    • Organizer
      第39回電子材料シンポジウム
    • Related Report
      2020 Annual Research Report
  • [Presentation] First Demonstration of Tunable Single-Mode InGaN Laser with Periodically Slotted Structure2020

    • Author(s)
      A. Higuchi, M. Uemukai, T. Tanikawa, and R. Katayama
    • Organizer
      第39回電子材料シンポジウム
    • Related Report
      2020 Annual Research Report
  • [Presentation] Design and Fabrication of AlN Waveguide Microcavity SHG Device2020

    • Author(s)
      S. Umeda, T. Nagata, M. Uemukai, T. Tanikawa, and R. Katayama
    • Organizer
      第39回電子材料シンポジウム
    • Related Report
      2020 Annual Research Report
  • [Presentation] Transverse Quasi-Phase-Matched Second Harmonic Generation using Polarity-Inverted GaN Channel Waveguide with Input Grating Coupler2020

    • Author(s)
      T. Murata, N. Yokoyama, T. Komatsu, Y. Morioka, M. Uemukai, T. Tanikawa, and R. Katayama
    • Organizer
      第39回電子材料シンポジウム
    • Related Report
      2020 Annual Research Report
  • [Presentation] ワイドギャップ窒化物半導体波長変換デバイスによる紫外光発生2020

    • Author(s)
      片山竜二、上向井正裕、谷川智之
    • Organizer
      応用物理学会 応用電子物性分科会 研究例会
    • Related Report
      2020 Annual Research Report
    • Invited
  • [Presentation] Second harmonic generation devices with transverse quasi-phase-matched polarity-inverted stacked AlN waveguide2020

    • Author(s)
      A. Yamauchi,T. Komatsu,K. Ikeda,K. Uesugi,K. Shojiki,H. Miyake,T. Hikosaka,S. Nunoue,T. Morikawa,Y. Fujiwara,M. Uemukai,T. Tanikawa and R. Katayama
    • Organizer
      SPIE Photonics West 2020
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] AlN 導波路型微小二重共振器第二高調波発生デバイスの設計2020

    • Author(s)
      梅田 颯志,永田 拓実,彦坂 年輝,布上 真也,上向井 正裕,谷川 智之,片山 竜二
    • Organizer
      第67回応用物理学会春季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] 横型擬似位相整合GaN 導波路型波長変換デバイスの開発2020

    • Author(s)
      小松 天太,彦坂 年輝,布上 真也,上向井 正裕,谷川 智之,片山 竜二
    • Organizer
      第67回応用物理学会春季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] 表面活性化接合により作製した GaN分極反転積層構造の接合強度評価2019

    • Author(s)
      田辺 凌、横山 尚生、上向井 正裕、谷川 智之、片山 竜二
    • Organizer
      第81回応用物理学会秋季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] AlN導波路第二高調波発生デバイスのための集光グレーティング結合器2019

    • Author(s)
      森岡 佳紀、上向井 正裕、上杉 謙次郎、正直 花奈子、三宅 秀人、森川 隆哉、藤原 康文、谷川 智之、片山 竜二
    • Organizer
      第81回応用物理学会秋季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] 2層極性反転積層 AlN導波路を用いた深紫外第二高調波発生デバイスの設計2019

    • Author(s)
      山内 あさひ、小松 天太、池田 和久、上杉 謙二郎、正直 花奈子、三宅 秀人、彦坂 年輝、布上 真也、森川 隆哉、藤原 康文、上向井 正裕、谷川 智之、片山 竜二
    • Organizer
      第81回応用物理学会秋季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] InGaN Laser Pumped Nitride Semiconductor Transverse Quasi-Phase-Matched Waveguide Second Harmonic Generation Devices2019

    • Author(s)
      M. Uemukai,S. Yamaguchi,A. Yamauchi,D. Tazuke,A. Higuchi,R. Tanabe,T. Tanikawa,T. Hikosaka,S. Nunoue,Y. Hayashi,H. Miyake,Y. Fujiwara and R. Katayama
    • Organizer
      7th International Workshop on Epitaxial Growth and Fundamental Properties of Semiconductor Nanostructures
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Input Focusing Grating Coupler for AlN Deep UV Waveguide SHG Device2019

    • Author(s)
      Y. Morioka,M. Uemukai,T. Tanikawa,K. Uesugi,K. Shojiki,H. Miyake2,T. Morikawa,Y. Fujiwara and R. Katayama
    • Organizer
      7th International Workshop on Epitaxial Growth and Fundamental Properties of Semiconductor Nanostructures
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Benchmark of nonlinear optical crystals for single path waveguide optical parametric amplifier2019

    • Author(s)
      T. Komatsu,R. Noro,M. Uemukai,T. Tanikawa and R. Katayama
    • Organizer
      38th Electronic Materials Symposium
    • Related Report
      2019 Annual Research Report
  • [Presentation] Design and fabrication of InGaN single mode laser with periodically slotted structure2019

    • Author(s)
      D. Tazuke,A. Higuchi,T. Hikosaka,T. Oka,S. Nunoue,M. Uemukai,T .Tanikawa and R. Katayama
    • Organizer
      38th Electronic Materials Symposium
    • Related Report
      2019 Annual Research Report
  • [Presentation] Optimization of annealing temperature to reduce contact resistance on p GaN toward fabrication of InGaN single mode laser2019

    • Author(s)
      A. Higuchi,D. Tazuke,T. Hikosaka, T. Oka,S. Nunoue,M. Uemukai,T. Tanikawa and R. Katayama
    • Organizer
      38th Electronic Materials Symposium
    • Related Report
      2019 Annual Research Report
  • [Presentation] Fabrication of GaN doubly resonant waveguide microcavity SHG device2019

    • Author(s)
      T. Nagata,S. Umeda,T. Hikosaka,S. Nunoue,T. Morikawa,Y. Fujiwara,M. Uemukai,T. Tanikawa and R. Katayama
    • Organizer
      38th Electronic Materials Symposium
    • Related Report
      2019 Annual Research Report
  • [Presentation] Design of GaN doubly resonant waveguide microcavity SHG device2019

    • Author(s)
      S. Umeda,T. Nagata,T. Hikosaka,S. Nuoue,T. Morikawa,Y. Fujiwara,M. Uemukai,T. Tanikawa and R. Katayama
    • Organizer
      38th Electronic Materials Symposium
    • Related Report
      2019 Annual Research Report
  • [Presentation] Input grating coupler for AlN channel waveguide wavelength conversion device2019

    • Author(s)
      Y. Morioka,M. Uemukai,K. Uesugi,K. Shojiki,H. Miyake,T. Morikawa,Y. Fujiwara,T. Tanikawa and R. Katayama
    • Organizer
      38th Electronic Materials Symposium
    • Related Report
      2019 Annual Research Report
  • [Presentation] Design of deep ultraviolet second harmonic generation device with double layer polarity inverted AlN waveguide2019

    • Author(s)
      A. Yamauchi,T. Komatsu,K. Ikeda,K. Uesugi,K. Shojiki,H. Miyake,T. Hikosaka,S. Nunoue,T. Morikawa,Y. Fujiwara,M. Uemukai,T. Tanikawa and R. Katayama
    • Organizer
      38th Electronic Materials Symposium
    • Related Report
      2019 Annual Research Report
  • [Presentation] Bonding Strength of Polarity-Inverted GaN Structure Fabricated by Surface-Activated Bonding2019

    • Author(s)
      Ryo Tanabe,Naoki Yokoyama,Masahiro Uemukai,Tomoyuki Tanikawa and Ryuji Katayama
    • Organizer
      9th Asia-Pacific Workshop on Widegap Semiconductors
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Design and Fabrication of GaN Doubly-Resonant Waveguide Microcavity SHG Device2019

    • Author(s)
      Takumi Nagata,Masahiro Uemukai,Toshiki Hikosaka,Shinya Nunoue,Takaya Morikawa,Yasufumi Fujiwara,Tomoyuki Tanikawa and Ryuji Katayama
    • Organizer
      9th Asia-Pacific Workshop on Widegap Semiconductors
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Design of Deep Ultraviolet Second Harmonic Generation Device with Double-Layer PolarityInverted AlN Waveguide2019

    • Author(s)
      Asahi Yamauchi,Tenta Komatsu,Kazuhisa Ikeda,Kenjiro Uesugi,Kanako Syojiki,Hideto Miyake,Toshiki Hikosaka,Sinya Nunoue,Takaya Morikawa,Yasufumi Fujiwara,Masahiro Uemukai,Tomoyuki Tanikawa and Ryuji Katayama
    • Organizer
      9th Asia-Pacific Workshop on Widegap Semiconductors
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Remarks] 研究室ホームページ

    • URL

      http://www.qoe.eei.eng.osaka-u.ac.jp/

    • Related Report
      2022 Annual Research Report 2021 Annual Research Report 2020 Annual Research Report 2019 Annual Research Report

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Published: 2019-04-18   Modified: 2024-01-30  

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